WO2002054139A2 - Lcc device inspection module - Google Patents
Lcc device inspection module Download PDFInfo
- Publication number
- WO2002054139A2 WO2002054139A2 PCT/US2002/000038 US0200038W WO02054139A2 WO 2002054139 A2 WO2002054139 A2 WO 2002054139A2 US 0200038 W US0200038 W US 0200038W WO 02054139 A2 WO02054139 A2 WO 02054139A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- light
- lcc
- mirror
- frequency
- lcc device
- Prior art date
Links
- 238000007689 inspection Methods 0.000 title description 16
- 238000000576 coating method Methods 0.000 claims abstract description 20
- 239000011248 coating agent Substances 0.000 claims description 14
- 238000005286 illumination Methods 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 13
- 229910052802 copper Inorganic materials 0.000 description 13
- 239000010949 copper Substances 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000003908 quality control method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Definitions
- FIG. 1 is a side elevation view of an LCC device inspection module embodying the present invention.
- Fig. 2 is a top plan view of the module illustrated in Fig. 1.
- Fig. 3 is an end view of the module illustrated in Fig. 1.
- Fig. 4 is a view taken along line 4-4 in Fig. 3.
- the front and rear surfaces 46, 50 are coated with reflective coatings 54, 58, respectively.
- the coating 54 on the front surface 46 is preferably dichroic or dichromatic (i.e., the coating 54 reflects only selected frequencies of light waves), and the coating 58 on the rear surface 50 may be broadband (i.e., reflects white light) or dichroic or dichromatic.
- the rear surfaces 50 of the mirrors 38 are non-parallel to the front surfaces 46.
- the reflective coatings 54, 58 permit one to select the perspective angle from which one desires to view the LCC device 18 by simply changing the wavelength of the illumination source.
- Several embodiments of the present invention are possible, and such embodiments may include different LED color combinations and different reflective coatings.
- the LED's may be replaced with other light emitting elements, including fiber optic lights or any other suitable light source.
- the lower bank of lights 26 preferably includes first and second sets of LED's 62, 66, respectively, having first and second frequencies (e.g., red and blue as illustrated), respectively.
- the LED's are arranged in an alternating pattern between the first and second sets 62, 66 such that each LED of the first set 62 has an LED of the second set 66 on either side of it, and vice versa.
- the upper ring of lights 42 is preferably comprised of third and fourth sets of LED's 70, 74 having third and fourth frequencies (e.g., green and blue as illustrated), respectively.
- the third and fourth sets of LED's 70, 74 are supported by a generally square or rectangular-shaped frame 78.
- the third set of LED's 70 are preferably supported on all four sides of the frame 78 and the fourth set of LED's 74 are preferably supported on just two sides of the frame 78.
- the reflective coating 58 (e.g., a blue or broadband reflective coating) on the rear surfaces 50 of the mirrors 38 reflects light 85 of the frequency emitted by the second set of LED's 66 (e.g., blue light).
- the second set of LED's 66 When the second set of LED's 66 is illuminated, the light 85 will pass through the coating 54 on the front surfaces 46 of the mirrors 38 and be reflected off the coating 58 on the rear surfaces 50.
- the LCC device 18 will therefore be illuminated for the camera 14 from the angle of the rear surfaces 50 of the mirrors 38. From this perspective or angle, the bottom edges of the LCC device 18 are silhouetted for the camera 14. An additional view of the device 18 is required to permit a final determination of warpage.
- the fourth set of LED's 74 may be illuminated.
- the fourth set of LED's 74 is preferably angled toward the vacuum nozzle 22, a portion of which is coated with a diffusion layer 86 (Figs. 1 and 3) for the fourth frequency of light (e.g., the diffusion layer may be a blue diffusion layer in the event the fourth set of LED's 74 emit blue light).
- the diffuse light reflected off the diffusion layer 86 backlights or silhouettes the LCC device 18 for the camera 14.
- the camera 14 can now see a silhouetted plan view of the bottom of the LCC device 18 reflected off the beam splitter 34. This provides the second view necessary for determining whether the LCC device 18 is warped.
- the bottom plan view may also be used to inspect for 2D pad measurement and device orientation.
- the inspection module 10 can determine the length and width of the pads 82 from the bottom plan view.
- Figs. 6 and 7 illustrate a lead-one indicator 90 included on each LCC device 18.
