US20050029657A1 - Enhanced die-up ball grid array and method for making the same - Google Patents

Enhanced die-up ball grid array and method for making the same Download PDF

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Publication number
US20050029657A1
US20050029657A1 US10/942,031 US94203104A US2005029657A1 US 20050029657 A1 US20050029657 A1 US 20050029657A1 US 94203104 A US94203104 A US 94203104A US 2005029657 A1 US2005029657 A1 US 2005029657A1
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Prior art keywords
stiffener
die
substrate
package
solder balls
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US10/942,031
Inventor
Reza-Ur Khan
Sam Zhao
Brent Bacher
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Avago Technologies International Sales Pte Ltd
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Broadcom Corp
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Priority to US10/942,031 priority Critical patent/US20050029657A1/en
Assigned to BROADCOM CORPORATION reassignment BROADCOM CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BACHER, BRENT, KHAN, REZA-UR R., ZHAO, SAM Z.
Publication of US20050029657A1 publication Critical patent/US20050029657A1/en
Priority to US12/424,270 priority patent/US20090203172A1/en
Priority to US14/542,351 priority patent/US20150137343A1/en
Assigned to BANK OF AMERICA, N.A., AS COLLATERAL AGENT reassignment BANK OF AMERICA, N.A., AS COLLATERAL AGENT PATENT SECURITY AGREEMENT Assignors: BROADCOM CORPORATION
Assigned to AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. reassignment AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BROADCOM CORPORATION
Assigned to BROADCOM CORPORATION reassignment BROADCOM CORPORATION TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS Assignors: BANK OF AMERICA, N.A., AS COLLATERAL AGENT
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Definitions

  • the invention relates generally to the field of integrated circuit (IC) device packaging technology, and more particularly to substrate stiffening and heat spreading techniques in ball grid array (BGA) packages.
  • IC integrated circuit
  • BGA ball grid array
  • Integrated circuit (IC) dies are typically mounted in or on a package that is attached to a printed circuit board (PCB).
  • PCB printed circuit board
  • One such type of IC die package is a ball grid array (BGA) package.
  • BGA packages provide for smaller footprints than many other package solutions available today.
  • a BGA package has an array of solder balls located on a bottom external surface of a package substrate. The solder balls are reflowed to attach the package to the PCB.
  • the IC die is mounted to a top surface of the package substrate. Wire bonds typically couple signals in the IC die to the substrate.
  • the substrate has internal routing which electrically couples the IC die signals to the solder balls on the bottom substrate surface.
  • BGA package substrate types including ceramic, plastic, and tape (also known as “flex”).
  • a stiffener may be attached to the substrate to supply planarity and rigidity to the package.
  • the IC die may be mounted to the stiffener instead of the substrate. Openings in the stiffener may be used to allow the IC die to be wire-bonded to the substrate.
  • die-up and die-down BGA package configurations exist.
  • the IC die is mounted on a top surface of the substrate or stiffener, opposite of the side to which the solder balls are attached.
  • die-down BGA packages the IC die is mounted on a bottom surface of the substrate or stiffener, on the same side as which the solder balls are attached.
  • the tape substrate used in flex BGA packages is typically polyimide, which has very low values of thermal conductivity. Consequently, the IC die is separated from the PCB internally by the tape substrate thermal barrier. The lack of direct thermal connection from IC die to PCB leads to relatively high resistance to heat transfer from IC die-to-board (theta-jb).
  • a stiffener attached to a substrate enhances heat spreading.
  • the openings on the stiffener for wire bond connections tend to reduce the thermal connections between the IC die and the edges of the stiffener.
  • heat spreading is limited largely to the region of the IC die attach pad, while areas at the stiffener peripheral do not contribute effectively to heat spreading.
  • Ball grid array packages that use plastic substrates (for example, BT or FR 4 plastic) are commonly known as plastic BGAs, or PBGAs. See, e.g., Lau, J. H., Ball Grid Array Technology , McGraw-Hill, New York, (1995).
  • a PBGA package may add solder balls to the bottom substrate surface under the IC die to aid in conducting heat to the PCB. Solder balls such as these are referred to as thermal balls.
  • the cost of the PBGA package will increase with the number of thermal balls. Furthermore, a large array of thermal balls may be necessary for heat dissipation into the PCB for high levels of IC device power.
  • the BGA package has a substrate that has a first surface and a second surface.
  • a stiffener has a first surface and a second surface. The second stiffener surface is attached to the first substrate surface.
  • An IC die has a first surface and a second surface. The first IC die surface is mounted to the first stiffener surface.
  • a plurality of solder balls are attached to the second substrate surface.
  • a heat spreader has a first surface.
  • the first heat spreader surface is mounted to the second IC die surface.
  • the second IC die surface includes a contact pad.
  • a wire bond corresponding to the contact pad couples the corresponding contact pad to the second stiffener surface.
  • At least one power/ground/thermal solder ball is attached to the second substrate surface.
  • Each of the power/ground/thermal solder balls are coupled to the stiffener through a corresponding via extending through the substrate.
