A system and method of cooling motors of a lithographic tool. The system includes a temperature-adjusting device which adjusts the temperature of a heat transfer fluid to a boiling temperature that is substantially equal to the desired motor housing temperature. The system further includes a fixed or...http://www.google.co.uk/patents/US7288864?utm_source=gb-gplus-sharePatent US7288864 - System and method for cooling motors of a lithographic tool
