WO2007123294A1 - Master mandrel used for fabricating x-ray mirrors and replication mehtod using the master mandrel - Google Patents

Master mandrel used for fabricating x-ray mirrors and replication mehtod using the master mandrel Download PDF

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Publication number
WO2007123294A1
WO2007123294A1 PCT/KR2006/003453 KR2006003453W WO2007123294A1 WO 2007123294 A1 WO2007123294 A1 WO 2007123294A1 KR 2006003453 W KR2006003453 W KR 2006003453W WO 2007123294 A1 WO2007123294 A1 WO 2007123294A1
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WO
WIPO (PCT)
Prior art keywords
master mandrel
jig
spindle
master
mandrel
Prior art date
Application number
PCT/KR2006/003453
Other languages
French (fr)
Inventor
Kwon-Soo Cheon
Kwon-Ha Yoon
Original Assignee
Wonkwang University Center For Industry-Academy Cooperation
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Application filed by Wonkwang University Center For Industry-Academy Cooperation filed Critical Wonkwang University Center For Industry-Academy Cooperation
Publication of WO2007123294A1 publication Critical patent/WO2007123294A1/en

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Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/067—Construction details

Definitions

  • the present invention relates to an X-ray mirror master mandrel and a method of replicating the X-ray mirror using the master mandrel, which can maximize a success rate in replication ofthe X-ray mirror.
  • a jig is used.
  • the ultra-precisionmachining apparatus is easily aligned with the master mandrel, and turbulence generated by a rotation is minimized. Therefore, nanometer scaled surface roughness is generated and geometric error is minimized. As a result, the success rate ismaximized.
  • X-rays include a short wavelength of about 10 nm and penetrate materials well.
  • X-rays having a relatively long wavelength ranging from 10 nm to 10 nm are called soft X-rays, which are easily absorbed in materials and have small penetrating power.
  • X-rays having a relatively short wavelength and great penetrating power are called hard X-rays.
  • an X-ray mirror of an optical device collecting the soft X-rays and magnifying a soft X-ray image should have a surface roughness as smooth as nanometer scaled surface roughness.
  • the soft X-rays are scattered at the rough surface. Therefore, the X-ray mirror cannot function as a mirror which collects the soft X-rays and magnifies the soft X-ray image.
  • the length of the X-ray mirror should be increased so as to have a predetermined numerical aperture. Since the total reflection angle is small, the X-ray mirror has a small radius from an optical axis, which ranges from 10 mm to 20 mm. Especially, the X-ray mirror is aspherical.
  • the X-ray mirror having a small radius ranging from 10 mm to 20 mm is symmetrical and aspherical.
  • the X-ray mirror should have an ultra- precision machined surface of which the surface roughness is smaller than the wavelength of X-rays (e.g., the wavelength of the soft X-rays ranges from 1 nm to 10 nm) in order to efficiently collect the X-rays and magnify an X-ray image.
  • the X-ray mirror is classified into a direct-type method and an indirect-type method.
  • the direct-type method after the X-ray mirror is directly fixed to an ultra-precision machining apparatus (e.g., single-point diamond turning machine tool and ultra-precision grinding machine), the X-ray mirror is machined to be an aspherical mirror having the inner diameterof the mirrorranging from 30 mm to 40 mm, a surface roughness ranging from 0.5 nm to 5 nm, and a geometric error smaller than 100 nm.
  • a coating layer may be formed on the surface of the aspherical mirror in order to increase the reflectance of the aspherical mirror.
  • the indirect- type method of fabricating an X-ray mirror has been used.
  • an X-ray mirror is fabricated after the outer surface of the master mandrel.Therefore, it is easy to machine the X-ray mirror and measure the inner surface of the X-ray mirror. Reproducibility of the same mirror using replication is also excellent.
  • FIG. 1 is a block diagram illustrating a conventional processof replicating an X-ray mirror.
  • a rear end of a master mandrel 10 is fixed to an ultra-precision machining apparatus, and then a front end of the master mandrel 10 is machined using the ultra-precision machining apparatus, and thus the front end of the master mandrel 10 has predetermined surface roughness and a mirror portion 12 having the same shape as that of the aspherical X- ray mirror.
  • the fitted tube 20 envelops the mirror portion 12 and a rear end of the tube 20 covers a rough portion of the master mandrel 10.
  • the front end of the tube 20 protrudes from the master mandrel 10.
  • the tube 20 is generally formed of Pyrex glass which is borosilicate glass and a brand of Corning, Inc. of US. [15] In a heating operation S3, after the tube 20 enveloping the front end of the master mandrel 10 is placed in an apparatus such as a heating apparatus, the tube 20 is heated to about 800 0 C and thus the tube 20 fitted on the master mandrel 10 forms a gel phase.
  • an X-ray mirror 20a from which the unnecessary portions are cut is separated from the master mandrel 10, and thus the X-ray mirror 20a having the aspherical shape, the predetermined surface roughness, andthe same shape as that of the mirror portion 12 of the master mandrel 10 is completed.
  • a scroll chuck is generally used as the chuck.
  • the other jaws are simultaneously operated by mechanical couplings and thus the rear end of the X-ray mirror or the master mandrel 10 is simultaneously fixed by the jaws.
  • the jaws are operated through the mechanical couplings, with spaced apart a predetermined distance from each other, cumulative error is caused by a mechanical configuration. Therefore, the front and rear ends of the X-ray mirror or the master mandrel 10 are misaligned with the chuck by several tens ⁇ m.
  • the X-ray mirror or the master mandrel 10 is repeatedly attached to and detached from the chuck in order to measure geometrical precision and surface roughness thereof. Therefore, the error occurs, which makes the X-ray mirror or the master mandrel 10 be misaligned with the chuck. To compensate the error, the X-ray mirror or the master mandrel 10 is repeatedly aligned with the chuck, which increases work time. In addition, since an expensive cutting tool is worn by a repeated work, the expensive cutting tool is frequently replaced, which is inefficient.
  • portions of the many jaws protrude from a spindle, the portions having a predetermined length.
  • the many protruding jaws produce turbulence in air flow generated by a high-speed rotation of the spindle.
  • the X-ray mirror or the master mandrel 10 fixed to the jaw is vibrated by the turbulence.
  • An object of the present invention is to provide an X-ray mirror master mandrel and a method of replicating the X-ray mirror using the X-ray mirror master mandrel.
  • Cumulative error caused by conventional mechanical configuration having a chuck fixing type is removed, and the master mandrel, a jig, and a spindle are easily aligned with each other by fixing the jig and the master mandrel to the spindle of an ultra-precision machining apparatus using coupling members. Therefore, the surface roughness and the geometric error range of the master mandrel are minimized and the process efficiency of the master mandrel is maximized.
  • Another object of the present invention is to provide an X-ray mirror master mandrel including a master mandrel, which includes a fixing end, a neck extending from a front end of the fixing end, a mirror portion extending from a front end of the neck, and an interface and a method of replicating the X-ray mirror using the X-ray mirror master mandrel.
  • the interface is formed since the diameter of the mirror portion is greater than the diameter of the neck. Therefore, the X-ray mirror can be easily replicated using the master mandrel, and the reproducibility of the X-ray mirror having an accurate length is excellent.
  • an X-ray mirror master mandrel including a jig fixed to a front end of a spindle of an ultra-precision machining apparatus using first coupling members, and a master mandrel including a fixing end fixed to a front end of the jig using second coupling members, a neck extending from a front end of the fixing end, a mirror portion extending from a front end of the neck, and an interface formed due to a difference between a diameter of the neck and a diameter of the mirror portion, wherein the diameter of the mirror portion is greater than the diameter of the neck.
  • the jig may include a flange fixed to the front e nd of the spindle using the first coupling members, and a protrusion formed on a front end of the flange and including a fixing end formed in a front end of the protrusion, the fixing end having a predetermined depth into which a portion of a rear end of the fixing end of the master mandrel is inserted.
