WO2007104811A1

WO2007104811A1 - Electrooptical reflector device and corresponding actuation methods

Info

Publication number: WO2007104811A1
Application number: PCT/ES2007/000121
Authority: WO
Inventors: Josep MONTANYÀ SILVESTRE; Juan José VALLE FRAGA
Original assignee: Baolab Microsystems S.L.
Priority date: 2006-03-10
Filing date: 2007-03-08
Publication date: 2007-09-20

Abstract

MEMS electrooptical digital reflector device that comprises a conductor element (7), which is a separate part mechanically independent from its environment and moves through an intermediate space (5) of the device as a function of voltages present on capacitor plates (1, 2, 3), and a reflective surface (19), which reflects an incident light beam and is integral with the conductor element (7). The conductor element (7) moves in the intermediate space (5) until its rests on rest points arranged such as to force the conductor element (7) to change orientation. Method for actuating the above MEMS device, which comprises the application of voltages to the plates such that the conductor element changes orientation. The conductor element can also move in the intermediate space over such a distance that it generates interference as a function of the position of the conductor element.

Description

ELECTROOPTIC REFLECTOR DEVICE AND CORRESPONDING ACTION PROCEDURES

DESCRIPTION

Field of the invention

The invention relates to a miniaturized electro-optical device, specifically to a miniaturized digital reflector electro-optical device. These devices belong to the family of devices usually called MEMS (micro electro-mechanical systems - microelectromechanical systems), in particular of the devices called Digital Micromirror Devices (digital micro mirror devices, DMD®).

The invention also relates to a method of actuating one of said miniaturized electro-optical devices and to miniaturized electro-optical devices suitable for carrying out the new procedure.

The invention also relates to a miniaturized reflector electro-optical assembly for the processing of a light signal. Miniaturized reflective electro-optical assemblies include MEMS and / or DMD® components. In general, the light signal can be monochromatic, in which case it will be defined as having a certain wavelength, or polychrome, in which case it will have a plurality of wavelengths, one of which will be referred to in The present description and claims. That is, when the electro-optical assembly processes a polychrome light signal, its performance will have the function of affecting one of the wavelengths present in the polychrome light. In some cases, as will be described later, the electro-optical assembly can affect several specific wavelengths within the spectrum of the polychrome light that forms the light signal. The object of the invention is also a process for processing a light signal comprising a predetermined wavelength by means of an electro-optical assembly according to the invention.

The invention also relates to a method of actuating an electro-optical assembly according to the invention.

State of the art

Miniaturized digital reflector electro-optical devices are known, such as those described in the document "A MEMS-Based Projection Display" by Peter F. Van KESSEL ₁ et al, Proceedings of the IEEE, VoI. 86, No. 8, August 1998. These devices comprise a reflective surface capable of adopting two positions in space that form a non-zero angle. In this way, an incident beam on the reflecting surface can be deflected in one direction or another depending on the position of the reflecting surface. The reflective surface is mounted on a layer of material that is cantilevered and which, when subjected to electrostatic fields, is capable of bending in one direction or another.

The miniaturized reflector electro-optical assemblies that process an incident light signal on them are also known. A family of these electro-optical assemblies is formed by devices that are capable of reflecting the incident light signal when they are in a first state and that are capable of causing destructive interference in said light signal, canceling it, when they are in a second state. For this, the devices have the reflective surface mounted on a cantilever so that, by means of the application of suitable electrostatic fields, the reflective surface can be moved towards a certain position, overcoming the elastic force of the material that forms the cantilever. By canceling the electrostatic fields, the reflective surface returns to its original position thanks to the elastic force of the cantilever material. An example of these electro-optical assemblies is the GLV® (Grating Light Valve) device developed by Silicon Light Machines and described, for example, in the document Lied "The Grating Light Valve: Revolutionizing Display Technology", DM Bloom, available on the Internet portal www.siliconliqht.com. Another example is the GEMS (Grating Electromechanical System) device developed by Kodak Research and Development, available on the Internet portal www.kodak.com/US/en/corp/researchDevelopment/technoloqyFeatures/qems.html.

However, these devices have a series of drawbacks, such as the need for a high activation voltage (usually greater than 50 V). Other drawbacks are, for example:

- relatively large sizes (for example, 16 x 16 microns),

- high power consumption,

- a limited resolution (as a consequence of the relatively large size),

- problems of residual mechanical stresses in the material that forms the overhang, which may cause the actual orientation acquired by the receiving surface does not match the desired orientation.

On the other hand, miniaturized digital electro-optical devices that include:

- a first zone facing a second zone,

- a first condenser plate arranged in the first zone,

- a second condenser plate arranged in the second zone and facing the first condenser plate, where the second condenser plate is less than or equal to the first condenser plate,

- a third condenser plate arranged in the second zone, where the third condenser plate is less than or equal to the first condenser plate, and - TO -

where the second and third condenser plates are, together, larger than the first condenser plate,

- an intermediate space arranged between the first zone and the second zone,

- a conductive element disposed in the intermediate space, this conductive element presenting a first surface facing the first zone and a second surface facing the second zone, where the conductive element is mechanically independent of both zones and being able to make a movement to through the intermediate space, from a first end, where the conductive element is in contact with the first zone, to a second end, where the conductive element is in contact with the second zone, and vice versa, depending on voltages present in the first, second and third condenser plates,

- a reflective surface, suitable for reflecting an incident beam of light, integral with the conductive element.

Also known are miniaturized digital electro-optical devices comprising:

- a first zone facing a second zone,

- a first condenser plate arranged in the first zone,

- a second condenser plate and a third condenser plate arranged in the second zone and facing the first condenser plate,

- an intermediate space arranged between the first zone and the second zone,

- a conductive element disposed in the intermediate space, where the conductive element is mechanically independent of both zones and being able to make a displacement through the intermediate space, from a first ex- section, where the conductive element is close to the first zone, to a second end, where the conductive element is close to the second zone, and vice versa, depending on voltages present in the first, second and third condenser plates,

Indeed, these devices are described in PCT application WO 2004/046807, of the same applicant, published on June 3, 2004. In particular on p. 19 line 7 - p. 22 line 24, p. 23 line 12-28, and p. 24 line 21 - 31 various geometries of this type of device are described and on p. 4 line 6 - p. 5 line 13, p. 5 line 29 - p. 6 line 8, p. 6 line 28 - p. 8 line 7, and p. 18 line 4 - p. 19 line 2 describes its mode of operation.

However, in the PCT application WO 2004/046807 only the possibility of these devices interrupting or deflecting a light beam by a translational movement is described, and the light beam is of small dimensions with respect to the device. The spatial orientation of the conductive element as it passes from the first end to the second end does not vary. Nor does any phenomenon of cancellation or interference in the reflected beam of light occur.

Summary of the invention

The object of the invention is to overcome these drawbacks. This purpose is achieved by a miniaturized reflecting electro-optical device of the type indicated at the beginning characterized in that:

a - when the conductive element is at the first end, that is, in contact with the first zone, it has at least three first support points not aligned on the first surface that are in contact with three corresponding first support points on the first zone, and when the conductive element is at the second end, that is, in contact with the second zone, it has at least three second support points not aligned on the second surface that are in contact with three corresponding second support points in the second area, and

b - when the conductive element is at the first end, the distance between at least one of the second support points of the second surface to its corresponding support point of the second zone is different from the distance of the remaining second points of support of the second surface to its corresponding support points of the second area, so that the reflecting surface changes orientation in the space when the conductive element makes the displacement between the first end and the second end.

Indeed, the device according to the invention allows the reflective surface to be positioned with two orientations in space that form a certain angle without the need to elastically deform any material. In addition, the conductive element is not in electrical contact with its surroundings during its movement. This allows to reduce the activation voltages and the power consumption, allows to reduce the size of each of the two devices (with the consequent improvement of resolution) and the problems derived from the residual mechanical stresses in the cantilever material are avoided. .

Usually MEMS devices have a pronounced laminar structure, inherent to their manufacturing process. In this sense the conductive element is usually a flat sheet and the condenser plates and other elements of the environment are usually also flat surfaces parallel to the conductive element. However, it is not necessary that this be so. For this reason, sections a and b above have detailed, in a general way, what are the basic requirements necessary for the present embodiment of the invention:

- The conductive element, in whatever form it has, will always move from a first end to a second end and vice versa. In order to define more precisely the two positions called first and second extremes, the following considerations have been taken into account. When the element con- ductor is at the first end, will be in contact with certain points of the first zone that limit the intermediate space and, therefore, that limit the displacement that the conductive element can make. At a minimum, the driver will be in contact with the first zone at three non-aligned points (which define a plane) although in practice it may be in contact at more points and, in addition, these points will not be points in the geometric sense but rather they will be more or less large surfaces. The contact points will be the junction points between the first surface of the conductive element and the first zone. Therefore, these contact points define first support points on the first surface of the conductive element and first support points in the first zone. When the conductive element moves towards the second end, the first support points of the first surface and the first support points of the first zone will be separated from each other defining a distance between each pair of support points. In a similar way, some second support points can be defined on the second surface of the conductive element and some second support points on the second zone.

- Yes, when the conductive element is at the first end (that is, with the first support points of the first surface and those of the first area in contact with each other), the distances between each pair of second support points are equal between yes, this means that when the conductive element moves from the first end to the second end it will perform a pure translation and, therefore, this has the consequence that when the conductive element is at the second end the distances between each pair of first points of Support are also equal to each other. In this case, the displacement of the conductive element will always be a pure translation and there will be no change of orientation in the reflecting surface. Therefore, the present embodiment of the invention is characterized in that when the conductive element is found at the first end, the distance between at least one pair of second support points is different from the others. This results in the fact that in order for the pairs of second support points to be in contact with each other, it is necessary for the conductive element to perform a rotation movement (which can be pure rotation or a combination rotation plus translation). This rotation is what allows to change the orientation of the reflective surface.

Preferably, the conductive element comprises a first projection arranged on one of the first and second surfaces, where the first projection comprises one of the first or second support points of the first or second surfaces. Indeed, as previously mentioned, these devices usually have a substantially laminar structure, that is, obtained by means of the deposition of superimposed layers and substantially parallel to each other. In this case, by adding a first projection on one of the surfaces of the conductive element, the desired effect is already obtained. In this case it can be achieved that, for example, the reflective surface is parallel to the general structure of layers of the device when it is at one of the two ends and that it forms a certain angle with the general structure of layers of the device when it is in the opposite end.

