WO2006069369A2

WO2006069369A2 - A method for constructing contact formations

Info

Publication number: WO2006069369A2
Application number: PCT/US2005/047000
Authority: WO
Inventors: Valery Dubin; Tzuen-Luh Huang; Ming Fang; Kevin Lee; Harry Liang; Margherita Chang
Original assignee: Intel Corporation
Priority date: 2004-12-21
Filing date: 2005-12-21
Publication date: 2006-06-29
Also published as: TWI292599B; TW200636887A; US7442634B2; WO2006069369A3; US20060134902A1

Abstract

According to one aspect of the invention, a method for forming contact formations is provided. A substrate may be placed in an electrolytic solution. The substrate may have an exposed conductive portion and the electrolytic solution may include a plurality of metallic ions and an accelerator. The accelerator may include at least one of bis-(sodium sulfopropyl)-disulfide and 3-mercapto-1-propanesulfonic acid-sodium salt. A voltage may be applied across the electrolytic solution and the conductive portion of the substrate to cause the metallic ions to be changed into metallic particles and deposited on the conductive portion. The electrolytic solution may also include a protonated organic additive. The electrolytic solution may also include an acid and a surfactant. The acid may include at least one of sulfuric acid, methane sulfonic acid, benzene sulfonic acid, and picryl sulfonic acid. The surfactant may include at least one of polyethylene glycol and polypropylene glycol.

Description

A METHOD FOR CONSTRUCTING CONTACT FORMATIONS

BACKGROUND OF THE INVENTION

1). Field of the Invention

[0001] Embodiments of this invention relate to a method for the formation of

contact formations, particularly for use on semiconductor substrates and a system

utilizing such contact formations.

2). Discussion of Related Art

[0002] Integrated circuits are formed on semiconductor substrates, such as

wafers. The wafers are then sawed (or "singulated" or " diced") into

microelectronic dice, also known as semiconductor chips, with each chip carrying

a respective integrated circuit. Each semiconductor chip is then mounted to a

package, or carrier, substrate. Often the packages are then mounted to circuit

boards, such as motherboards, which may then be installed in computing systems.

[0003] The package substrates provide structural integrity to the semiconductor

chips and are used to connect the integrated circuits electrically to the

motherboard. On the side of the package substrate connected to the motherboard,

there are contact formations, such as Ball Grid Array (BGA) solder balls, which

are soldered to the motherboard. Electric signals are sent through the BGA solder

balls into and out of the package. On the other side of the package substrate,

there are other, smaller contact formations used to connect the dice to the package

substrate. A modern trend for these contact formations is the use of "copper l bumps" which are formed on bonding pads on the dice. An underfill material,

such as an epoxy or paste, may also be present between the dice and the packages.

[0004] Copper bumps are typically formed using an electroplating process. The

formation of the bumps begins within a depression on the surface of the dice.

This depression leads to a "dimple," or other formations, on the surface of the

copper bumps opposite the dice. It is this dimpled surface which is used to

connect the dice to the packages.

[0005] This dimple is undesirable because it allows material, such as solder,

underfill material, or even air, to get caught between the copper bump and the

package substrate when the chip-to-package connections are made. This trapped

material weakens the strength of the mechanical bond between the dice and

package substrates and results in a decease in the maximum amount of current

that can be conducted through the copper bumps.

BRIEF DESCRIPTION OF THE DRAWINGS

[0006] Embodiments of the invention are described by way of example with

reference to the accompanying drawings, wherein:

[0007] Figure IA is a top plan view of a semiconductor substrate;

[0008] Figure IB is a cross-sectional side view of the semiconductor substrate

illustrated in Figure IA;

[0009] Figure 2A is a cross-sectional side view of a microelectronic die, or a

portion of the semiconductor substrate illustrated in Figure IA;

[0010] Figure 2B is a cross-sectional side view of the microelectronic die with a

passivation layer formed thereon; [0011] Figure 2C is a cross-sectional side view of the microelectronic die with an

adhesion layer and a seed layer formed over the passivation layer;

[0012] Figure 2D is a cross-sectional side view of the microelectronic die with a

photoresist layer formed over the seed layer;