  • the second coupling members may be inserted into a rear end of the jig such that the fixing end of the master mandrel positioned on the front end of the protrusion is fixed to the jig, and a coupling space may have a predetermined depth which enables the rear end of the jig to be closely fixed to the front end of the spindle without an interference between the second coupling members and the front end of the spindle.
  • a widthof the interface formed due to the difference between the diameter of the neck and the diameter of the mirror portion may approximately range from 0.3 mm to 3 mm.
  • a coating layer may be formed on a surface of the master mandrel. The coating layer may have a thickness ranging from 50 ⁇ m to 200 ⁇ m.
  • a coating layer mark indicating the boundary of the coating layer may be formed in the master mandrel.
  • a method of replicating an X-ray mirror using an X-ray mirror master mandrel including primarily aligning a first processed master mandrel and a jig, with a spindle of an ultra-precision machining apparatus, machining the first processed master mandrel aligned through the primary aligning using the ultra-precision machining apparatus to obtain a second processed master mandrel, coating a surface of the second processed master mandrel formed through the machining, the coated surface being formed of electroless nickel having a thickness ranging from 50 ⁇ m to 200 ⁇ m, depositing a surface of a mirror portion of the master mandrel which is coated through the coating to form a deposition layer, the deposition layer being a gold layer having a thickness ranging from 300 nm to 1000 nm, applying an adhesive layer to a surface of the mirror portion of the master mandrel including the deposition layer through the depositing, the adhesive layer being formed of
  • the present invention secondly aligningthe spindle, the jig with the master mandrel in order to fix the master mandrel which is coated through the coating to the ultra-precision machining apparatus, and ultra-precision machining the coated mirror portion of the master mandrel which is aligned with the ultra-precision machining apparatus through the second aligning, using the ultra-precision machining apparatus before depositing may be further included.
  • the ultra-precision machining may be grinding.
  • one of the primary aligning and the second aligning may include temporarily fixing the master mandrel to the jig using second coupling members, temporarily fixing the jig to the spindle and aligning the jig and the master mandrel with the spindle includingtemporarily fixing the jig including the master mandrel through the temporary fixing to the spindle using first coupling members, placing a gage on a periphery of the jig, rotating the spindle, compensating a roundness error of the jig, completely fixing the jig to the spindle, moving the gage on a periphery ofthe master mandrel, rotating the spindle, and compensating a roundness error of the master mandrel, separating the jig to which the master mandrel is temporarily fixed from the spindle and completely fixing the master mandrel to the jig; and fixing the jig to the spindle including temporarily fixing the
  • the master mandrel for an X-ray mirror includes a fixing end, a neck extending from a front end of the fixing end, a mirror portion extending from a front end of the neck, and an interface and a method of replicating the X-ray mirror using the master madnrel.
  • the interface is formed since the diameter of the mirror portion is greater than the diameter of the neck. Therefore, the X-ray mirror can be easily replicated using the master mandrel, and the reproducibility of the X-ray mirror having an accurate length is excellent.
  • FIG. 1 is a block diagram illustrating a conventional processof replicating an X-ray mirror.
  • FIG. 2 is an exploded sectional view illustrating a master mandrel and a jig, according to an embodiment of the present invention.
  • FIG. 3 is a sectional view illustrating an assembly of a master mandrel, a jig, and a spindle, according to an embodiment of the present invention.
  • FIG. 4 is a block diagram illustrating a processof replicating an X-ray mirror using a master mandrel,according to an embodiment of the present invention.
  • FIG. 5 is a block diagram illustrating a process of aligning a master mandrel, a jig, and a spindle with each other before being machined, according to an embodiment of the present invention.
  • FIG. 2 is an exploded sectional view illustrating a master mandrel 200 and a jig
  • FIG. 3 is a sectional view illustrating an assembly of the master mandrel 200, the jig 100, and a spindle 1, according to an embodiment of the present invention.
  • the jig 100 includes a flange 110 fixed to a front end of the spindle 1 using a plurality of first coupling members 300, a protrusion 120 protruding toward a front end of the flange 110, and a coupling space 130 having a predetermined depth, the coupling space 130 being formed from an rear end of the flange 110 toward the front end of the flange 110.
  • the jig 100 may be formed of a rigid material.
  • the rigid material may be stainless steel or steel.
  • the flange 100 includes a plurality of through holes into which the first coupling members 300 are inserted, as illustrated in FIG. 2.
  • the through holes may be counterbored holes.
  • the first coupling members 300 which may be hexagon head recessed bolts may be inserted into the through-holes of the counterbored holes such that an additional protrusion is not formed on the front end of the flange 110.
  • a rear end of the master mandrel 200 is closely fixed to a front end of the protrusion 120.
  • the front end of the protrusion 120 may include a fixing end 122 having a predetermined depth into which a portion of the rear end of the master mandrel 200 is inserted.
  • the fixing end 122 includes a plurality of through holes into which a plurality of second coupling members 400 are inserted.
  • the second coupling members 400 closely fixing the rear end of the master mandrel 200 to the front end of the protrusion 120 are inserted into the coupling space 130, as illustrated in FIG. 2.
  • the coupling space 130 has a predetermined depth which enables a rear end of the jig 100 to be closely fixed to the front end of the spindle 1 without the interference between the second coupling members 400 and the front end of the spindle 1.
  • the master mandrel 200 is fixed to a front end of the jig 100 using the second coupling members 400.
  • the master mandrel 200 includes a fixing end 210, a neck 220 formed in a front end of the fixing end 210, and a mirror portion 230 formed in a front end of the neck 220.
  • the master mandrel 200 may be formed of aluminum or oxygen free copper which has good workability and formability.
  • corners of a rear end of the fixing end 210 are chamfered or rounded so that the fixing end 210 can be easily inserted into the fixing end 122 of the protrusion 120 of the jig 100.
  • coating layer mark 250 is formed in the fixing end 210.
  • the coating layer 260 is formed from the coating layer mark 250 to a front end of the mirror portion 230.
  • the coating layer 260 prevents the master mandrel 200 formed of aluminum from being bended by a rotation.
  • the coating layer 260 may be formed to have good hardness and a thickness ranging from 50 ⁇ m to 200 ⁇ m using electroless nickel plating.
  • the coating layer 260 may be formed to have a thickness of about 100 ⁇ m.
  • an interface 240 is formed due to the diameter difference between the neck 220 and the mirror portion 230.
  • the diameter of the mirror portion 230 may be greater than that the neck 220 at the interface 240.
  • FIG. 4 is a block diagram illustrating a processof replicating an X-ray mirror using a master mandrel 200,according to an embodiment of the present invention.
  • FIG. 5 is a block diagram illustrating a process of aligning a first processed master mandrel, a jig 100, and a spindle 1 with each other before being machined, according to an embodiment of the present invention. Referring to FIGs. 4 and 5, in a primary aligning operation SlO, thefirst processed master mandrel is fixed to the jig 100.
  • the centers of the first processed master mandrel, the jig 100, and the spindle 1 are aligned with each other when the jig 100 to which the first processed master mandrel is fixed is fixed to the spindle 1 of an ultra-precision machining apparatus.