  • the at least one power/ground/thermal solder ball is coupled to a first potential.
  • the substrate has a window opening that exposes a portion of the second stiffener surface.
  • the exposed portion of the second stiffener surface is configured to be coupled to a printed circuit board (PCB).
  • PCB printed circuit board
  • a metal ring is attached to the first stiffener surface.
  • a wire bond opening is positioned along an edge of the IC die mount location.
  • the wire bond opening extends through the stiffener.
  • At least one stud corresponds to the wire bond opening.
  • Each stud bridges the substrate across the corresponding the wire bond opening.
  • a substrate has a first surface and a second surface.
  • the second substrate surface includes an array of contact pads.
  • the first substrate surface is configured to mount an integrated circuit (IC) die.
  • a plurality of solder balls is attached to the contact pads of the substrate.
  • a heat spreader has a first surface coupled to the second substrate surface.
  • a second surface of the heat spreader is configured to be coupled to a printed circuit board (PCB).
  • PCB printed circuit board
  • FIGS. 1A and 1B illustrate conventional flex BGA packages.
  • FIG. 2A shows a top view of a stiffener.
  • FIG. 2B shows a temperature distribution for a stiffener during operation of an IC device in a flex BGA package.
  • FIG. 2C shows an top view of an alternative stiffener configuration.
  • FIG. 3 shows across-sectional view of a conventional die-up plastic BGA package.
  • FIG. 4 illustrates a cross-sectional view of a die-up flex BGA package with heat spreader, according to an embodiment of the present invention.
  • FIG. 5 show a cross-sectional view of an alternative BGA package, according to embodiments of the present invention, where the heat spreader is internal to the BGA package.
  • FIG. 6 illustrates a cross-sectional view of a die-up flex BGA package with stiffener ground plane, according to an embodiment of the present invention.
  • FIG. 7 illustrates a cross-sectional view of a die-up flex BGA package with patterned stiffener, according to an embodiment of the present invention.
  • FIG. 8 illustrates a cross-sectional view of a die-up flex BGA package with ground/thermal connector, according to an embodiment of the present invention.
  • FIG. 9A illustrates a cross-sectional view of a die-up tape BGA package with metal ring, according to an embodiment of the present invention.
  • FIG. 9B illustrates a top view of the die-up tape BGA package with metal ring of FIG. 9A , according to an embodiment of the present invention.
  • FIG. 10A illustrates a stiffener that includes one or more thermal studs, according to an embodiment of the present invention.
  • FIG. 10B illustrates an IC die that is wire bound to a substrate through openings in the stiffener of FIG. 10A , according to an embodiment of the present invention.
  • FIG. 11 illustrates a cross-sectional view of a die-up PBGA package with ground/thermal connector, according to an embodiment of the present invention.
  • FIG. 12A illustrates a cross-sectional view of a die-up BGA package.
  • FIGS. 12B and 12C illustrate exemplary solder ball arrangements for the die-up BGA package of FIG. 12A .
  • FIG. 13 shows exemplary routing in a substrate layer.
  • FIG. 14 shows a flowchart related to FIGS. 4 and 5 , that provides operational steps of exemplary embodiments of the present invention.
  • FIG. 15 shows a flowchart related to FIG. 6 that provides operational steps of exemplary embodiments of the present invention.
  • FIGS. 16 A-D show flowcharts related to FIGS. 7 and 8 that provide operational steps of exemplary embodiments of the present invention.
  • FIG. 17 shows a flowchart related to FIGS. 9A and 9B that provides operational steps of exemplary embodiments of the present invention.
  • FIG. 18 shows a flowchart related to FIGS. 10A and 10B that provides operational steps of exemplary embodiments of the present invention.
  • FIGS. 19 A-C show flowcharts related to FIG. 11 that provide operational steps of exemplary embodiments of the present invention.
  • FIG. 20 illustrates a substrate that has a central window opening, according to an embodiment of the present invention.
  • FIG. 21 illustrates a side view of a stiffener that has a downward protruding portion, according to an embodiment of the present invention.
  • the present invention is directed to a method and system for improving the mechanical, thermal, and electrical performance of BGA packages.
  • the present invention is applicable to all types of BGA substrates, including ceramic, plastic, and tape (flex) BGA packages. Furthermore the present invention is applicable to die-up (cavity-up) and die-down (cavity-down) orientations.
  • BGA package thermal stress at the IC die/stiffener interface is released or altered with the introduction of a heat spreader on the top surface of the IC die, enabling large size dies with high input and output (I/O) counts to be packaged using BGA technology.
  • BGA package thermal resistance and the length of the current return path are reduced by introducing thermal/ground balls underneath or within close proximity of the IC die.
  • the package thermal resistance and ground inductance are reduced by removing center solder balls, and enabling the attachment of a die pad to the PCB.
  • the die pad is attached to the PCB with novel patternings of the metal stiffener, or by positioning a thermal/ground connector in between the IC die pad and the PCB.
  • the package thermal resistance is reduced by attaching a metal ring to the top surface of a stiffener.
  • the package thermal resistance is reduced by bridging the die pad to the outer regions of the stiffener with metal studs.
