A microactuator and method of operation is disclosed for use in actuating valves, electrical contacts, light beams, sensors and other elements between different actuation modes. An actuator member comprised of a shape memory alloy layer is mounted on an elastic substrate, and the proximal end of the...http://www.google.co.uk/patents/US5619177?utm_source=gb-gplus-sharePatent US5619177 - Shape memory alloy microactuator having an electrostatic force and heating means
