The present invention provides apparatus and methods for detecting defects in a semiconductor device. The semiconductor device includes a plurality of conductive pads, which may be formed, for example, between insulating layers for insulating the conductive pads from conductive lines formed between ones...http://www.google.co.uk/patents/US6545491?utm_source=gb-gplus-sharePatent US6545491 - Apparatus for detecting defects in semiconductor devices and methods of using the same
