WO1997034697A1 - Vorrichtung zur gekapselten aufnahme eines materials - Google Patents
Vorrichtung zur gekapselten aufnahme eines materials Download PDFInfo
- Publication number
- WO1997034697A1 WO1997034697A1 PCT/EP1997/000373 EP9700373W WO9734697A1 WO 1997034697 A1 WO1997034697 A1 WO 1997034697A1 EP 9700373 W EP9700373 W EP 9700373W WO 9734697 A1 WO9734697 A1 WO 9734697A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- membrane
- sensor component
- sensor
- base body
- indicator
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0663—Whole sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/06—Valves, specific forms thereof
- B01L2400/0677—Valves, specific forms thereof phase change valves; Meltable, freezing, dissolvable plugs; Destructible barriers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N2035/00178—Special arrangements of analysers
- G01N2035/00237—Handling microquantities of analyte, e.g. microvalves, capillary networks
Definitions
- the present invention relates to a device for encapsulated reception of a material, in particular a sensitive material.
- the invention is concerned with an electrically openable, miniaturizable device for encapsulated reception of a sensitive material.
- Sensitive means the lifespan, i.e. H. the usability for a certain purpose is reduced on contact with a certain substance or mixture of substances. Because of this limited service life, it is desirable to release these materials shortly before they are used in the harmful measuring medium and to keep them under protective gas or protective liquid or vacuum until this point.
- the harmful measuring medium can be identical to the substance to be measured.
- DE 3919042 AI discloses a system for the analysis of solid substances on mercury.
- a solid substance to be analyzed is introduced into a vessel, which is subsequently closed by a membrane, the membrane being heated by the solid substance and when the lid is placed on the edge of the vessel a resulting excess pressure in the vessel is destroyed.
- the device used in the system disclosed in DE 3919042 AI is not suitable for large-scale production.
- DE 3520416 C2 describes a device for the controllable opening of a partition, the partition consisting of a membrane inserted into a clamping ring with adjacent heating wires, which cause the membrane to open when supplied with electrical energy.
- This device is also not suitable for mass production, for example by means of micromechanical processes.
- DE 3818614 AI and DE3915920 AI disclose micromechanical structures with a plurality of depressions for receiving small amounts of material, in particular in the field of biotechnology.
- the depressions are closed by means of a cover, which preferably has elevations corresponding to the depressions.
- Transducer designs For the detection of substances in gases or liquids, for example, there are a variety of transducer designs. Many work on the principle of resistance or capacitance measurement of the indicator material. Regarding such Transducer designs are referred to H.-E. Endres, S. Rost, H. Sandmaier "A-PHYSICAL SYSTEM FOR CHEMICAL SENSORS", Proc. Microsystem Technologies, Berlin, October 29th-November 1st, 1991, 70-75. A change in this size (s) is correlated with an event in the medium to be examined. The for the z. B. Resistance measurement necessary structures, such as inter-digital structures, are often applied in a thin film technique on a substrate, such as silicon, quartz. The carrier of these sensors can also itself be a membrane structure.
- membrane structures for example Si 3 N 4 on Si carrier material and other combinations.
- these membrane structures are used because of their very low thermal heat capacity and / or thermal conductivity. They serve as a carrier material for temperature-sensitive resistors, for example in the implementation of thermal flow meters and / or for the thermal insulation of a heating element from its surroundings.
- the invention is therefore based on the object of creating a device for encapsulated reception of a material, in which contamination of the material is prevented and which can be opened quickly and easily.
- the present invention provides a device for encapsulated holding of a material, which has a base body formed in microsystem technology with a recess for holding the material, a membrane spanning the base body and implemented in microsysterotechnology or thin film technology for encapsulating the material in the recess of the base body, and has an electrically actuated heating device for destroying the membrane in order to expose the material. Due to the membrane seal of the sensitive material from the environment, the structure according to the invention offers the possibility of exposing the material in a simple, contamination-proof and quick manner, the structure being easily accessible to large-scale production technology. The proper opening of the encapsulation can be signaled by a suitable electrode geometry.