  • the electrical performance of the BGA package is improved.
  • electrical performance is improved by connecting ground bonds from the IC die to the stiffener.
  • the stiffener operates as a package ground plane.
  • the package ground plane may be connected to PCB ground through either thermal/ground balls or thermal/ground connectors mentioned in embodiments above, and further described herein.
  • package power distribution is enhanced by using a layer in a tape substrate as a power or ground plane.
  • plastic ball grid array (PBGA) package thermal and electrical performances are improved.
  • PBGA plastic ball grid array
  • Ball grid array package types are described below. Further detail on the above described embodiments, and additional embodiments according to the present invention, are presented below. The embodiments described herein may be combined in any applicable manner, as required by a particular application.
  • a ball grid array (BGA) package is used to package and interface an IC die with a printed circuit board (PCB).
  • BGA packages may be used with any type of IC die, and are particularly useful for high speed ICs.
  • solder pads do not just surround the package periphery, as in chip carrier type packages, but cover the entire bottom package surface in an array configuration.
  • BGA packages are also referred to as pad array carrier (PAC), pad array, land grid array, and pad-grid array packages.
  • PAC pad array carrier
  • BGA packages types are further described in the following paragraphs. For additional description on BGA packages, refer to Lau, J. H., Ball GridArray Technology , McGraw-Hill, New York, (1995), which is herein incorporated by reference in its entirety.
  • die-up and die-down BGA package configurations exist.
  • the IC die is mounted on a top surface of the substrate or stiffener, in a direction away from the PCB.
  • die-down BGA packages the IC die is mounted on a bottom surface of the substrate or stiffener, in a direction towards the PCB.
  • FIG. 1A illustrates a conventional flex BGA package 100 .
  • Flex BGA package 100 includes an IC die 102 , a tape substrate 104 , a plurality of solder balls 106 , and one or more wire bonds 108 .
  • Tape or flex BGA packages are particularly appropriate for large IC dies with large numbers of input and outputs, such as application specific integrated circuits (ASIC) and microprocessors.
  • ASIC application specific integrated circuits
  • Tape substrate 104 is generally made from one or more conductive layers bonded with a dielectric material.
  • the dielectric material may be made from various substances, such as polyimide tape.
  • the conductive layers are typically made from a metal, or combination of metals, such as copper and aluminum. Trace or routing patterns are made in the conductive layer material.
  • Substrate 104 may be a single-layer tape, a two-layer tape, or additional layer tape substrate type. In a two-layer tape, the metal layers sandwich the dielectric layer, such as in a copper-Upilex-copper arrangement.
  • IC die 102 is attached directly to substrate 104 , for example, by an epoxy.
  • IC die 102 is any type of semiconductor integrated circuit, separated from a semiconductor wafer.
  • One or more wire bonds 108 connect corresponding bond pads 118 on IC die 102 to contact points 120 on substrate 104 .
  • An encapsulate, mold compound, or epoxy 116 covers IC die 102 and wire bonds 108 for mechanical and environmental protection.
  • flex BGA package 100 does not include a stiffener.
  • a stiffener can be attached to the substrate to add planarity and rigidity to the package.
  • FIG. 11B illustrates a flex BGA package 110 , similar to flex BGA package 100 , that incorporates a stiffener 112 .
  • Stiffener 112 may be laminated to substrate 104 .
  • Stiffener 112 is typically made from a metal, or combination of metals, such as copper, tin, and aluminum, or may be made from a polymer, for example.
  • Stiffener 112 also may act as a heat sink, and allow for greater heat spreading in BGA package 110 .
  • One or more openings 114 in stiffener 112 may be used to allow for wire bonds 108 to connect IC die 102 to substrate 104 .
  • Stiffener 112 may be configured in other ways, and have different opening arrangements than shown in FIG. 1B .
  • FIG. 2A shows a top view of a stiffener 112 .
  • Stiffener 112 includes an opening 114 adjacent to all four sides of an IC die mounting position 202 in the center of stiffener 112 .
  • FIG. 2B shows a temperature distribution 204 of a stiffener, such as stiffener 1 12 , during operation of an IC die in a flex BGA package. Temperature distribution 204 shows that heat transfer from IC die mounting position 202 to the edges of stiffener 112 is substantially limited by openings 114 . Openings 114 act as thermal barriers to heat spreading in stiffener 112 .
  • FIG. 2C shows a top view of an alternative configuration for stiffener 112 , according to an embodiment of the present invention.
  • Stiffener 112 includes an opening 206 adjacent to all four sides of an IC die mounting position 202 in the center of stiffener 112 . Openings 206 are similar to openings 114 of FIG. 2A , but of different shape. Further alternatively shaped openings in stiffener 112 are applicable to the present invention.
  • FIG. 3 shows a cross-sectional view of a conventional die-up PBGA package 300 .
  • PBGA package 300 includes a plastic substrate 302 , an IC die 304 , a plurality of solder balls 306 , a plurality of wire bonds 308 , a die pad 310 , one or more vias 314 , and one or more thermal/ground vias 316 .