- the LCC device inspection module 10 can therefore determine the orientation of the first lead of the LCC device 18 and compare this with the desired orientation.
- the lead-one indicator 90 points up and to the right. If the first lead is not in the proper position, the inspection module 10 sends signals upstream to a controller that manipulates the LCC device 18 into the proper orientation after it is passed out of the inspection module 10 and before it is packaged for shipment.
- such dark field illumination is provided by the third set of LED's 70, which is situated behind the mirrors 38.
- the light 87 emitted by the third set of LED's 70 is preferably of a different frequency (e.g., green light) as the light 83, 85 emitted by the first and second sets of LED's 62, 66.
- the reflective coating 58 on the rear surface 50 be non-reflective of the light 87 emitted by the third set of LED's 70 (e.g., the reflective coating 58 is preferably not a broadband reflector).
- the white diffuser 30 is a piece of white plastic, however, other materials may be used.
- the light emitted by the first and second sets of LED's 62, 66 evenly illuminates the white diffuser 30. Because the diffuse light is reflected off the mirrors 38, more than a hemisphere of diffuse illumination is created. Thus, the light from the first and second sets of LED's 62, 66 meets both the "diffuse" and "broad area" requirements for creating a cloudy-day lighting condition. If the body of the part is white, polarized light may achieve the permitted contrast to see copper smear.
- Fig. 8 illustrates a possible lighting setup with >hemisphere (about 75% of sphere) cloudy day lighting. Parts similar to those described above are given the same reference numerals in Fig. 8. Additionally, this lighting setup includes LED boards 90, a gray filter or diffuser 94, and a black background 98.
- the mirrors 38 are preferably silvered mirrors if cloudy day lighting is employed, or may be replaced with beam splitters.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2002237751A AU2002237751A1 (en) | 2001-01-02 | 2002-01-02 | Lcc device inspection module |
EP02704051A EP1358473A2 (en) | 2001-01-02 | 2002-01-02 | Lcc device inspection module |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25929701P | 2001-01-02 | 2001-01-02 | |
US60/259,297 | 2001-01-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002054139A2 true WO2002054139A2 (en) | 2002-07-11 |
WO2002054139A3 WO2002054139A3 (en) | 2002-10-03 |
Family
ID=22984363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/000038 WO2002054139A2 (en) | 2001-01-02 | 2002-01-02 | Lcc device inspection module |
Country Status (4)
Country | Link |
---|---|
US (1) | US6573987B2 (en) |
EP (1) | EP1358473A2 (en) |
AU (1) | AU2002237751A1 (en) |
WO (1) | WO2002054139A2 (en) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0687847B2 (en) * | 1987-03-06 | 1994-11-09 | 株式会社東芝 | Magnetic resonance imager |
US6813016B2 (en) * | 2002-03-15 | 2004-11-02 | Ppt Vision, Inc. | Co-planarity and top-down examination method and optical module for electronic leaded components |
JP4041768B2 (en) * | 2002-09-12 | 2008-01-30 | 松下電器産業株式会社 | Component mounting head |
CN100383593C (en) * | 2003-03-07 | 2008-04-23 | 伊斯梅卡半导体控股公司 | Optical device and inspection module |
WO2005103656A1 (en) * | 2004-04-23 | 2005-11-03 | Advanced Systems Automation Limited | Multiple surface viewer |
WO2008124397A1 (en) | 2007-04-03 | 2008-10-16 | David Fishbaine | Inspection system and method |
DE102008018586A1 (en) * | 2008-04-12 | 2009-11-05 | Mühlbauer Ag | Optical detection device and method for detecting surfaces of components |
US20100226114A1 (en) * | 2009-03-03 | 2010-09-09 | David Fishbaine | Illumination and imaging system |
WO2011012291A1 (en) * | 2009-07-27 | 2011-02-03 | Amb Apparate + Maschinenbau Gmbh | Test system for detecting defects of form and/or positional defects of wafers |
KR101500375B1 (en) * | 2013-06-27 | 2015-03-10 | 현대자동차 주식회사 | Device for inspecting vehicle body paint exterior |
