USD668211S1 - Segmented electroplating anode and anode segment - Google Patents

Segmented electroplating anode and anode segment Download PDF

Info

Publication number
USD668211S1
USD668211S1 US29/369,658 US36965810F USD668211S US D668211 S1 USD668211 S1 US D668211S1 US 36965810 F US36965810 F US 36965810F US D668211 S USD668211 S US D668211S
Authority
US
United States
Prior art keywords
anode
segmented
electroplating
segment
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/369,658
Inventor
Jingbin Feng
Marshall Stowell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novellus Systems Inc
Original Assignee
Novellus Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novellus Systems Inc filed Critical Novellus Systems Inc
Priority to US29/369,658 priority Critical patent/USD668211S1/en
Assigned to NOVELLUS SYSTEMS, INC. reassignment NOVELLUS SYSTEMS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FENG, JINGBIN, STOWELL, MARSHALL
Application granted granted Critical
Publication of USD668211S1 publication Critical patent/USD668211S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Description

FIG. 1 is a top perspective view of a segmented electroplating anode and anode segment showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a left side elevation view thereof;
FIG. 6 is a right side elevation view thereof;
FIG. 7 is a top perspective view shown in environmental use; and,
FIG. 8 is a bottom perspective view shown in environmental use.
The broken lines shown represent unclaimed subject matter and form no part of the claimed design.

Claims (1)

  1. We claim the ornamental design for a segmented electroplating anode and anode segment, as shown and described.
US29/369,658 2010-09-10 2010-09-10 Segmented electroplating anode and anode segment Active USD668211S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/369,658 USD668211S1 (en) 2010-09-10 2010-09-10 Segmented electroplating anode and anode segment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/369,658 USD668211S1 (en) 2010-09-10 2010-09-10 Segmented electroplating anode and anode segment

Publications (1)

Publication Number Publication Date
USD668211S1 true USD668211S1 (en) 2012-10-02

Family

ID=46925096

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/369,658 Active USD668211S1 (en) 2010-09-10 2010-09-10 Segmented electroplating anode and anode segment

Country Status (1)

Country Link
US (1) USD668211S1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD778247S1 (en) * 2015-04-16 2017-02-07 Veeco Instruments Inc. Wafer carrier with a multi-pocket configuration
USD793972S1 (en) 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 31-pocket configuration
USD793971S1 (en) 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD881373S1 (en) * 2017-08-18 2020-04-14 Steven S. Wagner Exhaust fan screen

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5078852A (en) * 1990-10-12 1992-01-07 Microelectronics And Computer Technology Corporation Plating rack
US5671116A (en) * 1995-03-10 1997-09-23 Lam Research Corporation Multilayered electrostatic chuck and method of manufacture thereof
US6004440A (en) * 1997-09-18 1999-12-21 Semitool, Inc. Cathode current control system for a wafer electroplating apparatus
US6721162B2 (en) * 1996-04-26 2004-04-13 Applied Materials Inc. Electrostatic chuck having composite dielectric layer and method of manufacture
USD489319S1 (en) * 2002-08-23 2004-05-04 Biosensor Applications Sweden Ab Piezoelectric sensor
USD546784S1 (en) * 2005-09-29 2007-07-17 Tokyo Electron Limited Attracting disc for an electrostatic chuck for semiconductor production
USD570310S1 (en) * 2006-08-01 2008-06-03 Tokyo Electron Limited Attracting plate of an electrostatic chuck for semiconductor manufacturing
US20090211900A1 (en) 2008-02-22 2009-08-27 Novellus Systems, Inc. Convenient Replacement of Anode in Semiconductor Electroplating Apparatus
USD604693S1 (en) * 2008-02-18 2009-11-24 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion element
USD609652S1 (en) * 2008-07-22 2010-02-09 Tokyo Electron Limited Wafer attracting plate
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
USD615488S1 (en) * 2008-12-31 2010-05-11 Neobulb Technologies, Inc. Photoelectric energy transducing apparatus
USD624890S1 (en) * 2008-08-18 2010-10-05 Schadeck Matthew A Anode and cathode assembly