  • Plastic substrate 302 includes one or more metal layers formed on an organic substrate (for example, BT resin or FR 4 epoxy/glass).
  • IC die 304 is mounted to die pad 310 .
  • IC die 304 may be attached to die pad 310 with an epoxy, such as a silver-filled epoxy.
  • Wire bonds 308 connect signals of IC die 304 to substrate 302 .
  • gold bonding wire is bonded from aluminum bond pads on IC die 304 to gold-plated contact pads on substrate 302 .
  • the contact pads on substrate 302 connect to solder balls 306 attached to the bottom surface of substrate 302 , through vias 314 and routing within substrate 302 using copper conductors 312 .
  • Thermal/ground vias 316 connect die pad 310 to one or more thermal/ground balls 322 on the center bottom surface of substrate 302 .
  • An encapsulate, mold compound, or epoxy 320 covers IC die 304 and wire bonds 308 for mechanical and environmental protection.
  • FIG. 12A illustrates a cross-sectional view of a die-up BGA package 1200 .
  • FIGS. 12B and 12C illustrate exemplary solder ball arrangements for die-up BGA package 1200 .
  • BGA package 1200 includes an IC die 1208 mounted on a substrate 1212 .
  • IC die 1208 is electrically connected to substrate 1212 by one or more wire bonds 1210 .
  • Wire bonds 1210 are electrically connected to solder balls 1206 underneath substrate 1212 through corresponding vias and routing in substrate 1212 .
  • the vias in substrate 1212 can be filled with a conductive material, such as solder, to allow for these connections.
  • Solder balls 1206 are attached to substrate 1212 , and are used to attach the BGA package to a PCB.
  • wire bonds such as wire bonds 1210
  • IC dies may be mounted and coupled to a substrate with solder balls located on the bottom surface of the IC die, by a process commonly referred to as “C 4 ” or “flip chip” packaging.
  • solder balls 1206 may be arranged in an array.
  • FIG. 12B shows a 14 by 14 array of solder balls on the bottom surface of BGA package 1200 .
  • Other sized arrays of solder balls are also applicable to the present invention.
  • Solder balls 1206 are reflowed to attach BGA package 1200 to a PCB.
  • the PCB may include contact pads to which solder balls 1206 are bonded.
  • PCB contact pads are generally made from a metal or combination of metals, such as copper, nickel, tin, and gold.
  • FIG. 12C shows a bottom view of BGA package 1200 , with an alternative solder ball array arrangement.
  • BGA package 1200 attaches an array of solder balls 1206 on a bottom surface of substrate 1212 .
  • solder balls 1206 are located in a peripheral area of the bottom surface of substrate 1212 , away from a substrate center 1224 .
  • solder balls 1206 on the bottom surface of substrate 1212 may be located outside an outer profile area of an IC die mounted on the opposite surface of substrate 1212 .
  • the solder ball array may be organized in any number of ways, according to the requirements of the particular BGA package application.
  • the solder ball arrangement shown in FIG. 12C is particularly applicable to embodiments of the present invention described below, such as for attaching a heat spreader or ground/thermal connector to a bottom surface of a BGA package.
  • the heat spreader or ground/thermal connector may be connected in substrate center 1224 .
  • the BGA package substrate provides vias and routing on one or more layers to connect contact pads for wire bonds on its upper surface to solder balls attached to the bottom substrate surface.
  • FIG. 13 shows an example routing 1304 in a substrate layer 1302 for accomplishing this.
  • the present invention is applicable to improving thermal and electrical performance in the BGA package types described herein, and further BGA package types.
  • a heat spreader may be used in a BGA package to provide for thermal stress relief and heat dissipation.
  • a drop-in heat spreader is attached to the top surface of an IC die in a flex BGA package to provide for thermal stress relief and heat dissipation.
  • FIG. 4 illustrates a cross-sectional view of a die-up flex BGA package 400 , according to an embodiment of the present invention.
  • BGA package 400 includes IC die 102 , substrate 104 , plurality of solder balls 106 , one or more wire bonds 108 , stiffener 112 , epoxy 116 , a drop-in heat spreader 402 , and an epoxy 404 . Refer to the discussion above related to FIGS. 1A-1B for additional detail on the structure and operation of some of these elements.
  • Substrate 104 has a top surface to which a bottom surface of stiffener 112 is mounted. A bottom surface of substrate 104 attaches the plurality of solder balls 106 . The plurality of solder balls 106 connect to vias and/or points on the bottom surface of substrate 104 to which signals internal to substrate 104 are routed and exposed.
  • Stiffener 112 has a top surface to which IC die 102 is mounted.
  • BGA package 400 does not require a stiffener, and does not include a stiffener 112 .
  • IC die 102 is mounted to substrate 104 .
  • wire bonds 108 connect corresponding bond pads 118 on IC die 102 to contact points 120 on substrate 104 .
  • wire bonds 108 extend through one or more openings 114 in stiffener 112 to form connections with substrate 104 .
  • Heat spreader 402 is attached to the top surface (active surface) of IC die 102 using epoxy 404 .