[0013] Figure 3 is a cross-sectional schematic view of an electroplating

apparatus;

[0014] Figures 4A and 4B are cross-sectional schematic views of the

microelectronic die illustrating the formation of a contact formation within a

trench in the photoresist layer;

[0015] Figures 5A and 5B are cross-sectional side views of the microelectronic

die illustrating the removal of the photoresist layer;

[0016] Figure 6 is a perspective view of the semiconductor substrate with a

plurality of contact formations formed thereon;

[0017] Figure 7 A is a cross-sectional side view of the microelectronic die

attached to a printed circuit board;

[0018] Figure 7B is a perspective view of the microelectronic die attached to the printed circuit board;

[0019] Figure 8 is a perspective view of the package substrate attached to a

printed circuit board; and

[0020] Figure 9 is a block diagram of a computing system.

DETAILED DESCRIPTION OF THE INVENTION

[0021] In the following description, various aspects of the present invention will

be described, and various details set forth in order to provide a thorough understanding of the present invention. However, it will be apparent to those

skilled in the art that the present invention may be practiced with only some or all

of the aspects of the present invention, and the present invention may be

practiced without the specific details. In other instances, well-known features are

admitted or simplified in order not to obscure the present invention.

[0022] It should be understood that Figures LA - 9 are merely illustrative and

may not be drawn to scale.

[0023] Figure IA to Figure 9 illustrate a method for forming contact formations

and a system utilizing the contact formations. A substrate may be placed in an

electrolytic solution. The substrate may have an exposed conductive portion and

the electrolytic solution may include a plurality of metallic ions and an

accelerator. The accelerator may include at least one of bis-(sodium sulfopropyl)-

disulfide and 3-mercaρto-l-propanesulfonic acid-sodium salt. A voltage may be

applied across the electrolytic solution and the conductive portion of the substrate

to cause the metallic ions to be changed into metallic particles and deposited on

the conductive portion. The electrolytic solution may also include a protonated

organic additive. The electrolytic solution may also include an acid and a

surfactant. The acid may include at least one of sulfuric acid, methane sulfonic

acid, benzene sulfonic acid, picryl sulfonic acid, ethane sulfonic acid, and propane

sulfonic acid. The surfactant may include at least one of polyethylene glycol and

polypropylene glycol. The contact formations may be "copper bumps," as is

commonly understood in the art, and may have domed, or flat, upper surfaces.

[0024] Figures IA and IB illustrate a semiconductor substrate 10. The semiconductor substrate 10 may be a semiconductor wafer with a circular outer

edge 12, having a diameter of, for example, 200 or 300 mm, and an indicator 14

thereon. The semiconductor substratelO may have a thickness 16 of, for example,

0.7 mm and a plurality of integrated circuits, separate amongst multiple dice 18,

formed thereon.

[0025] Figure 2A illustrates one of the dice 18, or another portion of the

semiconductor substrate 10 illustrated in Figures IA and IB. Each die 18 may

include an integrated circuit, such as a microprocessor formed therein, which may

include multiple transistors and capacitors 20. The die 18 may also include a

plurality of alternating insulating and conducting layers and be in what is known

as a "flip-chip" configuration, as is commonly understood in the art. The die 18

may also include a bonding pad 22 formed within an upper surface thereof. The

bonding pad may have, for example, a width 24 of approximately 10 microns. and

a thickness 26 of approximately 1 micron. The bonding pad 22 may be made of a

conductive material, such as copper, and may be formed using electroplating. The

bonding pad 22 may be part of the integrated circuit, or be electrically connected

to the integrated circuit within the die 18.

[0026] Figure 2B illustrates the die 18 with a passivation layer 28 formed

thereon. The passivation layer 28 may have a thickness of, for example,

approximately 2 microns and may be selectively deposited or etched so that a

central portion of the bonding pad 22 remains exposed. Although not illustrated

in the detail, the passivation layer 28 may include an upper layer made of, for

example, polyimide or benzocyclobutene, formed over a lower layer made of a nitride, such as silicon nitride (SiN) or silicon oxide nitride (SiON).

