WO2008126897A1 - Sensing sensor and manufacturing method of the same - Google Patents

Sensing sensor and manufacturing method of the same Download PDF

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Publication number
WO2008126897A1
WO2008126897A1 PCT/JP2008/057087 JP2008057087W WO2008126897A1 WO 2008126897 A1 WO2008126897 A1 WO 2008126897A1 JP 2008057087 W JP2008057087 W JP 2008057087W WO 2008126897 A1 WO2008126897 A1 WO 2008126897A1
Authority
WO
WIPO (PCT)
Prior art keywords
thin
film counter
counter electrode
sensing sensor
film
Prior art date
Application number
PCT/JP2008/057087
Other languages
French (fr)
Japanese (ja)
Inventor
Tetsuji Imamura
Hajime Yamamoto
Daisuke Kuwahara
Masaru Takebayashi
Takayuki Nakano
Original Assignee
Hokuriku Electric Industry Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hokuriku Electric Industry Co., Ltd. filed Critical Hokuriku Electric Industry Co., Ltd.
Priority to JP2009509370A priority Critical patent/JP4913866B2/en
Publication of WO2008126897A1 publication Critical patent/WO2008126897A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Abstract

A sensing sensor in which the difference between the contour shape of an occupied part occupied by a pair of thin-film counter electrodes and that occupied by a sensing film is reduced, and in which precision in the detection by the sensing sensor if prevented from varying. One thin-film counter electrode (3) out of the pair of thin-film counter electrodes (3, 5) is formed arcuately along a virtual ring form CA. The other thin-film counter electrode (5) is surrounded by the one thin-film counter electrode (3), and positioned at the center section of the virtual ring form CA. At the center of the other thin-film counter electrode (5), a hole part (5b) is formed through the other thin-film counter electrode (5).
PCT/JP2008/057087 2007-04-10 2008-04-10 Sensing sensor and manufacturing method of the same WO2008126897A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009509370A JP4913866B2 (en) 2007-04-10 2008-04-10 Sensitive sensor and manufacturing method thereof

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-103246 2007-04-10
JP2007-103245 2007-04-10
JP2007103245 2007-04-10
JP2007103246 2007-04-10

Publications (1)

Publication Number Publication Date
WO2008126897A1 true WO2008126897A1 (en) 2008-10-23

Family

ID=39863992

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057087 WO2008126897A1 (en) 2007-04-10 2008-04-10 Sensing sensor and manufacturing method of the same

Country Status (2)

Country Link
JP (1) JP4913866B2 (en)
WO (1) WO2008126897A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2713157A1 (en) * 2012-09-27 2014-04-02 Sensirion AG Chemical sensor
WO2020203100A1 (en) * 2019-03-29 2020-10-08 新コスモス電機株式会社 Mems-type semiconductor gas detection element
JP2020165892A (en) * 2019-03-29 2020-10-08 新コスモス電機株式会社 Mems-type semiconductor gas sensing element
JP2020165894A (en) * 2019-03-29 2020-10-08 新コスモス電機株式会社 Mems-type semiconductor gas sensing element
US11371951B2 (en) 2012-09-27 2022-06-28 Sensirion Ag Gas sensor comprising a set of one or more sensor cells

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118658A (en) * 1980-02-23 1981-09-17 Nec Corp Gas detecting element
JPH07294474A (en) * 1994-04-25 1995-11-10 Matsushita Electric Ind Co Ltd Humidity sensor
JP2001502060A (en) * 1996-10-15 2001-02-13 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Gas sensor electrode device
JP2005291886A (en) * 2004-03-31 2005-10-20 Tdk Corp Manufacturing method of humidity sensor element, and the humidity sensor element

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005291186A (en) * 2004-04-06 2005-10-20 Nissan Motor Co Ltd Control device for internal combustion engine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118658A (en) * 1980-02-23 1981-09-17 Nec Corp Gas detecting element
JPH07294474A (en) * 1994-04-25 1995-11-10 Matsushita Electric Ind Co Ltd Humidity sensor
JP2001502060A (en) * 1996-10-15 2001-02-13 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Gas sensor electrode device
JP2005291886A (en) * 2004-03-31 2005-10-20 Tdk Corp Manufacturing method of humidity sensor element, and the humidity sensor element

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2713157A1 (en) * 2012-09-27 2014-04-02 Sensirion AG Chemical sensor
CN103698369A (en) * 2012-09-27 2014-04-02 森斯瑞股份公司 Chemical sensor
US8802568B2 (en) 2012-09-27 2014-08-12 Sensirion Ag Method for manufacturing chemical sensor with multiple sensor cells
US9508823B2 (en) 2012-09-27 2016-11-29 Sensirion Ag Chemical sensor with multiple sensor cells
CN103698369B (en) * 2012-09-27 2018-11-09 盛思锐股份公司 Chemical sensor
US11371951B2 (en) 2012-09-27 2022-06-28 Sensirion Ag Gas sensor comprising a set of one or more sensor cells
WO2020203100A1 (en) * 2019-03-29 2020-10-08 新コスモス電機株式会社 Mems-type semiconductor gas detection element
JP2020165892A (en) * 2019-03-29 2020-10-08 新コスモス電機株式会社 Mems-type semiconductor gas sensing element
JP2020165894A (en) * 2019-03-29 2020-10-08 新コスモス電機株式会社 Mems-type semiconductor gas sensing element

Also Published As

Publication number Publication date
JP4913866B2 (en) 2012-04-11
JPWO2008126897A1 (en) 2010-07-22

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