WO2001040558A2 - Clean-room cleaning cloth - Google Patents

Clean-room cleaning cloth Download PDF

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Publication number
WO2001040558A2
WO2001040558A2 PCT/EP2000/011584 EP0011584W WO0140558A2 WO 2001040558 A2 WO2001040558 A2 WO 2001040558A2 EP 0011584 W EP0011584 W EP 0011584W WO 0140558 A2 WO0140558 A2 WO 0140558A2
Authority
WO
WIPO (PCT)
Prior art keywords
cleaning cloth
clean room
continuous filaments
dtex
titer
Prior art date
Application number
PCT/EP2000/011584
Other languages
German (de)
French (fr)
Other versions
WO2001040558A3 (en
Inventor
Robert Groten
Gernot Buerger
Original Assignee
Carl Freudenberg Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Freudenberg Kg filed Critical Carl Freudenberg Kg
Priority to AT00989869T priority Critical patent/ATE278827T1/en
Priority to JP2001542621A priority patent/JP2003515407A/en
Priority to EP00989869A priority patent/EP1234066B1/en
Priority to DE50008157T priority patent/DE50008157D1/en
Priority to AU26672/01A priority patent/AU2667201A/en
Publication of WO2001040558A2 publication Critical patent/WO2001040558A2/en
Publication of WO2001040558A3 publication Critical patent/WO2001040558A3/en

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Classifications

    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H3/00—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length
    • D04H3/08—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating
    • D04H3/10—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating with bonds between yarns or filaments made mechanically
    • D04H3/105—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating with bonds between yarns or filaments made mechanically by needling
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H3/00—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length
    • D04H3/016—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the fineness
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L13/00—Implements for cleaning floors, carpets, furniture, walls, or wall coverings
    • A47L13/10—Scrubbing; Scouring; Cleaning; Polishing
    • A47L13/16—Cloths; Pads; Sponges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools, brushes, or analogous members
    • B08B1/143—
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01D—MECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
    • D01D5/00—Formation of filaments, threads, or the like
    • D01D5/28—Formation of filaments, threads, or the like while mixing different spinning solutions or melts during the spinning operation; Spinnerette packs therefor
    • D01D5/30—Conjugate filaments; Spinnerette packs therefor
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F8/00—Conjugated, i.e. bi- or multicomponent, artificial filaments or the like; Manufacture thereof
    • D01F8/04—Conjugated, i.e. bi- or multicomponent, artificial filaments or the like; Manufacture thereof from synthetic polymers
    • D01F8/12—Conjugated, i.e. bi- or multicomponent, artificial filaments or the like; Manufacture thereof from synthetic polymers with at least one polyamide as constituent
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F8/00—Conjugated, i.e. bi- or multicomponent, artificial filaments or the like; Manufacture thereof
    • D01F8/04—Conjugated, i.e. bi- or multicomponent, artificial filaments or the like; Manufacture thereof from synthetic polymers
    • D01F8/14—Conjugated, i.e. bi- or multicomponent, artificial filaments or the like; Manufacture thereof from synthetic polymers with at least one polyester as constituent
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H13/00—Other non-woven fabrics
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H3/00—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length
    • D04H3/005—Synthetic yarns or filaments
    • D04H3/009—Condensation or reaction polymers
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H3/00—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length
    • D04H3/08—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating
    • D04H3/10—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating with bonds between yarns or filaments made mechanically
    • D04H3/11—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating with bonds between yarns or filaments made mechanically by fluid jet
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H3/00—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length
    • D04H3/08—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating
    • D04H3/16—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating with bonds between thermoplastic filaments produced in association with filament formation, e.g. immediately following extrusion
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H5/00—Non woven fabrics formed of mixtures of relatively short fibres and yarns or like filamentary material of substantial length
    • D04H5/02—Non woven fabrics formed of mixtures of relatively short fibres and yarns or like filamentary material of substantial length strengthened or consolidated by mechanical methods, e.g. needling
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H5/00—Non woven fabrics formed of mixtures of relatively short fibres and yarns or like filamentary material of substantial length
    • D04H5/02—Non woven fabrics formed of mixtures of relatively short fibres and yarns or like filamentary material of substantial length strengthened or consolidated by mechanical methods, e.g. needling
    • D04H5/03—Non woven fabrics formed of mixtures of relatively short fibres and yarns or like filamentary material of substantial length strengthened or consolidated by mechanical methods, e.g. needling by fluid jet

