A method and apparatus for generating gas for a processing system is provided. In one embodiment, an apparatus for generating gas for a processing system includes an unitary, isolatable, transportable canister having a plurality of first spacing elements, a plurality of second spacing elements and a...http://www.google.co.uk/patents/US6915592?utm_source=gb-gplus-sharePatent US6915592 - Method and apparatus for generating gas to a processing chamber