Alternatively, the conductive element comprises a first projection arranged on the first surface, where the first projection comprises one of the first support points of the first surface, and a second projection disposed on the second surface, where the second projection comprises one of the second support points of the second surface. In this case it can be achieved that, for example, the reflective surface forms a certain angle with the general structure of layers of the device when it is at one of the two ends and forms another determined angle with the general structure of layers and device when it is at the opposite end.

It is also possible that at least one of the first zone and second zone comprises a projection that, in turn, comprises one of the first or second support points of the first or second surfaces. Indeed, it is possible to achieve that one of the distances indicated above is different from the others based on adding projections in the conductive element but it can also be achieved based on adding projections in the first zone and / or in The second zone. This has the advantage that the conductive element can have a symmetrical mass distribution.

It should also be borne in mind that projections should be interpreted broadly. Thus, an area of the device that has an asymmetric geometry should be understood as having projections in the sense of the invention, if this asymmetric geometry causes any of the distances indicated above to be different from the others.

A subject of the invention is also an actuation method of an electro-optical device of the type indicated above characterized in that it comprises a step of connecting at least one of the capacitor plates at a first voltage and at least one of the condenser plates at a second voltage, where the second voltage is greater than the first voltage, where each and every one of the capacitor plates are subjected to a certain voltage so that none of them is in a high impedance state, so that the projection along the central axis of the capacitor plates subjected to the first voltage has central asymmetry with respect to the projection according to the central axis of the capacitor plates subjected to the second voltage.

Indeed, this procedure allows to create a moment of forces on the conductive element that rotates it along an axis perpendicular to the central axis. Therefore, the conductive element does not carry out a pure translation by moving through the intermediate space but instead performs a combined movement of translation plus rotation or even pure rotation. As a result, the reflective surface, which is integral with the conductive element, changes its orientation in space. In this way, an operation equivalent to that described in the document "A MEMS-Based Projection Display" mentioned above can be achieved, but without the inconveniences presented by the device described in said document. In addition, the conductive element is not in electrical contact with its surroundings during its movement. This solution also has the advantage that it allows combining the possibility of changing the orientation in the space of the reflecting surface, as previously mentioned, with the possibility that the reflecting surface performs a pure translation, based on acting on the conductive element in a conventional manner, as described in PCT application WO 2004/046807, on p. 5 line 29 - p. 6 line 8.

A subject of the invention is also a method of actuating a miniaturized reflecting electro-optical device, where the device is the same as described above, but additionally has a plurality of condenser plates distributed with rotation symmetry along the central axis in the first zone and a plurality of condenser plates distributed with rotation symmetry along the central axis in the second zone, characterized in that it comprises a connection stage of at least one of the capacitor plates at a first voltage and at least one of the other plates of capacitor at a second voltage, where the second voltage is greater than the first voltage, so that the projection along the central axis of the capacitor plates subjected to the first voltage has central asymmetry with respect to the projection along the central axis of the plates capacitor subjected to the second voltage. Indeed, this arrangement of the condenser plates allows the reflecting surface to be oriented in many directions, rotating it along different axes perpendicular to the central axis. When indicating that it has a plurality of condenser plates, it should be understood that it has three (the first, second and third condenser plate) or more plates. With three plates, distributed in triangle, six positions could be obtained in the space differentiated from the reflecting surface, corresponding to the rotation according to three different axes. Increasing the number of plates increases the number of axes of rotation.

Advantageously when the conductive element is close to one of the first zone or second zone, the conductive element is in contact with an external circuit and the conductive element is connected to a voltage through said external circuit. Indeed, the conductive element will usually be in contact with stops that limit its movement at both ends. These stops may simply be mechanical stops, but they may be part of an external circuit so that the conductive element can be connected at a given voltage through said stops. In this way, the conductive element will be subject to a certain voltage (while the contact with the external circuit lasts), which can be used to increase the electrostatic force applied to the conductive element. In this way it is possible to facilitate the disengagement of the conductive element from the stops, overcoming the coupling forces that can be generated between the conductive element and the stops or other contact surfaces.

A subject of the invention is also a miniaturized reflecting electro-optical device of the type indicated above, characterized in that it comprises control means suitable for carrying out a method according to the invention.

A subject of the invention is also a miniaturized reflector electro-optical device of the type indicated above characterized in that it has four condenser plates not aligned in the first zone and four condenser plates not aligned in the second zone, and because it comprises suitable control means to perform a procedure according to the invention. Preferably, in both the first zone and the second zone, the condenser plates are distributed in a square shape and the control means are suitable for applying the first voltage and the second voltage on condenser plates such that their projections along the central axis They are adjacent.

A subject of the invention is also a miniaturized reflecting electro-optical device of the type indicated above characterized in that it comprises a plurality of condenser plates distributed with rotational symmetry along the central axis in the first zone and a plurality of condenser plates distributed with symmetry of rotation according to the central axis in the second zone, and because it comprises control means suitable for carrying out a process according to the invention.

A subject of the invention is also a miniaturized reflector electro-optical assembly of the type indicated at the beginning characterized in that it comprises: [a] a miniaturized digital reflector electro-optical device which, in turn, comprises:

- a first zone facing a second zone, - a first condenser plate disposed in said zone,

- a third condenser plate arranged in the second zone, where the third condenser plate is less than or equal to the first condenser plate, and where the second and third condenser plates are, together, larger than the first condenser plate,

- an intermediate space arranged between the first zone and the second zone,

- a conductive element disposed in the intermediate space, where the conductive element is mechanically independent of the first zone and second zone and is capable of moving through the intermediate space, from a first end, where the conductive element is in contact with The first zone, to a second end, where the conductive element is in contact with the second zone and vice versa, depending on voltages present in the first, second and third condenser plates,

- a reflective surface, suitable for reflecting an incident beam of light, integral with the conductive element, and

[b] a light source capable of emitting the light signal, where the light source is oriented such that the light signal strikes the reflecting surface, defining an optical path, whether the conductive element is at the first end or if it's at the second end,

and because the difference between the optical paths traveled by the light signal when the conductive element passes from the first end to the second end or vice versa, is equal to half of the wavelength, or an odd multiple of half of the wavelength , where the difference is due to the displacement made by the reflecting surface. Indeed, in this way, a shift of the reflected light signal equal to half a wavelength (or an odd multiple of half wavelengths) can be caused. By properly combining this outdated light signal with respect to another light signal that has not experienced this offset, destructive interference, or cancellation, of the light signal can be achieved. For this, a conductive element is displaced which is a loose piece and, therefore, can be displaced without having to overcome elastic mechanical forces, as is the case with electro-optical assemblies of the state of the art. In addition, the conductive element is not in electrical contact with its surroundings during its movement. This allows the above-mentioned problems to be solved since the conductive element can be displaced by small activation voltages, it can be manufactured with smaller sizes, which improves the resolution, the power consumption is also reduced, and there are no problems with mechanical stresses. residuals since it is not necessary a cantilever that must be deformed.

Preferably the assembly has a second fixed reflective surface separated from the reflecting surface, according to the optical path, a value equal to a quarter of the wavelength, or an odd multiple of the fourth part of the wavelength, when the element Driver is at one of the first end and second end. Indeed, this fixed reflective surface will be the one that reflects the non-offset light signal. Then, when the reflective surface integral to the conductive element is at one of the ends, the light signal reflected in it will be in phase agreement with the signal reflected in the fixed reflective surface, and the electro-optical assembly will reflect in its entirety the incident light signal . However, when the reflective surface integral to the conductive element is at the opposite end, the light signal reflected therein will be offset half wavelength with respect to the signal reflected in the fixed reflective surface, which will cause the cancellation of both so that the The electro-optical assembly will not reflect (seen as a whole) the incident light signal. Preferably the fixed reflective surface is in the electro-optical device itself, although it is also possible that the electro-optical assembly has the fixed reflective surface arranged in a place independent of the electro-optical device, for example adjacent to it.

The geometry of the conductive element can be diverse. Thus, for example, an advantageous solution is obtained when the conductive element has a main body that is a flat sheet from which a support arm extends at the end of which the reflecting surface is arranged. In this way the two functions are "separated": the main body is responsible for the displacement being carried out and can be housed inside the electro-optical device, while the reflective surface may be outside the electro-optical device and may have an optimized geometry to perform the reflection function. The support arm joins them mechanically and "crosses" the electro-optical device through an opening provided therein. The support arm can have any geometry appropriate to its function. In this sense it can be formed by a single column, by a plurality of columns, or by any other suitable geometry.

Alternatively, another advantageous solution is when the conductive element has a main body that is a flat sheet on which the reflective surface extends, where the reflective surface is oriented towards one of the first zone and second zone, which has an opening which allows the passage of the light signal. In this case, the geometry of the conductive element is simplified and the moving masses are reduced. In return, an opening in the electro-optical device large enough to allow the passage of a significant part of the light signal must be provided.

In general, a given electro-optical device will be able to affect a light signal of a certain wavelength. In the case that the light signal is polychrome, it may be interesting to have an electro-optical assembly capable of affecting more than a given wavelength. In this sense, an advantageous embodiment of the invention is obtained when the electro-optical assembly has three groups of electro-optical devices, where the electro-optical devices of each group are suitable for processing a light signal that comprises the same determined wavelength, and where each group is suitable for the processing of a light signal that comprises a determined wavelength different from that of the other groups. For example, three groups each could be used to affect the red, blue, and green light, respectively. By distributing the electro-optical devices so that they are grouped by triads (three devices, one for each color) one could process polychrome signals and, for example, form color images.

Another advantageous embodiment of the invention is obtained when the electro-optical assembly additionally comprises a semi-transparent layer disposed at a distance of half the wavelength (or a multiple of wave halves), measured according to the direction of the path optical. In this case, the semi-transparent layer performs a function equivalent to the fixed reflective surface: the semi-transparent layer will always reflect part of the light signal without offsetting it, while the part of the light signal that passes through the semi-transparent layer will affect the reflective surface integral with the element conductor and will be in phase or offset half wavelength with respect to the signal reflected in the semi-transparent layer depending on the position of the conductive element. In general, the semi-transparent layer does not have to be located in the vicinity of the device, but, on the contrary, it can be placed, for example, on the external surface of the chip (provided that the distance meets the condition of being a multiple of half of the wavelength).

The alternatives described so far presuppose the existence of a light source arranged in a certain relative position with respect to the electro-optical device. In this way, a specific optical path is defined and the geometry of the electro-optic assembly can be adequately designed for the said offset of the reflected signal to take place. However, another preferred form of the invention is obtained when the electro-optical assembly comprises a miniaturized digital reflector electro-optical device which, in turn, comprises:

- a first zone facing a second zone,

- a first condenser plate arranged in the first zone, - a second condenser plate arranged in the second zone and facing the first condenser plate, where the second condenser plate is less than or equal to the first condenser plate,

- an intermediate space arranged between the first zone and the second zone,

- a reflective surface, suitable for reflecting an incident beam of light, integral with the conductive element,

where the distance traveled by the reflecting surface is equal to the fourth part of the wavelength, or an odd multiple of the fourth part of the wavelength, when the conductive element passes from the first end to the second end or vice versa.

