[54] SEMICONDUCTOR WAFER PROCESSING SYSTEM
[75] Inventors: Raymon F. Thompson, Lakeside;
Robert W. Berner, Kalispell; Gary L.
Curtis, Kila; Stephen P. Culliton,
Kalispell; Blaine G. Wright, Whitefish,
all of Mont.
[73] Assignee: Semitool, Inc., Kalispell, Mont.
[21] Appl. No.: 236,424
[22] Filed: Apr. 28, 1994
[51] Int. CI.6 F26B 17/24
[52] U.S. CI 34/58; 414/938; 414/940;
414/941; 414/217; 414/222
[58] Field of Search 34/58; 414/935,
414/938, 939, 940, 941, 222, 217, 417
[56] References Cited
U.S. PATENT DOCUMENTS
4,431,361 2/1984 Bayne 415/405
4,449,885 5/1984 Hertel et al 414/750
4,840,530 6/1989 Nguyen 414/404
5,055,036 10/1991 Asano et al 432/5
llll lllll III! Mil I I I llll llll ll l l II M I I I II
US005544421A
[li] Patent Number: 5,544,421 [45] Date of Patent: Aug. 13, 1996
5,125,784 6/1992 Asano 414/404
5,232,328 8/1993 Owczarz et al 414/222
5,301,700 4/1994 Kamikawaetal 134/76
FOREIGN PATENT DOCUMENTS
0047132 3/1982 European Pat. Off. . W081/02533 9/1981 WIPO .
Primary Examiner—Henry A. Bennett
Assistant Examiner—Dinnatia Doster
Attorney, Agent, or Firm—Wells, St. John, Roberts, Gregory
& Matkin, RS.
[57] ABSTRACT
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto trays for processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.
38 Claims, 36 Drawing Sheets
