A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of...http://www.google.co.uk/patents/US6731787?utm_source=gb-gplus-sharePatent US6731787 - System and method for determining reticle defect printability