In fact, in the latter case there is an electro-optical assembly suitable for working with a light signal that affects the reflecting surface perpendicularly (or almost perpendicularly). This is a fairly common case, for example when it comes to "passive" reflective electro-optic assemblies, that is, they reflect the ambient light of the environment. An example would be the case of a user facing a screen formed by these electro-optical assemblies and illuminated by the ambient light. Logically, this specific case of the electro-optical assembly can be combined with all the alternatives and variants indicated above. In fact, this case is a particular case of the previous one, in which the light source is in a position perpendicular or almost perpendicular to the reflecting surface. However, this particular case allows to design an electro-optical assembly that does not have to comprise a light source in a predetermined position, since it is based on the premise that the light source, outside the assembly, will already have said relative position.

A subject of the invention is also a process for the processing of a light signal comprising a given wavelength, by means of a miniaturized reflector electro-optical assembly comprising a miniaturized digital reflector electro-optical device comprising:

- a first zone facing a second zone,

- a first condenser plate arranged in the first zone,

- a third condenser plate arranged in the second zone, where the third condenser plate is less than or equal to the first condenser plate, and where the second and third condenser plates are, together, larger than the first condenser plate, - an intermediate space arranged between the first zone and the second zone,

characterized in that the light signal is affected on the reflecting surface whether the conductive element is at the first end or if it is at the second end, and because the optical path traveled by said light signal is modified, at a value equal to half of the wavelength, or an odd multiple of half of the wavelength, passing the conductive element from the first end to the second end or vice versa, due to the displacement made by the reflective surface.

Brief description of the drawings

Other advantages and characteristics of the invention can be seen from the following description, in which, without any limitation, preferred embodiments of the invention are mentioned, mentioning the accompanying drawings. The figures show:

Fig. 1, a simplified scheme of an electro-optical device according to the state of the art.

Fig. 2, a simplified scheme of an electro-optical reflecting device according to the invention.

Fig. 3, an exploded perspective view of an electro-optical reflecting device according to the invention.

Fig. 4, a perspective view of the electro-optical reflecting device of Fig. 3,

Figs. 5 and 6, a front view of the reflecting electro-optical device of Fig. 3 showing two different orientations,

Figs. 7 and 8, two simplified schemes of conductive elements with projections,

Figs. 9 and 10, two simplified schemes showing the equivalence between projections arranged in the conductive element or arranged in the first and / or second zone, Fig. 11, a simplified scheme of another embodiment of an electro-optical reflecting device according to the invention.

Fig. 12, a simplified scheme of an electro-optical device according to the state of the art.

Fig. 13, a simplified scheme of an electro-optical reflecting device according to the invention.

Fig. 14, an exploded perspective view of an electro-optical reflecting device according to the invention.

Fig. 15, a perspective view of the electro-optical reflecting device of Fig. 14,

Figs. 16 and 17, a front view of the reflecting electro-optical device of Fig. 14 showing two different orientations,

Figs. 18A and 18B, a scheme of an actuation procedure using four condenser plates.

Figs. 19A and 19B, a scheme of an actuation procedure using three condenser plates.

Figs. 2OA and 2OB, a scheme of an actuation procedure using six condenser plates.

Figs. 21 A and 21 B, a scheme of an actuation procedure using six condenser plates and an intermediate voltage.

Figs. 22A and 22B, a scheme of an actuation procedure using eight condenser plates. Figs. 23A and 23B, a scheme of an actuation procedure using eight condenser plates and an intermediate voltage.

Figs. 24A ₁ 24B, 24C, 25A, 25B and 25C a scheme of an actuation procedure using 4 + 4 condenser plates not aligned.

Figs. 26A, 26B and 26C, a scheme of an actuation procedure using 4 + 4 non-aligned condenser plates and an intermediate voltage.

Figs. 27A, 27B and 27C, a scheme of an alternative procedure of operation using 4 + 4 non-aligned condenser plates.

Fig. 28, a scheme of two possible orientations using 4 + 4 non-aligned condenser plates.

Fig. 29, a scheme of multiple possible orientations using a plurality of non-aligned condenser plates.

Figs. 3OA and 3OB, a scheme of an actuation procedure using the plurality of plates of Fig. 29.

Figs. 31 and 32, two simplified schemes of conductive elements with projections,

Figs. 33 and 34, two simplified schemes showing the equivalence between projections arranged in the conductive element or arranged in the first and / or second zone,

Fig. 35, a simplified scheme of another embodiment of an electro-optical reflecting device according to the invention.

Fig. 36, a simplified scheme of an electro-optical device according to the state of the art. Fig. 37, a simplified scheme of an electro-optical reflecting device according to the invention.

Fig. 38, an exploded perspective view of an electro-optical reflecting device according to the invention.

Fig. 39, a perspective view of the reflecting electro-optical device of Fig. 38,

Figs. 39A and 39B, a simplified scheme of an electro-optical assembly according to the invention with the conductive element arranged at the first end and the second end, respectively.

Fig. 39C, a simplified scheme of an electro-optical assembly according to the invention with a semi-transparent layer.

Figs. 40 and 41, a front view of the reflecting electro-optical device of Fig. 38 showing two different orientations,

Figs. 42A and 42B, a scheme of an actuation procedure using four condenser plates.

Figs. 43A and 43B, a scheme of an actuation procedure using three condenser plates.

Figs. 44A and 44B, a scheme of an actuation procedure using six condenser plates.

Figs. 45A and 45B, a scheme of an actuation procedure using six condenser plates and an intermediate voltage.

Figs. 46A and 46B, a scheme of an actuation procedure using eight condenser plates. Figs. 47 A and 47B, a scheme of an actuation procedure using eight capacitor plates and an intermediate voltage.

Figs. 48A, 48B, 48C, 49A, 49B and 49C a scheme of an actuation procedure using 4 + 4 condenser plates not aligned.

Figs. 5OA, 5OB and 5OC, a scheme of an actuation procedure using 4 + 4 non-aligned condenser plates and an intermediate voltage.

Figs. 51 A, 51 B and 51 C, a scheme of an alternative procedure of operation using 4 + 4 condenser plates not aligned.

Fig. 52, a scheme of two possible orientations using 4 + 4 non-aligned condenser plates.

Fig. 53, a scheme of multiple possible orientations using a plurality of non-aligned condenser plates.

Figs. 54A and 54B, a scheme of an actuation procedure using the plurality of plates of Fig. 43.

Detailed description of some embodiments of the invention

Figure 1 shows a simplified scheme of an electro-optical device, as described in PCT application WO 2004/046807. The electro-optical device has a first zone 9 facing a second zone 11 (to the left and right of the drawing, respectively) with a first capacitor plate 1 arranged in the first zone 9, a second capacitor plate 2 and a third plate of capacitor 3 in the second zone 11, facing said first capacitor plate 1 and where each of said second and third capacitor plates 2, 3 are smaller or equal than the first capacitor plate 1 but both together are larger than Ia first condenser plate 1. Enter both zones 9, 11 there is an intermediate space 5 along which a conductive element 7 can be moved. A DC control circuit governs the condenser plates. As already specified in PCT application WO 2004/046807, on p. 4 line 6 - 21 and p. 16 line 7-11, the conductive element 7 is mechanically independent of the first zone 9 and the second zone 11, that is, it is mechanically independent of the entire fixed structure of the device. In other words, the conductive element 7 is a loose part suitable for freely moving through the intermediate space 5. The conductive element 7 has no physical connection with its surroundings.

In the first zone 9 and in the second zone 11 there are stops 13 that limit the movement of the conductive element 7 and which define a first end and a second end.

In figures 2 to 4, a reflecting electro-optical device according to the invention is shown. In particular, these views do not present projections (which will be defined below) for further simplification. In general, it is possible to observe the existence of eight condenser plates 15 (reference 15 has been used to designate any condenser plate, regardless of whether it is the first, the second, the third or any other additional condenser plate) and of some stops 13 (specifically Figure 2 has been drawn without stops). As already described in PCT application WO 2004/046807, on p. 6 line 28 - p. 7 line 5 and p. 18 line 4-18, the minimum amount of condenser plates necessary to be able to make a movement in two directions is three, with the geometric requirements indicated above. However, usually, the devices have more condenser plates as well as a plurality of stops.

It is usually advantageous that the conductive element 7 does not come into contact with the condenser plates 15, although in some cases it may be permissible to come into contact with any of them, as described in PCT application WO 2004/046807, in P. 23 line 12-28. The conductive element 7 has a main body 17 that is substantially a flat sheet and that supports a table-shaped structure with a central leg (or support structure). The table of the table has a reflecting surface 19 on which the light beam will affect, and the central leg extends through a hole arranged between the condenser plates 15 of the upper part of the device. Usually the conductive element 7 will have a main body 17 which, as mentioned above, will be substantially a laminar element and the reflective surface 19 will be parallel to the main body 17 of the conductive element 7, since these geometries are those obtained from a more easily using the usual MEMS manufacturing procedures.

In figures 5 and 6 it is shown how the reflecting surface 19 can be oriented in two different positions.

One way to achieve these different orientations is, as already mentioned above, by adding projections 21 in the conductive element 7. This has been shown schematically in Figures 7 and 8, in which only the body is shown main 17 of a conductive element 7, for example of a conductive element 7 such as that of Figures 2 to 4. In the case that the conductive element 7 has only a projection 21, for example on its upper surface, then the reflecting surface 19 it would be parallel to the base of the device when the conductive element 7 is in its lower position (seen according to the figures) and the reflective surface 19 would form a non-zero angle with the base of the device when the conductive element 7 is in its upper position (assuming that the stops 13 arranged in the upper area were coplanar according to a horizontal plane). If the conductive element 7 has two projections 21, one on each of its upper and lower surfaces, then the reflecting surface 19 would form a non-zero angle with the base of the device whether it is at the upper end or if it is at the lower end .

In Figure 9 it is observed that a result similar to that of Figure 8 can be achieved with a different arrangement of the projections 21, while in Figure 10 it is observed that a result similar to that of Figure 9 can be achieved based to include the projections 21 in the first zone 9 and in the second zone 11 of the device instead of including them in the moving conductor element 7. Logically it is possible to have a combination of both alternatives.

