WO1999045302A1 - Modular surface mount manifold - Google Patents
Modular surface mount manifold Download PDFInfo
- Publication number
- WO1999045302A1 WO1999045302A1 PCT/US1999/004972 US9904972W WO9945302A1 WO 1999045302 A1 WO1999045302 A1 WO 1999045302A1 US 9904972 W US9904972 W US 9904972W WO 9945302 A1 WO9945302 A1 WO 9945302A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fluid
- bridge
- fitting
- fittings
- inlet
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
- F15B13/0814—Monoblock manifolds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0821—Attachment or sealing of modular units to each other
- F15B13/0825—Attachment or sealing of modular units to each other the modular elements being mounted on a common member, e.g. on a rail
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/086—Sensing means, e.g. pressure sensors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0878—Assembly of modular units
- F15B13/0885—Assembly of modular units using valves combined with other components
- F15B13/0892—Valves combined with fluid components
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/5109—Convertible
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Abstract
Description
Claims
Priority Applications (20)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IL13825899A IL138258A (en) | 1998-03-05 | 1999-03-05 | Modular surface mount manifold |
JP2000534799A JP2002506181A (en) | 1998-03-05 | 1999-03-05 | Modular surface mount manifold |
US09/719,727 US6644353B1 (en) | 1998-03-05 | 1999-03-05 | Modular surface mount manifold |
AU29880/99A AU2988099A (en) | 1998-03-05 | 1999-03-05 | Modular surface mount manifold |
EP99911176A EP1068464B1 (en) | 1998-03-05 | 1999-03-05 | Modular surface mount manifold |
EP04006640A EP1471296B1 (en) | 1998-05-18 | 1999-05-18 | Modular surface mount manifold assemblies |
DE69933899T DE69933899T2 (en) | 1998-05-18 | 1999-05-18 | Surface mountable distributor |
EP06022607A EP1767839B1 (en) | 1998-05-18 | 1999-05-18 | Modular surface mount manifold assembly and fitting therefor |
DE69942568T DE69942568D1 (en) | 1998-05-18 | 1999-05-18 | Surface mountable manifold and connector for it |
KR1020007012994A KR100555168B1 (en) | 1998-05-18 | 1999-05-18 | Modular surface mount manifold assemblies |
DE69916046T DE69916046T2 (en) | 1998-05-18 | 1999-05-18 | SURFACE MOUNTABLE DISTRIBUTOR |
US09/544,020 US6629546B2 (en) | 1998-03-05 | 2000-04-06 | Modular surface mount manifold assemblies |
US10/154,113 US6502601B2 (en) | 1998-03-05 | 2002-05-23 | Modular surface mount manifold assemblies |
US10/154,154 US7048007B2 (en) | 1998-03-05 | 2002-05-23 | Modular surface mount manifold assemblies |
US10/605,268 US6938644B2 (en) | 1998-03-05 | 2003-09-18 | Modular surface mount manifold |
US10/605,266 US7036528B2 (en) | 1998-05-18 | 2003-09-18 | Modular surface mount manifold assemblies |
US11/194,409 US7195037B2 (en) | 1998-03-05 | 2005-08-01 | Modular surface mount manifold |
US11/378,198 US7686041B2 (en) | 1998-03-05 | 2006-03-17 | Modular surface mount manifold assemblies |
US11/685,486 US7404417B2 (en) | 1998-03-05 | 2007-03-13 | Modular surface mount manifold |
US12/150,508 US7712486B2 (en) | 1998-03-05 | 2008-04-29 | Modular surface mount manifold |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US7687198P | 1998-03-05 | 1998-03-05 | |
US60/076,871 | 1998-03-05 |
Related Child Applications (10)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/719,727 A-371-Of-International US6644353B1 (en) | 1998-03-05 | 1999-03-05 | Modular surface mount manifold |
US09719727 A-371-Of-International | 1999-03-05 | ||
PCT/US1999/010980 Continuation WO1999059392A2 (en) | 1998-03-05 | 1999-05-18 | Modular surface mount manifold assemblies |
PCT/US1999/010980 Continuation-In-Part WO1999059392A2 (en) | 1998-03-05 | 1999-05-18 | Modular surface mount manifold assemblies |
US09/544,020 Continuation US6629546B2 (en) | 1998-03-05 | 2000-04-06 | Modular surface mount manifold assemblies |
US09/544,020 Continuation-In-Part US6629546B2 (en) | 1998-03-05 | 2000-04-06 | Modular surface mount manifold assemblies |
US10/349,123 Division US6776193B2 (en) | 1998-03-05 | 2003-01-22 | Modular surface mount manifold |
US10/605,268 Division US6938644B2 (en) | 1998-03-05 | 2003-09-18 | Modular surface mount manifold |
US10/605,268 Continuation US6938644B2 (en) | 1998-03-05 | 2003-09-18 | Modular surface mount manifold |