- the invention makes use of a structure that can be implemented using common large-scale production methods.
- a membrane base body structure implemented in microsystem technology is particularly suitable for encapsulating the sensitive material.
- the membrane can also be made using thin film technology.
- the invention thus provides a device with which sensitive layers or materials can be shielded from your environment very inexpensively, this encapsulation being easy to release if required.
- the invention makes use of the fact that in thin membranes, which are implemented in thin-film technology or microsystem technology, high tension forces often occur, which in other areas of technology are considered to be a problem of such membrane structures. These tension forces, which are present in the membrane, cause an explosion-like bursting of the membrane when thermal forces are applied to the membrane.
- the heating device of the device according to the invention is preferably designed as a heater integrated on the membrane.
- a short heating pulse causes the membrane to be thermally braced, causing it to burst.
- the time for such an opening process is well below one second, typically in the millisecond range.
- the device according to the invention for encapsulating the layer forms part of a sensor component on which the sensitive material is arranged in the form of an indicator material.
- a sensor can be activated automatically by breaking the membrane for measurements at any time.
- FIG. 1 and 2 show a top view and a cross-sectional view of a gas sensor component
- a Gassen ⁇ or component that in Figures 1 and 2 in is designated in its entirety by reference numeral 10, comprises a carrier 1, which consists for example of quartz, on which the measuring elements (for example conductor strip structures, MOSFET, SAW etc.) 2, 3 of an interdigital structure for capacitance and / or resistance measurement with associated connecting lines 2b, 3b and pads 2a, 3a are applied.
- the interdigital structure is covered with an indicator material 6.
- the indicator material is 3-aminopropyltrimethyloxysilane, which has only a limited lifespan of three months in air. It is therefore desirable to bring the indicator material layer into contact with the ambient air only shortly before its use in order to have the full life of the indicator material layer available.
- the carrier 1 is provided on its side provided with the indicator material 6 with a membrane holding structure 4 which, in the exemplary embodiment shown here, consists of a silicon wafer in which the recess 8 is made by conventional photolithographic and etching methods is incorporated.
- a membrane holding structure 4 which, in the exemplary embodiment shown here, consists of a silicon wafer in which the recess 8 is made by conventional photolithographic and etching methods is incorporated.
- the membrane 5 can also consist of silicon. However, other materials, such as plastic film and glass, also come into consideration.
- a heater structure 7 On the membrane is a heater structure 7, which is connected to connection surfaces or bond pads 7c, 7d via connecting lines 7a, 7b. If it is desired with this gas sensor component 10 to bring the indicator material layer 6 into contact with the ambient air for the purpose of use, after inserting the gas sensor component 10 into a measuring device, the membrane 5 is automatically destroyed shortly before the start of the measurement, in which a current pulse gives the heater 7 is supplied, which leads to the destruction of the membrane 5 already described. As a result, the sensitive indicator material layer 6 is put into operation.
- the device according to the invention is also suitable for encapsulating a plurality of sensors, for example on a chip, which are operated cascaded in a gas measuring device.
- suitable control electronics automatically activate a further gas sensor component for measuring use, in which its membrane is destroyed. In this way, the maintenance-free operating time of a gas measuring device is multiplied.
- Another application example of the device according to the invention for encapsulating sensitive layers is the encapsulation of irreversible indicator materials.
- This material class performs an irreversible detection reaction with the substance to be detected, so that a sensor can only carry out one measurement.
- the advantage of these materials lies in their simpler chemistry in order to carry out a certain (chemical) detection.
- the device described here enables the relatively uncomplicated construction of a large array of one-way sensors, each being encapsulated according to the method described. This encapsulation can be carried out simultaneously for the entire array. For this purpose, the building block provided with the membranes must be placed on the support coated with the indicator. Due to the great miniaturization possibilities of the method, the size of the entire array can be kept very small.