[0027] Figure 2C illustrates the die 18 with an adhesion layer 38 and a seed layer

40 deposited over the passivation layer 28 and the exposed portion of the bonding

pad 22. The adhesion layer 38 may be made of a conductive material such as

titanium, titanium nitride, tantalum, tantalum nitride, tantalum silicon nitride,

tungsten nitride, tungsten silicon nitride, titanium tungsten, cobalt nickel

tungsten phosphorus, cobalt nickel rhenium phosphorus, cobalt nickel tungsten

boron, cobalt nickel rhenium boron, cobalt nickel tungsten boron phosphorus,

and/ or cobalt nickel rhenium boron phosphorus. The adhesion layer 38 may be

deposited by such methods as plasma vapor deposition (PVD), chemical vapor

deposition (CVD), atomic layer deposition (ALD), and electroless plating. The

adhesion layer 38 may have a thickness of, for example, between 10 and 1000

nanometers and may be formed over the exposed portion of the bonding pad 22.

[0028] The seed layer 40 may be made of a conductive material such as, for

example, copper, silver, gold, nickel, and/or cobalt and may be deposited using

PVD, CVD, ALD, electroless plating, and electroplating. The seed layer 40 may

have a thickness of, for example, between 10 and 10,000 nanometers and may be

formed directly over the adhesion layer 38. Due to the shape of the adhesion

layer 38 and the passivation layer 28, the seed layer 40 may have a depression 42

and an upper surface thereof.

[0029] Figure 2D illustrates the die 18 with a photoresist layer 32 formed over

the passivation layer 28. The photoresist layer 32 may have a thickness of, for

example, between 10 and 100 microns and may be selectively deposited or etched not to cover the portion of the passivation layer 28 covering the exposed portion

bonding pad 22, as illustrated in Figure 2D, to form a trench 36. The trench 36

may be positioned directly above the bonding pad 22.

[0030] Figure 3 illustrates an electroplating apparatus 44. The electroplating

apparatus 44 may include a liquid container 46, a substrate support 48 within the

container 46, and a voltage supply 50 having a first electrode 52 and a second

electrode 54. The container 46 may contain an electrolytic solution 56 so that both

of the electrodes 52 and 54 are completely immersed therein.

[0031] The electrolytic solution 56 may include a common electrolyte, metallic

ions, a surfactant, an accelerator, and a leveler. The common electrolyte may be an

acid such as, for example, sulfuric acid, methane sulfonic acid, benzene sulfonic

acid, picryl sulfonic acid, ethane sulfonic acid, and propane sulfonic acid. The

concentration of the common electrolyte within the electrolytic solution 56 may be

between approximately 5 grams per liter (g/L) and 150 g/L. The metallic ions

may be cupric ions provided by copper sulfate (CuSO₄) added to the electrolytic

solution 56. The concentration of the cupric ions within the electrolytic solution

56 may be between 10 g/L and 60 g/L. The surfactant may be polyethylene

glycol (PEG) polypropylene glycol (PPG), and/or the derivatives of PEG and

PPG. The concentration of the surfactant within the electrolytic solution 56 may

be between 0.5 g/L and 2 g/L. The accelerator may be bis-(sodium sulfopropyl)-

disulfide (SPS) and/or 3-mercapto-l-propanesulfonic acid-sodium salt (MPS).

The concentration of the accelerator within the electrolytic solution 56 may be

between 10 parts per million (ppm) and 500 ppm. The leveler may be a protonated organic additive, such as polyamine or polyimide. The concentration

of the leveler within the electrolytic solution 56 may be between 0.5 g/L and 2

g/L-

[0032] Still referring to Figure 3, the semiconductor substrate 10 may be placed

on the substrate support 48 within the liquid container 46 of the electroplating

apparatus 44 so that the semiconductor substrate 10 is completely immersed

within the electrolytic solution 56. The second electrode 54 may be connected to

the semiconductor substratelO such that the second electrode 54 is electrically

connected to each of the bonding pads 22, or the adhesion layer 38, as illustrated

in Figure 2D, and thus the exposed seed layer 40. Referring again to Figure 3, the

voltage supply 50 may then apply a voltage across the first 52 and second 54

electrodes. The voltage supplied may be between 1.5 and 120 volts.

