WO2002001193A3 - Optical system - Google Patents

Optical system Download PDF

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Publication number
WO2002001193A3
WO2002001193A3 PCT/US2001/019987 US0119987W WO0201193A3 WO 2002001193 A3 WO2002001193 A3 WO 2002001193A3 US 0119987 W US0119987 W US 0119987W WO 0201193 A3 WO0201193 A3 WO 0201193A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical system
surface made
image recording
band pass
spectral
Prior art date
Application number
PCT/US2001/019987
Other languages
French (fr)
Other versions
WO2002001193A2 (en
Inventor
Peter E Schmidt
Pamela R Lipson
John C Bowman
Original Assignee
Teradyne Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teradyne Inc filed Critical Teradyne Inc
Priority to EP01950394A priority Critical patent/EP1297326A2/en
Priority to AU2001271389A priority patent/AU2001271389A1/en
Priority to JP2002506079A priority patent/JP2004502166A/en
Publication of WO2002001193A2 publication Critical patent/WO2002001193A2/en
Publication of WO2002001193A3 publication Critical patent/WO2002001193A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G01N2021/8825—Separate detection of dark field and bright field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8838—Stroboscopic illumination; synchronised illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8845—Multiple wavelengths of illumination or detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G01N2021/95661—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G01N2021/95661—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature
    • G01N2021/95669—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature for solder coating, coverage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's

Abstract

An optical system for use in an inspection system is described. The optical system includes an imaging system which may be provided as a multi-spectral band pass image recording system and a lighting system which includes at least one coaxial light and at least one side light to provide spectral discrimination and to provide contrast between a first surface made from a first material and a second surface made from a second different material.
PCT/US2001/019987 2000-06-28 2001-06-22 Optical system WO2002001193A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP01950394A EP1297326A2 (en) 2000-06-28 2001-06-22 Optical system
AU2001271389A AU2001271389A1 (en) 2000-06-28 2001-06-22 Optical system
JP2002506079A JP2004502166A (en) 2000-06-28 2001-06-22 Optical device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/605,613 2000-06-28
US09/605,613 US6552783B1 (en) 2000-06-28 2000-06-28 Optical system

Publications (2)

Publication Number Publication Date
WO2002001193A2 WO2002001193A2 (en) 2002-01-03
WO2002001193A3 true WO2002001193A3 (en) 2002-06-27

Family

ID=24424442

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/019987 WO2002001193A2 (en) 2000-06-28 2001-06-22 Optical system

Country Status (8)

