Any one of an insulating film forming a TFT, a silicon film and a conductive film is formed by applying a solution and annealing it. In a spin coater (102), a coating solution containing a thin film component which is supplied from a solution storage section (105) is spin-coated onto a substrate. The...http://www.google.co.uk/patents/US7067337?utm_source=gb-gplus-sharePatent US7067337 - Thin film device provided with coating film, liquid crystal panel and electronic device, and method for making the thin film device