Finally, Figure 11 shows another alternative, in which it is achieved that the reflecting surface 19 adopts two different orientations thanks to the fact that the upper area of the device is asymmetric. In Figure 11 the conductive element 7 has again been shown without the table structure with the reflective surface 19 to simplify the drawing.

In general, it should be taken into account that the specific geometry of the conductive element 7 shown in Figures 2 to 4, with the table structure that includes the reflecting surface 19, is a concrete example of an embodiment. In general, the conductive element 7 and the reflective surface 19 can have other geometries, in particular the reflective surface 19 can be included directly in the main body 17 of the conductive element 7.

Also in general, it should be taken into account that these devices have three-dimensional geometries and that, therefore, the arrangement of the projections 21 (and, in general, of the contact points) can be a more or less complex three-dimensional arrangement. The examples shown in the figures are simply examples with simplified geometries.

Figure 12 shows a simplified scheme of an electro-optical device, as described in PCT application WO 2004/046807. The electro-optical device has a first zone 109 facing a second zone 111 (to the left and to the right of the drawing, respectively) with a first capacitor plate 101 arranged in the first zone 109, a second capacitor plate 102 and a third plate of capacitor 103 in the second zone 111, facing said first capacitor plate 101 and where each of said second and third capacitor plates 102, 103 are smaller or equal than the first capacitor plate 101 but both together are larger that the first condenser plate 101. Between the two zones 109, 111 there is an intermediate space 105 a The length of which a conductive element 107 can be moved. A DC control circuit governs the condenser plates. As already specified in PCT application WO 2004/046807, on p. 4 line 6 - 21 and p. 16 line 7-11, the conductive element 107 is mechanically independent of the first zone 109 and the second zone 111, that is, it is mechanically independent of the entire fixed structure of the device. In other words, the conductive element 107 is a loose part suitable for freely moving through the intermediate space 105. The conductive element 107 has no physical connection with its surroundings.

In the first zone 109 and in the second zone 11 1 there are stops 113 that limit the movement of the conductive element 107 and which define a first end and a second end.

Figures 13 to 15 show a reflecting electro-optical device according to the invention. In general, it is possible to observe the existence of eight condenser plates 115 (reference 1 15 has been used to designate any condenser plate, regardless of whether it is the first, the second, the third or any other additional condenser plate) and of stops 113 (specifically Figure 13 has been drawn without stops). As already described in PCT application WO 2004/046807, on p. 6 line 28 - p. 7 line 5 and p. 18 line 4-18, the minimum amount of condenser plates needed to be able to make a movement in two directions is three. However, usually, the devices have more condenser plates as well as a plurality of stops.

It is usually advantageous that the conductive element 107 does not come into contact with the condenser plates 115, although in some cases it may be permissible to come into contact with any of them, as described in PCT application WO 2004/046807, in P. 23 line 12-28.

The conductive element 107 has a main body 117 that is substantially a flat sheet and that supports a table-shaped structure with a central leg (or support structure). The table of the table has a reflective surface 119 on which the light beam will affect, and the central leg extends through a hole disposed between the condenser plates 115 of the upper part of the device. Usually the conductive element 107 will have a main body 117 which, as mentioned above, will be substantially a laminar element and the reflective surface 119 will be parallel to the main body 117 of the conductive element 107, since these geometries are those obtained in a simpler way through the usual MEMS manufacturing procedures.

In figures 16 and 17 it is shown how the reflective surface 119 can be oriented in two different positions.

In figures 18A and 18B the basic concept of the actuation procedure according to the invention is schematically shown. Both these figures and the remaining figures describing the procedure show only the condenser plates 115 and the main body 117 of the conductive element 107. The figures additionally show the voltage applied to the condenser plates 115. When the condenser plate shows horizontal lines in dashed lines, it represents that it is connected to a "low" voltage (preferably 0 V). When the capacitor plate 115 shows continuous horizontal lines and vertical lines (forming a grid) it represents that it is connected to a "high" voltage (V ₀ , which will preferably be the circuit supply voltage, but in general any higher voltage at the "low" voltage). When the capacitor plate 115 shows continuous horizontal lines, it represents that it is connected to an intermediate voltage between the two previous ones (preferably V ₀ 12). In any case, it must be taken into account that it is possible to reverse the polarity of the capacitor plates 115, obtaining the same result. Additionally, in figures 18A, 18B, 19A, 19B, 20A ₁ 2OB, 21 A, 21 B, 22A, 22B, 23A and 23B, the conductive element 107 and the profile condenser plates 115 are shown. It can be assumed that the condenser plates 115 are, in these cases, substantially square. Specifically in figures 18A and 18B, it is observed how the capacitor plate 115 connected to a high voltage is asymmetric with respect to the central axis (which would be a vertical line that would pass through the middle of the figure). Therefore a pair of forces is created which rotates the conductive element 107 as schematically represented in the figures. As will be seen below, the same phenomenon occurs in the other examples.

A simplified case of the previous case is seen in Figures 19A and 19B. As can be seen in Figures 18A and 18B, the two upper capacitor plates 115 are always at the same voltage. Therefore, they can be physically joined so that they form a single condenser plate 1 15. This is the case shown in Figures 19A and 19B, in which the device has the essential minimum of condenser plates 115: three plates.

In general, preferably at least one additional capacitor plate 115 is connected at an intermediate voltage between the first voltage and the second voltage. This allows to make the device more stable against external influences. In fact, if the device has four or more capacitor plates 115 in each zone, it may be interesting to connect some of the plates 115 to a second intermediate voltage, different from the previous one. In this way, the force moment applied to the conductive element 107 can be adjusted more precisely.

In an advantageous embodiment, the device has three condenser plates 115 aligned in the first zone 109 and three condenser plates 115 aligned in the second zone 111, and the central condenser plate 115 of each of the zones is connected Same voltage This alternative is reflected in figures 2OA and 2OB. In this case it is particularly advantageous that one of the side condenser plates 115 of each of the zones is connected to an intermediate voltage, as shown in Figures 21 A and 21 B.

In another preferred embodiment, the device has four condenser plates 115 aligned in the first zone 109 and four condenser plates 115 aligned in the second zone 111, and three condenser plates 115 of the first zone 109 and three plates are connected of capacitor 115 of the second zone 111 at the same voltage, as shown in Figures 22A and 22B. In this case it is again advantageous to connect two capacitor plates 115 of Ia First zone 109 and two capacitor plates 115 of the second zone 111 at an intermediate voltage in order to make the assembly more stable against external influences, as shown in Figures 23A and 23B.

Another advantageous embodiment of the invention is obtained when the device has four condenser plates 115 not aligned in the first zone 109 and four condenser plates 115 not aligned in the second zone 111, and three condenser plates 115 of the Ia are connected First zone 109 and three capacitor plates 115 of the second zone 111 at the same voltage, as shown in Figures 24A, 24B, 24C, 25A, 25B and 25C. Figure 24A shows a plan view of the condenser plates 115 of the lower zone (for example, the first zone 109), Figure 24B shows a plan view of the condenser plates 115 of the upper zone (which, following the same example, would be the second zone 111) and in Figure 24C a profile view is shown, with a slight perspective so that the four condenser plates 115 of each zone are appreciated. In fact, Figures 24A and 24B are equivalent to the aforementioned projections along the central axis on a plane perpendicular to the central axis. In this case, the fact that the device is actually three-dimensional is used and that the condenser plates 115 do not have to be aligned, but can be distributed along a two-dimensional surface (usually along a flat). Also in this case it is advantageous that two capacitor plates 115 of the first zone 109 and two capacitor plates 115 of the second zone 111 are connected to an intermediate voltage, as shown in Figures 26A, 26B and 26C. There are other actuation alternatives, such as that shown in Figures 27A, 27B and 27C, in which the capacitor plates 115 connected to the high and low voltage are not adjacent, but it is advantageous that, when the plates of capacitor 115 are distributed in the form of a square both in the first zone 109 and in the second zone 111, the condenser plates 115 connected to the high voltage and the low voltage are adjacent (or, in a more correct way, than their respective projections along the central axis on a plane perpendicular to the central axis are adjacent). Figure 28 is shown as, by means of a device having four condenser plates 115 not aligned and arranged squarely in each of the zones, two pairs of orientations of the conductive element 107 can be achieved as the conductive element is rotated 107 according to one of the two axes indicated in the figure. For this, one of the procedures shown in Figures 24A, 24B, 24C, 25A, 25B, 25C and / or 26A ₁ 26B, 26C, as represented or rotated 90 °, would be used. However, the procedure shown in Figures 27A, 27B, 27C could also be used, in which case we would have 45 ° inclined axes of rotation with respect to those shown in Figure 28.

In the case of having a device having a plurality of condenser plates 115 distributed with rotation symmetry along the central axis in both zones, then the actuation procedure is preferably characterized in that at least one additional condenser plate 115 is connected. at an intermediate voltage between the first voltage and the second voltage. Preferably, each and every one of the plates 115 is subjected to a certain voltage so that none of them is in a high impedance state.

The fact that none of the capacitor plates 115 remain in a high impedance state is an advantageous solution that is applicable for any of the different alternatives of the present invention. Indeed, it is generally possible to control the displacement of the conductive element 107 in various ways, by combining capacitor plates 115 connected at a low voltage, capacitor plates 115 connected at a high voltage and, in certain cases, capacitor plates 115 left in a high impedance state. However, it has been observed that, in practice, achieving a really effective high impedance state is not easy. In fact, it has been observed that in order to guarantee that a capacitor plate 115 is in a really effective high impedance state, it is necessary to use at least one additional relay. This additional relay consumes space for what is, a priori, undesirable. Therefore, it is advantageous to use those control forms of the conductive element 107 that do not require the presence of a capacitor plate 115 in a high impedance state. However, in general, the devices according to the invention they have a plurality of capacitor plates 115. In certain cases not all of them participate in the control of the conductive element 107. The present invention specifies that only those condenser plates 115 that participate in the control of the conductive element 107 at any given time must be connected to a certain voltage (that is, they must not be in a high impedance state), however, there is no requirement as regards those capacitor plates 1 15 that, at a given time, do not participate in the control of the conductive element 107. On the other hand, it should be borne in mind that the problem derived from having a capacitor plate 1 15 in a high impedance state is that, with long periods of time, some voltage can reach determined by a priori unknown environmental conditions. To avoid this inconvenience it may be advisable to ensure that none of the capacitor plates 115 present in the device are at any time in a high impedance state.

