The distribution states of defects are analyzed on the basis of the coordinates of defects detected by an inspection apparatus to classify them into a distribution feature category, or any one of repetitive defect, congestion defect, linear distribution defect, ring/lump distribution defect and random...http://www.google.co.uk/patents/US20020181756?utm_source=gb-gplus-sharePatent US20020181756 - Method for analyzing defect data and inspection apparatus and review system
