WO2004056547A3 - Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure - Google Patents

Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure Download PDF

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Publication number
WO2004056547A3
WO2004056547A3 PCT/IB2003/005460 IB0305460W WO2004056547A3 WO 2004056547 A3 WO2004056547 A3 WO 2004056547A3 IB 0305460 W IB0305460 W IB 0305460W WO 2004056547 A3 WO2004056547 A3 WO 2004056547A3
Authority
WO
WIPO (PCT)
Prior art keywords
micro
mechanical
manufacturing
oriented polymer
layer
Prior art date
Application number
PCT/IB2003/005460
Other languages
French (fr)
Other versions
WO2004056547A2 (en
Inventor
Dirk J Broer
Grietje N Mol
Witz Christiane M R De
Original Assignee
Koninkl Philips Electronics Nv
Dirk J Broer
Grietje N Mol
Witz Christiane M R De
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv, Dirk J Broer, Grietje N Mol, Witz Christiane M R De filed Critical Koninkl Philips Electronics Nv
Priority to CN2003801068552A priority Critical patent/CN1729086B/en
Priority to DE60327887T priority patent/DE60327887D1/en
Priority to AT03772564T priority patent/ATE432802T1/en
Priority to EP03772564A priority patent/EP1578579B1/en
Priority to JP2004561759A priority patent/JP4508876B2/en
Priority to US10/539,388 priority patent/US7538930B2/en
Priority to AU2003280194A priority patent/AU2003280194A1/en
Publication of WO2004056547A2 publication Critical patent/WO2004056547A2/en
Publication of WO2004056547A3 publication Critical patent/WO2004056547A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0053—Moulding articles characterised by the shape of the surface, e.g. ribs, high polish
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0016—Lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/756—Microarticles, nanoarticles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/034—Moulding

Abstract

The invention relates to a micro-mechanical thermal structure for modulating a light beam and a method for manufacturing such a structure. The micro-mechanical structure comprises two layers of material with different thermal expansion coefficients in a first direction and a second direction respectively, in which the first direction is transverse to the second direction and the two layers comprise an oriented polymer and the director of the molecules of the oriented polymer of the first layer is transverse to the director of the molecules of the oriented polymer of the second layer. An array of such micro-mechanical structures may form a thermo-optical modulator for modulating light. The method comprises a step of providing a mold with an orientation-inducing layer to obtain a molecular orientation in a mono-meric state of liquid crystalline monomers and a step of fixing the molecular orientation by photo-polymerization.
PCT/IB2003/005460 2002-12-20 2003-11-20 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure WO2004056547A2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CN2003801068552A CN1729086B (en) 2002-12-20 2003-11-20 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure
DE60327887T DE60327887D1 (en) 2002-12-20 2003-11-20 MICROMECHANICAL THERMAL STRUCTURE AND THEIR MANUFACTURING PROCESS
AT03772564T ATE432802T1 (en) 2002-12-20 2003-11-20 MICROMECHANICAL THERMAL STRUCTURE AND PROCESS OF PRODUCTION THEREOF
EP03772564A EP1578579B1 (en) 2002-12-20 2003-11-20 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure
JP2004561759A JP4508876B2 (en) 2002-12-20 2003-11-20 Micromechanical thermal structure and method for manufacturing the micromechanical structure
US10/539,388 US7538930B2 (en) 2002-12-20 2003-11-20 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure
AU2003280194A AU2003280194A1 (en) 2002-12-20 2003-11-20 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP02080519 2002-12-20
EP02080519.8 2002-12-20

Publications (2)

Publication Number Publication Date
WO2004056547A2 WO2004056547A2 (en) 2004-07-08
WO2004056547A3 true WO2004056547A3 (en) 2005-01-13

Family

ID=32668818

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2003/005460 WO2004056547A2 (en) 2002-12-20 2003-11-20 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure

Country Status (10)

