A dry-release method for sacrificial layer microstructure fabrication is provided in which a structural layer is anchored to a substrate and deposited on a sacrificial layer located therebetween. Thereafter, holes are etched through the structural layer. Some of the holes are covered with a polymer layer,...http://www.google.co.uk/patents/US5258097?utm_source=gb-gplus-sharePatent US5258097 - Dry-release method for sacrificial layer microstructure fabrication
