One embodiment disclosed relates to a method of detecting defects in a microminiature pattern repeated over a particular surface of an object. The method includes providing an image detector capable of resolving intensity data for each pixel of an array of m×n pixels of an image projected thereupon....http://www.google.co.uk/patents/US7397941?utm_source=gb-gplus-sharePatent US7397941 - Method and apparatus for electron beam inspection of repeated patterns