Another way of achieving orientation in two different positions in space is the reflective surface by means of a miniaturized reflecting electro-optical device according to the one described above in which

- the second condenser plate 102 is less than or equal to the first condenser plate 101,

- the third condenser plate 103 is smaller than or equal to the first condenser plate 101, and where said second and third condenser plates 102, 103 are, together, larger than the first condenser plate 101,

- the conductive element has a first surface facing the first zone 109 and a second surface facing the second zone 111, the conductive element 107 being able to move through the intermediate space 105, from a first end, where the element conductor 107 is in contact with the first zone 109, to a second end, where the conductor element 107 is in contact with the second zone 111, and vice versa, in function of voltages present in the first, second and third capacitor plates 101, 102, 103,

and where

a - when the conductive element 107 is at the first end it has at least three first support points not aligned on the first surface that are in contact with three corresponding first support points in the first zone 109, and when the conductive element 107 it is at the second end has at least three second support points not aligned on the second surface that are in contact with three corresponding second support points in the second zone 111, and

b - when the conductive element 107 is at the first end, the distance between at least one of the second support points of the second surface to its corresponding support point of the second zone 111 is different from the distance of the remaining seconds support points of the second surface to their corresponding support points of the second zone 111, so that the reflective surface 119 changes orientation in the space when the conductive element 107 makes said displacement between the first end and the second end.

Indeed, the device according to the invention allows the reflective surface to be positioned with two orientations in space that form a certain angle without the need to elastically deform any material. This allows to reduce the activation voltages and the power consumption, it allows to reduce the size of each of the two devices (with the consequent improvement of resolution) and the problems derived from the residual mechanical tensions in the cantilever material are avoided.

Usually MEMS devices have a pronounced laminar structure, inherent to their manufacturing process. In this sense the conductive element is usually a flat sheet and the condenser plates and other elements of the environment are usually also flat surfaces parallel to the element ductor However, it is not necessary that this be so. Therefore, in sections a and b above, in a general way, what are the basic requirements necessary for the present embodiment of the invention have been detailed:

- The conductive element, in whatever form it has, will always move from a first end to a second end and vice versa. In order to define more precisely the two positions called first and second extremes, the following considerations have been taken into account. When the conductive element is at the first end, it will be in contact with certain points of the first zone that limit the intermediate space and, therefore, limit the displacement that the conductive element can make. At a minimum, the driver will be in contact with the first zone at three non-aligned points (which define a plane) although in practice it may be in contact at more points and, in addition, these points will not be points in the geometric sense but rather they will be more or less large surfaces. The contact points will be the junction points between the first surface of the conductive element and the first zone. Therefore, these contact points define first support points on the first surface of the conductive element and first support points on the first zone. When the conductive element moves towards the second end, the first support points of the first surface and the first support points of the first zone will be separated from each other defining a distance between each pair of support points. In a similar way, some second support points can be defined on the second surface of the conductive element and some second support points on the second zone.

- Yes, when the conductive element is at the first end (that is, with the first support points of the first surface and those of the first area in contact with each other), the distances between each pair of second support points are equal between yes, this means that when the conductive element moves from the first end to the second end it will carry out a pure translation and, therefore, this has the consequence that when the conductive element is at the second end the distances between each pair of first Support points are also equal to each other. In this case the displacement of the conductive element will be always a pure translation and there will be no change of orientation in the reflective surface. Therefore, the present embodiment of the invention is characterized in that when the conductive element is found at the first end, the distance between at least one pair of second support points is different from the others. This results in the fact that for the pairs of second support points to be in contact with each other, it is necessary for the conductive element to perform a rotation movement (which can be pure rotation or a combination of rotation plus translation). This rotation is what allows to change the orientation of the reflective surface.

The present invention also aims at combining this possible solution (and the variants thereof described below) with the alternatives indicated above.

Preferably the conductive element comprises a first projection disposed on one of the first and second surfaces, where the first projection comprises one of the first or second support points of the first or second surfaces. Indeed, as previously stated, these devices usually have a substantially laminar structure, that is, obtained by the deposition of superimposed layers and substantially parallel to each other. In this case, by adding a first projection on one of the surfaces of the conductive element, the desired effect is already obtained. In this case it can be achieved that, for example, the reflective surface is parallel to the general structure of layers of the device when it is at one of the two ends and that it forms a certain angle with the general structure of layers of the device when it is in the opposite end.

Alternatively, the conductive element comprises a first projection arranged on the first surface, where the first projection comprises one of the first support points of the first surface, and a second projection disposed on the second surface, where the second projection comprises one of the second support points of the second surface. In this case it can be achieved that, for example, the reflective surface forms a certain angle with the general structure of layers of the device when it is at one of the two ends and that forms another angle determined with the general structure of layers and device when it is at the opposite end.

It is also possible that at least one of the first zone and second zone comprises a projection that, in turn, comprises one of the first or second support points of the first or second surfaces. Indeed, it is possible to achieve that one of the distances indicated above is different from the others by adding projections in the conductive element but it can also be achieved by adding projections in the first zone and / or in the second zone. This has the advantage that the conductive element can have a symmetrical mass distribution.

It should also be borne in mind that projections should be interpreted broadly. Thus, an area of the device that has an asymmetric geometry should be understood as having projections in the sense of the invention, if this asymmetric geometry causes any of the distances indicated above to be different from the others

Examples of these alternatives are shown in Figures 31 to 35.

One way to achieve these different orientations is, as already stated above, by adding projections 121 in the conductive element 107. This has been shown schematically in Figures 31 and 32, in which only the body is shown main 117 of a conductive element 107, for example of a conductive element 107 such as that of Figures 13 to 15. In the case that the conductive element 107 has only a projection 121, for example on its upper surface, then the reflective surface 119 would be parallel to the base of the device when the conductive element 107 is in its lower position (seen according to the figures) and the reflective surface 119 would form a non-zero angle with the base of the device when the conductive element 107 is in its upper position (assuming that the stops 113 arranged in the upper area were coplanar according to a horizontal plane). If the conductive element 107 has two pro projections 121, one on each of its upper and lower surfaces, then the reflective surface 119 would form a non-zero angle with the base of the device whether it is at the upper end or at the lower end.

In Figure 33 it is observed that a result similar to that of Figure 32 can be achieved with a different arrangement of the projections 121, while in Figure 34 it is observed that a result similar to that of Figure 33 can be achieved based on include projections 121 in the first zone 109 and in the second zone 111 of the device instead of including them in the mobile conductor element 107. Logically it is possible to have a combination of both alternatives.

Finally in Figure 35 another alternative is shown, in which it is achieved that the reflective surface 119 adopts two different orientations thanks to the fact that the upper area of the device is asymmetric. In Figure 35, the conductive element 107 has again been shown without the table structure with the reflective surface 119 to simplify the drawing.

In general, it should be taken into account that the specific geometry of the conductive element 107 shown in Figures 13 to 15, with the table structure that includes the reflecting surface 119, is a concrete example of an embodiment. In general, the conductive element 107 and the reflective surface 119 may have other geometries, in particular the reflective surface 119 may be included directly in the main body 117 of the conductive element 107.

Also in general, it should be taken into account that these devices have three-dimensional geometries and that, therefore, the arrangement of the projections 121 (and, in general, of the contact points) can be a more or less complex three-dimensional arrangement. The examples shown in the figures are simply examples with simplified geometries.

Figure 36 shows a simplified scheme of an electro-optical device, as described in PCT application WO 2004/046807. The electro-optical device has a first zone 209 facing a second zone 211 (on the left and to the right of the drawing, respectively) with a first condenser plate 201 disposed in the first zone 209, a second condenser plate 202 and a third condenser plate 203 in the second zone 211, facing said first condenser plate 201 and wherein each of said second and third condenser plates 202, 203 are smaller or equal than the first condenser plate 201 but both together are larger than the first capacitor plate 201. Between the two zones 209, 211 there is an intermediate space 205 along which a conductive element 207 can be moved. A DC control circuit governs the condenser plates. As already specified in PCT application WO 2004/046807, on p. 4 line 6 - 21 and p. 16 line 7-11, the conductive element 207 is mechanically independent of the first zone 209 and the second zone 211, that is, it is mechanically independent of the entire fixed structure of the device. In other words, the conductive element 207 is a loose part suitable for freely moving through the intermediate space 205. The conductive element 207 has no physical connection with its surroundings.

In the first zone 209 and in the second zone 211 there are stops 213 that limit the movement of the conductive element 207 and which define a first end and a second end.

In figures 37 to 39, a reflecting electro-optical device according to the invention is shown. In general, the existence of eight condenser plates 215 can be observed (reference 215 has been used to designate any condenser plate, regardless of whether it is the first, the second, the third or any other additional condenser plate) and of stops 213 (specifically Figure 37 has been drawn without stops). As already described in PCT application WO 2004/046807, on p. 6 line 28 - p. 7 line 5 and p. 18 line 4-18, the minimum amount of condenser plates needed to be able to make a movement in two directions is three. However, usually, the devices have more condenser plates as well as a plurality of stops.

It is usually advantageous that the conductive element 207 does not come into contact with the condenser plates 215, although in some cases it may be permissible for contact any of them, as described in PCT application WO 2004/046807, on p. 23 line 12-28.

The conductive element 207 has a main body 217 that is substantially a flat sheet and that supports a table-shaped structure with a central leg (or support structure). The table of the table has a reflective surface 219 on which the light beam will impact, and the central leg extends through a hole arranged between the condenser plates 215 of the upper part of the device. Usually the conductive element 207 will have a main body 217 which, as said above, will be substantially a laminar element and the reflective surface 219 will be parallel to the main body 217 of the conductive element 207, since these geometries are those obtained from a more easily using the usual MEMS manufacturing procedures.

In figures 39A and 39B an electro-optical device is shown in which the reflective surface 219 extends directly over the main body 217 of the conductive element 207. As already stated above this solution is an alternative to the solution shown, for example, in figures 37 to 39. Likewise as already mentioned above, the electro-optical assembly can comprise the light source or not. In the present figures, the light source has not been represented, but it should be understood that the light signal can come both from a light source belonging to the electro-optical assembly, from a light source outside the electro-optical assembly or, in general, it can be light from The ambient light. The electro-optical device of Figures 39A and 39B has a second fixed reflecting surface 221, disposed in the upper part thereof. On this second reflecting surface 221 the light signal is reflected without experiencing any offset (this light signal has been indicated with a continuous line). Additionally, the light signal passes through an opening 223 disposed at the upper end of the device and is reflected on the reflective surface 219 integral with the conductive element 207 (indicated by a broken line). In the case of Figure 39A, the optical path of the light signal reflected on the reflective surface 219 integral with the conductive element 207 is half a longer wavelength whereby a cancellation of the light signal will take place. When the conductive element 207 moves to the upper end (Figure 39B) the light signal no longer suffers destructive interference and, therefore, is fully reflected.

