According to one embodiment of the invention, photoelectron spectroscopy is used to determine the thickness of one or more layers in a single or multi-layer structure on a substrate. The thickness may be determined by measuring the intensities of two photoelectron species or other atom-specific characteristic...http://www.google.co.uk/patents/US7420163?utm_source=gb-gplus-sharePatent US7420163 - Determining layer thickness using photoelectron spectroscopy