- the heater can also be arranged in the recess 8 in order to use a thermally generated excess pressure of a gas filling in the recess 8 to detach the membrane.
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/142,634 US6114658A (en) | 1996-03-15 | 1997-01-28 | Device for the encapsulated reception of a material |
EP97902246A EP0874691B1 (de) | 1996-03-15 | 1997-01-28 | Vorrichtung zur gekapselten aufnahme eines materials |
DE59700173T DE59700173D1 (de) | 1996-03-15 | 1997-01-28 | Vorrichtung zur gekapselten aufnahme eines materials |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19610293A DE19610293C1 (de) | 1996-03-15 | 1996-03-15 | Vorrichtung zur gekapselten Aufnahme eines Materials |
DE19610293.6 | 1996-03-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1997034697A1 true WO1997034697A1 (de) | 1997-09-25 |
Family
ID=7788441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1997/000373 WO1997034697A1 (de) | 1996-03-15 | 1997-01-28 | Vorrichtung zur gekapselten aufnahme eines materials |
Country Status (4)
Country | Link |
---|---|
US (1) | US6114658A (de) |
EP (1) | EP0874691B1 (de) |
DE (2) | DE19610293C1 (de) |
WO (1) | WO1997034697A1 (de) |
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US7070590B1 (en) * | 1996-07-02 | 2006-07-04 | Massachusetts Institute Of Technology | Microchip drug delivery devices |
JP2007248470A (ja) * | 2000-03-02 | 2007-09-27 | Microchips Inc | 化学物質およびデバイスを格納し、選択的に露出させるための微細加工されたデバイス |
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DE19716683C1 (de) * | 1997-04-21 | 1998-06-04 | Fraunhofer Ges Forschung | Vorrichtung zur getrennten, gekapselten Aufnahme einer Mehrzahl gleicher oder unterschiedlicher Stoffe |
DE60018582T2 (de) * | 1999-08-18 | 2006-01-19 | Microchips, Inc., Bedford | Thermisch aktivierbarer microchip als abgabevorrichtung für chemikalien |
EP2308522A3 (de) * | 1999-11-17 | 2012-02-29 | Boston Scientific Limited | Miniaturisierte Vorrichtungen zur Abgabe von Molekülen in einer Trägerflüssigkeit |
US6808522B2 (en) * | 1999-12-10 | 2004-10-26 | Massachusetts Institute Of Technology | Microchip devices for delivery of molecules and methods of fabrication thereof |
DE10020352A1 (de) * | 2000-04-26 | 2001-10-31 | Simons Hans Juergen | Implantierbares Blutzuckermessgerät |
WO2001091902A2 (en) | 2000-05-30 | 2001-12-06 | Massachusetts Institute Of Technology | Methods and devices for sealing microchip reservoir devices |
DE60116520T2 (de) * | 2000-10-10 | 2006-08-31 | Microchips, Inc., Bedford | Microchip-reservoir-vorrichtungen mit drahtloser übertragung von energie und daten |
AU2002224453A1 (en) | 2000-10-11 | 2002-04-22 | Microchips, Inc. | Microchip reservoir devices and facilitated corrosion of electrodes |
JP4657577B2 (ja) * | 2001-01-09 | 2011-03-23 | マイクロチップス・インコーポレーテッド | 眼への適用および他への適用のための可撓性マイクロチップデバイス |
WO2002096389A1 (en) * | 2001-05-30 | 2002-12-05 | Microchips, Inc. | Conformal coated microchip reservoir devices |
WO2002099457A1 (en) * | 2001-05-31 | 2002-12-12 | Massachusetts Inst Technology | Microchip devices with improved reservoir opening |
EP1399135B1 (de) * | 2001-06-28 | 2004-12-29 | Microchips, Inc. | Verfahren zum hermetischen versiegeln von mikrochip-reservoir-vorrichtungen |
