A surface micromachined microaccelerometer includes a substrate which has a surface plane, and a cantilever formed on the substrate with a fixed end and a free end, the fixed end being anchored to the substrate. The cantilever includes a mass fixed along the length of the cantilever. A cooperating device...http://www.google.co.uk/patents/US6130464?utm_source=gb-gplus-sharePatent US6130464 - Latching microaccelerometer