  • the primary aligning operation SlO includes a temporary fixing operation Sl 1 of the master mandrel to the jig 100, a temporary fixing operation S 12 of the jig 100 to the spindle 1, an aligning operation S 12 ofthe master mandrel, the jig 100 with the spindle 1, a disassembling operationS13 of the jig 100, the master mandrel, and the spindle 1, acomplete fixing operation S13 of the master mandrel to the jig 100, and a complete fixing S 14 ofthe jig 100 to the spindle 1.
  • the primary aligning operation SlO will now be described in more detail.
  • the master mandrel In the temporary fixing operation S 11 of the master mandrel to the jig 100, the master mandrel is temporarily fixed to the jig 100 using a plurality of second coupling members 400. Therefore, when the master mandrel is hit by a soft hammer, the master mandrel can be moved.
  • the master mandrel may be formed of a raw material.
  • a material processed by a precision machining apparatus such as a numerical control (NC) lathe may also be used as the master mandrel.
  • the master mandrel and jig 100 fixed through the temporary fixing operation Sl 1 of the master mandrel to the jig 100 are fixed to the spindle 1 and then aligned with the spindle 1.
  • the temporarily fixed jig 100 and master mandrel are temporarilyfixed to the spindle 1 using a plurality of first coupling members 300 such that the jig 100, master mandrel, and spindle 1 can be moved.
  • a gauge is placed on the periphery of the jig 100.
  • the spindle 1 and jig 100 are aligned with each other while the spindle 1 is rotated, and thus thejig 100 have a roundness error approximately ranging from 0.5 ⁇ m to 1 ⁇ m using the spindle 100.
  • the spindle 1 is aligned with the jig 100 by hitting the soft jig
  • a roundness error of the master mandrel using the jig 100 is 3 ⁇ m or less.
  • the spindle 1, thejig 100, and the master mandrel are aligned within the roundness error ranges, the jig 100 being completely fixed to the spindle 1, the master mandrel being temporarily fixed to thejig 100.
  • the jig 100 and the master mandrel are separated from the spindle 1 through the temporary fixing and aligning operations S 12 of the jig 100 with the spindle 1, and then the separated master mandrel is completely fixed to the separated jig 100.
  • the jig 100 completely fixed to the spindle 1 using the first coupling members 300 is separated from the spindle 1 by unfastening the first coupling members 300.
  • the jig 100 to which master mandrel is completely fixed is temporarily fixed to the spindle 1 using the first coupling members 300.
  • the jig 100 temporarily fixed to the spindle 1 is compensatedagain within the roundness error range using the gauge. After that, the aligned jig 100 is completely fixed to the spindle 1 usingthe first coupling members 300.
  • the first processed master mandrel is machined to be a second processed master mandrel having a nanometer scaled surface roughness using the ultra-precision machining apparatus.
  • the master mandrel and jig 100 are aligned with and fixed to the spindle 1, and then the master mandrel machined by a precision machining apparatus such as an NC lathe is machined to be the second processed master mandrel having the nanometer scaled surface roughness.
  • the master mandrel includes a fixing end 210, a neck 220 extending from a front end of the fixing end 210, and a mirror portion 230 extending from a front end of the neck 220.
  • a coating layer mark 250 is formed in the fixing end 210.
  • a coating layer 260 is formed from the coating layer mark 250 to a front end of the mirror portion 230.
  • the fixing end 210 has a diameter enabling the fixing end 210 to be inserted into a fixing end 122 of the jig 100.
  • An interface 240 is formed due to the diameter difference between the neck 220 and the mirror portion 230.
  • the diameter of the mirror portion 230 is greater than that of the neck 220 by 0.3 mm through 3 mm.
  • the widthof the interface 240 formed due to the diameter difference between the neck 220 and the mirror portion 230 may range from 0.5 mm to 1 mm.
  • a coating operation S30 a surface of the second processed master mandrel formed through the machining operation S20 is coated. That is, the coating layer 260 is formed on the surface of the second processed master mandrel formed by the ultra- precision machining apparatus to obtain a master mandrel.
  • the coating layer 260 is formed from the coating layer mark 250 to the front end of the mirror portion 230.
  • the coating layer 260 may be formed to have a thickness ranging from
  • the coating layer 260 may have a thickness of 100 ⁇ m.
  • the neck 220 having the relatively small diameter is bended by bending moment of a cutting tool.
  • the master mandrel is formed of aluminum or oxygen free copper which is soft and has good workability and formability.
  • the coating layer 260 is formed to obtain good surface roughness.
  • the jig 100 is separated from the spindle 1 and then the second processed master mandrel is separated from the jig 100.
  • the coating layer 260 is formed on the separated master mandrel.
  • asecond aligning operationS40 the master mandrel which is coated through the coating operation S30 is aligned with the jig 100 and the spindle 1 in order to fix the master mandrel to the spindle 1 through the jig 100.
  • the master mandrel and jig 100 are fixed to the spindle 1 of the ultra precision machining apparatus, the master mandrel is ultra-precision machined by the ultra-precision machining apparatus.
  • the coating layer 260 formed on the surface of the master mandrel protects the master mandrel formed of aluminum which is soft.
  • the bending moment is generated.
  • the bending moment can bend the master mandrel 200.
  • the coating layer 260 prevents the master mandrel from being bended since the coating layer 260 is formed to have good hardness using electroless nickel plating. Therefore, the master mandrel is successfully ultra-precision machined.
  • the coating layer 260 formed of electroless nickel has good cutting and grinding characteristics, nanometer scaled (1 nm through 2 nm) ultra- precision surface roughness can be obtained.
  • the width of the interface 250 formed between the neck 220 and the mirror portion 230 ranges from 0.5 mm to 1 mm, and the master mandrel has a geometric error of 100 nm or less and a surface roughness ranging from 1 nm to 2 nm.
  • the deposition layer formed on the mirror portion 230 of the ultra- precision machined master mandrel may be formed of gold which has high reflectance.
  • the deposition layer formed of gold may have a thickness ranging from 300 nm to 1000 nm.
  • an adhesive layer is applied to the deposition layer formed on the mirror portion 230 of a master mandrel through the depositing operation S60. That is, the adhesive layer is applied to the mirror portion 230 of the master mandrel.
  • the deposition layer is formed between the adhesive layer and the mirror portion 230.
  • the adhesive layer may be formed of epoxy.
  • the X-ray mirror substrate has the same shape as that of the mirror portion 230 of the master mandrel 200 including the adhesive layer through the applying operation S70.
  • the X-ray mirror substrate is fitted on the mirror portion 230 of the master mandrel 200 including the adhesive layer.
  • the inner surface of the X-ray mirror substrate has the same shape as that of the outer surface of the mirror portion 230.
  • the X-ray mirror substrate may be fitted on the mirror portion 230 in a vacuum.
  • the difference between an outer diameter of the mirror portion 230 of the master mandrel 200 and an inner diameter of the X-ray mirror substrate may be generally 70 ⁇ m or less, for example, 35 ⁇ m.
  • a curing operation S90 the adhesive layer formed between the inside of the X- ray mirror substrate and the deposition layer is cured in a room temperature for a predetermined time, with the X-ray mirror substrate being fitted on the mirror portion 230 of the master mandrel 200 through the fitting operation S 80.
  • the adhesive layer formed between the X-ray mirror substrate and the deposition layer may be naturally cured for a predetermined time ranging from 72 hours to 120 hours, for example, 96 hours.
  • a portion of the adhesive layer flowing out between the mirror portion 230 of the master mandrel 200 and the X-ray mirror substrate through the curing S90 is removed.
  • the portion of the adhesive layer flowing out between the mirror portion 230 of the master mandrel 200 and the inside of the X- ray mirror substrate is removed using highly volatile chemicals such as acetone.
  • the X-ray mirror on which the deposition layer is attached using the adhesive layer is obtained by separating the X-ray mirror substrate from the mirror portion 230 of the master mandrel 200 on which the deposition and adhesive layers are formed.
  • the same master mandrels are obtained by continuous repeating from the depositing operation S60 to the separating operation Sl 10.
  • the continuous repeating has good reproducibility.

