US20070290377A1 - Three Dimensional Six Surface Conformal Die Coating - Google Patents
Three Dimensional Six Surface Conformal Die Coating Download PDFInfo
- Publication number
- US20070290377A1 US20070290377A1 US11/849,162 US84916207A US2007290377A1 US 20070290377 A1 US20070290377 A1 US 20070290377A1 US 84916207 A US84916207 A US 84916207A US 2007290377 A1 US2007290377 A1 US 2007290377A1
- Authority
- US
- United States
- Prior art keywords
- die
- insulating material
- exposing
- electrically insulating
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3185—Partial encapsulation or coating the coating covering also the sidewalls of the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3171—Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- Semiconductor die are typically manufactured as a large group of integrated circuit die imaged through photolithographic means on a semiconductor wafer or slice made of silicon. After manufacture, the silicon wafer is thinned, usually by mechanical means, and the wafer is cut, usually with a diamond saw, to singulate the individual die. The resulting individual integrated circuit has six exposed surfaces.
- the top surface of the die includes the circuitry images and any passivation layers that have been added to the top layer during wafer fabrication.
- the present invention describes a method for protecting and insulating all six surfaces of the die to reduce breakage, provide electrical insulation for these layers, and to provide physical surfaces that can be used for bonding one semiconductor die to another for the purpose of stacking die in an interconnected module or component.
- the present invention provides the advantages of reducing chipping, cracking, and physical damage to die during die handling and processing operations such as burn-in, test, and assembly.
- the present invention is useable for any semiconductor chips including, but not limited to memory chips.
- FIG. 1 is a diagram illustrating a single semiconductor die with original connection pads running down the center of the die, and rerouting lines connecting the original connection pads at the center of the die with new connection pads located at the edges of the die.
- FIG. 2 is a diagram illustrating a cross sectional side view of a semiconductor die showing the die coated with a conformal, insulating coating.
- FIG. 3 is a diagram illustrating a cross section view of the semiconductor die showing the conformal coating and openings in the conformal coating above the original connection pads which run down the center of the semiconductor die.
- FIG. 4 shows a semiconductor die with connection pads around the periphery of the die.
- FIG. 5 shows a semiconductor die with peripheral pads, either original or relocated, coated with a conformal insulative coating, and with openings in the insulative coating located above the peripherally located electrical connection pads.
- semiconductor die 10 with original connection pads 60 have had an insulating layer applied to the top surface, 30 of all of the die while the die are still connected together in a wafer form.
- a metal layer is deposited and defined using photolithography, to reroute the electrical signals from the original connection pads 60 to new locations at the edge of the die.
- An additional layer of insulating material is optionally applied above the metal layer, and openings are made in the top layer of insulating material at the relocated pad locations at the edge of the semiconductor die, and optionally at the original pad locations down the center of the top surface of the die.
- the semiconductor die 10 has been thinned by grinding or lapping, and has been singulated from the semiconductor wafer, and said semiconductor die has been coated with a conformal insulating coating 20 .
- openings have been made in the coating 20 , above original connection pads 60 , of semiconductor die 10 .
- the electrical connection pads in this illustration run down the center of the top surface of the die.
- this shows a semiconductor die 70 with connection pads 80 located around the periphery of the die top surface.
- FIG. 5 shows openings in the conformal coating material at locations 90 on a semiconductor die whose electrical connections are located at the edges of the surface of the die.
- the electrical connection points may be located anywhere on any of the surfaces of the die, but are typically located on the top surface of the die and are typically either at the peripheral edges of the top surface or down the center of the top surface.
Abstract
Description
- This application is a Divisional of U.S. application Ser. No. 11/016,558, filed Dec. 17, 2004, titled “Three dimensional six surface conformal die coating”, which claimed priority from U.S. Provisional Application No. 60/561,847, filed Apr. 13, 2004, titled “Three dimensional six surface conformal die coating”, and both of which are hereby incorporated by reference.
- Semiconductor die are typically manufactured as a large group of integrated circuit die imaged through photolithographic means on a semiconductor wafer or slice made of silicon. After manufacture, the silicon wafer is thinned, usually by mechanical means, and the wafer is cut, usually with a diamond saw, to singulate the individual die. The resulting individual integrated circuit has six exposed surfaces. The top surface of the die includes the circuitry images and any passivation layers that have been added to the top layer during wafer fabrication. The present invention describes a method for protecting and insulating all six surfaces of the die to reduce breakage, provide electrical insulation for these layers, and to provide physical surfaces that can be used for bonding one semiconductor die to another for the purpose of stacking die in an interconnected module or component.
- The present invention provides the advantages of reducing chipping, cracking, and physical damage to die during die handling and processing operations such as burn-in, test, and assembly. The present invention is useable for any semiconductor chips including, but not limited to memory chips.