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5078852A (en) * 1990-10-12 1992-01-07 Microelectronics And Computer Technology Corporation Plating rack
US5671116A (en) * 1995-03-10 1997-09-23 Lam Research Corporation Multilayered electrostatic chuck and method of manufacture thereof
US6721162B2 (en) * 1996-04-26 2004-04-13 Applied Materials Inc. Electrostatic chuck having composite dielectric layer and method of manufacture
US6004440A (en) * 1997-09-18 1999-12-21 Semitool, Inc. Cathode current control system for a wafer electroplating apparatus
USD489319S1 (en) * 2002-08-23 2004-05-04 Biosensor Applications Sweden Ab Piezoelectric sensor
USD546784S1 (en) * 2005-09-29 2007-07-17 Tokyo Electron Limited Attracting disc for an electrostatic chuck for semiconductor production
USD570310S1 (en) * 2006-08-01 2008-06-03 Tokyo Electron Limited Attracting plate of an electrostatic chuck for semiconductor manufacturing
USD604693S1 (en) * 2008-02-18 2009-11-24 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion element
US20090211900A1 (en) 2008-02-22 2009-08-27 Novellus Systems, Inc. Convenient Replacement of Anode in Semiconductor Electroplating Apparatus
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
USD609652S1 (en) * 2008-07-22 2010-02-09 Tokyo Electron Limited Wafer attracting plate
USD624890S1 (en) * 2008-08-18 2010-10-05 Schadeck Matthew A Anode and cathode assembly
USD615488S1 (en) * 2008-12-31 2010-05-11 Neobulb Technologies, Inc. Photoelectric energy transducing apparatus

Non-Patent Citations (10)

* Cited by examiner, † Cited by third party
Title
CN patent application No. 201130040306.7, Notification of Grant mailed Apr. 28, 2011.
EP patent application No. 001260111, Certificate of Registration issued Feb. 15, 2011.
JP patent application No. 2011-005362, Certificate of Design Registration No. 1437774 dated Mar. 9, 2012.
KR patent application No. 30-2011-0005223, Office Action mailed Apr. 20, 2012.
Novellus SABRE Extreme Manual, p. 396, Oct. 7, 2008.
Novellus SABRE xT Manual, p. 423, Mar. 16, 2007.
SG patent application No. D2011/261/I, Certificate of Registration dated Apr. 25, 2011.
TW patent application No. 100301070, Office Action mailed Sep. 23, 2011.
U.S. Appl. No. 12/879,484, "Front Referenced Anode", Feng et al., filed Sep. 10, 2010.
U.S. Appl. No. 29/420,177, "Segmented electroplating anode and anode segment," Mayer et al., filed May 4, 2012.

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD793972S1 (en) 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 31-pocket configuration
USD793971S1 (en) 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD852762S1 (en) 2015-03-27 2019-07-02 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD778247S1 (en) * 2015-04-16 2017-02-07 Veeco Instruments Inc. Wafer carrier with a multi-pocket configuration
USD806046S1 (en) 2015-04-16 2017-12-26 Veeco Instruments Inc. Wafer carrier with a multi-pocket configuration
USD881373S1 (en) * 2017-08-18 2020-04-14 Steven S. Wagner Exhaust fan screen

Similar Documents

Publication Publication Date Title
USD672536S1 (en) Shoe
USD678597S1 (en) Troffer with lens
USD646969S1 (en) Container
USD649862S1 (en) Quick-lock for pole handle
USD644072S1 (en) Strainer
USD636999S1 (en) Basket
USD655182S1 (en) Bottle
USD621648S1 (en) Carafe
USD636065S1 (en) Faucet
USD652733S1 (en) Bottle
USD646938S1 (en) Bottle blade
USD655181S1 (en) Bottle
USD652732S1 (en) Bottle
USD631128S1 (en) Floating water fountain
USD641979S1 (en) Basket
USD649670S1 (en) Flashlight
USD670057S1 (en) Wax scraper
USD675110S1 (en) Shaped can
USD630196S1 (en) Antenna
USD642699S1 (en) Tree-like observation blind
USD660724S1 (en) Shaped can
USD631783S1 (en) Pot
USD629610S1 (en) Basket
USD653985S1 (en) Pendant
USD714637S1 (en) Container