Country Link
US (1) US6552783B1 (en)
EP (1) EP1297326A2 (en)
JP (1) JP2004502166A (en)
KR (1) KR20030015297A (en)
CN (1) CN1434919A (en)
AU (1) AU2001271389A1 (en)
TW (1) TW552413B (en)
WO (1) WO2002001193A2 (en)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE9900276L (en) * 1999-01-28 2000-01-10 Skogsind Tekn Foskningsinst Topographic determination of a surface illuminated by incident light
IL132817A (en) * 1999-11-08 2003-11-23 Orbotech Schuh Gmbh & Co Illumination and image acquisition system
US20030123055A1 (en) * 2001-12-31 2003-07-03 Stephen Jaeschke Image digitizer having single optical path
DE10234084B4 (en) * 2002-07-26 2006-06-14 Koenig & Bauer Ag Device for inspection of sheet material
DE10239548A1 (en) 2002-08-23 2004-03-04 Leica Microsystems Semiconductor Gmbh Device and method for inspecting an object
WO2004023072A1 (en) * 2002-09-05 2004-03-18 Solvision, Inc. Shadow-free 3d and 2d measurement system and method
EP1400802A1 (en) * 2002-09-23 2004-03-24 Ford Global Technologies, Inc. Method and arrangement for detecting and evaluating surface irregularities
US6781687B2 (en) * 2002-09-26 2004-08-24 Orbotech Ltd. Illumination and image acquisition system
KR20040034003A (en) * 2002-10-16 2004-04-28 주식회사 고영테크놀러지 Inspecting apparatus of protection circuit module
EP1581781B1 (en) * 2003-01-09 2011-09-21 Orbotech Ltd. Method and apparatus for simultaneous 2-d and topographical inspection
JP4166585B2 (en) * 2003-01-20 2008-10-15 株式会社サキコーポレーション Appearance inspection apparatus and appearance inspection method
JP4166587B2 (en) * 2003-01-24 2008-10-15 株式会社サキコーポレーション Appearance inspection apparatus and volume inspection method
US7019826B2 (en) * 2003-03-20 2006-03-28 Agilent Technologies, Inc. Optical inspection system, apparatus and method for reconstructing three-dimensional images for printed circuit board and electronics manufacturing inspection
DE102005033061A1 (en) * 2005-07-15 2007-01-25 Asentics Gmbh & Co. Kg Method and device for testing a hollow fiber bundle
US7372556B2 (en) * 2005-10-31 2008-05-13 The Boeing Company Apparatus and methods for inspecting a composite structure for inconsistencies
US8374498B2 (en) 2006-09-29 2013-02-12 Microscan Systems, Inc. Systems and/or devices for camera-based inspections
US8032017B2 (en) * 2006-09-29 2011-10-04 Microscan Systems, Inc. Methods for providing diffuse light
US7978970B2 (en) * 2006-09-29 2011-07-12 Microscan Systems, Inc. Systems and/or devices for providing diffuse light
JP5132982B2 (en) * 2007-05-02 2013-01-30 株式会社日立ハイテクノロジーズ Pattern defect inspection apparatus and method
US7877003B2 (en) * 2007-06-20 2011-01-25 Microscan Systems, Inc. Devices, systems, and methods regarding images
US7698098B2 (en) * 2008-02-18 2010-04-13 Thermo Electron Scientific Instruments Llc Efficient spectral matching, particularly for multicomponent spectra
TWI382176B (en) * 2008-02-19 2013-01-11 Utechzone Co Ltd Optical detection device
JP5362368B2 (en) * 2009-01-09 2013-12-11 株式会社日立情報通信エンジニアリング Appearance inspection apparatus and appearance inspection method
US8000594B2 (en) * 2009-07-02 2011-08-16 Microscan Systems, Inc. Diffuse reflective illuminator
DE102010030883B4 (en) * 2009-07-03 2018-11-08 Koh Young Technology Inc. Apparatus for testing a plate and method therefor
US8768159B2 (en) 2009-07-10 2014-07-01 Microscan Systems, Inc. Combination dark field and bright field illuminator
US8107808B2 (en) * 2009-07-10 2012-01-31 Microscan Systems, Inc. Combination dark field and bright field illuminator
ES2670333T3 (en) * 2009-11-14 2018-05-30 Vmt Vision Machine Technic Bildverarbeitungssysteme Gmbh Procedure for detecting the front edge surfaces of hollow fibers and procedure for detecting the interior spaces of hollow, unobstructed fibers of a bundle of hollow fibers
US9212900B2 (en) 2012-08-11 2015-12-15 Seagate Technology Llc Surface features characterization
US20140076956A1 (en) * 2012-09-20 2014-03-20 Tyco Electronics Corporation Soldering machine and method of soldering
TWI504886B (en) * 2013-12-26 2015-10-21 Machvision Inc Inspection method of crack defects and heterochromatic of printed circuit board and inspection apparatus of the same
JP6280429B2 (en) * 2014-04-21 2018-02-14 キヤノン株式会社 Color measuring apparatus and method
TWI495867B (en) * 2014-07-22 2015-08-11 Machvision Inc Application of repeated exposure to multiple exposure image blending detection method
CN104897693A (en) * 2015-06-12 2015-09-09 武汉中导光电设备有限公司 Glass surface defect enhancement device and detection method thereof
CN106680298A (en) * 2016-12-16 2017-05-17 南京协辰电子科技有限公司 Printed circuit board (PCB) detection device and PCB detection method
KR102084563B1 (en) 2017-01-03 2020-03-04 주식회사 엘지화학 Welding Method Capable of Improving Welding-Reliability through Accurate Definition about Welding Portion of Electrode Tabs
CN108333187A (en) * 2018-04-10 2018-07-27 湖南科创信息技术股份有限公司 Plate-shaped material two sides otherness vision identification system
CN108896560A (en) * 2018-06-29 2018-11-27 佛山市坦斯盯科技有限公司 A kind of AOI light source complete machine
CN108896559A (en) * 2018-06-29 2018-11-27 佛山市坦斯盯科技有限公司 A kind of AOI light source
CN109142375A (en) * 2018-08-20 2019-01-04 宁波市智能制造产业研究院 A kind of high accuracy vision detection system and method for target
WO2020241598A1 (en) * 2019-05-28 2020-12-03 京セラ株式会社 Spectrum determination device, spectrum determination method, spectrum determination program, illumination system, illumination device, and inspection device
CN110108720A (en) * 2019-05-30 2019-08-09 苏州精濑光电有限公司 Optical detection apparatus
CN110687134B (en) * 2019-09-29 2021-03-16 武汉大学 Online detection device and method in production of banded FPC
CN111256826B (en) * 2020-05-01 2020-08-04 武汉精立电子技术有限公司 Display screen chrominance measuring method and device and terminal equipment
TWI764179B (en) * 2020-06-19 2022-05-11 財團法人紡織產業綜合研究所 Textile detecting system and textile detecting method
CN114184138A (en) * 2020-08-24 2022-03-15 深圳中科飞测科技股份有限公司 Detection device and detection method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5187611A (en) * 1991-08-27 1993-02-16 Northeast Robotics, Inc. Diffuse on-axis light source
US5684530A (en) * 1993-02-16 1997-11-04 Northeast Robotics, Inc. Continuous diffuse illumination method and apparatus
EP0822409A2 (en) * 1996-08-02 1998-02-04 MV Research Limited A measurement system
US5745236A (en) * 1994-05-31 1998-04-28 New Creation Co., Ltd. Optical inspecting apparatus having a focusing system with a telecentric optical system and an aperture stop
US5982493A (en) * 1998-06-02 1999-11-09 Motorola, Inc. Apparatus and method for acquiring multiple images
WO2000010114A1 (en) * 1998-08-14 2000-02-24 Acuity Imaging, Llc System and method for arithmetic operations for electronic package inspection