  • the epoxy 404 may be the same substance as epoxy 116 , or may be a different substance.
  • Silver filled epoxies may be used for epoxy 404 to enhance heat extraction from IC die 102 .
  • heat spreader 402 is smaller in area than the upper surface of IC die 102 .
  • Alternative sizes for heat spreader 402 are also applicable to the present invention, including sizes equal to the area of IC die 102 , or larger areas.
  • Heat spreader 402 is shaped and configured to spread heat from IC die 102 , as is required by the application.
  • FIG. 4 the top surface of heat spreader 402 forms a portion of a top surface of BGA package 400 .
  • Heat dissipation to the environment can be improved by exposing the top surface of heat spreader 402 .
  • additional heat sinks may be attached to heat spreader 402 .
  • FIG. 5 show a cross-sectional view of an alternative BGA package 500 , according to embodiments of the present invention, where a heat spreader 502 is internal to BGA package 500 . Heat spreader 502 is completely encapsulated by epoxy 116 .
  • the mechanical structure of BGA package 400 becomes more symmetrical in its center region, particularly when ground/thermal solder balls do not exist on the bottom surface of substrate 104 underneath the outer profile of IC die 102 .
  • Thermal stress at the interface of IC die 102 and stiffener 112 is substantially released or altered by heat spreader 402 .
  • Deformation caused by thermal stress in stiffener 112 and substrate 104 is substantially reduced through the use of heat spreader 402 .
  • Drop-in heat spreader 402 allows for even larger sizes for IC die 102 and greater I/O counts by providing for greater heat spreading capacity in BGA package 400 .
  • FIG. 14 shows a flowchart 1400 providing operational steps for assembling one or more embodiments of the present invention.
  • the steps of FIG. 14 do not necessarily have to occur in the order shown, as will be apparent to persons skilled in the relevant art(s) based on the teachings herein.
  • Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1400 begins with step 1402 .
  • a substrate that has a first surface and a second surface is provided.
  • the substrate is flex substrate 104 , or another substrate type suitable for a BGA package.
  • an IC die mounting position and/or contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • a first surface of a stiffener is attached to the first substrate surface.
  • the stiffener is stiffener 112 , which is attached to substrate 104 .
  • a stiffener is not required.
  • an IC die is mounted to the second stiffener surface.
  • the IC die is IC die 102 , which is mounted to stiffener 112 .
  • IC die 102 is mounted directly to the substrate.
  • a heat spreader is mounted to the IC die, wherein the heat spreader dissipates heat from the IC die.
  • the heat spreader is heat spreader 402 or 502 , which is mounted with epoxy 404 or other attachment means to the upper surface of IC die 102 .
  • Heat spreader 402 or 502 typically is mounted to the center of the upper surface of IC die 102 , and covers less than the entire upper surface of IC die 102 .
  • the smaller area of heat spreader 402 or 502 allows for bond pads 118 to be exposed on the upper surface of IC die 102 for wire bond connections.
  • heat spreader 402 or 502 is of the same size, or comprises a larger area than the upper surface of IC die 102 .
  • a plurality of solder balls are attached to the second substrate surface.
  • the plurality of solder balls are plurality of solder balls 106 , which connect to vias and/or solder ball pads on the bottom surface of substrate 104 .
  • the solder balls may be arranged on the bottom surface of substrate 104 as shown in FIGS. 12B and 12C , or in alternative arrangements.
  • the solder balls are used to attach a BGA package to a PCB.
  • a benefit of performing the steps of flowchart 1400 is that the heat spreader relieves thermal stress at an interface of the IC die and the first stiffener surface.
  • Flowchart 1400 may include the additional step where the second stiffener surface is encapsulated.
  • the second stiffener surface may be encapsulated by a resin or molding compound, that also encapsulates the IC die, heat spreader, and wire bonding.
  • electrical performance of an IC die, and thermal performance of a corresponding BGA package may be improved by allowing a stiffener to act as a ground plane.
  • a stiffener in a die-up tape BGA (Flex BGA) package is coupled to PCB ground through one or more vias to ground solder balls.
  • Ground contact pads of the IC die are connected to the stiffener by ground wire bonds.
  • one or more metal layers of a flex tape substrate may be coupled to a ground or power potential, to operate as a ground or power plane.
  • FIG. 6 illustrates a cross-sectional view of a die-up flex BGA package 600 , according to an embodiment of the present invention.
  • BGA package 600 includes IC die 102 , substrate 104 , plurality of solder balls 106 , one or more wire bonds 108 , stiffener 112 , epoxy 116 , one or more ground bonds to stiffener 602 , one or more ground/thermal vias 604 , one or more ground/thermal balls 606 , one or more ground contact pads 608 , one or more power contact pads 610 , and one or more power vias 612 .
  • Substrate 104 has a top surface to which a bottom surface of stiffener 112 is mounted. A bottom surface of substrate 104 attaches the plurality of solder balls 106 . The plurality of solder balls 106 connect to vias and/or points on the bottom surface of substrate 104 to which signals internal to substrate 104 are routed and exposed.
  • Stiffener 112 has a top surface to which IC die 102 is mounted.