[0033] Figure 4A illustrates one of the dice 18 on the semiconductor substrate 10

as the semiconductor substrate 10 is immersed within the electrolytic solution 56

illustrated in Figure 3. As illustrated specifically in Figure 4A, particles of the

surfactants, the accelerator, and the leveler are deposited on an upper surface of

the seed layer 40 within the trench 36. As illustrated, the surfactant is deposited

relatively uniformly across the upper surface of the seed layer 40. However,

particles of the accelerator may tend to collect within the depression 42 on the

upper surface of the seed layer 40. Therefore, the ratio of accelerator particles to

surfactant particles may be higher within the depression 42 than on areas not

within the depression. Particles of the leveler may tend to collect at the "corners"

of the depression 42 as illustrated in Figure 4A. [0034] As illustrated in Figures 4A and 4B, while the voltage is applied across

the first and second electrodes, the cupric ions within the electrolytic solution 56

may undergo a reduction process, or become reduced to metal, and become

deposited, or "electroplated", as is commonly understood in the art, on the seed

layer 40.

[0035] During the electroplating process, the surfactant particles improve

wettability and suppress the plating rate to prevent a dendritic copper deposit

from forming. The accelerator particles may act to increase the electroplating rate.

The leveler particles may passivate the more negatively charged areas during

electroplating. Because of the distribution of the surfactant particles, the

accelerator particles, and the leveler particles illustrated in Figure 4A, the

electroplating process may occur more quickly within the depression 42 on the

upper surface of the seed layer 40. As illustrated specifically in Figure 4B, a

contact formation 58 may be formed during the electroplating process within the

trench 36. As shown a central portion of the contact formation 58, located directly

over the depression 42 may form more rapidly than portions of the contact

formation 58 not located directly over the trench 42.

[0036] Figure 5A illustrates the die 18 after the completion of the electroplating

process illustrated in Figures 4A and 4B. The contact formation 58 may be a

"copper bump/' as in commonly understood in the art, and have a "domed"

upper surface. The semiconductor substrate 10 may then be removed from the

electrolytic solution 56, and the photoresist layer 32 may then be removed by

known processes, such as plasma ashing, and the adhesion 38 and seed 40 layers may be removed from in between the copper bumps 58 by known wet and dry

etch processes, as illustrated Figure 5B.

[0037] Still referring to Figure 5B, the contact formation 58 may have a height 60

between 10 microns and 100 microns, and a surface roughness of between 1 and

500 A root mean square (RMS).

[0038] Figure 6 A illustrates the semiconductor substrate 10 after the removal of

the photoresist layer 32. As illustrated, each of the dice 18 may now have a

plurality of contact formations 58 connected thereto. Although the dice 18 are

illustrated as having only nine contact formations 58 thereon, it should be

understood that each die 18 may have literally hundreds (or more) of contact

formations 58 thereon. The dice 18 may then be separated, or cingulated, from the

semiconductor wafer 10 into separate microelectronic dice 18.

[0039] As illustrated in Figures 7 A and 7B, the dice 18 may then be attached to a

package substrate 62. The package substrate 62 may be square with, for example,

side lengths of approximately 3 cm and a thickness of 3 mm. The package

substrate 62 may include alternating conducting and insulating layers formed

therein, as is commonly understood in the art. As illustrated specifically in Figure

7A, the package substrate 62 may include contact pads 64 formed on an upper

surface thereof. The contact pads 64 may be made of, for example, a conductive

material such as solder or copper. The contact pads 64 may be electrically

connected to the conducting layers within the package substrate 62. The contact

formations 58 may be connected to the contact pads 64 by known processes, such

as reflow and thermocompression. As illustrated in Figure 7B, Ball Good Array (BGA) solder ball contact formations 66 or other suitable contact formations, may^¬

be connected to a lower surface of package substrate 62.