DE10133013C2 (de) * | 2001-07-06 | 2003-07-03 | Karlsruhe Forschzent | Verschluss für Hohlräume oder Durchführungen |
US20030116552A1 (en) * | 2001-12-20 | 2003-06-26 | Stmicroelectronics Inc. | Heating element for microfluidic and micromechanical applications |
US6953455B2 (en) * | 2002-07-30 | 2005-10-11 | Hospira, Inc. | Medicine delivery system |
JP4436258B2 (ja) * | 2002-08-16 | 2010-03-24 | マイクロチップス・インコーポレーテッド | 制御された放出デバイスおよび方法 |
US7497855B2 (en) * | 2002-09-04 | 2009-03-03 | Microchips, Inc. | Method and device for the controlled delivery of parathyroid hormone |
US7534241B2 (en) * | 2002-09-23 | 2009-05-19 | Microchips, Inc. | Micro-reservoir osmotic release systems and microtube array device |
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CA2523432C (en) * | 2003-04-25 | 2014-10-28 | Microchips, Inc. | Solid drug formulation and device for storage and controlled delivery thereof |
US7114312B2 (en) * | 2003-07-17 | 2006-10-03 | Microchips, Inc. | Low temperature methods for hermetically sealing reservoir devices |
WO2005016558A2 (en) * | 2003-08-04 | 2005-02-24 | Microchips, Inc. | Methods for accelerated release of material from a reservoir device |
EP1694200B1 (de) * | 2003-11-03 | 2010-09-29 | MicroCHIPS, Inc. | Medizinprodukt zum messen von glucose |
US7402425B2 (en) * | 2004-03-02 | 2008-07-22 | The Charles Stark Draper Laboratory, Inc. | Stress-based electrostatic monitoring of chemical reactions and binding |
US20070036835A1 (en) * | 2004-07-19 | 2007-02-15 | Microchips, Inc. | Hermetically Sealed Devices for Controlled Release or Exposure of Reservoir Contents |
US7537590B2 (en) * | 2004-07-30 | 2009-05-26 | Microchips, Inc. | Multi-reservoir device for transdermal drug delivery and sensing |
ATE424928T1 (de) * | 2004-09-01 | 2009-03-15 | Microchips Inc | Behältervorrichtungen mit mehreren verschlüssen zur gesteuerten abgabe oder exponierung des behälterinhalts |
CA2583911A1 (en) * | 2004-10-28 | 2006-05-11 | Microchips, Inc. | Orthopedic and dental implant devices providing controlled drug delivery |
CN101080359A (zh) | 2004-11-04 | 2007-11-28 | 微芯片公司 | 压入式冷焊密封方法和装置 |
US7413846B2 (en) * | 2004-11-15 | 2008-08-19 | Microchips, Inc. | Fabrication methods and structures for micro-reservoir devices |
US7827983B2 (en) * | 2004-12-20 | 2010-11-09 | Hewlett-Packard Development Company, L.P. | Method for making a pharmaceutically active ingredient abuse-prevention device |
CA2595457A1 (en) | 2005-01-25 | 2006-08-03 | Microchips, Inc. | Control of drug release by transient modification of local microenvironments |
WO2007047556A2 (en) * | 2005-10-14 | 2007-04-26 | Microchips, Inc. | Passive wear-indicating sensor for implantable prosthetic device |
US20070275035A1 (en) * | 2006-05-24 | 2007-11-29 | Microchips, Inc. | Minimally Invasive Medical Implant Devices for Controlled Drug Delivery |
WO2008008845A2 (en) * | 2006-07-11 | 2008-01-17 | Microchips, Inc. | Multi-reservoir pump device for dialysis, biosensing, or delivery of substances |
US20090014340A1 (en) * | 2007-06-15 | 2009-01-15 | Williams John R | Devices, systems, and methods for measuring glucose |