Abstract

Provided are an X-ray mirror master mandrel and a method of replicating an X-ray mirror using the X-ray mirror master mandrel. The X-ray mirror master mandrel includes a jig and a master mandrel. The jig is fixed to a front end of a spindle of an ultra-precision machining apparatus using first coupling members. The master mandrel includes a fixing end, a neck, a mirror portion, and an interface. The fixing end is fixed to a front end of the jig using second coupling members. The neck extends from a front end of the fixing end. The mirror portion extends from a front end of the neck. The interface is formed due to a difference between a diameter of the neck and a diameter of the mirror portion. The diameter of the mirror portion is greater than the diameter of the neck.

Description

Description
MASTER MANDREL USED FOR FABRICATING X-RAY MIRRORS AND REPLICATION METHOD USING THE
MASTER MANDREL
Technical Field
[1] The present invention relates to an X-ray mirror master mandrel and a method of replicating the X-ray mirror using the master mandrel, which can maximize a success rate in replication ofthe X-ray mirror. When machining a master mandrel usingan ultra-precision machining apparatus, a jig is used. The ultra-precisionmachining apparatus is easily aligned with the master mandrel, and turbulence generated by a rotation is minimized. Therefore, nanometer scaled surface roughness is generated and geometric error is minimized. As a result, the success rate ismaximized. Background Art
[2] X-rays (or Roentgen rays) include a short wavelength of about 10 nm and penetrate materials well. X-rays having a relatively long wavelength ranging from 10 nm to 10 nm are called soft X-rays, which are easily absorbed in materials and have small penetrating power. X-rays having a relatively short wavelength and great penetrating power are called hard X-rays.
[3] Since the soft X-rays are also absorbed in air, apparatus using the soft X-rays needs a vacuum.
[4] In addition, an X-ray mirror of an optical device collecting the soft X-rays and magnifying a soft X-ray image should have a surface roughness as smooth as nanometer scaled surface roughness. When the surface of the X-ray mirror is rough, the soft X-rays are scattered at the rough surface. Therefore, the X-ray mirror cannot function as a mirror which collects the soft X-rays and magnifies the soft X-ray image.
[5] In addition, since a total reflection angle of a soft X-ray region is less than about
10°, the length of the X-ray mirror should be increased so as to have a predetermined numerical aperture. Since the total reflection angle is small, the X-ray mirror has a small radius from an optical axis, which ranges from 10 mm to 20 mm. Especially, the X-ray mirror is aspherical.
[6] That is, the X-ray mirror having a small radius ranging from 10 mm to 20 mm, is symmetrical and aspherical. In addition, the X-ray mirror should have an ultra- precision machined surface of which the surface roughness is smaller than the wavelength of X-rays (e.g., the wavelength of the soft X-rays ranges from 1 nm to 10 nm) in order to efficiently collect the X-rays and magnify an X-ray image.
[7] Meanwhile, methods of fabricating the X-ray mirror are classified into a direct-type method and an indirect-type method. For the direct-type method, after the X-ray mirror is directly fixed to an ultra-precision machining apparatus (e.g., single-point diamond turning machine tool and ultra-precision grinding machine), the X-ray mirror is machined to be an aspherical mirror having the inner diameterof the mirrorranging from 30 mm to 40 mm, a surface roughness ranging from 0.5 nm to 5 nm, and a geometric error smaller than 100 nm. In addition, a coating layer may be formed on the surface of the aspherical mirror in order to increase the reflectance of the aspherical mirror.
[8] However, when the inner diameter of a common X-ray mirror ranges from 10 mm to 20 mm, it is difficult to form the X-ray mirror having an aspherical shape, predetermined surface roughness, and predetermined geometric errorand to accurately measure the inner diameter of the X-ray mirror. In addition, it is very difficult for a coating layer to be formed on the X-ray mirror having a small inner diameter. Reproducibility of the same mirror is also difficult.
[9] To solve these problems, the indirect- type method of fabricating an X-ray mirror has been used. For the indirect-type method, after a master mandrel is fabricated, of which an outer surface has the same rotational symmetry shape asan inner surfaceof the aspherical X-ray mirror, an X-ray mirror is fabricated after the outer surface of the master mandrel.Therefore, it is easy to machine the X-ray mirror and measure the inner surface of the X-ray mirror. Reproducibility of the same mirror using replication is also excellent.
[10] FIG. 1 is a block diagram illustrating a conventional processof replicating an X-ray mirror.
[11] Referring to FIG. 1, in a forming operation Sl of a master mandrel, a rear end of a master mandrel 10 is fixed to an ultra-precision machining apparatus, and then a front end of the master mandrel 10 is machined using the ultra-precision machining apparatus, and thus the front end of the master mandrel 10 has predetermined surface roughness and a mirror portion 12 having the same shape as that of the aspherical X- ray mirror.
[12] In addition, a bar having a constant diameter is used as the master mandrel 10, as illustrated in FIG. 1.
[13] In an inserting operation S2 of a tube 20, the tube 20 is fitted on the mirror portion
12 of the front end of the master mandrel 10. As illustrated in FIG. 1, the fitted tube 20 envelops the mirror portion 12 and a rear end of the tube 20 covers a rough portion of the master mandrel 10. In addition, the front end of the tube 20 protrudes from the master mandrel 10.
[14] In addition, the tube 20 is generally formed of Pyrex glass which is borosilicate glass and a brand of Corning, Inc. of US. [15] In a heating operation S3, after the tube 20 enveloping the front end of the master mandrel 10 is placed in an apparatus such as a heating apparatus, the tube 20 is heated to about 8000C and thus the tube 20 fitted on the master mandrel 10 forms a gel phase.
[16] In a suction operation S4, when a vacuum is created in the front end of the gel- phased tube 20 using high temperature, the tube 20 is compressed against the mirror portion 12 of the master mandrel 10 by suction power of the vacuum.
[17] In a cooling operation S5, when the tube 20 compressed against the mirror portion
12 of the master mandrel 10 by suction power of the vacuum is cooled down at room temperature, the gel-phase is transformed to a solid-phase.
[18] In a cutting operation S6, unnecessary portions, that is, a portion contacting the rough portion of the rear end of the master mandrel 10 and the protruding portion of the front end of the tube 20 except for a compressed portion against the mirror portion 12 of the master mandrel 10 are cut from the solid-phased tube 20 by a cutting tool.
[19] In an extraction operation S7, an X-ray mirror 20a from which the unnecessary portions are cut is separated from the master mandrel 10, and thus the X-ray mirror 20a having the aspherical shape, the predetermined surface roughness, andthe same shape as that of the mirror portion 12 of the master mandrel 10 is completed.
[20] Therefore, reproducibility of the same X-ray mirrors having anaspherical shape, a predetermined surface roughness, and a rotational symmetry shapeusing the above method is possible.
[21] However, in the cutting operation S6 of the indirect- type method, an operator recognizes the boundary between the rough portion of the master mandrel 10 and the mirror portion 12 with his or her naked eyes so as to cut the unnecessary portions. Therefore, reproducibility of the ultra-precision length of the X-raymirror 20a requiring nanometer scaled ultra-precision is difficult.
[22] Especially, machining the mirror or the master mandrel 10 used in the direct- type method and the indirect-type method is difficult because of mechanical errors of the ultra-precision machiningapparatus. Hereinafter, the mechanical errors will now be described in detail.
[23] When the X-ray mirror of the direct-type method or the master mandrel 10 of the indirect-method is fixed to the chuck of an ultra-precision machiningapparatus, a tightened portion of the X-ray mirror or the master mandrel 10 is not uniformly compressed by various tightening forces of the chuck. Therefore, the X-ray mirror or the master mandrel 10 is misaligned with the chuck.
[24] Especially, a scroll chuck is generally used as the chuck. When a jaw of the scroll chuck is fastened, the other jaws are simultaneously operated by mechanical couplings and thus the rear end of the X-ray mirror or the master mandrel 10 is simultaneously fixed by the jaws. However, since the jaws are operated through the mechanical couplings, with spaced apart a predetermined distance from each other, cumulative error is caused by a mechanical configuration. Therefore, the front and rear ends of the X-ray mirror or the master mandrel 10 are misaligned with the chuck by several tens μm.
[25] In addition, the cumulative error of several tens μm is difficult to be compensated because of the mechanical characteristics of the scroll chuck. Therefore, the process has the cumulative error of several tens μm.
[26] In addition, when the X-ray mirror or the master mandrel 10 having the cumulative error of several tens μm is rotated for the machining, the error makes the front end(i.e., free end) of the X-ray mirror or the master mandrel 10 vibrate. Especially, since the front endin which a machined surface is practically formed vibrates, it is very difficult to obtain an ultra-precision surface roughness ranging from 1 to 2 nm.