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0236738A3 (en) 1986-02-05 1988-12-21 OMRON Corporation Input method for reference printed circuit board assembly data to an image processing printed circuit board assembly automatic inspection apparatus
IL85862A (en) 1988-03-24 1993-01-14 Orbot Systems Ltd Telecentric imaging system
JPH02231510A (en) * 1989-03-02 1990-09-13 Omron Tateisi Electron Co Substrate inspection device
US5058982A (en) * 1989-06-21 1991-10-22 Orbot Systems Ltd. Illumination system and inspection apparatus including same
US4959898A (en) * 1990-05-22 1990-10-02 Emhart Industries, Inc. Surface mount machine with lead coplanarity verifier
IL99823A0 (en) 1990-11-16 1992-08-18 Orbot Instr Ltd Optical inspection method and apparatus
IL125217A (en) 1990-12-04 1999-10-28 Orbot Instr Ltd Apparatus and method for microscopic inspection of articles
EP0612203A4 (en) 1991-11-07 1995-05-10 Omron Tateisi Electronics Co Automatic soldering apparatus, teaching apparatus thereof and teaching method thereof, soldering inspection apparatus and its inspection method, and automatic soldering correction apparatus and its correction method.
IL102659A (en) 1992-07-27 1997-07-13 Orbot Instr Ltd Apparatus and method for comparing and aligning two digital representations of an image
IL104708A (en) 1993-02-12 1995-12-31 Orbotech Ltd Apparatus and method for optical inspection of articles
JPH0896129A (en) 1994-09-21 1996-04-12 Omron Corp Model image registering method
US5793901A (en) 1994-09-30 1998-08-11 Omron Corporation Device and method to detect dislocation of object image data
KR0168243B1 (en) 1994-12-19 1999-05-01 다떼이시 요시오 Observation area setting method and device, Appearance inspection method using this observation area setting method and device
EP0871027A3 (en) * 1997-04-07 1999-05-19 Hewlett-Packard Company Inspection of print circuit board assembly

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5187611A (en) * 1991-08-27 1993-02-16 Northeast Robotics, Inc. Diffuse on-axis light source
US5684530A (en) * 1993-02-16 1997-11-04 Northeast Robotics, Inc. Continuous diffuse illumination method and apparatus
US5745236A (en) * 1994-05-31 1998-04-28 New Creation Co., Ltd. Optical inspecting apparatus having a focusing system with a telecentric optical system and an aperture stop
EP0822409A2 (en) * 1996-08-02 1998-02-04 MV Research Limited A measurement system
US5982493A (en) * 1998-06-02 1999-11-09 Motorola, Inc. Apparatus and method for acquiring multiple images
WO2000010114A1 (en) * 1998-08-14 2000-02-24 Acuity Imaging, Llc System and method for arithmetic operations for electronic package inspection

Also Published As

Publication number Publication date
JP2004502166A (en) 2004-01-22
KR20030015297A (en) 2003-02-20
EP1297326A2 (en) 2003-04-02
CN1434919A (en) 2003-08-06
TW552413B (en) 2003-09-11
WO2002001193A2 (en) 2002-01-03
US6552783B1 (en) 2003-04-22
AU2001271389A1 (en) 2002-01-08

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