US8328720B2 (en) | 2007-08-10 | 2012-12-11 | Infotonics Technology Center, Inc. | MEMS interstitial prothrombin time test |
US8181531B2 (en) * | 2008-06-27 | 2012-05-22 | Edwin Carlen | Accessible stress-based electrostatic monitoring of chemical reactions and binding |
US9011670B2 (en) * | 2008-08-14 | 2015-04-21 | The Charles Stark Draper Laboratory, Inc. | Three-dimensional metal ion sensor arrays on printed circuit boards |
FR2945097B1 (fr) * | 2009-04-30 | 2011-06-03 | Commissariat Energie Atomique | Vanne microfluidique a usage unique. |
US10244981B2 (en) | 2011-03-30 | 2019-04-02 | SensiVida Medical Technologies, Inc. | Skin test image analysis apparatuses and methods thereof |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4198135A (en) * | 1979-04-04 | 1980-04-15 | Polaroid Corporation | Method and apparatus for releasing processing fluid from a fluid applicator by application of thermal energy |
DE3520416A1 (de) * | 1985-06-07 | 1986-12-11 | Erno Raumfahrttechnik Gmbh | Vorrichtung zum steuerbaren oeffnen einer trennwand |
EP0316065A2 (de) * | 1987-11-09 | 1989-05-17 | Alza Corporation | Vorrichtung zur transdermalen Applikation von Medikamenten |
EP0347579A2 (de) * | 1988-06-01 | 1989-12-27 | Daimler-Benz Aerospace Aktiengesellschaft | Vorrichtung mit Träger besonderer Struktur zur Aufnahme, Untersuchung und Behandlung von Proben |
EP0459239A2 (de) * | 1990-05-29 | 1991-12-04 | Lifecor, Inc. | Tragbare Einrichtung zur Detektierung der Herztätigkeit und zur automatischen Auslieferung einer Elektrotherapie |
EP0471431A2 (de) * | 1990-08-13 | 1992-02-19 | Minnesota Mining And Manufacturing Company | Detektor für elektrostatische Entladungen |
WO1993007463A1 (en) * | 1991-10-10 | 1993-04-15 | The Regents Of The University Of California | Plate-mode ultrasonic structure including a gel |
US5345213A (en) * | 1992-10-26 | 1994-09-06 | The United States Of America, As Represented By The Secretary Of Commerce | Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4225410A (en) * | 1978-12-04 | 1980-09-30 | Technicon Instruments Corporation | Integrated array of electrochemical sensors |
US4772560A (en) * | 1985-11-18 | 1988-09-20 | Attar Amir J | Laminated wafer for sensing and monitoring exposure to gases |
DE3621331A1 (de) * | 1986-06-26 | 1988-01-14 | Fraunhofer Ges Forschung | Mikroventil |
US4928513A (en) * | 1986-07-29 | 1990-05-29 | Sharp Kabushiki Kaisha | Sensor |
US4706061A (en) * | 1986-08-28 | 1987-11-10 | Honeywell Inc. | Composition sensor with minimal non-linear thermal gradients |
US4914742A (en) * | 1987-12-07 | 1990-04-03 | Honeywell Inc. | Thin film orthogonal microsensor for air flow and method |
US4967589A (en) * | 1987-12-23 | 1990-11-06 | Ricoh Company, Ltd. | Gas detecting device |
DE3818614A1 (de) * | 1988-06-01 | 1989-12-07 | Messerschmitt Boelkow Blohm | Mikrobehaelter |
DE68928739T2 (de) * | 1988-12-29 | 1999-02-11 | Sharp Kk | Detecteur d'humidite |
DE3915920A1 (de) * | 1989-05-16 | 1990-11-22 | Messerschmitt Boelkow Blohm | Mikromechanische struktur |
DE3919042A1 (de) * | 1989-06-10 | 1990-12-13 | Bodenseewerk Perkin Elmer Co | Verfahren und vorrichtung zur analyse von festen substanzen auf quecksilber |
