An apparatus for isolating defects in an integrated circuit using near field scanning photon emission microscopy comprises a photon collector 10 which receives emitted photons 16 from a surface 14 of an energized or biased integrated circuit 12, a CCD camera 20 for converting the photons into an emission...http://www.google.co.uk/patents/US5981967?utm_source=gb-gplus-sharePatent US5981967 - Method and apparatus for isolating defects in an integrated circuit near field scanning photon emission microscopy