[0040] Figure 8 illustrates the package substrate 62 attached to a printed circuit

board 68, such as a motherboard. The motherboard 68 may be a large silicon

plane having a plurality of sockets for securing and providing electrical signals to

various package substrates, microelectronic dice, and other electronic devices, as

well as conductive traces to electrically connect such devices, as is commonly

understood in the art. Although not illustrated in detail, the BGA solder balls 66

may be heated and bonded to a socket on the motherboard 68. Additionally, an

underfill material, such as an adhesive paste or epoxy, may be deposited between

the die 18 and the package substrate 62, as is commonly understood in the art.

[0041] In use, the motherboard 68 may be installed in a computing system.

Electric signals such as input/ output (IO) signals, are then sent from the

integrated circuit within the die 18 through the contact formations 58, into the

package substrate 62, and into the computing system through the motherboard

68. Power and ground signals may also be provided to the die 18. The computing

system may send similar, or different, signals back to the integrated circuit within

the die 18 through the motherboard 68, the package substrate 62, and the contact

formations 58.

[0042] One advantage is that because of the domed shape and the smooth upper

surface of the copper bumps, when the die is attached to the package substrate,

the likelihood of any solder material, underfill material, or air being trapped

between the copper bump and the package substrate is reduced. Therefore, the mechanical strength of the bond between the copper bumps and the package

substrates is increased, resulting in a more reliable electrical connection. Another

advantage is that a greater portion of the copper bumps may be an electrical

contact with the package substrate, allowing the amount of current that is

conducted through each copper bump to be maximized.

[0043] Other embodiments may use an electrolytic solution that does not contain

the leveler. A two-step electroplating process may also be used. In the two-step

electroplating process, one step may use an electrolytic solution that does not

contain the accelerator or the leveler. While the other electroplating step may use

the electrolytic solution described above with the accelerator and/or the leveler.

The contact formations resulting from these alternative embodiments may not be

domed to the same extent as the copper bump illustrated in Figure 5B, as the

upper surfaces thereof may be substantially flat.

[0044] Figure 9 illustrates a computing system 100 into which the dice, packages,

and printed circuit boards described above may be installed. The computing

system may include a processor 102, a main memory 104, a static memory 106, a

network interface device 108, a video display device 110, an alphanumeric input

device 112, a cursor control device 114, a drive unit 116 including a machine-

readable medium 118, and a signal generation device 120. All the components of

the computing system 100 may be interconnected by a bus 122. The computing

system 100 may be connected to a network 124 through the network interface

device 108. The machine-readable medium 118 may include a set of instructions

126, which may be partially transferred to the processor 102 and the main memory 104 through the bus 122. The processor 102 and the main memory 104

may also have separate internal sets of instructions 128 and 130.

[0045] While certain exemplary embodiments have been described and shown in

the accompanying drawings, it is to be understood that such embodiments are

merely illustrative and not restrictive of the current invention, and that this

invention is not restricted to the specific constructions and arrangements shown

and described since modifications may occur to those ordinarily skilled in the art.

Claims

CLAIMSWhat is claimed:

1. A method comprising:

placing a substrate in an electrolytic solution, the substrate having an

exposed conductive portion, the electrolytic solution including a plurality of

metallic ions and an accelerator, the accelerator comprising at least one of bis-

(sodium sulfopropyl)-disulfide and 3-mercapto-l-propanesulfonic acid-sodium

salt; and

applying a voltage across the electrolytic solution and the conductive

portion of the substrate to cause the metallic ions to be reduced to metal and deposited on the conductive portion.

2. The method of claim 1, wherein the electrolytic solution further comprises

a protonated organic additive.

3. The method of claim 2, wherein the protonated organic additive comprises

at least one of polyamine and polyimide.

4. The method of claim 3, wherein the electrolytic solution further comprises an acid.

5. The method of claim 4, wherein the electrolytic solution further comprises

a surfactant.

6. The method of claim 5, wherein the acid comprises at least one of sulfuric

acid, methane sulfonic acid, benzene sulfonic acid, picryl sulfonic acid, ethane

sulfonic acid, and propane sulfonic acid.