  • Wire bonds 108 connect corresponding bond pads 118 on IC die 102 to contact points 120 on substrate 104 .
  • Wire bonds 108 extend through one or more openings 114 in stiffener 112 to form connections with substrate 104 .
  • IC die 102 has a top surface that includes at least one ground pad 608 .
  • Ground pad 608 is coupled to a ground potential signal in IC die 102 .
  • a ground wire bond 602 connects ground pad 608 to stiffener 112 .
  • the bottom surface of stiffener 112 is coupled to a ground potential signal in the PCB to which BGA package 600 is attached, to cause stiffener 112 to operate as a ground plane.
  • Stiffener 112 is coupled to PCB ground through one or more of ground/thermal via 604 that extend through substrate 104 .
  • the one or more of ground/thermal vias 604 are located in substrate 104 , underneath IC die 102 , and can be filled with a conductive material, such as solder.
  • a ground/thermal solder ball 606 is attached to each ground/thermal via 604 on the bottom surface of substrate 104 .
  • Ground/thermal solder ball 606 forms the connection to PCB ground, when reflowed to attach to the PCB.
  • Each ground/thermal via 604 connects the respective ground/thermal solder ball 606 to stiffener 112 both electrically and thermally.
  • a tape substrate is configured such that a metal layer is used as a package power or ground plane.
  • the bottom metal layer may be used as a power or ground-lane.
  • PCB package 600 includes a bottom metal layer 614 of a two-layer tape substrate 104 that is coupled to a potential to operate as a power plane, according to an embodiment of the present invention.
  • One or more power contact pads 610 on IC die 102 are coupled to a power potential signal in IC die 102 .
  • Power contact pad 610 on IC die 102 is connected to a corresponding power via 612 by a power wire bond 616 .
  • power wire bond 616 extends through opening 114 .
  • Power via 612 extends through substrate 104 .
  • Power via 612 can be filled with a conductive material, such as solder.
  • Each power via 612 is coupled to the bottom metal layer 614 of substrate 104 .
  • one or more power vias 612 may be connected to corresponding solder balls on the bottom of substrate 104 , to connect bottom metal layer 614 to PCB power pads when the solder balls are reflowed.
  • a stiffener ground plane, and/or a power/ground plane using a metal layer of a tape substrate allows for very short power and ground connections.
  • Current return path lengths are shortened, voltage drop across planes is reduced, and power/ground inductance is reduced.
  • the shorter power and ground paths are also significant in reducing a power/ground path resistance, which advantageously reduces required IC device power levels.
  • thermal vias in a flex tape substrate and of the use of a thermal ball coupled to a heat spreader in a die-down TBGA package, refer to U.S. Pat. No. 6,020,637, which is incorporated by reference in its entirety herein.
  • thermal via and a thermal ball in a plastic substrate BGA package refer to U.S. Pat. No. 5,894,410, which is incorporated by reference in its entirety.
  • FIG. 15 shows a flowchart 1500 providing operational steps for assembling one or more embodiments of the present invention.
  • the steps of FIG. 15 do not necessarily have to occur in the order shown, as will be apparent to persons skilled in the relevant art(s) based on the teachings herein.
  • Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1500 begins with step 1502 .
  • a substrate that has a first surface and a second surface is provided.
  • the substrate is flex substrate 104 , or another substrate type suitable for a BGA package.
  • an IC die mounting position and/or contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • step 1504 at least one opening in a stiffener from a first surface of the stiffener to a second surface of the stiffener is provided.
  • the at least one opening includes openings 114 in stiffener 112 .
  • an opening 114 is located on each of the four edges of IC die 102 .
  • the first stiffener surface is attached to the first substrate surface.
  • the stiffener is stiffener 112 , which is attached to substrate 104 .
  • a stiffener is not required, and is not attached to the substrate.
  • an integrated circuit (IC) die is mounted to the second stiffener surface, wherein a first surface of the IC die includes a contact pad.
  • the IC die is IC die 102 , which is mounted to stiffener 112 .
  • IC die 102 is mounted directly to the substrate.
  • the contact pad is ground contact pad 608 .
  • the contact pad is coupled to the second stiffener surface.
  • contact pad is ground contact pad 608 , which is connected to stiffener 112 by ground wire bond 602 .
  • Ground wire bond 602 may be soldered, or otherwise attached to stiffener 112 .
  • a plurality of solder balls is attached to the second substrate surface, inside an outer dimensional profile of the IC die.
  • the plurality of solder balls include one or more ground/thermal balls 606 , which are arranged on the bottom surface of substrate 104 in the region of substrate center 1224 , shown in FIG. 12C .
  • the outer dimensional profile of the IC die is the area bounded by the edges of IC die 102 .
  • the plurality of solder balls are coupled through corresponding vias in the substrate to the first stiffener surface.
  • the vias include ground/thermal via 604 .
  • the vias can be filled with a conductive material, such as solder, to allow the electrical connection of the solder balls to stiffener 112 .
  • the substrate includes a metal layer, wherein the metal layer is coupled to a second potential.