Figure 39C shows the case in which the electro-optical assembly also has a semi-transparent layer 225. As already mentioned above, the semi-transparent layer 225 reflects a part of the incident light signal (indicated by a continuous line). ) and let another part pass through (indicated with a dashed line). The reflecting surface 219, integral with the main body 217 of the conductive element 207, is at a distance from the semi-transparent layer 225 equal to a quarter of the wavelength of the light signal (or an odd multiple of quarter wavelengths) when The conductive element 207 is at one end, and is at a distance equal to half the wavelength (or a multiple of the wavelength) when the conductive element 207 is at the other end.

There are other possible alternatives to obtain an electro-optical assembly according to the invention. Indeed, it is possible to act appropriately on the conductive element so that it carries out a displacement that is not a pure translation, which allows the reflecting surface to change orientation. This purpose is achieved by means of an actuation procedure of an electro-optical device of the type indicated above characterized in that it comprises a connection stage of at least one of the capacitor plates at a first voltage and at least one of the capacitor plates a a second voltage, where the second voltage is greater than the first voltage, where each and every one of the capacitor plates are subjected to a certain voltage so that none of them is in a high impedance state, so that the projection according to the central axis of the capacitor plates subjected to the first voltage, it has central asymmetry with respect to the projection according to the central axis of the capacitor plates subjected to the second voltage.

Indeed, this procedure allows creating a moment of forces on the conductive element that rotates it along an axis perpendicular to the central axis. Therefore, the conductive element does not carry out a pure translation when moving through the intermediate space but instead performs a combined movement of translation more rotation or even a pure rotation. As a result, the reflective surface, which is integral with the conductive element, changes its orientation in space. In this way, an operation equivalent to that described in the document "A MEMS-Based Projection Display" mentioned above can be achieved, but without the inconveniences presented by the device described in said document.

Advantageously, both alternatives can be combined so that the electro-optical assembly can work either by generating a destructive interference that cancels the light signal or by diverting the incident signal by changing the orientation of the reflecting surface.

A subject of the invention is also a method of actuating a miniaturized reflecting electro-optical device, where the device is the same as described above, but additionally has a plurality of condenser plates distributed with rotation symmetry along the central axis in the first zone and a plurality of condenser plates distributed with rotation symmetry along the central axis in the second zone, characterized in that it comprises a connection stage of at least one of the capacitor plates at a first voltage and at least one of the other plates of capacitor at a second voltage, where the second voltage is greater than the first voltage, so that the projection along the central axis of the capacitor plates subjected to the first voltage has central asymmetry with respect to the projection along the central axis of the plates capacitor subjected to the second voltage. Indeed, this arrangement of the condenser plates allows the reflecting surface to be oriented in many directions, rotating it along different axes perpendicular to the central axis. When indicating that it has a plurality of condenser plates, it should be understood that it has three (the first, second and third condenser plate) or more plates. With three plates, distributed in triangle, six positions could be obtained in the space differentiated from the reflecting surface, corresponding to the rotation according to three different axes. Increasing the number of plates increases the number of axes of rotation. Advantageously when the conductive element is close to one of the first zone or second zone, the conductive element is in contact with an external circuit and the conductive element is connected to a voltage through said external circuit. Indeed, the conductive element will usually be in contact with stops that limit its movement at both ends. These stops may simply be mechanical stops, but they may be part of an external circuit so that the conductive element can be connected at a given voltage through said stops. In this way, the conductive element will be subject to a certain voltage (while the contact with the external circuit lasts), which can be used to increase the electrostatic force applied to the conductive element. In this way it is possible to facilitate the disengagement of the conductive element from the stops, overcoming the coupling forces that can be generated between the conductive element and the stops or other contact surfaces.

In figures 40 and 41 it is shown how the reflecting surface 219 can be oriented in two different positions.

In figures 42A and 42B the basic concept of the actuation procedure according to the invention is schematically shown. Both these figures and the remaining figures describing the procedure only show the condenser plates 215 and the main body 217 of the conductive element 207. In the figures, the voltage applied to the capacitor plates has been shown additionally 215. When the condenser plate shows horizontal lines in broken lines, it represents that it is connected to a "low" voltage (preferably 0 V). When the capacitor plate 215 shows continuous horizontal lines and vertical lines (forming a grid) it represents that it is connected to a "high" voltage (V ₀ , which will preferably be the circuit supply voltage, but in general any higher voltage at the "low" voltage). When the condenser plate 215 shows horizontal lines such continuous represents that it is connected to an intermediate voltage between the previous two (preferably V ₀ 12). In any case, it should be taken into account that it is possible to reverse the polarity of the condenser plates 215 obtaining the same result. Additionally, in Figures 42A, 42B, 43A, 43B, 44A, 44B, 45A, 45B, 46A, 46B, 47A and 47B, the conductive element 207 and the profile condenser plates 215 are shown. It can be assumed that condenser plates 215 are, in these cases, substantially square. Specifically in Figures 42A and 42B, it can be seen how the capacitor plate 215 connected to a high voltage is asymmetric with respect to the central axis (which would be a vertical line that would pass through the middle of the figure). Therefore, a pair of forces is created that rotates the conductive element 207 as schematically represented in the figures. As will be seen below, the same phenomenon occurs in the other examples.

A simplified case of the previous case is seen in Figures 43A and 43B. As can be seen in Figures 42A and 42B, the two upper capacitor plates 215 are always at the same voltage. Therefore, they can be physically joined so that they form a single condenser plate 215. This is the case shown in Figures 43A and 43B, in which the device has the essential minimum of condenser plates 215: three plates.

In general, preferably at least one additional capacitor plate 215 is connected at an intermediate voltage between the first voltage and the second voltage. This allows to make the device more stable against external influences. In fact, in the case that the device has four or more capacitor plates 215 in each zone, it may be interesting to connect some of the plates 215 to a second intermediate voltage, different from the previous one. In this way, the force moment applied to the conductive element 207 can be adjusted more precisely.

In an advantageous embodiment, the device has three condenser plates 215 aligned in the first zone 209 and three condenser plates 215 aligned in the second zone 211, and the central condenser plate 215 is connected from each of the zones at the same voltage. This alternative is reflected in Figures 44A and 44B. In this case it is particularly advantageous that one of the lateral condenser plates 215 of each of the zones is connected to an intermediate voltage, as shown in Figures 45A and 45B.

In another preferred embodiment, the device has four condenser plates 215 aligned in the first zone 209 and four condenser plates 215 aligned in the second zone 211, and three condenser plates 215 of the first zone 209 and three plates are connected of capacitor 215 of the second zone 211 at the same voltage, as shown in Figures 46A and 46B. In this case it is again advantageous to connect two capacitor plates 215 of the first zone 209 and two capacitor plates 215 of the second zone 211 at an intermediate voltage in order to make the assembly more stable against external influences, such as It is shown in Figures 47A and 47B.

Another advantageous embodiment of the invention is obtained when the device has four condenser plates 215 not aligned in the first zone 209 and four condenser plates 215 not aligned in the second zone 211, and three condenser plates 215 of the Ia are connected First zone 209 and three capacitor plates 215 of the second zone 211 at the same voltage, as shown in Figures 48A, 48B, 48C, 49A, 49B and 49C. Figure 48A shows a plan view of the condenser plates 215 of the lower zone (for example, the first zone 209), Figure 48B shows a plan view of the condenser plates 215 of the upper zone (which, following the same example, would be the second zone 211) and in Figure 48C a profile view is shown, with a slight perspective so that the four condenser plates 215 of each zone are appreciated. In fact, Figures 48A and 48B are equivalent to the aforementioned projections along the central axis on a plane perpendicular to the central axis. In this case, the fact that the device is really three-dimensional is used and that the condenser plates 215 do not have to be aligned, but can be distributed along a two-dimensional surface (usually along a plane) . Also in this case it is advantageous to connect two condenser plates 215 of the first zone 209 and two condenser plates 215 of the second zone 211 at an intermediate voltage, as shown in Figures 5OA, 5OB and 5OC. There are other actuation alternatives, such as that shown in Figures 51A ₁ 51 B and 51 C, in which the condenser plates 215 connected to the high and low voltage are not adjacent, but it is advantageous that, when condenser plates 215 are distributed in the form of a square both in the first zone 209 and in the second zone 211, the condenser plates 215 connected to the high and low voltage are adjacent (or, in a more correct way, that their respective projections along the central axis on a plane perpendicular to the central axis are adjacent).

Figure 52 is shown as, by means of a device having four condenser plates 215 not aligned and arranged squarely in each of the zones, two pairs of orientations of the conductive element 207 can be achieved as the conductive element is rotated 207 according to one of the two axes indicated in the figure. For this, one of the procedures shown in Figures 48A, 48B, 48C, 49A, 49B, 49C and / or 5OA, 5OB, 5OC, as represented or rotated 90 °, would be used. However, the procedure shown in Figures 51 A, 51 B, 51 C could also be used, in which case we would have 45 ° inclined axes of rotation with respect to those shown in Figure 52.

In the case of having a device having a plurality of condenser plates 215 distributed with rotation symmetry along the central axis in both zones, then the actuation procedure is preferably characterized in that at least one additional condenser plate 215 is connected. at an intermediate voltage between the first voltage and the second voltage. Preferably, each and every one of the plates 215 is subjected to a certain voltage so that none of them is in a high impedance state.

The fact that none of the capacitor plates 215 remain in a high impedance state is an advantageous solution that is applicable for any of the different alternatives of the present invention. Indeed, in general it is possible to control the displacement of the conductive element 207 in various ways, by combining capacitor plates 215 connected to a voltage low, capacitor plates 215 connected to a high voltage and, in certain cases, capacitor plates 215 left in a high impedance state. However, it has been observed that, in practice, achieving a really effective high impedance state is not easy. In fact, it has been observed that in order to ensure that a capacitor board 215 is in a really effective high impedance state, it is necessary to use at least one additional relay. This additional relay consumes space for what is, a priori, undesirable. Therefore, it is advantageous to use those forms of control of the conductive element 207 that do not require the presence of a capacitor plate 215 in a high impedance state. However, in general, the devices according to the invention have a plurality of condenser plates 215. In certain cases not all of them participate in the control of the conductive element 207. The present invention specifies that only those condenser plates 215 that participate in the control of the conductive element 207 at any given time they must be connected to a certain voltage (that is, they must not be in a high impedance state), however there is no requirement as regards those capacitor plates 215 that, at a given time, they do not participate in the control of the conductive element 207. On the other hand, it should be taken into account that the problem derived from having a capacitor plate 215 in a high impedance state is that, with Long periods of time may reach some voltage determined by a priori unknown environmental conditions. To avoid this inconvenience it may be advisable to ensure that none of the capacitor plates 215 present in the device are at any time in a high impedance state.