Definitions

  • the invention relates to a clean room cleaning cloth consisting of a microfilament nonwoven fabric with basis weights of 30 to 300 g / m 2 .
  • Cleanrooms are increasingly used for the manufacture, inspection and maintenance of precision products, where it is very important that various work steps take place in an environment that is largely free of small particles.
  • the improvements in the production of high-tech products such as microelectronic circuits, optical or pharmaceutical products place ever increasing demands on the particle content of the clean rooms, typically for a class 100 clean room in the range of up to 100 particles in the size> 0, 5 ⁇ m per cubic foot of indoor air or in the equivalent metric purity class M 3.5 of no more than 3530 particles in the size of> 0.5 ⁇ m per cubic meter of indoor air [per million (parts per miliion - ppm) or increasingly in particles per billion ( parts per billion - ppb)] is required.
  • the integrated circuits are produced on so-called "wafers", thin silicon single-crystal wafers.
  • the integrated circuits require an exact electrical connection of the transistors and the other electrical components to one another.
  • the individual circuit components are connected to one another by an electrically conductive film, which is made of vapor-deposited metal the conductor track structures are produced by a photo-etching process.
  • An insulation layer between the semiconductor elements underneath and the evaporated metal layer permits an electrical connection only at the locations provided for this purpose.
  • the insulation layer is applied to the surface of the “wafer” after the individual components have been produced, but before the “wafer” is vapor-deposited with the conductive metal to produce the interconnect structure. Contamination such as fiber fragments or dust particles can lead to short circuits between the components and thus at least to a partial failure of the circuit functions provided. Therefore, a basic requirement is to keep all surfaces and workpieces as free as possible from these contaminants.
  • Woven or knitted cleaning wipes are known from documents US 4,888,229 and US 5,229,181, which are intended to prevent the release of lint or fiber fragments due to the special edging of their edges. Furthermore, from US Pat. Nos. 4,328,279 and 5,736,469, cleanroom cleaning wipes are known which consist of nonwovens. A chemical size is applied to the surface of the fibers forming the nonwovens to reduce the amount of extractable ions or to reduce the electrostatic charge.
  • the documents US 5,320,900 and US 5,645,916 describe clean room cleaning wipes which consist of fiber mixtures and have been consolidated into nonwovens by means of a water jet treatment. Synthetic fibers such as polyester and regenerated cellulose or cellulose fibers are specified as fibers.
  • a disadvantage of the known cleanroom cleaning wipes is that they cannot be subjected to a washing process without which the highest cleanroom classes 10 or better cannot be achieved. Therefore, these classes can only be served today with fabrics or knitted continuous filaments.
  • the invention has set itself the task of providing inexpensive, washable cleanroom cleaning cloth which meets the requirements of cleanroom class 100, and a method for its production. By means of a subsequent clean room washing process, the clean room cleaning cloth according to the invention based on microfilament spunbonded nonwoven can be used in clean room class 10 or better.
  • the object is achieved by a clean room cleaning cloth which is made of a microfilament nonwoven fabric with basis weights of 30 to 300 g / m ? , wherein the nonwoven fabric consists of melt-spun, aerodynamically stretched and immediately deposited into a nonwoven multi-component continuous filament with a titer of 1.5 to 5 dtex and the multi-component continuous filament at least 80% to micro-continuous filament with a titer of 0.1 to 1 , 0 dtex are tracked and solidified.
  • a clean room cleaning cloth has a surface structure into which dust particles and liquids penetrate well and are held therein.
  • the cleanroom cleaning cloth is preferably one in which the nonwoven fabric consists of melt-spun, aerodynamically stretched, and multi-component continuous filaments with a titer of 2 to 3 dtex, which are immediately deposited to form a nonwoven, and the multi-component continuous filaments are at least 80% micro-continuous filaments with a titer from 0.1 to 0.3 dtex are split and solidified.
  • the cleanroom cleaning cloth is preferably one in which the multi-component continuous filament is a bicomponent continuous filament made of two incompatible polymers, in particular a polyester and a polyamide. is.
  • a bicomponent filament has good cleavage in super micro filaments and brings about a favorable ratio of strength to basis weight.
  • the cleanroom cleaning cloth is preferably one in which the multicomponent continuous filaments have a cross section with an orange-like or also called “pie” structure, the segments alternately each containing one of the two incompatible polymers.
  • the multicomponent continuous filaments have a cross section with an orange-like or also called “pie” structure, the segments alternately each containing one of the two incompatible polymers.
  • a filament-side-by-side (s / s) arrangement of the incompatible polymers in the multicomponent filament is also possible, which is preferably used to produce crimped filaments, such arrangements of the incompatible polymers in the multicomponent filament have proven to be very easily cleavable.
  • the cleanroom cleaning cloth is preferably also one in which at least one of the incompatible polymers forming the multi-component continuous filament contains an additive, such as color pigments, permanently acting antistatic agents and / or additives which influence the hydrophilic or hydrophobic properties, in the maximum amounts required the permissible extractability values in water and isopropanol are sufficient.
  • the cleanroom cleaning cloth made of spun-dyed filaments has a very good wash resistance. Furthermore, the additives can reduce or avoid static charges and improve the moisture transport properties.
  • the process according to the invention for producing a clean room cleaning cloth consists in spinning multicomponent continuous filaments from the melt, aerodynamically stretching them and laying them down immediately to form a nonwoven fabric, if necessary pre-consolidation and the nonwoven fabric being consolidated by high-pressure fluid jets, as at the same time in micro- Continuous filaments with a titer of 0.1 to 1.0 dtex is preferably split with a titer of 0.1 to 0.3 dtex.
  • the clean room cleaning cloth obtained in this way is very uniform in terms of its thickness, it has an isotropic thread distribution, has no tendency to delaminate and is distinguished by high modulus values.
  • the process for producing the cleanroom cleaning cloth is advantageously carried out in such a way that the solidification and splitting of the multicomponent continuous filaments takes place in that the nonwoven fabric is subjected to high pressure water jets at least once on each side.
  • the clean room cleaning cloth therefore has a good surface and a degree of splitting of the multi-component continuous filaments> 80%.
  • the clean room cleaning cloth according to the invention is also characterized by its good specific water absorption and a short drying time.
  • the clean room cleaning cloth can be used multiple times as a wipe or dust cloth.
  • the clean room cleaning cloth preferably meets the requirements of industrial clean room washability and can be used for clean room class 10 or better.
  • a "pie" filament pile with a basis weight of 57 g / m 2 is produced from a polyethylene terephthalate poly (hexamethylene diamine adipad) (PET-PA66) bicomponent filament and subjected to water jet needling at pressures of up to 250 bar on both sides.
  • PET-PA66 polyethylene terephthalate poly (hexamethylene diamine adipad)
  • the bicomponent filaments point after water jet needling, which leads to simultaneous splitting of the starting filaments, a titer of approx. 0.1 dtex.
  • a (s / s) filament pile with a basis weight of 65 g / m 2 is produced from a polyethylene terephthalate poly (hexamethylene diamine adipad) (PET-PA66) bicomponent filament and subjected to water jet needling at pressures of up to 250 bar on both sides. After the water jet needling, which leads to simultaneous splitting of the starting filaments, the bicomponent filaments have a titer of approximately 1.0 dtex.
  • a (s / s) filament pile with a basis weight of 80 g / m 2 is produced from a polyethylene terephthalate poly (hexamethylene diamine adipad) (PET-PA66) bicomponent filament with a weight ratio of PET to PA66 of 60 to 40 and water jet needling subjected to pressures up to 250 bar on both sides. After the water jet needling, the bicomponent filaments point to a simultaneous splitting of the Starting filaments have a titer of approximately 0.8 dtex and a crimped filament structure.
  • PET-PA66 polyethylene terephthalate poly (hexamethylene diamine adipad)
  • PET-PA6 Polyethylene terephthalate poly (caprolactam)
  • Bicomponent continuous filament is produced from a (PIE) filament pile with a basis weight of 70 g / m 2 and subjected to water jet needling with pressures of up to 250 bar on both sides. After the water jet needling, which leads to simultaneous splitting of the starting filaments, the bicomponent filaments have a titer of approx. 0.1 dtex.