EP3071930B1 (en) * | 2013-11-20 | 2021-03-24 | Semiconductor Technologies & Instruments Pte Ltd. | Apparatus and method for selectively inspecting component sidewalls |
JP6491425B2 (en) * | 2014-05-21 | 2019-03-27 | Towa株式会社 | Electronic parts package side view photographing device |
GB2536468A (en) * | 2015-03-18 | 2016-09-21 | Stratec Biomedical Ag | Device, system and method for the visual alignment of a pipettor tip and a reference point marker |
CN107889522B (en) | 2015-08-26 | 2020-08-28 | Abb瑞士股份有限公司 | Object multi-view detection device and method thereof |
CN106123808B (en) * | 2016-06-14 | 2018-09-14 | 上海贝特威自动化科技有限公司 | A method of it is measured for the deflection of automobile rearview mirror specular angle degree |
JP6546672B1 (en) * | 2018-02-22 | 2019-07-17 | 陽程科技股▲ふん▼有限公司 | Optical path detection device detection method |
US20210299879A1 (en) * | 2018-10-27 | 2021-09-30 | Gilbert Pinter | Machine vision systems, illumination sources for use in machine vision systems, and components for use in the illumination sources |
JP2022000617A (en) * | 2020-06-19 | 2022-01-04 | スミダコーポレーション株式会社 | Inspection device and inspection method for electronic component |
DE102020127580A1 (en) * | 2020-10-20 | 2022-04-21 | Integrated Dynamics Engineering Gesellschaft mit beschränkter Haftung | Device and method for imaging an object in at least two views |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4555179A (en) * | 1982-11-08 | 1985-11-26 | John Langerholc | Detection and imaging of objects in scattering media by light irradiation |
US4873569A (en) * | 1987-05-15 | 1989-10-10 | Dainippon Screen Mfg. Co., Ltd. | Image reader having spectroscope for color separation |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49133042A (en) * | 1973-04-09 | 1974-12-20 | ||
JPH03203399A (en) * | 1989-12-29 | 1991-09-05 | Matsushita Electric Ind Co Ltd | Parts mounting device |
US5173796A (en) * | 1991-05-20 | 1992-12-22 | Palm Steven G | Three dimensional scanning system |
US5452080A (en) * | 1993-06-04 | 1995-09-19 | Sony Corporation | Image inspection apparatus and method |
US6128034A (en) * | 1994-02-18 | 2000-10-03 | Semiconductor Technologies & Instruments, Inc. | High speed lead inspection system |
US5909285A (en) * | 1997-05-05 | 1999-06-01 | Beaty; Elwin M. | Three dimensional inspection system |
US6359694B1 (en) * | 1997-11-10 | 2002-03-19 | Siemens Aktiengesellschaft | Method and device for identifying the position of an electrical component or terminals thereof, and equipping head employing same |
US6055055A (en) * | 1997-12-01 | 2000-04-25 | Hewlett-Packard Company | Cross optical axis inspection system for integrated circuits |
JPH11237210A (en) * | 1998-02-19 | 1999-08-31 | Komatsu Ltd | Inspecting equipment of semiconductor package |
JP3747621B2 (en) * | 1998-03-26 | 2006-02-22 | コニカミノルタオプト株式会社 | Color projection display device |
US6292261B1 (en) * | 1998-05-22 | 2001-09-18 | Cyberoptics Corporation | Rotary sensor system with at least two detectors |
US6249341B1 (en) * | 1999-01-25 | 2001-06-19 | Amnis Corporation | Imaging and analyzing parameters of small moving objects such as cells |
-
2002
- 2002-01-02 WO PCT/US2002/000038 patent/WO2002054139A2/en not_active Application Discontinuation
- 2002-01-02 AU AU2002237751A patent/AU2002237751A1/en not_active Abandoned
- 2002-01-02 US US10/039,378 patent/US6573987B2/en not_active Expired - Fee Related
- 2002-01-02 EP EP02704051A patent/EP1358473A2/en not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4555179A (en) * | 1982-11-08 | 1985-11-26 | John Langerholc | Detection and imaging of objects in scattering media by light irradiation |
US4873569A (en) * | 1987-05-15 | 1989-10-10 | Dainippon Screen Mfg. Co., Ltd. | Image reader having spectroscope for color separation |
Also Published As
Publication number | Publication date |
---|---|
WO2002054139A3 (en) | 2002-10-03 |
US20020085199A1 (en) | 2002-07-04 |
US6573987B2 (en) | 2003-06-03 |
AU2002237751A1 (en) | 2002-07-16 |
EP1358473A2 (en) | 2003-11-05 |
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