Claims

REIVIND1CACIQNES

1.- Miniaturized digital reflector electro-optical device comprising:

- a first zone (9) facing a second zone (11),

- a first condenser plate (1) arranged in said first zone (9),

- a second condenser plate (2) disposed in said second zone (11) and facing said first condenser plate (1), wherein said second condenser plate (2) is less than or equal to said first condenser plate (1 ),

- a third condenser plate (3) disposed in said second zone (11), wherein said third condenser plate (3) is less than or equal to said first condenser plate (1), and where said second and third condenser plates (2, 3) are, together, larger than said first condenser plate (1),

- an intermediate space (5) disposed between said first zone (9) and said second zone (11),

- a conductive element (7) disposed in said intermediate space (5), said conductive element having a first surface facing said first zone (9) and a second surface facing said second zone (11), said conductive element (7) being mechanically independent of said first zone (9) and second zone (11) and being able to make a displacement through said intermediate space (5), from a first end, where said conductive element (7) is in contact with said first zone (9), to a second end, where said conductive element (7) is in contact with said second zone (11), and vice versa, depending on voltages present in said first, second and third condenser plates (1, 2, 3), - a reflective surface (19), suitable to reflect an incident beam of light, integral with said conductive element (7)

characterized because

- when said conductive element (7) is at said first end it has at least three first support points not aligned on said first surface that are in contact with three corresponding first support points in the first zone (9), and when said conductive element (7) is at said second end has at least three second support points not aligned on the second surface that are in contact with three corresponding second support points in the second zone (11), and

- when said conductive element (7) is at said first end, the distance between at least one of said second support points of said second surface to its corresponding support point of said second zone (11) is different from the distance of the remaining second support points of said second surface to their corresponding support points of said second area (11), so that said reflecting surface (19) changes orientation in space when said conductive element (7) makes said displacement between said first end and said second end.

2. Device according to claim 1, characterized in that said conductive element (7) comprises a first projection (21) arranged on one of said first and second surfaces, wherein said first projection (21) comprises one of said first or second support points of said first or second surfaces.

3. Device according to claim 1, characterized in that said conductive element (7) comprises a first projection (21) disposed on said first surface, wherein said first projection (21) comprises one of said first support points of said first surface, and a second projection (21) placed on said second surface, wherein said second projection (21) comprises one of said second support points of said second surface.

Device according to any one of claims 1 to 3, characterized in that at least one of said first zone (9) and second zone (11) comprises a projection (21) comprising one of said first or second support points of said first or second surface.

5.- Procedure for actuating a miniaturized reflector electro-optical device, said device comprising:

- a first zone (109) facing a second zone (111),

- a first condenser plate (101) arranged in said first zone (109),

- a second condenser plate (102) and a third condenser plate (103) arranged in said second zone (111) and facing said first condenser plate (101),

- an intermediate space (105) disposed between said first zone (109) and said second zone (111),

- a conductive element (107) disposed in said intermediate space (105), said conductive element (107) being mechanically independent of said first zone (109) and second zone (111) and being able to make a movement through said space intermediate (105), from a first end, where said conductive element is close to said first zone (109), to a second end, where said conductive element is close to said second zone (111), and vice versa, depending on some voltages present in said first, second and third capacitor plates (101, 102, 103),

- a reflective surface, capable of reflecting an incident beam of light, integral with said conductive element - a central axis that extends from said first zone (109) to said second zone (111) and passes through the center of mass of said conductive element, wherein said first, second and third condenser plate (101, 102, 103) they are apt to be projected along said central axis on a plane perpendicular to said central axis

characterized because

- comprises a step of connecting at least one of said capacitor plates (115) at a first voltage and at least one of said capacitor plates (115) at a second voltage, wherein said second voltage is greater than said first voltage, where each and every one of said capacitor plates (115) are subjected to a certain voltage so that none of them is in a high impedance state,

so that said projection along said central axis of the capacitor plates (115) subjected to said first voltage has central asymmetry with respect to said projection according to said central axis of the capacitor plates (115) subjected to said second voltage.

6. Method according to claim 5, characterized in that at least one additional capacitor plate (115) is connected to an intermediate voltage between said first voltage and said second voltage.

7. Method according to claim 5, wherein said device has three condenser plates (115) aligned in said first zone (109) and three condenser plates (115) aligned in said second zone (11 1), characterized in that it is connected The central condenser plate (115) of each of said zones at the same voltage.

8. Method according to claim 7, characterized in that one of the lateral condenser plates (115) of each of said zones is connected to said intermediate voltage.

9. Method according to claim 5, wherein said device has four condenser plates (115) aligned in said first zone (109) and four condenser plates (115) aligned in said second zone (111), characterized in that three are connected condenser plates (115) of said first zone (109) and three condenser plates (115) of said second zone (111) at the same voltage.

10. Method according to claim 5, wherein said device has four condenser plates (115) aligned in said first zone (109) and four condenser plates (115) aligned in said second zone (111), characterized in that two are connected capacitor plates (115) of said first zone (109) and two capacitor plates (115) of said second zone (111) at said intermediate voltage.

11. Method according to claim 5, wherein said device has four condenser plates (115) not aligned in said first zone (109) and four condenser plates (115) not aligned in said second zone (111), characterized in that three capacitor plates (115) of said first zone (109) and three capacitor plates (115) of said second zone (111) are connected to the same voltage.

12. Method according to claim 5, wherein said device has four condenser plates (115) not aligned in said first zone (109) and four condenser plates (115) not aligned in said second zone (111), characterized in that connect two capacitor plates (115) of said first zone (109) and two capacitor plates (115) of said second zone (111) to said intermediate voltage.

13. Method according to one of claims 11 or 12, wherein in said first zone as well as in said second zone (111) said condenser plates (115) are distributed in square form both in said first zone and in said second zone (111), characterized in that said first voltage and said second voltage are applied on capacitor plates (115) such that their projections along said central axis are adjacent.

14.- Procedure for actuating a miniaturized reflector electro-optical device, said device comprising:

- a first zone (109) facing a second zone (111),

- a first condenser plate (101) arranged in said first zone (109),

- a conductive element (107) disposed in said intermediate space (105), said conductive element (107) being mechanically independent of said first zone (109) and second zone (111) and being able to make a movement through said space intermediate (105), from a first end, where said conductive element (107) is close to said first zone (109), to a second end, where said conductive element (107) is close to said second zone (111), and vice versa, depending on voltages present in said first, second and third capacitor plates (101, 102, 103),

- a reflective surface, suitable to reflect an incident beam of light, integral with said conductive element (107) - a central axis extending from said first zone (109) to said second zone (111) and passing through the center of mass of said conductive element (107), wherein said first, second and third condenser plate (101, 102 , 103) are suitable for being projected along said central axis on a plane perpendicular to said central axis,

wherein said device has a plurality of condenser plates (115) distributed with rotation symmetry along said central axis in said first zone (109) and a plurality of condenser plates (115) distributed with rotation symmetry along said central axis in said second zone (111),

characterized in that it comprises a step of connecting at least one of said capacitor plates (115) at a first voltage and at least one of said capacitor plates (115) at a second voltage, wherein said second voltage is greater than said first voltage, so that said projection along said central axis of the capacitor plates (115) subjected to said first voltage has central asymmetry with respect to said projection according to said central axis of the capacitor plates (115) subjected to said second voltage .

15. Method according to claim 14, characterized in that at least one additional capacitor plate (115) is connected to an intermediate voltage between said first voltage and said second voltage.

16. Method according to one of claims 14 or 15, characterized in that each and every one of said plates is subjected to a determined voltage so that none of them remain in a high impedance state.

17. Actuation method according to any of claims 1 to 16, characterized in that when said conductive element (107) is close to one of said first zone (109) or second zone (111), said conductive element is in contact with a external circuit and because said conductive element (107) is connected to a voltage through said external circuit.

18.- Miniaturized reflector electro-optical device comprising

- a first zone (109) facing a second zone (111),

- a first condenser plate (101) arranged in said first zone (109),

- a conductive element (107) disposed in said intermediate space (105), said conductive element (107) being mechanically independent of said first zone (109) and second zone (111) and being able to make a movement through said space intermediate (105), from a first end, where said conductive element (107) is close to said first zone (109), to a second end, where said conductive element (107) is close to said second zone (111) , and vice versa, depending on voltages present in said first, second and third capacitor plates (101, 102, 103),

- a reflective surface, suitable to reflect an incident beam of light, integral with said conductive element (107)

- a central axis extending from said first zone (109) to said second zone (111) and passing through the center of mass of said conductive element (107), wherein said first, second and third condenser plate (101, 102 , 103) are suitable for being projected along said central axis on a plane perpendicular to said central axis

characterized because It comprises control means suitable for carrying out a method according to any of claims 5 to 10 or 17.

19.- Miniaturized reflector electro-optical device comprising

- a first zone (109) facing a second zone (111),

- a first condenser plate (101) arranged in said first zone (109),

- a central axis that extends from said first zone (109) to said second zone (111) and passes through the center of mass of said conductive element

(107), wherein said first, second and third condenser plate (101, 102, 103) are apt to be projected along said central axis on a plane perpendicular to said central axis characterized in that it has four condenser plates (115) not aligned in said first zone (109) and four condenser plates (115) not aligned in said second zone (111), and because

It comprises control means suitable for carrying out a method according to one of claims 11, 12 or 17.

20. Device according to claim 18, characterized in that both in said first zone and in said second zone (111) said condenser plates (115) are distributed in the form of a square, and because said control means are suitable for applying said first voltage and said second voltage on capacitor plates (115) such that their projections along said central axis are adjacent.

21.- Miniaturized reflector electro-optical device comprising

- a first zone (109) facing a second zone (111),

- a first condenser plate (101) arranged in said first zone (109),

- a conductive element (107) disposed in said intermediate space (105), said conductive element (107) being mechanically independent of said first zone (109) and second zone (111) and being able to make a movement through said space intermediate (105), from a first end, where said conductive element (107) is close to said first zone (109), to a second extreme end, where said conductive element (107) is close to said second zone (111), and vice versa, depending on voltages present in said first, second and third capacitor plates (101, 102, 103),

characterized in that it comprises a plurality of condenser plates (115) distributed with rotation symmetry along said central axis in said first zone (109) and a plurality of condenser plates (115) distributed with rotation symmetry along said central axis in said second axis zone (111),

and because it comprises control means suitable for performing a method according to any of claims 14 to 17.

