A solid state thermal control device contains a substrate and a plurality of solid state thermal elements on the substrate. The thermal elements are adapted to provide thermal control to a device under test (DUT). Each solid state thermal element contains at least one solid state heater and an active...http://www.google.co.uk/patents/US6985000?utm_source=gb-gplus-sharePatent US6985000 - Thermal control of a DUT using a thermal control substrate
