WO2007112300A3 - Systems and methods for measuring one or more characteristics of patterned features on a specimen - Google Patents

Systems and methods for measuring one or more characteristics of patterned features on a specimen Download PDF

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Publication number
WO2007112300A3
WO2007112300A3 PCT/US2007/064769 US2007064769W WO2007112300A3 WO 2007112300 A3 WO2007112300 A3 WO 2007112300A3 US 2007064769 W US2007064769 W US 2007064769W WO 2007112300 A3 WO2007112300 A3 WO 2007112300A3
Authority
WO
WIPO (PCT)
Prior art keywords
patterned features
specimen
measuring
systems
methods
Prior art date
Application number
PCT/US2007/064769
Other languages
French (fr)
Other versions
WO2007112300A2 (en
Inventor
Dan Wack
Haiming Wang
Kenneth P Gross
Original Assignee
Kla Tencor Tech Corp
Dan Wack
Haiming Wang
Kenneth P Gross
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kla Tencor Tech Corp, Dan Wack, Haiming Wang, Kenneth P Gross filed Critical Kla Tencor Tech Corp
Publication of WO2007112300A2 publication Critical patent/WO2007112300A2/en
Publication of WO2007112300A3 publication Critical patent/WO2007112300A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N2021/217—Measuring depolarisation or comparing polarised and depolarised parts of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4704—Angular selective
    • G01N2021/4707—Forward scatter; Low angle scatter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4704—Angular selective
    • G01N2021/4711—Multiangle measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4792—Polarisation of scatter light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

Systems and methods for measuring one or more characteristics of patterned features on a specimen are provided. One system includes an optical subsystem configured to acquire measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The system also includes a processor configured to determine the one or more characteristics of the patterned features from the measurements. One method includes acquiring measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The method also includes determining the one or more characteristics of the patterned features from the measurements.
PCT/US2007/064769 2006-03-29 2007-03-23 Systems and methods for measuring one or more characteristics of patterned features on a specimen WO2007112300A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/277,856 2006-03-29
US11/277,856 US7463369B2 (en) 2006-03-29 2006-03-29 Systems and methods for measuring one or more characteristics of patterned features on a specimen

Publications (2)

Publication Number Publication Date
WO2007112300A2 WO2007112300A2 (en) 2007-10-04
WO2007112300A3 true WO2007112300A3 (en) 2008-12-04

Family

ID=38541822

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/064769 WO2007112300A2 (en) 2006-03-29 2007-03-23 Systems and methods for measuring one or more characteristics of patterned features on a specimen

Country Status (2)

Country Link
US (1) US7463369B2 (en)
WO (1) WO2007112300A2 (en)

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US9297749B2 (en) * 2012-03-27 2016-03-29 Innovative Science Tools, Inc. Optical analyzer for identification of materials using transmission spectroscopy
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US9513215B2 (en) * 2013-05-30 2016-12-06 Seagate Technology Llc Surface features by azimuthal angle
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CN104677299A (en) * 2013-11-29 2015-06-03 上海微电子装备有限公司 Film detection device and method
US9115987B2 (en) * 2013-12-04 2015-08-25 Nanometrics Incorporated Optical metrology with multiple angles of incidence and/or azimuth angles
US10072921B2 (en) 2014-12-05 2018-09-11 Kla-Tencor Corporation Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element
US9470639B1 (en) * 2015-02-03 2016-10-18 Kla-Tencor Corporation Optical metrology with reduced sensitivity to grating anomalies
US10101676B2 (en) 2015-09-23 2018-10-16 KLA—Tencor Corporation Spectroscopic beam profile overlay metrology
US10563973B2 (en) * 2016-03-28 2020-02-18 Kla-Tencor Corporation All surface film metrology system
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Also Published As

Publication number Publication date
US20070229852A1 (en) 2007-10-04
US7463369B2 (en) 2008-12-09
WO2007112300A2 (en) 2007-10-04

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