Abstract

The invention relates to a clean-room cleaning cloth consisting of a microfilament nonwoven material with a substance weight of 30 to 300 g/m<2>. Said nonwoven material consists of melt-spun, aerodynamically drawn multi-component continuous filaments which are immediately arranged so as to form a nonwoven and which have a titer of 1.5 to 5 dtex. Optionally, at least 80 % of the multi-component continuous filaments can be split into micro-continuous filaments with a titer of 0.1 to 1.0 dtex after presetting and then set.

Description

Reinraum-Reinigungstuch Cleanroom Cleaning Cloth
Beschreibungdescription
Die Erfindung betrifft ein Reinraum-Reinigungstuch, bestehend aus einem Mikrofilament-Vliesstoff mit Flächengewichten von 30 bis 300 g/m2.The invention relates to a clean room cleaning cloth consisting of a microfilament nonwoven fabric with basis weights of 30 to 300 g / m 2 .
Reinräume finden eine immer breitere Nutzung für die Herstellung, Untersuchung und Wartung von Präzisionserzeugnissen, bei denen es sehr wichtig ist, daß verschiedene Arbeitsschritte in einer Umgebung stattfinden, die weitestgehend frei von kleinen Partikeln ist. Die Verbesserungen bei der Herstellung von Hochtechnologie-Erzeugnissen wie mikroelektronischen Schaltkreisen, optischen oder pharmazeutischen Erzeugnissen stellen immer höhere Anforderungen an den Partikelgehalt der Reinräume, der typischer Weise für einen Reinraum der Klasse 100 im Bereich von bis zu 100 Teilchen in der Größe von > 0,5 μm pro Kubikfuß Raumluft oder in der äquivalenten metrischen Reinheitsklasse M 3,5 von nicht mehr als 3530 Teilchen in der Größe von > 0,5 μm pro Kubikmeter Raumluft [pro Million (parts per miliion - ppm) oder zunehmend in Teilchen pro Milliarde (parts per billion - ppb)] gefordert wird. Die integrierten Schaltkreise werden auf sogenannten „Wafern", dünnen Silizium-Einkristall-Scheiben hergestellt. Die integrierten Schaltkreise erfordern eine exakte elektrische Verbindung der Transistoren und der anderen elektrischen Bauelemente untereinander. Die einzelnen Schaltkreis- Bauelemente sind durch einen elektrisch leitfähigen Film mit einander verbunden, der aus aufgedampften Metall besteht. In dieser Filmschicht werden die Leiterbahnstrukturen durch einen Photo-Ätzprozeß erzeugt. Eine Isolationsschicht zwischen den darunterliegenden Halbleiterelementen und der aufgedampften Metallschicht gestattet eine elektrische Verbindung nur an den dafür vorgesehenen Stellen. Die Isolationsschicht wird auf der Oberfläche des „Wafers" aufgebracht, nachdem die einzelnen Bauelemente erzeugt, aber bevor der „Wafer" zur Herstellung der Leiterbahnstruktur mit dem leitfähigen Metall bedampft wird. Verunreinigungen wie Faserbruchstücke oder Staubteilchen können zu Kurzschlüssen zwischen den Bauelementen und damit zumindest zu einem teilweisen Ausfall der vorgesehenen Schaltkreisfunktionen führen. Deshalb besteht eine Grundforderung darin, alle Oberflächen und Werkstücke so frei wie möglich von diesen Verunreinigungen zu halten.Cleanrooms are increasingly used for the manufacture, inspection and maintenance of precision products, where it is very important that various work steps take place in an environment that is largely free of small particles. The improvements in the production of high-tech products such as microelectronic circuits, optical or pharmaceutical products place ever increasing demands on the particle content of the clean rooms, typically for a class 100 clean room in the range of up to 100 particles in the size> 0, 5 μm per cubic foot of indoor air or in the equivalent metric purity class M 3.5 of no more than 3530 particles in the size of> 0.5 μm per cubic meter of indoor air [per million (parts per miliion - ppm) or increasingly in particles per billion ( parts per billion - ppb)] is required. The integrated circuits are produced on so-called "wafers", thin silicon single-crystal wafers. The integrated circuits require an exact electrical connection of the transistors and the other electrical components to one another. The individual circuit components are connected to one another by an electrically conductive film, which is made of vapor-deposited metal the conductor track structures are produced by a photo-etching process. An insulation layer between the semiconductor elements underneath and the evaporated metal layer permits an electrical connection only at the locations provided for this purpose. The insulation layer is applied to the surface of the “wafer” after the individual components have been produced, but before the “wafer” is vapor-deposited with the conductive metal to produce the interconnect structure. Contamination such as fiber fragments or dust particles can lead to short circuits between the components and thus at least to a partial failure of the circuit functions provided. Therefore, a basic requirement is to keep all surfaces and workpieces as free as possible from these contaminants.