[27] In addition, the X-ray mirror or the master mandrel 10 is repeatedly attached to and detached from the chuck in order to measure geometrical precision and surface roughness thereof. Therefore, the error occurs, which makes the X-ray mirror or the master mandrel 10 be misaligned with the chuck. To compensate the error, the X-ray mirror or the master mandrel 10 is repeatedly aligned with the chuck, which increases work time. In addition, since an expensive cutting tool is worn by a repeated work, the expensive cutting tool is frequently replaced, which is inefficient.
[28] Meanwhile, portions of the many jaws protrude from a spindle, the portions having a predetermined length. The many protruding jaws produce turbulence in air flow generated by a high-speed rotation of the spindle. The X-ray mirror or the master mandrel 10 fixed to the jaw is vibrated by the turbulence.
[29] That is, when the X-ray mirror of the direct-type method or the master mandrel of the indirect- method is fixed to the jaws formed in the spindle of the ultra-precision machiningapparatus in order to machine the X-ray mirror or the master mandrel, an error is caused by the various tightening forces of the jaws and the cumulative error is caused by the mechanical configuration. In addition, when the protruding jaws produce the turbulence in air flow generated in a rotation of the spindle, an error is caused by the vibration of the turbulence. Therefore, the various errors make it difficult to fabricate the more accurate X-ray mirror of the direct-type method and the more accurate master mandrel 10 of the indirect- method having nanometer scaled surface roughness.
[30] In addition, since the X-ray mirror is rather inaccurate due to these problems, it is difficult to obtain X-rays having more accurate resolving power. Disclosure of Invention Technical Problem [31] The present invention has been made in an effort to solve the above-described problems of the related art. An object of the present invention is to provide an X-ray mirror master mandrel and a method of replicating the X-ray mirror using the X-ray mirror master mandrel. Cumulative error caused by conventional mechanical configuration having a chuck fixing type is removed, and the master mandrel, a jig, and a spindle are easily aligned with each other by fixing the jig and the master mandrel to the spindle of an ultra-precision machining apparatus using coupling members. Therefore, the surface roughness and the geometric error range of the master mandrel are minimized and the process efficiency of the master mandrel is maximized.
[32] Another object of the present invention is to provide an X-ray mirror master mandrel including a master mandrel, which includes a fixing end, a neck extending from a front end of the fixing end, a mirror portion extending from a front end of the neck, and an interface and a method of replicating the X-ray mirror using the X-ray mirror master mandrel. The interface is formed since the diameter of the mirror portion is greater than the diameter of the neck. Therefore, the X-ray mirror can be easily replicated using the master mandrel, and the reproducibility of the X-ray mirror having an accurate length is excellent. Technical Solution
[33] To achieve the objects of the present invention, there is provided an X-ray mirror master mandrel, the X-ray mirror master mandrel including a jig fixed to a front end of a spindle of an ultra-precision machining apparatus using first coupling members, and a master mandrel including a fixing end fixed to a front end of the jig using second coupling members, a neck extending from a front end of the fixing end, a mirror portion extending from a front end of the neck, and an interface formed due to a difference between a diameter of the neck and a diameter of the mirror portion, wherein the diameter of the mirror portion is greater than the diameter of the neck.
[34] According to the present invention, the jig may include a flange fixed to the front e nd of the spindle using the first coupling members, and a protrusion formed on a front end of the flange and including a fixing end formed in a front end of the protrusion, the fixing end having a predetermined depth into which a portion of a rear end of the fixing end of the master mandrel is inserted. The second coupling members may be inserted into a rear end of the jig such that the fixing end of the master mandrel positioned on the front end of the protrusion is fixed to the jig, and a coupling space may have a predetermined depth which enables the rear end of the jig to be closely fixed to the front end of the spindle without an interference between the second coupling members and the front end of the spindle.
[35] According to the present invention, a widthof the interface formed due to the difference between the diameter of the neck and the diameter of the mirror portion may approximately range from 0.3 mm to 3 mm. A coating layer may be formed on a surface of the master mandrel. The coating layer may have a thickness ranging from 50 μm to 200 μm.
[36] According to the present invention, a coating layer mark indicating the boundary of the coating layer may be formed in the master mandrel.
[37] In another aspect of the present invention, there is provided a method of replicating an X-ray mirror using an X-ray mirror master mandrel, the method including primarily aligning a first processed master mandrel and a jig, with a spindle of an ultra-precision machining apparatus, machining the first processed master mandrel aligned through the primary aligning using the ultra-precision machining apparatus to obtain a second processed master mandrel, coating a surface of the second processed master mandrel formed through the machining, the coated surface being formed of electroless nickel having a thickness ranging from 50 μm to 200 μm, depositing a surface of a mirror portion of the master mandrel which is coated through the coating to form a deposition layer, the deposition layer being a gold layer having a thickness ranging from 300 nm to 1000 nm, applying an adhesive layer to a surface of the mirror portion of the master mandrel including the deposition layer through the depositing, the adhesive layer being formed of epoxy, fitting a X-ray mirror substrate on the mirror portion of the master mandrel including the adhesive layerthrough the applying, the X-ray mirror substrate having the same shape as the mirror portion and a predetermined gap between the master mandrel and the X-ray mirror substrate, the adhesive layer filling the predetermined gap, curing the adhesive layer in a room temperature for a predetermined time with the adhesive layer filling the predetermined gap through the fitting, removing a portion of the adhesive layer cured through the curing and protruding from both ends of the master mandrel and X-ray mirror substrate, and separating the X-ray mirror substrate from the master mandrel after removing the portion of the adhesive layer protruding from the both ends of the master mandrel and X-ray mirror substrate through the removing, the deposition layer deposited on the surface of the master mandrel being attached to the inner surface of the X-ray mirror substrate.
[38] According to the present invention, secondly aligningthe spindle, the jig with the master mandrel in order to fix the master mandrel which is coated through the coating to the ultra-precision machining apparatus, and ultra-precision machining the coated mirror portion of the master mandrel which is aligned with the ultra-precision machining apparatus through the second aligning, using the ultra-precision machining apparatus before depositing may be further included. The ultra-precision machining may be grinding.
[39] According to the present invention, one of the primary aligning and the second aligning may include temporarily fixing the master mandrel to the jig using second coupling members, temporarily fixing the jig to the spindle and aligning the jig and the master mandrel with the spindle includingtemporarily fixing the jig including the master mandrel through the temporary fixing to the spindle using first coupling members, placing a gage on a periphery of the jig, rotating the spindle, compensating a roundness error of the jig, completely fixing the jig to the spindle, moving the gage on a periphery ofthe master mandrel, rotating the spindle, and compensating a roundness error of the master mandrel, separating the jig to which the master mandrel is temporarily fixed from the spindle and completely fixing the master mandrel to the jig; and fixing the jig to the spindle including temporarily fixing the jig to which the master mandrel is completely fixed to the spindle using the first coupling members and placing the gauge on the periphery of the jig and compensating the roundness error of the jig and completely fixing the jig to the spindle using the first coupling members.
Advantageous Effects
[40] According to the present invention, cumulative error caused by conventional mechanical configuration having a chuck fixing type is removed, and a master mandrel, a jig, and a spindle are easily aligned with each other by fixing the jig and the master mandrel to the spindle of an ultra-precision machining apparatus using coupling members. Therefore, the surface roughness and the geometric error range of the master mandrel are minimized and the process efficiency of the master mandrel is maximized.
[41] The master mandrel for an X-ray mirror includes a fixing end, a neck extending from a front end of the fixing end, a mirror portion extending from a front end of the neck, and an interface and a method of replicating the X-ray mirror using the master madnrel. The interface is formed since the diameter of the mirror portion is greater than the diameter of the neck. Therefore, the X-ray mirror can be easily replicated using the master mandrel, and the reproducibility of the X-ray mirror having an accurate length is excellent. Brief Description of the Drawings
