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| US5386169 | 19 Jul 1993 | 31 Jan 1995 | | Device for causing an untuned structure to vibrate ultrasonically |
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| US7518288 | 16 Aug 2007 | 14 Apr 2009 | | System for megasonic processing of an article |
| US7938131 | 23 Jul 2007 | 10 May 2011 | | Apparatus for ejecting fluid onto a substrate and system and method incorporating the same |