Aus den Dokumenten US 4,888,229 und US 5,229,181 sind gewebte oder gestrickte Reinigungstücher bekannt, die durch die spezielle Einfassung ihrer Kanten, die Freisetzung von Fusseln oder Faserbruchstücken verhindern sollen. Weiterhin sind aus den Dokumenten US 4,328,279 und 5,736,469 Reinraum-Reinigungstüchem bekannt, die aus Vliesstoffen bestehen. Auf die Oberfläche der die Vliesstoffe bildenden Fasern wird zur Verringerung der Menge an extrahierbaren Ionen oder zur Verringerung der elektrostatischen Aufladung eine chemische Schlichte aufgebracht. Die Dokumente US 5,320,900 und US 5,645,916 beschreiben Reinraum-Reinigungstüchem, die aus Fasermischungen bestehen und mittels einer Wasserstrahlbehandlung zu Vliesstoffen verfestigt wurden. Als Fasern werden synthetische Fasern wie Polyester und Zellulose- oder Zelluloseregeneratfasern angegeben. Nachteilig an den bekannten Reinraum-Reinigungstüchern ist, daß sie keinem Waschprozeß unterzogen werden können, ohne den die höchsten Reinraumklassen 10 oder besser, nicht erreicht werden kann. Deshalb können diese Klassen heute nur mit Geweben oder Gestricken kontinuierlicher Filamente bedient werden. Die Erfindung hat sich die Aufgabe gestellt, preiswertes, waschbares Reinraum- Reinigungstuch, welches den Anforderungen der Reinraumklasse 100 entspricht, sowie ein Verfahren zu seiner Herstellung anzugeben. Durch einen nachfolgenden Reinraumwaschprozess kann das erfindungsgemäße Reinraum- Reinigungstuch auf Mikrofilamentspinnvliesstoffbasis in der Reinraumklasse 10 oder besser Anwendung finden.Woven or knitted cleaning wipes are known from documents US 4,888,229 and US 5,229,181, which are intended to prevent the release of lint or fiber fragments due to the special edging of their edges. Furthermore, from US Pat. Nos. 4,328,279 and 5,736,469, cleanroom cleaning wipes are known which consist of nonwovens. A chemical size is applied to the surface of the fibers forming the nonwovens to reduce the amount of extractable ions or to reduce the electrostatic charge. The documents US 5,320,900 and US 5,645,916 describe clean room cleaning wipes which consist of fiber mixtures and have been consolidated into nonwovens by means of a water jet treatment. Synthetic fibers such as polyester and regenerated cellulose or cellulose fibers are specified as fibers. A disadvantage of the known cleanroom cleaning wipes is that they cannot be subjected to a washing process without which the highest cleanroom classes 10 or better cannot be achieved. Therefore, these classes can only be served today with fabrics or knitted continuous filaments. The invention has set itself the task of providing inexpensive, washable cleanroom cleaning cloth which meets the requirements of cleanroom class 100, and a method for its production. By means of a subsequent clean room washing process, the clean room cleaning cloth according to the invention based on microfilament spunbonded nonwoven can be used in clean room class 10 or better.
Erfindungsgemäß wird die Aufgabe durch Reinraum-Reinigungstuch gelöst, welches aus einem Mikrofilament-Vliesstoff mit Flächengewichten von 30 bis 300 g/m?, wobei der Vliesstoff aus schmelzgesponnenen, aerodynamisch verstreckten und unmittelbar zu einem Vlies abgelegten Mehrkomponenten- Endlosfilamenten mit einem Titer 1 ,5 bis 5 dtex besteht und die Mehrkomponenten-Endlosfilamente zumindest zu 80 % zu Mikro- Endlosfilamenten mit einem Titer von 0,1 bis 1 ,0 dtex gespurtet und verfestigt sind. Ein solches Reinraum-Reinigungstuch weist eine Oberflächenstruktur auf, in die Staubteilchen und Flüssigkeiten gut eindringen und darin festgehalten werden. Darüber hinaus liegen nur auf Grund der Bildung aus Endlosfilamenten nur sehr wenige Faserenden im Reinraum-Reinigungstuch vor. Es werden fusselfreie Reinigungstücher erhalten, deren Kanten nicht extra umgenäht oder eingefaßt werden müssenAccording to the invention, the object is achieved by a clean room cleaning cloth which is made of a microfilament nonwoven fabric with basis weights of 30 to 300 g / m ? , wherein the nonwoven fabric consists of melt-spun, aerodynamically stretched and immediately deposited into a nonwoven multi-component continuous filament with a titer of 1.5 to 5 dtex and the multi-component continuous filament at least 80% to micro-continuous filament with a titer of 0.1 to 1 , 0 dtex are tracked and solidified. Such a clean room cleaning cloth has a surface structure into which dust particles and liquids penetrate well and are held therein. In addition, due to the formation of continuous filaments, there are very few fiber ends in the clean room cleaning cloth. Lint-free cleaning cloths are obtained, the edges of which do not have to be sewn or edged
Vorzugsweise ist das Reinraum-Reinigungstuch eines, bei dem der Vliesstoff aus schmelzgesponnenen, aerodynamisch verstreckten und unmittelbar zu einem Vlies abgelegten Mehrkomponenten-Endlosfilamenten mit einem Titer 2 bis 3 dtex besteht und die Mehrkomponenten-Endlosfiiamente zumindest zu 80 % zu Mikro-Endlosfilamenten mit einem Titer von 0,1 bis 0,3 dtex gesplittet und verfestigt sind.The cleanroom cleaning cloth is preferably one in which the nonwoven fabric consists of melt-spun, aerodynamically stretched, and multi-component continuous filaments with a titer of 2 to 3 dtex, which are immediately deposited to form a nonwoven, and the multi-component continuous filaments are at least 80% micro-continuous filaments with a titer from 0.1 to 0.3 dtex are split and solidified.
Vorzugsweise ist das Reinraum-Reinigungstuch eines, bei dem das Mehrkomponenten-Endlosfilament ein Bikomponenten-Endlosfilament aus zwei inkompatiblen Polymeren, insbesondere einem Polyester und einem Polyamid, ist. Ein solches Bikomponenten-Endlosfilament weist eine gute Spaltbarkeit in Supermikro-Endlosfilamenten auf und bewirkt ein günstiges Verhältnis von Festigkeit zu Flächengewicht auf.The cleanroom cleaning cloth is preferably one in which the multi-component continuous filament is a bicomponent continuous filament made of two incompatible polymers, in particular a polyester and a polyamide. is. Such a bicomponent filament has good cleavage in super micro filaments and brings about a favorable ratio of strength to basis weight.
Vorzugsweise ist das Reinraum-Reinigungstuch eines, bei dem die Mehrkomponenten-Endlosfilamente einen Querschnitt mit orangenartiger oder auch „Pie" genannten Multisegment-Struktur aufweisen, wobei die Segmente alternierend jeweils eines der beiden inkompatiblen Polymeren enthalten. Neben dieser orangenartigen Multisegment-Struktur der Mehrkomponenten- Endlosfilamente ist auch eine side-by-side (s/s) Anordnung der inkompatiblen Polymeren im Mehrkomponenten-Endlosfilament möglich, die vorzugsweise zur Erzeugung gekräuselter Filamente genutzt wird. Solche Anordnungen der inkompatiblen Polymeren im Mehrkomponenten-Endlosfilament haben sich als sehr gut spaltbar erwiesen.The cleanroom cleaning cloth is preferably one in which the multicomponent continuous filaments have a cross section with an orange-like or also called “pie” structure, the segments alternately each containing one of the two incompatible polymers. In addition to this orange-like multisegment structure of the multicomponent A filament-side-by-side (s / s) arrangement of the incompatible polymers in the multicomponent filament is also possible, which is preferably used to produce crimped filaments, such arrangements of the incompatible polymers in the multicomponent filament have proven to be very easily cleavable.
Vorzugsweise ist das Reinraum-Reinigungstuch weiterhin eines, bei dem mindestens eines der das Mehrkomponenten-Endlosfilament bildenden inkompatiblen Polymeren ein Additiv, wie Farbpigmente, permanent wirkende Antistatika und/oder die hydrophilen oder hydrophoben Eigenschaften beeinflussende Zusätze maximal in den Mengen enthält, die den Anforderungen an die zulässigen Extrahierbarkeitswerte in Wasser und Isopropanol genügen. Das aus spinngefärbten Filamenten bestehende Reinraum-Reinigungstuch weist eine sehr gute Waschbeständigkeit auf. Weiterhin können durch die Zusätze statische Aufladungen vermindert bzw. vermieden und die Feuchtigkeits-Transporteigenschaften verbessert werden.The cleanroom cleaning cloth is preferably also one in which at least one of the incompatible polymers forming the multi-component continuous filament contains an additive, such as color pigments, permanently acting antistatic agents and / or additives which influence the hydrophilic or hydrophobic properties, in the maximum amounts required the permissible extractability values in water and isopropanol are sufficient. The cleanroom cleaning cloth made of spun-dyed filaments has a very good wash resistance. Furthermore, the additives can reduce or avoid static charges and improve the moisture transport properties.
Das erfindungsgemäße Verfahren zur Herstellung eines Reinraum- Reinigungstuchs besteht darin, daß Mehrkomponenten-Endlosfilamente aus der Schmelze ersponnen, aerodynamisch verstreckt und unmittelbar zu einem Vlies abgelegt werden, gegebenenfalls eine Vorverfestigung erfolgt und der Vliesstoff durch Hochdruck-Fluidstrahlen verfestigt wie gleichzeitig in Mikro- Endlosfilamente mit einem Titer von 0,1 bis 1 ,0 dtex vorzugsweise mit einem Titer von 0,1 bis 0,3 dtex gesplittet wird. Das so erhaltene Reinraum- Reinigungstuch ist sehr gleichmäßig hinsichtlich seiner Dicke, es weist eine isotrope Fadenverteilung auf, besitzt keine Neigung zum Delaminieren und ist durch hohe Modulwerte ausgezeichnet.The process according to the invention for producing a clean room cleaning cloth consists in spinning multicomponent continuous filaments from the melt, aerodynamically stretching them and laying them down immediately to form a nonwoven fabric, if necessary pre-consolidation and the nonwoven fabric being consolidated by high-pressure fluid jets, as at the same time in micro- Continuous filaments with a titer of 0.1 to 1.0 dtex is preferably split with a titer of 0.1 to 0.3 dtex. The clean room cleaning cloth obtained in this way is very uniform in terms of its thickness, it has an isotropic thread distribution, has no tendency to delaminate and is distinguished by high modulus values.
Vorteilhafterweise wird das Verfahren zur Herstellung des Reinraum- Reinigungstuches in der Weise durchgeführt, daß die Verfestigung und Splittung der Mehrkomponenten-Endlosfilamente dadurch erfolgt, daß der Vliesstoff mehrfach mindestens einmal auf jeder Seite mit Hochdruck- Wasserstrahlen beaufschlagt wird. Das Reinraum-Reinigungstuch weist dadurch eine gute Oberfläche und einen Splittungsgrad der Mehrkomponenten- Endlosfilamente > 80 % auf. Das erfindungsgemäße Reinraum-Reinigungstuch zeichnet sich überdies durch seine gute spezifische Wasseraufnahme und eine geringe Trockenzeit aus.The process for producing the cleanroom cleaning cloth is advantageously carried out in such a way that the solidification and splitting of the multicomponent continuous filaments takes place in that the nonwoven fabric is subjected to high pressure water jets at least once on each side. The clean room cleaning cloth therefore has a good surface and a degree of splitting of the multi-component continuous filaments> 80%. The clean room cleaning cloth according to the invention is also characterized by its good specific water absorption and a short drying time.
Erfindungsgemäß ist das Reinraum-Reinigungstuch als Wisch- oder Staubtuch mehrfach einsetzbar.According to the invention, the clean room cleaning cloth can be used multiple times as a wipe or dust cloth.
Vorzugsweise genügt das Reinraum-Reinigungstuch den Ansprüchen industrieller Reinraumwaschbarkeit und kann für die Reinraumklasse 10 oder besser Anwendung finden. The clean room cleaning cloth preferably meets the requirements of industrial clean room washability and can be used for clean room class 10 or better.
Beispiel 1example 1
Aus einem Polyethylenterephthalat-Poly(hexamethylendiaminadipad) (PET- PA66)-Bikomponenten-Endlosfilament wird ein „Pie"-Filamentflor mit einem Flächengewicht von 57 g/m2 erzeugt und einer Wasserstrahlvernadelung mit Drücken bis 250 bar beidseitig unterzogen. Die Bikomponenten- Endlosfilamente weisen nach der Wasserstrahlvernadelung, die zu einer gleichzeitigen Splittung der Ausgangsfilamente führt, einen Titer von ca. 0,1 dtex auf.A "pie" filament pile with a basis weight of 57 g / m 2 is produced from a polyethylene terephthalate poly (hexamethylene diamine adipad) (PET-PA66) bicomponent filament and subjected to water jet needling at pressures of up to 250 bar on both sides. The bicomponent filaments point after water jet needling, which leads to simultaneous splitting of the starting filaments, a titer of approx. 0.1 dtex.
Beispiel 2Example 2
Aus einem Polyethylenterephthalat-Poly(hexamethylendiaminadipad) (PET- PA66)-Bikomponenten-Endlosfilament wird ein (s/s)-Filamentflor mit einem Flächengewicht von 65 g/m2 erzeugt und einer Wasserstrahlvernadelung mit Drücken bis 250 bar beidseitig unterzogen. Die Bikomponenten- Endlosfilamente weisen nach der Wasserstrahlvernadelung, die zu einer gleichzeitigen Splittung der Ausgangsfilamente führt, einen Titer von ca. 1 ,0 dtex auf.A (s / s) filament pile with a basis weight of 65 g / m 2 is produced from a polyethylene terephthalate poly (hexamethylene diamine adipad) (PET-PA66) bicomponent filament and subjected to water jet needling at pressures of up to 250 bar on both sides. After the water jet needling, which leads to simultaneous splitting of the starting filaments, the bicomponent filaments have a titer of approximately 1.0 dtex.
Beispiel 3Example 3
Aus einem Polyethylenterephthalat-Poly(hexamethylendiaminadipad) (PET- PA66)-Bikomponenten-Endlosfilament mit einem Gewichtsverhältnis von PET zu PA66 von 60 zu 40 wird ein (s/s)-Filamentflor mit einem Flächengewicht von 80 g/m2 erzeugt und einer Wasserstrahlvernadelung mit Drücken bis 250 bar beidseitig unterzogen. Die Bikomponenten-Endlosfilamente weisen nach der Wasserstrahlvernadelung, die zu einer gleichzeitigen Splittung der Ausgangsfilamente führt, einen Titer von ca. 0,8 dtex und eine gekräuselte Filamentstruktur auf.A (s / s) filament pile with a basis weight of 80 g / m 2 is produced from a polyethylene terephthalate poly (hexamethylene diamine adipad) (PET-PA66) bicomponent filament with a weight ratio of PET to PA66 of 60 to 40 and water jet needling subjected to pressures up to 250 bar on both sides. After the water jet needling, the bicomponent filaments point to a simultaneous splitting of the Starting filaments have a titer of approximately 0.8 dtex and a crimped filament structure.
Beispiel 4Example 4
Aus einem Polyethylenterephthalat-Poly(caprolactam) (PET-PA6)-Made from a polyethylene terephthalate poly (caprolactam) (PET-PA6) -
Bikomponenten-Endlosfilament wird ein (PIE)-Filamentflor mit einem Flächengewicht von 70 g/m2 erzeugt und einer Wasserstrahlvernadelung mit Drücken bis 250 bar beidseitig unterzogen. Die Bikomponenten- Endlosfilamente weisen nach der Wasserstrahlvernadelung, die zu einer gleichzeitigen Splittung der Ausgangsfilamente führt, einen Titer von ca. 0,1 dtex auf. Bicomponent continuous filament is produced from a (PIE) filament pile with a basis weight of 70 g / m 2 and subjected to water jet needling with pressures of up to 250 bar on both sides. After the water jet needling, which leads to simultaneous splitting of the starting filaments, the bicomponent filaments have a titer of approx. 0.1 dtex.
Tabelle der EigenschaftenTable of properties
Figure imgf000009_0001
Figure imgf000009_0001

Claims

Patentansprüche claims
1. Reinraum-Reinigungstuch bestehend aus einem Mikrofilament-Vliesstoff mit Flächengewichten von 30 bis 300 g/m2, wobei der Vliesstoff aus schmelzgesponnenen, aerodynamisch verstreckten und unmittelbar zu einem Vlies abgelegten Mehrkomponenten-Endlosfilamenten mit einem Titer von 1 ,5 bis 5 dtex besteht und die Mehrkomponenten- Endlosfilamente gegebenenfalls nach einer Vorverfestigung zumindest zu 80 % zu Mikro-Endlosfilamenten mit einem Titer von 0, 1 bis 1 ,0 dtex gesplittet und verfestigt sind.1. Clean room cleaning cloth consisting of a microfilament non-woven fabric with weights per unit area of 30 to 300 g / m 2 , the non-woven fabric consisting of melt-spun, aerodynamically stretched and immediately deposited multi-component filaments with a titer of 1.5 to 5 dtex and the multicomponent continuous filaments are optionally split and consolidated at least 80% into micro continuous filaments with a titer of 0.1 to 1.0 dtex after pre-consolidation.
2. Reinraum-Reinigungstuch nach Anspruch 1 , dadurch gekennzeichnet, daß der Vliesstoff aus schmelzgesponnenen, aerodynamisch verstreckten und- unmittelbar zu einem Vlies abgelegten2. Clean room cleaning cloth according to claim 1, characterized in that the nonwoven fabric of melt-spun, aerodynamically stretched and - immediately deposited to a nonwoven
Mehrkomponenten-Endlosfilamenten mit einem Titer von 2 bis 3 dtex besteht und die Mehrkomponenten-Endlosfilamente gegebenenfalls nach einer Vorverfestigung zumindest zu 80 % zu Mikro-Endlosfilamenten mit einem Titer von 0,1 bis 0,3 dtex gesplittet und verfestigt sind.There are multi-component continuous filaments with a titer of 2 to 3 dtex and the multi-component continuous filaments are optionally split and consolidated at least 80% into micro-continuous filaments with a titer of 0.1 to 0.3 dtex after pre-consolidation.
3. Reinraum-Reinigungstuch nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß das Mehrkomponenten-Endlosfilament ein Bikomponenten-Endlosfilament aus zwei inkompatiblen Polymeren, insbesondere einem Polyester und einem Polyamid, ist.3. Clean room cleaning cloth according to claim 1 or 2, characterized in that the multi-component continuous filament is a bicomponent continuous filament made of two incompatible polymers, in particular a polyester and a polyamide.
4. Reinraum-Reinigungstuch nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Mehrkomponenten-Endlosfilamente einen Querschnitt mit orangenartiger Multisegment-Struktur aufweisen, wobei die Segmente alternierend jeweils eines der beiden inkompatiblen Polymeren enthalten und/oder eine ,,side-by-side"-Struktur besitzen. 4. Clean room cleaning cloth according to one of claims 1 to 3, characterized in that the multicomponent continuous filaments have a cross section with an orange-like multisegment structure, the segments alternately each containing one of the two incompatible polymers and / or a ,, side-by -side "structure.
5. Reinraum-Reinigungstuch nach Anspruch 3, dadurch gekennzeichnet, daß die beiden Seiten des Reinigungstuch eine unterschiedliche Segment-Struktur besitzen.5. Clean room cleaning cloth according to claim 3, characterized in that the two sides of the cleaning cloth have a different segment structure.
6. Verfahren zur Herstellung von Reinraum-Reinigungstuch nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, daß Mehrkomponenten- Endlosfilamente aus der Schmelze ersponnen, aerodynamisch verstreckt und unmittelbar zu einem Vlies abgelegt werden, eine gegebenenfalls Vorverfestigung erfolgt und der Vliesstoff durch Hochdruck-Fluidstrahlen verfestigt sowie gleichzeitig in Mikro-Endlosfilamente mit einem Titer von6. A process for the production of clean room cleaning cloth according to one of claims 1 to 5, characterized in that multicomponent continuous filaments are spun from the melt, aerodynamically stretched and deposited immediately to form a nonwoven material, optionally pre-solidifying and the nonwoven material by high pressure fluid jets solidified and at the same time in micro continuous filaments with a titer of
0,1 bis 1 ,0 dtex gesplittet wird.0.1 to 1.0 dtex is split.
7. Verfahren nach Anspruch 6, dadurch gekennzeichnet, daß die Verfestigung und Splittung der Mehrkomponenten-Endlosfilamente dadurch erfolgt, daß der Vliesstoff mindestens einmal von jeder Seiten mit Hochdruck-Fluidstrahlen beaufschlagt wird.7. The method according to claim 6, characterized in that the solidification and splitting of the multi-component continuous filaments takes place in that the nonwoven fabric is acted on at least once by high pressure fluid jets from each side.
8. Verfahren nach Anspruch 6 oder 7, dadurch gekennzeichnet, daß die Färbung der Mehrkomponenten-Endlosfilamente durch Spinnfärben vorgenommen wird.8. The method according to claim 6 or 7, characterized in that the dyeing of the multi-component continuous filaments is carried out by spin dyeing.
9. Verfahren nach Anspruch 5 und 6, dadurch gekennzeichnet, daß zwei Spinnbalken eingesetzt werden, von denen einer Mehrkomponenten- Endlosfilamente mit einer „Pie"-Segmentstruktur und der andere mit einer „side-by-side"-Segmentstruktur erzeugt.9. The method according to claim 5 and 6, characterized in that two spinning beams are used, one of which produces multi-component continuous filaments with a "pie" segment structure and the other with a "side-by-side" segment structure.
10. Verwendung eines Reinraum-Reinigungstuchs nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, daß es als Wisch- oder Staubtücher mehrfach einsetzbar ist. 10. Use of a clean room cleaning cloth according to one of claims 1 to 9, characterized in that it can be used several times as a wipe or duster.
1. Verwendung eines Reinraum-Reinigungstuchs nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, daß es den Ansprüchen industrieller Reinraumwaschbarkeit genügt und für die Reinraumklasse 10 oder besser Anwendung finden kann. 1. Use of a clean room cleaning cloth according to one of claims 1 to 9, characterized in that it meets the requirements of industrial clean room washability and can be used for clean room class 10 or better.
PCT/EP2000/011584 1999-11-30 2000-11-21 Clean-room cleaning cloth WO2001040558A2 (en)

