WO1997045699A3 - Micromachined vibratory rate gyroscope - Google Patents

Micromachined vibratory rate gyroscope Download PDF

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Publication number
WO1997045699A3
WO1997045699A3 PCT/US1997/009150 US9709150W WO9745699A3 WO 1997045699 A3 WO1997045699 A3 WO 1997045699A3 US 9709150 W US9709150 W US 9709150W WO 9745699 A3 WO9745699 A3 WO 9745699A3
Authority
WO
WIPO (PCT)
Prior art keywords
proof mass
sense
gyroscope
substrate
mass
Prior art date
Application number
PCT/US1997/009150
Other languages
French (fr)
Other versions
WO1997045699A2 (en
Inventor
William A Clark
Thor Juneau
Roger T Howe
Original Assignee
Univ California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ California filed Critical Univ California
Priority to DE69735759T priority Critical patent/DE69735759T2/en
Priority to JP54293897A priority patent/JP2002515976A/en
Priority to EP97931004A priority patent/EP0902876B1/en
Priority to AU34744/97A priority patent/AU3474497A/en
Publication of WO1997045699A2 publication Critical patent/WO1997045699A2/en
Publication of WO1997045699A3 publication Critical patent/WO1997045699A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Abstract

A microfabricated gyroscope (20) includes proof mass (22) connected to a frame or substrate (24) to measure rotation about an axis parallel to the surface of the substrate. The micromachined gyroscope includes a suspension system (30), a drive system (32) used to sustain oscillation of the proof mass (22) and a sensing system (34) used to detect deflections of the proof mass (22). The proof mass includes a plurality of electrode fingers (38). Voltage sources (120, 122, 124, 126) apply a voltage to sense fingers (74a-b, 76a-b) of sense electrodes (62a-b) to provide bias voltages to nullify quadrature error, select or adjust the resonant frequency of vibrations of the mass along the sense axis and cancel any centrifugal or other low-frequency forces.
PCT/US1997/009150 1996-05-31 1997-05-30 Micromachined vibratory rate gyroscope WO1997045699A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE69735759T DE69735759T2 (en) 1996-05-31 1997-05-30 MICRO-MANUFACTURED VIBRATION SPEED CIRCUIT
JP54293897A JP2002515976A (en) 1996-05-31 1997-05-30 Ultra-small precision vibration rate gyroscope
EP97931004A EP0902876B1 (en) 1996-05-31 1997-05-30 Micromachined vibratory rate gyroscope
AU34744/97A AU3474497A (en) 1996-05-31 1997-05-30 Micromachined vibratory rate gyroscope

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/658,924 1996-05-31
US08/658,924 US5992233A (en) 1996-05-31 1996-05-31 Micromachined Z-axis vibratory rate gyroscope

Publications (2)

Publication Number Publication Date
WO1997045699A2 WO1997045699A2 (en) 1997-12-04
WO1997045699A3 true WO1997045699A3 (en) 2002-01-10

Family

ID=24643274

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1997/009150 WO1997045699A2 (en) 1996-05-31 1997-05-30 Micromachined vibratory rate gyroscope

Country Status (6)

Country Link
US (3) US5992233A (en)
EP (1) EP0902876B1 (en)
JP (1) JP2002515976A (en)
AU (1) AU3474497A (en)
DE (1) DE69735759T2 (en)
WO (1) WO1997045699A2 (en)

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US6296779B1 (en) 2001-10-02
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US5992233A (en) 1999-11-30
WO1997045699A2 (en) 1997-12-04
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