[42] FIG. 1 is a block diagram illustrating a conventional processof replicating an X-ray mirror.
[43] FIG. 2 is an exploded sectional view illustrating a master mandrel and a jig, according to an embodiment of the present invention.
[44] FIG. 3 is a sectional view illustrating an assembly of a master mandrel, a jig, and a spindle, according to an embodiment of the present invention.
[45] FIG. 4 is a block diagram illustrating a processof replicating an X-ray mirror using a master mandrel,according to an embodiment of the present invention.
[46] FIG. 5 is a block diagram illustrating a process of aligning a master mandrel, a jig, and a spindle with each other before being machined, according to an embodiment of the present invention.
[47] [Description of Reference Numerals of Major Parts in the Drawing]
[48] 1: SPINDLE 100: JIG
[49] 110: FLANGE 120: PROTRUSION
[50] 130: COUPLING SPACE 200: MASTER MANDREL
[51] 210: FIXING END 220: NECK
[52] 230: MIRROR PORTION 240: INTERFACE
[53] 250: COATING LAYER MARK 260: COATING LAYER
[54] 300: FIRST COUPLING MEMBER 400: SECOND COUPLING MEMBER
Best Mode for Carrying Out the Invention
[55] Hereinafter, the present invention will now be described with reference to the accompanying drawing.
[56] FIG. 2 is an exploded sectional view illustrating a master mandrel 200 and a jig
100, according to an embodiment of the present invention. FIG. 3 is a sectional view illustrating an assembly of the master mandrel 200, the jig 100, and a spindle 1, according to an embodiment of the present invention. Referring to FIGs. 2 and 3, the jig 100 includes a flange 110 fixed to a front end of the spindle 1 using a plurality of first coupling members 300, a protrusion 120 protruding toward a front end of the flange 110, and a coupling space 130 having a predetermined depth, the coupling space 130 being formed from an rear end of the flange 110 toward the front end of the flange 110.
[57] In addition, the jig 100 may be formed of a rigid material. For example, the rigid material may be stainless steel or steel.
[58] In addition, the flange 100 includes a plurality of through holes into which the first coupling members 300 are inserted, as illustrated in FIG. 2. The through holes may be counterbored holes. In addition, the first coupling members 300 which may be hexagon head recessed bolts may be inserted into the through-holes of the counterbored holes such that an additional protrusion is not formed on the front end of the flange 110.
[59] Therefore, turbulence caused by a protruding head is prevented from being produced in air flow generated by a high-speed rotation of the spindle 1. A mirror or a master mandrel which is to be machined does not vibrate.
[60] In addition, a rear end of the master mandrel 200 is closely fixed to a front end of the protrusion 120. The front end of the protrusion 120 may include a fixing end 122 having a predetermined depth into which a portion of the rear end of the master mandrel 200 is inserted.
[61] In addition, the fixing end 122 includes a plurality of through holes into which a plurality of second coupling members 400 are inserted.
[62] In addition, the second coupling members 400 closely fixing the rear end of the master mandrel 200 to the front end of the protrusion 120 are inserted into the coupling space 130, as illustrated in FIG. 2. The coupling space 130 has a predetermined depth which enables a rear end of the jig 100 to be closely fixed to the front end of the spindle 1 without the interference between the second coupling members 400 and the front end of the spindle 1.
[63] The master mandrel 200 is fixed to a front end of the jig 100 using the second coupling members 400. The master mandrel 200 includes a fixing end 210, a neck 220 formed in a front end of the fixing end 210, and a mirror portion 230 formed in a front end of the neck 220. The master mandrel 200 may be formed of aluminum or oxygen free copper which has good workability and formability.
[64] In addition, corners of a rear end of the fixing end 210 are chamfered or rounded so that the fixing end 210 can be easily inserted into the fixing end 122 of the protrusion 120 of the jig 100.
[65] In addition, a plurality of thread holes are formed in the rear end of the fixing end
210 so as to fix the second coupling member 400.
[66] In addition, coating layer mark 250 is formed in the fixing end 210. A coating layer
260 is formed from the coating layer mark 250 to a front end of the mirror portion 230. The coating layer 260 prevents the master mandrel 200 formed of aluminum from being bended by a rotation.
[67] In addition, the coating layer 260 may be formed to have good hardness and a thickness ranging from 50 μm to 200 μm using electroless nickel plating. The coating layer 260 may be formed to have a thickness of about 100 μm.
[68] Especially, an interface 240 is formed due to the diameter difference between the neck 220 and the mirror portion 230. The diameter of the mirror portion 230 may be greater than that the neck 220 at the interface 240.
[69] Hereinafter, a method of fabricating the master mandrel 200 using the jig 10 described above and a method of fabricating an X-ray mirror using the master mandrel 200 will now be described.
[70] FIG. 4 is a block diagram illustrating a processof replicating an X-ray mirror using a master mandrel 200,according to an embodiment of the present invention. FIG. 5 is a block diagram illustrating a process of aligning a first processed master mandrel, a jig 100, and a spindle 1 with each other before being machined, according to an embodiment of the present invention. Referring to FIGs. 4 and 5, in a primary aligning operation SlO, thefirst processed master mandrel is fixed to the jig 100. In addition, the centers of the first processed master mandrel, the jig 100, and the spindle 1 are aligned with each other when the jig 100 to which the first processed master mandrel is fixed is fixed to the spindle 1 of an ultra-precision machining apparatus. [71] In addition, the primary aligning operation SlO includes a temporary fixing operation Sl 1 of the master mandrel to the jig 100, a temporary fixing operation S 12 of the jig 100 to the spindle 1, an aligning operation S 12 ofthe master mandrel, the jig 100 with the spindle 1, a disassembling operationS13 of the jig 100, the master mandrel, and the spindle 1, acomplete fixing operation S13 of the master mandrel to the jig 100, and a complete fixing S 14 ofthe jig 100 to the spindle 1. The primary aligning operation SlO will now be described in more detail. [72] In the temporary fixing operation S 11 of the master mandrel to the jig 100, the master mandrel is temporarily fixed to the jig 100 using a plurality of second coupling members 400. Therefore, when the master mandrel is hit by a soft hammer, the master mandrel can be moved. [73] The master mandrel may be formed of a raw material. In addition, a material processed by a precision machining apparatus such as a numerical control (NC) lathe may also be used as the master mandrel. [74] In the temporary fixing and aligning operations S 12 of the jig 100 and the spindle 1, the master mandrel and jig 100 fixed through the temporary fixing operation Sl 1 of the master mandrel to the jig 100 are fixed to the spindle 1 and then aligned with the spindle 1. [75] In detail, the temporarily fixed jig 100 and master mandrel are temporarilyfixed to the spindle 1 using a plurality of first coupling members 300 such that the jig 100, master mandrel, and spindle 1 can be moved. [76] In addition, when the temporarily fixed jig 100 is temporarilyfixed to the spindle 1 using the first coupling members 300, a gauge is placed on the periphery of the jig 100.
After that, the spindle 1 and jig 100 are aligned with each other while the spindle 1 is rotated, and thus thejig 100 have a roundness error approximately ranging from 0.5 μm to 1 μm using the spindle 100. [77] As a matter of course, the spindle 1 is aligned with the jig 100 by hitting the soft jig
100 using a soft hammer. When the spindle 1 and jig 100 are aligned within the tolerance of roundness, the jig 100 is completely fixed to the spindle 1 using the first coupling members 300. [78] In addition, after the gauge placed on the jig 100 is moved to the periphery of the master mandrel, the spindle 1 is rotated, and then the roundness error of the master mandrel is adjusted using thejig 100 completely fixed to the spindle 1. [79] In here, a roundness error of the master mandrel using the jig 100 is 3 μm or less.
[80] Therefore, the spindle 1, thejig 100, and the master mandrel are aligned within the roundness error ranges, the jig 100 being completely fixed to the spindle 1, the master mandrel being temporarily fixed to thejig 100. [81] In the disassembling operation of S 13 of the jig 100, the master mandrel, and the spindle 1 and the complete fixing operation S 13 of the master mandrel to the jig 100, the jig 100 and the master mandrel are separated from the spindle 1 through the temporary fixing and aligning operations S 12 of the jig 100 with the spindle 1, and then the separated master mandrel is completely fixed to the separated jig 100.
[82] In detail, the jig 100 completely fixed to the spindle 1 using the first coupling members 300 is separated from the spindle 1 by unfastening the first coupling members 300.
[83] In addition, since the separated jig 100 is aligned with the temporarily fixed master mandrel, the temporarily fixed master mandrel is completely fixed to the jig 100 using the second coupling members 400.
