WO2007067343A3 - O-ring-less low profile fittings and fitting assemblies - Google Patents

O-ring-less low profile fittings and fitting assemblies Download PDF

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Publication number
WO2007067343A3
WO2007067343A3 PCT/US2006/044981 US2006044981W WO2007067343A3 WO 2007067343 A3 WO2007067343 A3 WO 2007067343A3 US 2006044981 W US2006044981 W US 2006044981W WO 2007067343 A3 WO2007067343 A3 WO 2007067343A3
Authority
WO
WIPO (PCT)
Prior art keywords
fitting
low profile
manifold
ring
receiving hole
Prior art date
Application number
PCT/US2006/044981
Other languages
French (fr)
Other versions
WO2007067343A2 (en
Inventor
Iraj Gashgaee
Original Assignee
Entegris Inc
Iraj Gashgaee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc, Iraj Gashgaee filed Critical Entegris Inc
Priority to JP2008543343A priority Critical patent/JP5302002B2/en
Publication of WO2007067343A2 publication Critical patent/WO2007067343A2/en
Publication of WO2007067343A3 publication Critical patent/WO2007067343A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/08—Joining pipes to walls or pipes, the joined pipe axis being perpendicular to the plane of the wall or to the axis of another pipe
    • F16L41/086—Joining pipes to walls or pipes, the joined pipe axis being perpendicular to the plane of the wall or to the axis of another pipe fixed with screws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
    • B21C37/00—Manufacture of metal sheets, bars, wire, tubes or like semi-manufactured products, not otherwise provided for; Manufacture of tubes of special shape
    • B21C37/06—Manufacture of metal sheets, bars, wire, tubes or like semi-manufactured products, not otherwise provided for; Manufacture of tubes of special shape of tubes or metal hoses; Combined procedures for making tubes, e.g. for making multi-wall tubes
    • B21C37/15—Making tubes of special shape; Making tube fittings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
    • F16L19/02—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/08—Joining pipes to walls or pipes, the joined pipe axis being perpendicular to the plane of the wall or to the axis of another pipe
    • F16L41/12—Joining pipes to walls or pipes, the joined pipe axis being perpendicular to the plane of the wall or to the axis of another pipe using attaching means embracing the pipe

Abstract

Embodiments of the invention provide new fittings and fitting assemblies for tight, leak-proof filter and fluid connections in a pump useful in dispensing fluid onto wafers during a semiconductor manufacturing process. One embodiment of a fitting assembly comprises an o-ring-less low profile fitting and a low profile male threaded locking nut. A manifold of the pump is machined with a female threaded hole for receiving the fitting and the locking nut. The fitting has higher compressibility than the manifold. Initially, as one end of the fitting touches the bottom of the receiving hole, there is a small gap between the end of the fitting and the bottom of the receiving hole. As the fitting is pressed down, the end of the fitting that touches the bottom of the receiving hole begins to deform and fill the small gap, thus creating a tight seal between the fitting and the manifold.
PCT/US2006/044981 2005-12-02 2006-11-20 O-ring-less low profile fittings and fitting assemblies WO2007067343A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008543343A JP5302002B2 (en) 2005-12-02 2006-11-20 Low-profile mounting parts and mounting part assemblies without O-rings

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US74166705P 2005-12-02 2005-12-02
US60/741,667 2005-12-02

Publications (2)

Publication Number Publication Date
WO2007067343A2 WO2007067343A2 (en) 2007-06-14
WO2007067343A3 true WO2007067343A3 (en) 2008-12-04

Family

ID=38123368

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/044981 WO2007067343A2 (en) 2005-12-02 2006-11-20 O-ring-less low profile fittings and fitting assemblies

Country Status (5)

Country Link
US (1) US7547049B2 (en)
JP (2) JP5302002B2 (en)
KR (1) KR20080073778A (en)
TW (1) TW200726918A (en)
WO (1) WO2007067343A2 (en)

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US8172546B2 (en) * 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
JP5079516B2 (en) 2004-11-23 2012-11-21 インテグリス・インコーポレーテッド System and method for a variable home position dispensing system
JP5339914B2 (en) 2005-11-21 2013-11-13 インテグリス・インコーポレーテッド System and method for a pump having reduced form factor
US8753097B2 (en) 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
KR101243509B1 (en) * 2005-12-02 2013-03-20 엔테그리스, 아이엔씨. System and method for pressure compensation in a pump
JP5253178B2 (en) * 2005-12-02 2013-07-31 インテグリス・インコーポレーテッド System and method for valve sequence of pump
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
KR101364385B1 (en) 2005-12-02 2014-02-17 엔테그리스, 아이엔씨. I/o systems, methods and devices for interfacing a pump controller
US8083498B2 (en) * 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
JP5345853B2 (en) * 2005-12-05 2013-11-20 インテグリス・インコーポレーテッド Error volume system and method for pumps
TWI402423B (en) 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
US7684446B2 (en) * 2006-03-01 2010-03-23 Entegris, Inc. System and method for multiplexing setpoints
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Also Published As

Publication number Publication date
US20070126233A1 (en) 2007-06-07
JP5302002B2 (en) 2013-10-02
WO2007067343A2 (en) 2007-06-14
KR20080073778A (en) 2008-08-11
US7547049B2 (en) 2009-06-16
JP2009517618A (en) 2009-04-30
TW200726918A (en) 2007-07-16
JP2013130295A (en) 2013-07-04

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