To include a focused ion beam apparatus fabricating a sliced specimen by processing a specimen as well as observing the sliced specimen, a scanning electron microscope observing the slice specimen, a gas-ion beam irradiation apparatus performing finishing processing by irradiating a gas-ion beam onto...http://www.google.co.uk/patents/US7442942?utm_source=gb-gplus-sharePatent US7442942 - Charged particle beam apparatus