  • the stiffener has at least one opening extending from the first stiffener surface to the second stiffener surface.
  • the second IC die surface includes a second contact pad.
  • the second contact pad is coupled to the metal layer through one of the openings in the stiffener and through a corresponding via that extends through the substrate.
  • the second contact pad may be coupled to a power or ground potential in the IC die.
  • the second contact pad is power contact pad 610
  • the metal layer is metal layer 614
  • the corresponding via is power via 612 .
  • flowchart 1500 may include an additional step, where the contact pad is coupled to a ground potential in the IC die.
  • the contact pad may be connected to a ground plane or ground signal in IC die that is routed to the contact pad.
  • Flowchart 1500 may include the additional step where the second stiffener surface is encapsulated.
  • the second stiffener surface may be encapsulated by a resin or molding compound, that also encapsulates the IC die and wire bonding.
  • Flowchart 1500 may include the additional step where a second plurality of solder balls is attached to the second substrate surface, outside an outer dimensional profile of the IC die.
  • the second plurality of solder balls are plurality of solder balls 106 , which connect to vias and/or solder ball pads on the bottom surface of substrate 104 .
  • the solder balls are arranged on the bottom surface of substrate 104 as shown in FIG. 12B , outside of substrate center 1224 .
  • the solder balls are used to attach a BGA package to a PCB.
  • electrical performance of the IC device, and thermal performance of a BGA package is improved by enabling an IC die pad to attach to a PCB.
  • the IC die pad is attached to the PCB by a novel patterning of the metal stiffener in a die-up tape BGA package.
  • the IC die pad is attached to the PCB by placing a thermal/ground connector between the IC die pad and PCB in a die-up tape BGA package.
  • a BGA package junction-to-board thermal resistance can be substantially reduced by the attachment of a metal die-attach pad directly to a PCB.
  • Metal die-attach pads are coupled to a PCB for package junction-to-board thermal resistance minimization in an exposed pad quad flat pack (QFP), a QFP with exposed heat sink at bottom, and a leadless plastic chip carrier (i.e. LPCC, QFN, SON, QLP) package, for instance. All existing such designs that involve an exposed die pad or an exposed heat sink at package bottom are “lead flame” packages.
  • the present invention provides for an exposed die-attach pad or heat sink at the bottom of flex BGA packages.
  • FIG. 7 illustrates a cross-sectional view of a die-up flex BGA package 700 , according to an embodiment of the present invention.
  • BGA package 700 includes IC die 102 , substrate 104 , plurality of solder balls 106 , one or more wire bonds 108 , stiffener 112 , epoxy 116 , ground wire bond to stiffener 602 , ground contact pad 608 , and a stiffener cavity 702 .
  • Substrate 104 has a top surface to which a bottom surface of stiffener 112 is mounted. A bottom surface of substrate 104 attaches the plurality of solder balls 106 . The plurality of solder balls 106 connect to vias and/or points on the bottom surface of substrate 104 to which signals internal to substrate 104 are routed and exposed. Substrate 104 in FIG. 7 has a central window-shaped opening 704 , under which solder balls are preferably not connected.
  • FIG. 20 illustrates a bottom view of a substrate 104 that has a central window opening 704 , according to an embodiment of the present invention.
  • Stiffener 112 has a top surface to which IC die 102 is mounted. Stiffener 112 in FIG. 7 is patterned with a cavity 702 , which protrudes downward for attachment of IC die 102 . As described above, a central window-shaped opening 704 exists in substrate 104 . This opening 704 exists to allow stiffener 112 to protrude through, and make contact with soldering pads on a PCB to which BGA package 700 is to be mounted. The bottom exposed surface of cavity 702 can be plated with solder to facilitate surface mount to solder plated metal pads on a PCB to which BGA package 700 is mounted. Hence, stiffener 112 may act as a conduit for heat to be transferred from IC die 102 to the PCB.
  • Stiffener 112 may optionally be configured to operate as a ground plane.
  • One or more ground pads 608 may be coupled to a ground potential signal in IC die 102 .
  • a ground wire bond 602 connects each ground pad 608 to stiffener 112 .
  • the bottom exposed surface of cavity 702 may function both as an exposed ground pad of BGA package 700 , and as an exposed heat spreader.
  • the bottom exposed surface of cavity 702 may be plated with solder to allows stiffener 112 to be surface mounted to one or more soldering pads on the PCB.
  • the pads on the PCB can be connected to a PCB ground plane to shorten the length of electrical current return paths, as well as to form a conductive heat dissipation path from BGA package 700 to the PCB.
  • FIG. 8 illustrates a cross-sectional view of a die-up flex BGA package 700 , according to an embodiment of the present invention.
  • Substrate 104 in FIG. 8 has a central window-shaped opening, under which no solder balls are connected.
  • a portion of the bottom surface of stiffener 112 is exposed through the central window-shaped opening 704 of substrate 104 .
  • a heat spreader (for example, manufactured from copper or aluminum), shown as ground/thermal connector 802 , is coupled to the exposed portion of stiffener 112 .
  • Ground/thermal connector 802 can be made from the same material as stiffener 112 .
