An improved capacitor for a semiconductor memory, and method for depositing material on a substrate is shown. The material to be deposited is energized by irradiation with light in a chamber in which a CVD method is carried out. The energy induced by the irradiation remains in the molecules of the material...http://www.google.co.uk/patents/US5079615?utm_source=gb-gplus-sharePatent US5079615 - Capacitor for a semiconductor