US10/605,266 Continuation-In-Part US7036528B2 (en) | 1998-05-18 | 2003-09-18 | Modular surface mount manifold assemblies |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999045302A1 true WO1999045302A1 (en) | 1999-09-10 |
Family
ID=22134680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1999/004972 WO1999045302A1 (en) | 1998-03-05 | 1999-03-05 | Modular surface mount manifold |
Country Status (9)
Country | Link |
---|---|
US (6) | US6644353B1 (en) |
EP (1) | EP1068464B1 (en) |
JP (1) | JP2002506181A (en) |
KR (1) | KR100538130B1 (en) |
CN (2) | CN1107830C (en) |
AU (1) | AU2988099A (en) |
IL (1) | IL138258A (en) |
TW (1) | TW394834B (en) |
WO (1) | WO1999045302A1 (en) |
Cited By (20)
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GB2353353A (en) * | 1999-06-23 | 2001-02-21 | Mks Instr Inc | Integrated gas delivery system |
EP1239203A1 (en) * | 2001-03-06 | 2002-09-11 | ASML US, Inc. | Modular fluid delivery apparatus |
WO2003081103A1 (en) | 2002-03-21 | 2003-10-02 | Siemens Aktiengesellschaft | System for treating fluids |
US6629546B2 (en) | 1998-03-05 | 2003-10-07 | Swagelok Company | Modular surface mount manifold assemblies |
US6644353B1 (en) | 1998-03-05 | 2003-11-11 | Swagelok Company | Modular surface mount manifold |
WO2004005780A1 (en) * | 2002-07-09 | 2004-01-15 | Ichimaru Giken Co., Ltd. | Panel valve |
EP1471296A1 (en) * | 1998-05-18 | 2004-10-27 | Swagelok Company | Modular surface mount manifold assemblies |
US7036528B2 (en) | 1998-05-18 | 2006-05-02 | Swagelok Company | Modular surface mount manifold assemblies |
US7048007B2 (en) | 1998-03-05 | 2006-05-23 | Swagelok Company | Modular surface mount manifold assemblies |
US7048008B2 (en) | 2004-04-13 | 2006-05-23 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
US7080666B2 (en) | 2002-03-21 | 2006-07-25 | Siemens Aktiengesellschaft | System for treating fluids |
US7258139B2 (en) | 2002-11-26 | 2007-08-21 | Swagelok Company | Modular surface mount fluid system |
US7299825B2 (en) | 2005-06-02 | 2007-11-27 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
US7320339B2 (en) | 2005-06-02 | 2008-01-22 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
US7334605B2 (en) | 2002-08-27 | 2008-02-26 | Celerity, Inc. | Modular substrate gas panel having manifold connections in a common plane |
US7640948B2 (en) | 2001-02-02 | 2010-01-05 | Mitsubishi Heavy Industries, Ltd. | Integrated piping plate, machining method for same, machining apparatus for same, and machining equipment for same |
US7984891B2 (en) | 2002-12-20 | 2011-07-26 | Applied Materials, Inc. | Manufacture of an integrated fluid delivery system for semiconductor processing apparatus |
US8307854B1 (en) | 2009-05-14 | 2012-11-13 | Vistadeltek, Inc. | Fluid delivery substrates for building removable standard fluid delivery sticks |
US8496029B2 (en) | 2009-06-10 | 2013-07-30 | Vistadeltek, Llc | Extreme flow rate and/or high temperature fluid delivery substrates |
CN103827560A (en) * | 2011-09-30 | 2014-05-28 | 株式会社富士金 | Gas supply device |
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US6736370B1 (en) * | 2002-12-20 | 2004-05-18 | Applied Materials, Inc. | Diaphragm valve with dynamic metal seat and coned disk springs |
US6874538B2 (en) * | 2003-03-26 | 2005-04-05 | Kevin S. Bennett | Fluid delivery system |
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US7178556B2 (en) * | 2003-08-07 | 2007-02-20 | Parker-Hannifin Corporation | Modular component connector substrate assembly system |
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US20060070674A1 (en) * | 2004-10-01 | 2006-04-06 | Eidsmore Paul G | Substrate with offset flow passage |
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Also Published As
Publication number | Publication date |
---|---|
US7404417B2 (en) | 2008-07-29 |
AU2988099A (en) | 1999-09-20 |
US20040112447A1 (en) | 2004-06-17 |
US6776193B2 (en) | 2004-08-17 |
TW394834B (en) | 2000-06-21 |
KR20010041622A (en) | 2001-05-25 |
EP1068464B1 (en) | 2006-10-04 |
CN1289851C (en) | 2006-12-13 |
KR100538130B1 (en) | 2005-12-22 |
US20030145895A1 (en) | 2003-08-07 |
US6938644B2 (en) | 2005-09-06 |
CN1298478A (en) | 2001-06-06 |
US7712486B2 (en) | 2010-05-11 |
US20070157984A1 (en) | 2007-07-12 |
US20050263197A1 (en) | 2005-12-01 |
US6644353B1 (en) | 2003-11-11 |
CN1432758A (en) | 2003-07-30 |
JP2002506181A (en) | 2002-02-26 |
US20080202615A1 (en) | 2008-08-28 |
US7195037B2 (en) | 2007-03-27 |
IL138258A (en) | 2005-08-31 |
EP1068464A1 (en) | 2001-01-17 |
CN1107830C (en) | 2003-05-07 |
IL138258A0 (en) | 2001-10-31 |
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