An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly of light energy sources for emitting light energy onto a wafer. The light energy sources can be placed in various configurations. In accordance with the present invention,...http://www.google.co.uk/patents/US8138451?utm_source=gb-gplus-sharePatent US8138451 - Heating device for heating semiconductor wafers in thermal processing chambers
