Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing...http://www.google.co.uk/patents/US7777198?utm_source=gb-gplus-sharePatent US7777198 - Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation
