A method and structure tests devices on a wafer by applying an electrical bias to the devices and simultaneously monitoring emitted light from all of the devices. The emitted light indicates locations of defective devices and records time-based images of the emitted light across the wafer....http://www.google.co.uk/patents/US6788093?utm_source=gb-gplus-sharePatent US6788093 - Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies
