WO2000068974A3 - System for processing wafers - Google Patents

System for processing wafers Download PDF

Info

Publication number
WO2000068974A3
WO2000068974A3 PCT/DE2000/001452 DE0001452W WO0068974A3 WO 2000068974 A3 WO2000068974 A3 WO 2000068974A3 DE 0001452 W DE0001452 W DE 0001452W WO 0068974 A3 WO0068974 A3 WO 0068974A3
Authority
WO
WIPO (PCT)
Prior art keywords
wafers
production units
control station
processing wafers
transport system
Prior art date
Application number
PCT/DE2000/001452
Other languages
German (de)
French (fr)
Other versions
WO2000068974A2 (en
Inventor
Rolf-Arno Klaebsch
Ronald Huber
Original Assignee
Infineon Technologies Ag
Klaebsch Rolf Arno
Ronald Huber
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Klaebsch Rolf Arno, Ronald Huber filed Critical Infineon Technologies Ag
Priority to EP00940171A priority Critical patent/EP1183715A2/en
Publication of WO2000068974A2 publication Critical patent/WO2000068974A2/en
Publication of WO2000068974A3 publication Critical patent/WO2000068974A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41815—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell
    • G05B19/41825—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell machine tools and manipulators only, machining centre
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
    • G07C3/00—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

The invention relates to a system for processing wafers in at least one clean room (1). The inventive system comprises an arrangement of production units (2) for carrying out individual production steps and a transport system for transporting the wafers between different production units (2). Furthermore, at least one control station (7) is provided for automatically tracking and controlling the material flow of the wafers. Process data is read in the control station (7) by the production units (2) and/or the transport system.
PCT/DE2000/001452 1999-05-07 2000-05-05 System for processing wafers WO2000068974A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP00940171A EP1183715A2 (en) 1999-05-07 2000-05-05 System for processing wafers

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19921244A DE19921244A1 (en) 1999-05-07 1999-05-07 Plant for processing wafers
DE19921244.9 1999-05-07

Publications (2)

Publication Number Publication Date
WO2000068974A2 WO2000068974A2 (en) 2000-11-16
WO2000068974A3 true WO2000068974A3 (en) 2001-04-05

Family

ID=7907410

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2000/001452 WO2000068974A2 (en) 1999-05-07 2000-05-05 System for processing wafers

Country Status (4)

Country Link
EP (1) EP1183715A2 (en)
DE (1) DE19921244A1 (en)
TW (1) TW480589B (en)
WO (1) WO2000068974A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10064030A1 (en) * 2000-12-21 2002-07-18 Infineon Technologies Ag Method and device for processing a physical object, computer program element and computer-readable storage medium
US8960099B2 (en) 2002-07-22 2015-02-24 Brooks Automation, Inc Substrate processing apparatus
JP4712379B2 (en) 2002-07-22 2011-06-29 ブルックス オートメーション インコーポレイテッド Substrate processing equipment
US7988398B2 (en) 2002-07-22 2011-08-02 Brooks Automation, Inc. Linear substrate transport apparatus

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5672230A (en) * 1995-05-11 1997-09-30 Samsung Electronics Co., Ltd. Central management system of wet chemical stations
US5751581A (en) * 1995-11-13 1998-05-12 Advanced Micro Devices Material movement server
EP0884765A2 (en) * 1997-06-13 1998-12-16 Canon Kabushiki Kaisha Semiconductor process system, its control method, computer readable memory, and device manufacturing method
EP0915507A1 (en) * 1996-06-07 1999-05-12 Tokyo Electron Limited Device for controlling treating station
US6050768A (en) * 1997-08-08 2000-04-18 Mitsubishi Denki Kabushiki Kaisha Automatic carrier control method in semiconductor wafer cassette transportation apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616475B2 (en) * 1987-04-03 1994-03-02 三菱電機株式会社 Article manufacturing system and article manufacturing method
US5474647A (en) * 1993-11-15 1995-12-12 Hughes Aircraft Company Wafer flow architecture for production wafer processing
TW309503B (en) * 1995-06-27 1997-07-01 Tokyo Electron Co Ltd

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5672230A (en) * 1995-05-11 1997-09-30 Samsung Electronics Co., Ltd. Central management system of wet chemical stations
US5751581A (en) * 1995-11-13 1998-05-12 Advanced Micro Devices Material movement server
EP0915507A1 (en) * 1996-06-07 1999-05-12 Tokyo Electron Limited Device for controlling treating station
EP0884765A2 (en) * 1997-06-13 1998-12-16 Canon Kabushiki Kaisha Semiconductor process system, its control method, computer readable memory, and device manufacturing method
US6050768A (en) * 1997-08-08 2000-04-18 Mitsubishi Denki Kabushiki Kaisha Automatic carrier control method in semiconductor wafer cassette transportation apparatus

Also Published As

Publication number Publication date
TW480589B (en) 2002-03-21
WO2000068974A2 (en) 2000-11-16
EP1183715A2 (en) 2002-03-06
DE19921244A1 (en) 2000-11-16

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