[84] In the complete fixing operation S 14 of the jig 100 to the spindle 1, the jig 100 to which master mandrel is completely fixed through the disassembling operation S 13 of the jig 100, the master mandrel, and the spindle 1 and thefixing operation S13 of the master mandrel to the jig 100 is completely fixed to the spindle 1 using the first coupling members 300.
[85] In detail, the jig 100 to which master mandrel is completely fixed is temporarily fixed to the spindle 1 using the first coupling members 300.
[86] In addition, the jig 100 temporarily fixed to the spindle 1 is compensatedagain within the roundness error range using the gauge. After that, the aligned jig 100 is completely fixed to the spindle 1 usingthe first coupling members 300.
[87] Therefore, through the processes, the jig 100 and master mandrel are completely fixed to the spindle 1 within the roundness error ranges using the first and second coupling members 300 and 400, respectively.
[88] In a machining operation S20, after the aligned jig 100 and first processed master mandrel are fixed to the spindle 1 through the primary aligning operation SlO, the first processed master mandrel is machined to be a second processed master mandrel having a nanometer scaled surface roughness using the ultra-precision machining apparatus.
[89] In detail, the master mandrel and jig 100 are aligned with and fixed to the spindle 1, and then the master mandrel machined by a precision machining apparatus such as an NC lathe is machined to be the second processed master mandrel having the nanometer scaled surface roughness.
[90] In addition, the master mandrel includes a fixing end 210, a neck 220 extending from a front end of the fixing end 210, and a mirror portion 230 extending from a front end of the neck 220. A coating layer mark 250 is formed in the fixing end 210. A coating layer 260 is formed from the coating layer mark 250 to a front end of the mirror portion 230.
[91] In addition, the fixing end 210 has a diameter enabling the fixing end 210 to be inserted intoa fixing end 122 of the jig 100. An interface 240 is formed due to the diameter difference between the neck 220 and the mirror portion 230. The diameter of the mirror portion 230 is greater than that of the neck 220 by 0.3 mm through 3 mm. The widthof the interface 240 formed due to the diameter difference between the neck 220 and the mirror portion 230 may range from 0.5 mm to 1 mm.
[92] In a coating operation S30, a surface of the second processed master mandrel formed through the machining operation S20 is coated. That is, the coating layer 260 is formed on the surface of the second processed master mandrel formed by the ultra- precision machining apparatus to obtain a master mandrel.
[93] In addition, the coating layer 260 is formed from the coating layer mark 250 to the front end of the mirror portion 230.
[94] In addition, the coating layer 260 may be formed to have a thickness ranging from
50 μm to 200 μm using electroless nickel plating. The coating layer 260 may have a thickness of 100 μm.
[95] That is, the neck 220 having the relatively small diameter is bended by bending moment of a cutting tool. To minimize the bending, the master mandrel is formed of aluminum or oxygen free copper which is soft and has good workability and formability. In addition, the coating layer 260 is formed to obtain good surface roughness.
[96] The jig 100 is separated from the spindle 1 and then the second processed master mandrel is separated from the jig 100. The coating layer 260 is formed on the separated master mandrel.
[97] In asecond aligning operationS40, the master mandrel which is coated through the coating operation S30 is aligned with the jig 100 and the spindle 1 in order to fix the master mandrel to the spindle 1 through the jig 100.
[98] Before the master mandrel including the coating layer 260 is completely fixed to the ultra-precision machining apparatus, the spindle 1 of the ultra-precision machining apparatus, the jig 100, and the master mandrel are aligned with each other in the same way as the primary aligning operation SlO. Therefore, detailed descriptions of the second aligning operationS40 are omitted.
[99] In an ultra-precision machining process S50, the master mandrel aligned with the ultra precision machining apparatus through the second aligning process S40 is ultra- precision machined.
[100] That is, after the master mandrel and jig 100 are fixed to the spindle 1 of the ultra precision machining apparatus, the master mandrel is ultra-precision machined by the ultra-precision machining apparatus.
[101] In addition, the coating layer 260 formed on the surface of the master mandrel protects the master mandrel formed of aluminum which is soft. When the cutting tool of the ultra-precision machining apparatus contacts the master mandrel to machine the master mandrel, the bending moment is generated. The bending moment can bend the master mandrel 200. However, the coating layer 260 prevents the master mandrel from being bended since the coating layer 260 is formed to have good hardness using electroless nickel plating. Therefore, the master mandrel is successfully ultra-precision machined.
[102] In addition, since the coating layer 260 formed of electroless nickel has good cutting and grinding characteristics, nanometer scaled (1 nm through 2 nm) ultra- precision surface roughness can be obtained. In addition, the width of the interface 250 formed between the neck 220 and the mirror portion 230 ranges from 0.5 mm to 1 mm, and the master mandrel has a geometric error of 100 nm or less and a surface roughness ranging from 1 nm to 2 nm.
[103] In a depositing operation S60, a deposition layer is formed on the mirror portion
230 of the master mandrel which has the nanometer scaled geometric error and surface roughness through the ultra-precision machining operation S50.
[104] In detail, the deposition layer formed on the mirror portion 230 of the ultra- precision machined master mandrel may be formed of gold which has high reflectance. The deposition layer formed of gold may have a thickness ranging from 300 nm to 1000 nm.
[105] In an applying operation S70, an adhesive layer is applied to the deposition layer formed on the mirror portion 230 of a master mandrel through the depositing operation S60. That is, the adhesive layer is applied to the mirror portion 230 of the master mandrel. The deposition layer is formed between the adhesive layer and the mirror portion 230.
[106] In addition, the adhesive layer may be formed of epoxy.
[107] In a fitting operation S80, an X-ray mirror substrate is fitted on the mirror portion
230. The X-ray mirror substrate has the same shape as that of the mirror portion 230 of the master mandrel 200 including the adhesive layer through the applying operation S70. In detail, the X-ray mirror substrate is fitted on the mirror portion 230 of the master mandrel 200 including the adhesive layer. The inner surface of the X-ray mirror substrate has the same shape as that of the outer surface of the mirror portion 230. The X-ray mirror substrate may be fitted on the mirror portion 230 in a vacuum.
[108] In addition, the difference between an outer diameter of the mirror portion 230 of the master mandrel 200 and an inner diameter of the X-ray mirror substrate may be generally 70 μm or less, for example, 35 μm.
[109] In a curing operation S90, the adhesive layer formed between the inside of the X- ray mirror substrate and the deposition layer is cured in a room temperature for a predetermined time, with the X-ray mirror substrate being fitted on the mirror portion 230 of the master mandrel 200 through the fitting operation S 80.
[110] In detail, the adhesive layer formed between the X-ray mirror substrate and the deposition layer may be naturally cured for a predetermined time ranging from 72 hours to 120 hours, for example, 96 hours.
[I l l] In a removing operation SlOO, a portion of the adhesive layer flowing out between the mirror portion 230 of the master mandrel 200 and the X-ray mirror substrate through the curing S90 is removed. In detail, the portion of the adhesive layer flowing out between the mirror portion 230 of the master mandrel 200 and the inside of the X- ray mirror substrate is removed using highly volatile chemicals such as acetone.
[112] When the X-ray mirror substrate has the same length as that of the mirror portion
230 of the master mandrel 200, a portion of the adhesive layer which flows out due to the interface 240 between the mirror portion 230 of the master mandrel 200 and the neck 220, is easily removed. Therefore, reproducibility of an X-ray mirror having an accurate length is excellent.
[113] After the adhesive layer is cured, the portion of the adhesive layer flowing out between the mirror portion 230 of the master mandrel 200 and the X-ray mirror substrate is removed. In a separating operation Sl 10, the X-ray mirror substrate is removed from the master mandrel. Through the separating operation SI lO, the deposition layer attached to the inner surface of the X-ray mirror substrate is separated from the mirror portion 230 of the master mandrel. Therefore, the X-ray mirror on which the deposition layer is attached is completed.
[114] That is, the X-ray mirror on which the deposition layer is attached using the adhesive layer is obtained by separating the X-ray mirror substrate from the mirror portion 230 of the master mandrel 200 on which the deposition and adhesive layers are formed.
[115] In addition, the same master mandrels are obtained by continuous repeating from the depositing operation S60 to the separating operation Sl 10. The continuous repeating has good reproducibility.
[116] While the present invention relating to the master mandrel for the X-ray mirror and the method of replicating the X-ray mirror using the master mandrel has been particularly shown and described with reference to one embodiment thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the following claims.