-
FIG. 1 is a diagram illustrating a single semiconductor die with original connection pads running down the center of the die, and rerouting lines connecting the original connection pads at the center of the die with new connection pads located at the edges of the die. -
FIG. 2 is a diagram illustrating a cross sectional side view of a semiconductor die showing the die coated with a conformal, insulating coating. -
FIG. 3 is a diagram illustrating a cross section view of the semiconductor die showing the conformal coating and openings in the conformal coating above the original connection pads which run down the center of the semiconductor die. -
FIG. 4 shows a semiconductor die with connection pads around the periphery of the die. -
FIG. 5 shows a semiconductor die with peripheral pads, either original or relocated, coated with a conformal insulative coating, and with openings in the insulative coating located above the peripherally located electrical connection pads. - Referring to
FIG. 1 ,semiconductor die 10, withoriginal connection pads 60 have had an insulating layer applied to the top surface, 30 of all of the die while the die are still connected together in a wafer form. A metal layer is deposited and defined using photolithography, to reroute the electrical signals from theoriginal connection pads 60 to new locations at the edge of the die. An additional layer of insulating material is optionally applied above the metal layer, and openings are made in the top layer of insulating material at the relocated pad locations at the edge of the semiconductor die, and optionally at the original pad locations down the center of the top surface of the die. - Referring to
FIG. 2 , the semiconductor die 10, has been thinned by grinding or lapping, and has been singulated from the semiconductor wafer, and said semiconductor die has been coated with aconformal insulating coating 20. - Referring to
FIG. 3 , openings have been made in thecoating 20, aboveoriginal connection pads 60, ofsemiconductor die 10. The electrical connection pads in this illustration run down the center of the top surface of the die. - Referring to
FIG. 4 , this shows asemiconductor die 70 withconnection pads 80 located around the periphery of the die top surface. -
FIG. 5 shows openings in the conformal coating material atlocations 90 on a semiconductor die whose electrical connections are located at the edges of the surface of the die. The electrical connection points may be located anywhere on any of the surfaces of the die, but are typically located on the top surface of the die and are typically either at the peripheral edges of the top surface or down the center of the top surface.
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/849,162 US20070290377A1 (en) | 2004-04-13 | 2007-08-31 | Three Dimensional Six Surface Conformal Die Coating |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US56184704P | 2004-04-13 | 2004-04-13 | |
US11/016,558 US7705432B2 (en) | 2004-04-13 | 2004-12-17 | Three dimensional six surface conformal die coating |
US11/849,162 US20070290377A1 (en) | 2004-04-13 | 2007-08-31 | Three Dimensional Six Surface Conformal Die Coating |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/016,558 Division US7705432B2 (en) | 2004-04-13 | 2004-12-17 | Three dimensional six surface conformal die coating |
Publications (1)
Publication Number | Publication Date |
---|---|
US20070290377A1 true US20070290377A1 (en) | 2007-12-20 |
Family
ID=35150641
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/016,558 Active 2025-04-18 US7705432B2 (en) | 2004-04-13 | 2004-12-17 | Three dimensional six surface conformal die coating |
US11/849,162 Abandoned US20070290377A1 (en) | 2004-04-13 | 2007-08-31 | Three Dimensional Six Surface Conformal Die Coating |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/016,558 Active 2025-04-18 US7705432B2 (en) | 2004-04-13 | 2004-12-17 | Three dimensional six surface conformal die coating |
Country Status (4)
Country | Link |
---|---|
US (2) | US7705432B2 (en) |
EP (1) | EP1743370A4 (en) |
TW (1) | TW200603257A (en) |
WO (1) | WO2005101494A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8587088B2 (en) | 2011-02-17 | 2013-11-19 | Apple Inc. | Side-mounted controller and methods for making the same |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8154881B2 (en) * | 2006-11-13 | 2012-04-10 | Telecommunication Systems, Inc. | Radiation-shielded semiconductor assembly |
KR100844997B1 (en) * | 2006-12-29 | 2008-07-09 | 삼성전자주식회사 | Semiconductor package, stacked semiconductor package and methods of manufacturing the packages |
US8533853B2 (en) | 2009-06-12 | 2013-09-10 | Telecommunication Systems, Inc. | Location sensitive solid state drive |
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2004
- 2004-12-17 US US11/016,558 patent/US7705432B2/en active Active
-
2005
- 2005-04-11 TW TW094111357A patent/TW200603257A/en unknown
- 2005-04-12 WO PCT/US2005/012373 patent/WO2005101494A2/en active Application Filing
- 2005-04-12 EP EP05736129A patent/EP1743370A4/en not_active Withdrawn
-
2007
- 2007-08-31 US US11/849,162 patent/US20070290377A1/en not_active Abandoned
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Also Published As
Publication number | Publication date |
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WO2005101494A3 (en) | 2006-11-23 |
EP1743370A2 (en) | 2007-01-17 |
WO2005101494A2 (en) | 2005-10-27 |
US20050224952A1 (en) | 2005-10-13 |
EP1743370A4 (en) | 2007-12-05 |
TW200603257A (en) | 2006-01-16 |
US7705432B2 (en) | 2010-04-27 |
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