A dryer for drying a substrate includes: a bath containing a fluid; a chamber; and a delivery system supplying a polar organic compound, such as isopropyl alcohol, and a hydrophobic organic compound, such as hydrofluoroether, to the interface between the substrate and the fluid as the substrate is removed...http://www.google.co.uk/patents/US20010047595?utm_source=gb-gplus-sharePatent US20010047595 - Apparatus and method for drying a substrate using hydrophobic and polar organic compounds