7. The method of claim 6, wherein the surfactant comprises at least one of

polyethylene glycol and polypropylene glycol.

8. The method of claim 7, wherein the metallic ions are copper ions.

9. The method of claim 8, wherein a concentration of the accelerator is

between approximately 10 ppm and 500 ppm.

10. The method of claim 9, wherein a concentration of the protonated organic

additive is between approximately 0.5 g/L and 2 g/L.

11. The method of claim 10, wherein a concentration of the acid is between

approximately 5 g/L and 150 g/L and a concentration of the metallic ions is

between approximately 10 g/L and 60 g/L.

12. The method of claim 11, wherein a concentration of the surfactant is

between approximately 0.5 g/L and 2 g/L.

13. The method of claim 12, wherein the substrate is a semiconductor substrate

having an integrated circuit formed therein and the conductive portion is

electrically connected to the integrated circuit.

14. A method for forming contact formations on a semiconductor substrate

comprising:

placing a semiconductor substrate in an electrolytic solution, the

semiconductor having at least one integrated circuit formed therein and at least

one exposed conductive portions being electrically connected to the at least one

integrated circuit, the electrolytic solution including a plurality of metallic ions

and an accelerator, the accelerator comprising at least one of bis-(sodium

sulfopropyl)~disulfide and 3-mercapto-l-propanesulfonic acid-sodium salt; and

applying a voltage across the electrolytic solution and the at least one

conductive portion of the substrate to cause the metallic ions to be reduced to

metal and deposited on the at least one conductive portion to form at least one

contact formation on the at least one conductive portion.

15. The method of claim 14, wherein the electrolytic solution further comprises a protonated organic additive.

16. The method of claim 15, wherein the protonated organic additive

comprises at least one of polyamine and polyimide.

17. The method of claim 16, wherein the electrolytic solution further comprises

an acid.

18. The method of claim 17, wherein the electrolytic solution further comprises

a surfactant.

19. The method of claim 18, wherein the acid comprises at least one of sulfuric

sulfonic acid, and propane sulfonic acid.

20. The method of claim 19, wherein the surfactant comprises at least one of

polyethylene glycol and polypropylene glycol.

21. The method of claim 20, wherein the metallic ions are copper ions.

22. The method of claim 21, wherein a concentration of the accelerator is

between approximately 10 ppm and 500 ppm.

23. The method of claim 22, wherein a concentration of the protonated organic

additive is between approximately 0.5 g/L and 2 g/L.

24. The method of claim 23, wherein a concentration of the acid is between

approximately 5 g/L and 150 g/L and a concentration of the metallic ions is

between approximately 10 g/L and 60 g/L.

25. The method of claim 24, wherein a concentration of the surfactant is

between approximately 0.5 g/L and 2 g/L.

26. The method of claim 25, wherein the integrated circuit is a microprocessor.

27. A method for forming contact formations on a semiconductor substrate

comprising:

placing a semiconductor substrate in a first electrolytic solution, the

integrated circuit, the first electrolytic solution including a first plurality of

metallic ions;

applying a voltage across the electrolytic solution and the at least one

conductive portion of the substrate while the semiconductor substrate is within

the first electrolytic solution to cause a portion of the first plurality of metallic ions

to be reduced to metal and deposited on the at least one conductive portion;

placing a semiconductor substrate in a second electrolytic solution, the

second electrolytic solution including a second plurality of metallic ions and an accelerator, the accelerator comprising at least one of bis-(sodium sulfopropyl)-

disulfide and 3-mercapto-l-propanesulfonic acid-sodium salt; and

applying a voltage across the electrolytic solution and the at least one

conductive portion of the substrate while the semiconductor substrate is within

the second electrolytic solution to cause the a portion of the second plurality of

metallic ions to be reduced to metal and deposited on the at least one conductive

portion to form at least one contact formation on the at least one conductive portion.

28. The method of claim 27, wherein the second electrolytic solution further

comprises a protonated organic additive.

29. The method of claim 28, wherein the first and second pluralities of metallic

ions are copper ions.

30. The method of claim 29, wherein the protonated organic additive

comprises at least one of polyamine and polyimide.