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AT00989869T ATE278827T1 (en) 1999-11-30 2000-11-21 CLEANROOM CLEANING CLOTH
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EP00989869A EP1234066B1 (en) 1999-11-30 2000-11-21 Clean-room cleaning cloth
DE50008157T DE50008157D1 (en) 1999-11-30 2000-11-21 CLEAN ROOM CLEANING CLOTH
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CN106884263B (en) * 2017-01-22 2019-01-18 杭州萧山凤凰纺织有限公司 A kind of preparation method of woven fabric spun-laced cleaning cloth
CN107447361A (en) * 2017-09-02 2017-12-08 江苏鑫轮特种纤维科技发展有限公司 A kind of preparation method of specific highly hygroscopic superpower anti-mite fabric
DE102019129734A1 (en) * 2019-11-05 2021-05-06 Bode Chemie Gmbh Wiping cloth for cleaning and disinfecting objects and surfaces

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EP1118305A2 (en) * 2000-01-22 2001-07-25 Firma Carl Freudenberg Cleaning sheet
EP1118305A3 (en) * 2000-01-22 2002-09-25 Carl Freudenberg KG Cleaning sheet
US7201777B2 (en) 2002-03-28 2007-04-10 Booker Jr Archer E D Nonwoven fabric having low ion content and method for producing the same
US7740412B2 (en) 2005-01-28 2010-06-22 S.C. Johnson & Son, Inc. Method of cleaning using a device with a liquid reservoir and replaceable non-woven pad
US7891898B2 (en) 2005-01-28 2011-02-22 S.C. Johnson & Son, Inc. Cleaning pad for wet, damp or dry cleaning
US7976235B2 (en) 2005-01-28 2011-07-12 S.C. Johnson & Son, Inc. Cleaning kit including duster and spray
US8893347B2 (en) 2007-02-06 2014-11-25 S.C. Johnson & Son, Inc. Cleaning or dusting pad with attachment member holder

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JP2003515407A (en) 2003-05-07
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DE19957693C2 (en) 2002-06-27
WO2001040558A3 (en) 2001-10-25
KR100491846B1 (en) 2005-05-27
EP1234066B1 (en) 2004-10-06
DE19957693A1 (en) 2001-06-21
KR20020054358A (en) 2002-07-06
ATE278827T1 (en) 2004-10-15
CN1158044C (en) 2004-07-21
ES2226974T3 (en) 2005-04-01
EP1234066A2 (en) 2002-08-28
AU2667201A (en) 2001-06-12

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