Claims

Claims
[1] An X-ray mirror master mandrel comprising: a jig (100) fixed to a front end of a spindle (1) of an ultra-precision machining apparatus using first coupling members (300); and a master mandrel (200) including: a fixing end (210) fixed to a front end of the jig (100) using second coupling members (400); a neck (220) extending from a front end of the fixing end (210); a mirror portion (230) extending from a front end of the neck (220); and an interface (240) formed due to a difference between diameters of the neck
(220) and the mirror portion (230), wherein the diameter of the mirror portion (230) is greater than that of the neck
(220). [2] The X-ray mirror master mandrel of claim 1, wherein the jig (100) comprises: a flange (110) fixed to the front end of the spindle (1) using the first coupling members (300): and a protrusion (120) formed on a front end of the flange (110) and including a fixing end (122) formed in a front end of the protrusion (120), the fixing end
(122) having a predetermined depth into which a portion of a rear end of the fixing end (210) of the master mandrel (200) is inserted. [3] The X-ray mirror master mandrel of claim 1 or 2, wherein the second coupling members (400) is inserted into a rear end of the jig (100) such that the fixing end
(210) of the master mandrel (200) positioned on the front end of the protrusion
(120) is fixed to the jig (100), and a coupling space(130) has a predetermined depth which enables the rear end of the jig (100) to be closely fixed to the front end of the spindle (1) without an interference between the second coupling members (400) and the front end of the spindle (1). [4] The X-ray mirror master mandrel of claim 1, wherein a width of the interface
(240) formed due to the difference between the diameter of the neck (220) and the diameter of the mirror portion (230) approximately ranges from 0.3 mm to 3 mm. [5] The X-ray mirror master mandrel of claim 1 or 4, further comprising a coating layer (260) formed on a surface thereof. [6] The X-ray mirror master mandrel of claim 1 or 4, further comprising a coating layer mark (250) indicating a boundary of a coating layer (260). [7] A method of replicating an X-ray mirror using an X-ray mirror master mandrel, the method comprising: primarily aligning (SlO) a first processed master mandrel and a jig with a spindle of an ultra-precision machining apparatus (SlO); machining (20) the first processed master mandrel aligned through the primary aligning (SlO) using the ultra-precision machining apparatus to obtain a second processed master mandrel; coating (S30) a surface of the second processed master mandrel formed through the machining (S20), the coated surface being formed of electroless nickel having a thickness ranging from 50 μm to 200 μm; depositing (S60) a surface of a mirror portion of the master mandrel which is coated through the coating (S30) to form a deposition layer, the deposition layer being a gold layer having a thickness ranging from 300 nm to 1000 nm; applying (S70) an adhesive layer to a surface of the mirror portion of the master mandrel including the deposition layer through the depositing (S60), the adhesive layer being formed of epoxy; fitting (S80) a X-ray mirror substrate on the mirror portion of the master mandrel including the adhesive layer through the applying (S70), the X-ray mirror substrate having the same shape as that of the mirror portion and a predetermined gap between the master mandrel and the X-ray mirror substrate, the adhesive layer filling the predetermined gap; curing (S90) the adhesive layer in a room temperature for a predetermined time with the adhesive layer filling the predetermined gap through the fitting (S80); removing (SlOO) a portion of the adhesive layer cured through the curing (S90) and protruding from both ends of the master mandrel and X-ray mirror substrate; and separating (Sl 10) the X-ray mirror substrate from the master mandrel after removing the portion of the adhesive layer protruding from the both ends of the master mandrel and X-ray mirror substrate through the removing (SlOO), the deposition layer deposited on the surface of the master mandrel being attached to an inner surface of the X-ray mirror substrate.
[8] The method of claim 7, further comprising: secondly aligning(S40) the jig and the master mandrel with the spindle in order to fix the master mandrel which is coated through the coating S30 to the ultra- precision machining apparatus; and ultra-precision machining (S50) the coated mirror portion of the master mandrel which is aligned with the ultra-precision machining apparatus through the second aligning (S40), using the ultra-precision machining apparatus before depositing (S60).
[9] The method of claim 7 or 8, wherein one of the primary aligning (S 10) and the second aligning (S40) comprises: temporarily fixing (Sl 1) the master mandrel to the jig using second coupling members; temporarily fixing (S 12) the jig to the spindle and aligning (S 12) the jig and the master mandrel with the spindle includingtemporarily fixing the jig including the master mandrel through the temporary fixing (Sl 1) to the spindle using first coupling members, placing a gage on a periphery of the jig, rotating the spindle, compensating a roundness error of the jig, completely fixing the jig to the spindle, moving the gage on a periphery of the master mandrel, rotating the spindle, and compensating a roundness error of the master mandrel; separating (S 13) the jig to which the master mandrel is temporarily fixed from the spindle and completely fixing (S 13) the master mandrel to the jig; and fixing (S 14) the jig to the spindle including temporarily fixing the jig to which the master mandrel is completely fixed to the spindle using the first coupling members and placing the gauge on the periphery of the jig and compensating the roundness error of the jig and completely fixing the jig to the spindle using the first coupling members.
PCT/KR2006/003453 2006-04-24 2006-08-31 Master mandrel used for fabricating x-ray mirrors and replication mehtod using the master mandrel WO2007123294A1 (en)

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KR10-2006-0036853 2006-04-24

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EP2348348A3 (en) * 2009-08-28 2012-08-08 European Space Agency Method for assembling a mirror plate stack

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CN110125615B (en) * 2019-04-23 2021-02-09 北京控制工程研究所 Sub-nanometer mandrel for reproducing and manufacturing grazing incidence reflection lens and manufacturing process

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Publication number Priority date Publication date Assignee Title
EP2348348A3 (en) * 2009-08-28 2012-08-08 European Space Agency Method for assembling a mirror plate stack
US8746903B2 (en) 2009-08-28 2014-06-10 European Space Agency Method for assembling a mirror plate stack

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KR100781309B1 (en) 2007-12-03

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