DE4012080A1 (de) * | 1990-04-14 | 1991-10-17 | Bosch Gmbh Robert | Verfahren zum aufbau von mikromechanischen sensoren |
US5291781A (en) * | 1991-04-12 | 1994-03-08 | Yamatake-Honeywell Co., Ltd. | Diaphragm-type sensor |
US5262127A (en) * | 1992-02-12 | 1993-11-16 | The Regents Of The University Of Michigan | Solid state chemical micro-reservoirs |
US5406841A (en) * | 1992-03-17 | 1995-04-18 | Ricoh Seiki Company, Ltd. | Flow sensor |
US5464966A (en) * | 1992-10-26 | 1995-11-07 | The United States Of America As Represented By The Secretary Of Commerce | Micro-hotplate devices and methods for their fabrication |
US5356756A (en) * | 1992-10-26 | 1994-10-18 | The United States Of America As Represented By The Secretary Of Commerce | Application of microsubstrates for materials processing |
DE4424112A1 (de) * | 1994-07-08 | 1996-01-11 | Raytest Isotopenmesgeraete Gmb | Verfahren zur Herstellung eines Probenträgers |
-
1996
- 1996-03-15 DE DE19610293A patent/DE19610293C1/de not_active Expired - Fee Related
-
1997
- 1997-01-28 US US09/142,634 patent/US6114658A/en not_active Expired - Lifetime
- 1997-01-28 EP EP97902246A patent/EP0874691B1/de not_active Expired - Lifetime
- 1997-01-28 WO PCT/EP1997/000373 patent/WO1997034697A1/de active IP Right Grant
- 1997-01-28 DE DE59700173T patent/DE59700173D1/de not_active Expired - Lifetime
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4198135A (en) * | 1979-04-04 | 1980-04-15 | Polaroid Corporation | Method and apparatus for releasing processing fluid from a fluid applicator by application of thermal energy |
DE3520416A1 (de) * | 1985-06-07 | 1986-12-11 | Erno Raumfahrttechnik Gmbh | Vorrichtung zum steuerbaren oeffnen einer trennwand |
EP0316065A2 (de) * | 1987-11-09 | 1989-05-17 | Alza Corporation | Vorrichtung zur transdermalen Applikation von Medikamenten |
EP0347579A2 (de) * | 1988-06-01 | 1989-12-27 | Daimler-Benz Aerospace Aktiengesellschaft | Vorrichtung mit Träger besonderer Struktur zur Aufnahme, Untersuchung und Behandlung von Proben |
EP0459239A2 (de) * | 1990-05-29 | 1991-12-04 | Lifecor, Inc. | Tragbare Einrichtung zur Detektierung der Herztätigkeit und zur automatischen Auslieferung einer Elektrotherapie |
EP0471431A2 (de) * | 1990-08-13 | 1992-02-19 | Minnesota Mining And Manufacturing Company | Detektor für elektrostatische Entladungen |
WO1993007463A1 (en) * | 1991-10-10 | 1993-04-15 | The Regents Of The University Of California | Plate-mode ultrasonic structure including a gel |
US5345213A (en) * | 1992-10-26 | 1994-09-06 | The United States Of America, As Represented By The Secretary Of Commerce | Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7070590B1 (en) * | 1996-07-02 | 2006-07-04 | Massachusetts Institute Of Technology | Microchip drug delivery devices |
JP2007248470A (ja) * | 2000-03-02 | 2007-09-27 | Microchips Inc | 化学物質およびデバイスを格納し、選択的に露出させるための微細加工されたデバイス |
Also Published As
Publication number | Publication date |
---|---|
DE59700173D1 (de) | 1999-07-01 |
EP0874691A1 (de) | 1998-11-04 |
DE19610293C1 (de) | 1997-07-31 |
US6114658A (en) | 2000-09-05 |
EP0874691B1 (de) | 1999-05-26 |
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