A correction target edge extracting part of a layout pattern data correction apparatus extracts a correction target edge from circuit layout patterns. A density calculation region setting part of the apparatus sets density calculation regions around the center of the correction target edge. An area density...http://www.google.co.uk/patents/US6298473?utm_source=gb-gplus-sharePatent US6298473 - Apparatus and method for inhibiting pattern distortions to correct pattern data in a semiconductor device