22. Miniaturized reflector electro-optical device according to any of claims 18 to 21, characterized in that

- said second condenser plate (102) is less than or equal to said first condenser plate (101),

- said third condenser plate (103) is less than or equal to said first condenser plate (101), and wherein said second and third condenser plates (102, 103) are, together, larger than said first condenser plate (101), - said conductive element (107) has a first surface facing said first zone (109) and a second surface facing said second zone (111), said conductive element (107) being able to make a displacement through said intermediate space (105), from a first end, where said conductive element (107) is in contact with said first zone (109), to a second end, where said conductive element (107) is in contact with said second zone (111), and vice versa, depending on voltages present in said first, second and third capacitor plates (101, 102, 103),

and because

- when said conductive element (107) is at said first end it has at least three first support points not aligned on said first surface that are in contact with three corresponding first support points in the first zone (109), and when said conductive element (107) is at said second end has at least three second support points not aligned on the second surface that are in contact with three corresponding second support points in the second zone (111), and

- when said conductive element (107) is at said first end, the distance between at least one of said second support points of said second surface to its corresponding support point of said second zone (111) is different from the distance of the remaining second support points of said second surface to their corresponding support points of said second zone (111), so that said reflecting surface (119) changes orientation in space when said conductive element (107) makes said displacement between said first end and said second end.

23. Device according to claim 22, characterized in that said conductive element (107) comprises a first projection (121) arranged on one of said first and second surfaces, wherein said first projection (121) comprises turn on one of said first or second support points of said first or second surfaces.

24. Device according to claim 23, characterized in that said conductive element (107) comprises a first projection (121) arranged on said first surface, wherein said first projection (121) comprises one of said first support points of said first surface, and a second projection (121) disposed on said second surface, wherein said second projection (121) comprises one of said second support points of said second surface.

25. Device according to any of claims 22 to 24, characterized in that at least one of said first zone (109) and second zone (11) comprises a projection (121) comprising one of said first or second support points of said first or second surface.

26.- Miniaturized reflector electro-optical assembly for the processing of a light signal comprising a certain wavelength, characterized in that it comprises:

[a] a miniaturized digital reflector electro-optical device which, in turn, comprises:

- a first zone (209) facing a second zone (211),

- a first condenser plate (201) disposed in said first zone (209), - a second condenser plate (202) disposed in said second zone (211) and facing said first condenser plate (201), wherein said second condenser plate (202) is less than or equal to said first condenser plate (201),

- a third condenser plate (203) disposed in said second zone (211), wherein said third condenser plate (203) is less than or equal to said first condenser plate, and where said second and third condenser plates (202, 203) are, together, larger than said first condenser plate (201), - an intermediate space (205) disposed between said first zone (209) and said second zone (211),

- a conductive element (207) disposed in said intermediate space (205), said conductive element (207) being mechanically independent of said first zone (209) and second zone (211) and being able to make a displacement through said space intermediate (205), from a first end, where said conductive element (207) is in contact with said first zone (209), to a second end, where said conductive element (207) is in contact with said second zone (211) and vice versa, depending on voltages present in said first, second and third capacitor plates (201, 202, 203),

- a reflective surface (219), suitable for reflecting an incident beam of light, integral with said conductive element (207), and

[b] a light source capable of emitting said light signal, where said light source is oriented such that said light signal strikes said reflector surface (219), defining an optical path, whether said conductive element (207) is at said first end as if it is at said second end,

and because the difference between the optical paths traveled by said light signal when said conductive element (207) passes from said first end to said second end or vice versa, is equal to half of said wavelength, or an odd multiple of said half of said wavelength, where said difference is due to the displacement made by said reflecting surface (219).

27.- Assembly according to claim 26, characterized in that it has a second fixed reflecting surface (221) separated from said reflecting surface (219), according to said optical path, a value equal to the fourth part of said wavelength, or a multiple odd of said fourth part of said wavelength, when said conductive element (207) is at one of said first end and second end.

28.- Assembly according to claim 26, characterized in that said conductive element (207) has a main body (217) which is a flat sheet from Ia which extends a support arm at the end of which said reflecting surface (219) is arranged.

29.- Assembly according to one of claims 26 or 27, characterized in that said conductive element (207) has a main body (217) which is a flat sheet on which said reflective surface (219) extends, wherein said surface reflector (219) is oriented towards one of said first zone (209) and second zone (211), which has an opening (223) that allows the passage of said light signal.

30.- Assembly according to any of claims 26 to 29, characterized in that it has three groups of said electro-optical devices, wherein the electro-optical devices of each group are suitable for processing a light signal comprising the same determined wavelength, and where Each group is suitable for processing a light signal that comprises a determined wavelength different from that of the other groups.

31.- Assembly according to claim 29, characterized in that it additionally comprises a semi-transparent layer (225) disposed at a distance of half of said wavelength, measured according to the direction of said optical path.

32.- Miniaturized reflector electro-optical assembly for the processing of a light signal comprising a certain wavelength, characterized in that it comprises a miniaturized digital reflector electro-optical device which, in turn, comprises:

- a first zone (209) facing a second zone (211),

- a first condenser plate (201) arranged in said first zone (209),

- a second condenser plate (202) disposed in said second zone (211) and facing said first condenser plate (201), wherein said second condenser plate (202) is less than or equal to said first condenser plate (201 ),

- a third condenser plate (203) disposed in said second zone (211), wherein said third condenser plate (203) is less than or equal to said first ra condenser plate (201), and wherein said second and third condenser plates (202, 203) are, together, larger than said first condenser plate (201),

- an intermediate space (205) disposed between said first zone (209) and said second zone (211),

- a reflective surface (219), suitable for reflecting an incident beam of light, integral with said conductive element (207),

wherein the distance traveled by said reflecting surface (219) is equal to the fourth part of said wavelength, or an odd multiple of said fourth part of said wavelength, when said conductive element (207) passes from said first end to said second end or vice versa.

33.- Procedure for processing a light signal comprising a certain wavelength, by means of a miniaturized reflector electro-optical assembly comprising a miniaturized digital reflector electro-optical device comprising:

- a first zone (209) facing a second zone (211),

- a first condenser plate (201) arranged in said first zone (209),

characterized in that said light signal is affected on said reflecting surface (219) whether said conductive element (207) is at said first end or if it is at said second end,

and because the optical path traveled by said light signal is modified, at a value equal to half of said wavelength, or an odd multiple of said half of said wavelength, said conductive element (207) passing from said first end to said second end or vice versa, due to the displacement made by said reflecting surface (219).

34.- Procedure for actuating an electro-optical assembly according to any of claims 26 to 32, wherein said device comprises a central axis extending from said first zone (209) to said second zone (211) and passes through the center of masses of said conductive element (207), wherein said first, second and third condenser plate (201, 202, 203) are apt to be projected along said central axis on a plane perpendicular to said central axis characterized in that it comprises a stage of connection of at least one of said capacitor plates (215) at a first voltage and at least one of said capacitor plates (215) at a second voltage, wherein said second voltage is greater than said first voltage, where each and every one of said plates of capacitor (215) are subjected to a certain voltage so that none of them is in a high impedance state, so that said projection along said central axis of the capacitor plates (215) subjected to said first voltage has central asymmetry with respect to said projection along said central axis of the condenser plates (215) subjected to said second voltage.

35. Method according to claim 34, characterized in that at least one additional capacitor plate (215) is connected to an intermediate voltage between said first voltage and said second voltage.

36.- Method according to claim 34, wherein said device has three condenser plates (215) aligned in said first zone (209) and three condenser plates (215) aligned in said second zone (211), characterized in that the Ia central condenser plate (215) of each of said zones at the same voltage.

37.- Method according to claim 36, characterized in that one of the lateral condenser plates (215) of each of said zones is connected to said intermediate voltage.

38.- Method according to claim 34, wherein said device has four condenser plates (215) aligned in said first zone (209) and four condenser plates (215) aligned in said second zone (211), characterized in that three are connected condenser plates (215) of said first zone (209) and three condenser plates (215) of said second zone (211) at the same voltage.

39.- Method according to claim 34, wherein said device has four condenser plates (215) aligned in said first zone (209) and four pia- condenser cas (215) aligned in said second zone (211), characterized in that two condenser plates (215) of said first zone (209) and two condenser plates (215) of said second zone (211) are connected to said intermediate voltage

40.- Method according to claim 34, wherein said device has four condenser plates (215) not aligned in said first zone (209) and four condenser plates (215) not aligned in said second zone (211), characterized in that three capacitor plates (215) of said first zone (209) and three capacitor plates (215) of said second zone (211) are connected to the same voltage.

41.- Method according to claim 34, wherein said device has four condenser plates (215) not aligned in said first zone (209) and four condenser plates (215) not aligned in said second zone (211), characterized in that connect two capacitor plates (215) of said first zone (209) and two capacitor plates (215) of said second zone (211) to said intermediate voltage.

42. The method according to one of claims 40 or 41, wherein in said first zone and in said second zone (211) said condenser plates (215) are distributed in the form of a square both in said first zone and in said second zone (211), characterized in that said first voltage and said second voltage are applied on capacitor plates (215) such that their projections along said central axis are adjacent.

43.- Procedure for actuating an electro-optical assembly according to any of claims 26 to 32, wherein said device comprises a central axis extending from said first zone (209) to said second zone (211) and passes through the center of masses of said conductive element (207), wherein said first, second and third condenser plate (201, 202, 203) are apt to be projected along said central axis on a plane perpendicular to said central axis, where said device has a plurality of condenser plates (215) distributed with rotation symmetry along said central axis in said first zone (209) and a plurality of condenser plates (215) distributed with rotation symmetry along said central axis in said second zone (211), characterized in that it comprises a connection stage of at least one of said capacitor plates (215) at- a first voltage and at least one of said capacitor plates (215) at a second voltage, wherein said second voltage is greater than said first voltage, so that said projection along said central axis of the capacitor plates (215) subjected to said first voltage has central asymmetry with respect to said projection according to said central axis of the capacitor plates (215) subjected to said second voltage.

44.- Method according to claim 43, characterized in that at least one additional capacitor plate (215) is connected to an intermediate voltage between said first voltage and said second voltage.

45. Method according to one of claims 43 or 44, characterized in that each and every one of said plates is subjected to a determined voltage so that none of them is in a high impedance state.

46.- Actuation method according to any of claims 34 to 45, characterized in that when said conductive element (207) is close to one of said first zone (209) or second zone (211), said conductive element is in contact with a external circuit and because said conductive element (207) is connected to a voltage through said external circuit.