WO2007087047A3 - Interconnect structure for mems device - Google Patents

Interconnect structure for mems device Download PDF

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Publication number
WO2007087047A3
WO2007087047A3 PCT/US2006/048318 US2006048318W WO2007087047A3 WO 2007087047 A3 WO2007087047 A3 WO 2007087047A3 US 2006048318 W US2006048318 W US 2006048318W WO 2007087047 A3 WO2007087047 A3 WO 2007087047A3
Authority
WO
WIPO (PCT)
Prior art keywords
interconnect structure
mems device
array
encapsulation layer
iterferometric
Prior art date
Application number
PCT/US2006/048318
Other languages
French (fr)
Other versions
WO2007087047A2 (en
Inventor
Jon Bradley Lasiter
Original Assignee
Qualcomm Inc
Jon Bradley Lasiter
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Inc, Jon Bradley Lasiter filed Critical Qualcomm Inc
Publication of WO2007087047A2 publication Critical patent/WO2007087047A2/en
Publication of WO2007087047A3 publication Critical patent/WO2007087047A3/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Abstract

An iterferometric modulator array (800) is formed with connectors (840) and/or an encapsulation layer (802) with electrical connections. The encapsulation layer hermetically seals the array. Circuitry may also be formed over the array.
PCT/US2006/048318 2006-01-13 2006-12-19 Interconnect structure for mems device WO2007087047A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/331,705 2006-01-13
US11/331,705 US7916980B2 (en) 2006-01-13 2006-01-13 Interconnect structure for MEMS device

Publications (2)

Publication Number Publication Date
WO2007087047A2 WO2007087047A2 (en) 2007-08-02
WO2007087047A3 true WO2007087047A3 (en) 2007-10-04

Family

ID=37969743

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/048318 WO2007087047A2 (en) 2006-01-13 2006-12-19 Interconnect structure for mems device

Country Status (2)

Country Link
US (2) US7916980B2 (en)
WO (1) WO2007087047A2 (en)

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KR100703140B1 (en) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 Interferometric modulation and its manufacturing method
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US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7916980B2 (en) * 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7643199B2 (en) * 2007-06-19 2010-01-05 Qualcomm Mems Technologies, Inc. High aperture-ratio top-reflective AM-iMod displays
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US7768690B2 (en) 2008-06-25 2010-08-03 Qualcomm Mems Technologies, Inc. Backlight displays
US8023167B2 (en) 2008-06-25 2011-09-20 Qualcomm Mems Technologies, Inc. Backlight displays
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US7782522B2 (en) * 2008-07-17 2010-08-24 Qualcomm Mems Technologies, Inc. Encapsulation methods for interferometric modulator and MEMS devices
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US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
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