WO2003017013A3 - Experiment management system, method and medium - Google Patents

Experiment management system, method and medium Download PDF

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Publication number
WO2003017013A3
WO2003017013A3 PCT/US2002/024859 US0224859W WO03017013A3 WO 2003017013 A3 WO2003017013 A3 WO 2003017013A3 US 0224859 W US0224859 W US 0224859W WO 03017013 A3 WO03017013 A3 WO 03017013A3
Authority
WO
WIPO (PCT)
Prior art keywords
experiment
automated environment
environment
order
users
Prior art date
Application number
PCT/US2002/024859
Other languages
French (fr)
Other versions
WO2003017013A2 (en
Inventor
Badri N Krishnamurthy
Parris C M Hawkins
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to KR10-2004-7001992A priority Critical patent/KR20040025744A/en
Priority to AU2002356021A priority patent/AU2002356021A1/en
Priority to EP02752701A priority patent/EP1417549A2/en
Priority to JP2003521456A priority patent/JP2005520225A/en
Publication of WO2003017013A2 publication Critical patent/WO2003017013A2/en
Publication of WO2003017013A3 publication Critical patent/WO2003017013A3/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Systems or methods specially adapted for specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B15/00—Systems controlled by a computer
    • G05B15/02—Systems controlled by a computer electric
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

Systems, methods and mediums are provided for automating experiments within an automated environment without the need to disassociate the test subject (e.g., the semiconductor chip or chips) from that environment. An 'experiment' may be a pre-planned deviation of an established (e.g., pre-defined) process utilizing the automated environment. A computer-implemented method, system and computer-readable medium for managing experiments, such as those relating to semiconductor technology. An experiment order includes some deviation from a base process capable of operating in an automated environment. An approval of the experiment order is obtained from a distribution list of users, while permitting the users to attach documents to the experiment order or perhaps modify the experiment. The experiment order is translated into processing data suitable for implementation by said automated environment, and stored. The experiment is caused to be executed in conjunction with at least some portion of said base process via the automated environment according to the processing data.
PCT/US2002/024859 2001-08-14 2002-08-06 Experiment management system, method and medium WO2003017013A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR10-2004-7001992A KR20040025744A (en) 2001-08-14 2002-08-06 Experiment management system, method and medium
AU2002356021A AU2002356021A1 (en) 2001-08-14 2002-08-06 Experiment management system, method and medium
EP02752701A EP1417549A2 (en) 2001-08-14 2002-08-06 Experiment management system, method and medium
JP2003521456A JP2005520225A (en) 2001-08-14 2002-08-06 Experiment management system, method and medium

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/928,474 2001-08-14
US09/928,474 US6984198B2 (en) 2001-08-14 2001-08-14 Experiment management system, method and medium

Publications (2)

Publication Number Publication Date
WO2003017013A2 WO2003017013A2 (en) 2003-02-27
WO2003017013A3 true WO2003017013A3 (en) 2003-05-08

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/024859 WO2003017013A2 (en) 2001-08-14 2002-08-06 Experiment management system, method and medium

Country Status (8)

Country Link
US (1) US6984198B2 (en)
EP (1) EP1417549A2 (en)
JP (1) JP2005520225A (en)
KR (1) KR20040025744A (en)
CN (1) CN100511054C (en)
AU (1) AU2002356021A1 (en)
TW (1) TW578081B (en)
WO (1) WO2003017013A2 (en)

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