Country Link
US (1) US7538930B2 (en)
EP (1) EP1578579B1 (en)
JP (1) JP4508876B2 (en)
KR (1) KR20050095587A (en)
CN (1) CN1729086B (en)
AT (1) ATE432802T1 (en)
AU (1) AU2003280194A1 (en)
DE (1) DE60327887D1 (en)
TW (1) TW200510238A (en)
WO (1) WO2004056547A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060122565A1 (en) * 2004-11-23 2006-06-08 Kooi Chee C Switch structures or the like based on a thermoresponsive polymer
US8442368B1 (en) * 2010-01-22 2013-05-14 The Ohio State University Research Foundation Cantilever couplers for intra-chip coupling to photonic integrated circuits
ES2602909T3 (en) 2012-09-07 2017-02-22 Akzo Nobel Chemicals International B.V.  Method and device for the preparation of expanded thermoplastic microspheres
CN105469847A (en) * 2015-11-29 2016-04-06 中国人民解放军国防科学技术大学 Device for realizing light-induced track rotation based on double-light beam misalignment method and method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6132668A (en) * 1985-09-26 2000-10-17 Foster-Miller, Inc. Biaxially oriented ordered polymer films
US6137623A (en) * 1998-03-17 2000-10-24 Mcnc Modulatable reflectors and methods for using same
US6236491B1 (en) * 1999-05-27 2001-05-22 Mcnc Micromachined electrostatic actuator with air gap
US6423260B1 (en) * 1997-08-06 2002-07-23 University Of Dayton Methods and apparatus for producing ordered parts from liquid crystal monomers

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Publication number Priority date Publication date Assignee Title
US4074253A (en) 1975-11-19 1978-02-14 Kenneth E. Macklin Novel bistable light modulators and display element and arrays therefrom
US4235522A (en) 1978-06-16 1980-11-25 Bos-Knox, Ltd. Light control device
NL8402201A (en) 1984-07-12 1986-02-03 Philips Nv PASSIVE DISPLAY.
KR960001941B1 (en) 1992-11-10 1996-02-08 재단법인한국전자통신연구소 Plate display device
US5481396A (en) 1994-02-23 1996-01-02 Aura Systems, Inc. Thin film actuated mirror array
US5784190A (en) 1995-04-27 1998-07-21 John M. Baker Electro-micro-mechanical shutters on transparent substrates
TW494263B (en) 1996-05-17 2002-07-11 Koninkl Philips Electronics Nv Liquid-crystal display device, compensator layer and method of manufacturing a retardation foil
US6080988A (en) 1996-12-20 2000-06-27 Nikon Corporation Optically readable radiation-displacement-conversion devices and methods, and image-rendering apparatus and methods employing same
US6366414B1 (en) 1999-09-03 2002-04-02 Agere Systems Guardian Corp. Micro-electro-mechanical optical device
DE60007535T2 (en) * 1999-10-08 2004-11-11 Sumitomo Bakelite Co. Ltd. METHOD AND DEVICE FOR PRODUCING A POLYMER FILM
JP2002303731A (en) * 2001-04-09 2002-10-18 Nitto Denko Corp Semitransmissive reflection plate, semitransmissive polarizing plate and liquid crystal display device using the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6132668A (en) * 1985-09-26 2000-10-17 Foster-Miller, Inc. Biaxially oriented ordered polymer films
US6423260B1 (en) * 1997-08-06 2002-07-23 University Of Dayton Methods and apparatus for producing ordered parts from liquid crystal monomers
US6137623A (en) * 1998-03-17 2000-10-24 Mcnc Modulatable reflectors and methods for using same
US6236491B1 (en) * 1999-05-27 2001-05-22 Mcnc Micromachined electrostatic actuator with air gap

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
KOSSIKHINA S A ET AL: "THERMOMECHANICAL PROPERTIES OF A MAGNETICALLY AND MECHANICALLY ORIENTED LIQUID CRYSTALLINE COPOLYESTER, XYDAR", POLYMER ENGINEERING & SCIENCE, WILEY & SONS, BOGNOR REGIS, GB, vol. 38, no. 6, June 1998 (1998-06-01), pages 914 - 921, XP000848913, ISSN: 0032-3888 *
O'NEILL M; KELLY S M: "Photoinduced surface alignment for liquid crystal displays", JOURNAL OF PHYSICS D, vol. 33, no. 10, 21 May 2000 (2000-05-21), BRISTOL, UK, pages R67 - R84, XP002303452 *

Also Published As

Publication number Publication date
ATE432802T1 (en) 2009-06-15
EP1578579A2 (en) 2005-09-28
KR20050095587A (en) 2005-09-29
DE60327887D1 (en) 2009-07-16
CN1729086A (en) 2006-02-01
TW200510238A (en) 2005-03-16
JP4508876B2 (en) 2010-07-21
WO2004056547A2 (en) 2004-07-08
US20070053051A1 (en) 2007-03-08
EP1578579B1 (en) 2009-06-03
CN1729086B (en) 2010-10-13
US7538930B2 (en) 2009-05-26
AU2003280194A1 (en) 2004-07-14
JP2006511187A (en) 2006-03-30

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