  • Ground/thermal connector 802 may be laminated to the exposed portion of stiffener 112 using conductive epoxy.
  • the bottom surface of ground/thermal connector 802 may be plated with solder to facilitate its surface mount to soldering pads on the PCB.
  • Metal pads on the PCB may be connected to a PCB ground plane to shorten the length of electrical current return paths, as well as enhance the conductive heat dissipation path from IC die 102 to the PCB.
  • stiffener 112 and ground/thermal connector 802 may be manufactured from a single piece of metal, and hence consist of a single metal piece.
  • FIG. 21 illustrates a side view of stiffener 112 that has a downward protruding portion 2102 , according to an embodiment of the present invention.
  • portion 2102 extends partially or entirely through window-shaped opening 704 .
  • Portion 2102 may be directly connected to the PCB, or may be connected to a ground/thermal connector 802 that is connected to the PCB. Because of the thermal and electrical improvement enabled by the coupling of stiffener 112 to a PCB, length of wire bonds can be reduced by moving opening 114 closer to the proximity of die 102 without compromising thermal performance significantly.
  • FIG. 16A shows a flowchart 1600 providing operational steps for assembling one or more embodiments of the present invention.
  • FIGS. 16 B-D provide operational steps according to further embodiments. The steps of FIGS. 16 A-D do not necessarily have to occur in the order shown, as will be apparent to persons skilled in the relevant art(s) based on the teachings herein. Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1600 begins with step 1602 .
  • a substrate that has a first surface and a second surface is provided.
  • the substrate is flex substrate 104 , or another substrate type suitable for a BGA package.
  • an IC die mounting position and/or contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • a first surface of a stiffener is attached to the first substrate surface.
  • the stiffener is stiffener 112 , which is attached to substrate 104 .
  • step 1606 a portion of the first stiffener surface is exposed through a window opening in the substrate.
  • substrate 104 has a window opening 704 in its center. A portion of the bottom surface of stiffener 112 is exposed through window opening 704 .
  • an IC die is mounted to a second surface of the stiffener, wherein a surface of the IC die includes at least one contact pad.
  • the IC die is IC die 102 , which is mounted to stiffener 112 .
  • a plurality of solder balls are attached to the second substrate surface.
  • the plurality of solder balls are plurality of solder balls 106 , which connect to vias and/or solder ball pads on the bottom surface of substrate 104 .
  • the solder balls are arranged on the bottom surface of substrate 104 as shown in FIG. 12B , exclusive of the area of window opening 704 .
  • the solder balls are used to attach a BGA package to a PCB.
  • the exposed portion of the first stiffener surface is configured to be coupled to a printed circuit board (PCB), whereby electrical and thermal performance of the BGA package is improved.
  • PCB printed circuit board
  • FIG. 16B provides exemplary steps for performing step 1612 :
  • a heat spreader is coupled to the exposed portion of the first stiffener surface.
  • the heat spreader is ground/thermal connector 802 , which is coupled to stiffener 112 through window opening 702 .
  • step 1616 a surface of the heat spreader is configured to be coupled to the PCB.
  • step 1612 further includes the step where the heat spreader surface is plated with solder to allow the heat spreader surface to be surface mounted to soldering pads on the PCB.
  • step 1612 comprises the step where the stiffener is shaped to have a centrally-located cavity shaped portion that protrudes through the window opening.
  • step 1612 further includes the step where a surface of the cavity shaped portion is plated with solder to allow the stiffener to be surface mounted to soldering pads on the PCB.
  • stiffener 112 is patterned with a cavity 702 , which protrudes downward in window opening 704 .
  • the bottom surface of cavity 702 is plated with solder.
  • FIG. 16C provides additional exemplary steps for flowchart 1600 of FIG. 16A :
  • the stiffener is coupled to a potential.
  • the stiffener may be coupled to ground or power on the PCB.
  • the bottom surface of cavity 702 may be coupled to the ground or power potential on the PCB, or ground/thermal connector 802 may make the connection to the PCB.
  • each of the at least one contact pads are coupled to the second stiffener surface with corresponding wire bonds.
  • FIG. 16D provides exemplary steps for performing step 1618 :
  • step 1622 the stiffener is coupled to a ground potential.
  • step 1624 the stiffener allowed to serve as a ground plane.
  • Flowchart 1600 may include the additional step where the second stiffener surface is encapsulated.
  • the second stiffener surface may be encapsulated by an epoxy, that also encapsulates the IC die and wire bonding.
  • the mechanical and thermal performance of a BGA package is enhanced by attaching a metal ring to the top surface of the stiffener.
  • a metal ring is attached to the top surface of the stiffener in a die-up tape BGA package.
  • FIG. 9A illustrates a cross-sectional view of a die-up tape BGA package 900 , according to an embodiment of the present invention.
  • BGA package 900 includes IC die 102 , substrate 104 , plurality of solder balls 106 , one or more wire bonds 108 , stiffener 112 , epoxy 116 , and a ring 902 .
  • FIG. 9B illustrates a top view of die-up tape BGA package 900 , with ring 902 .
  • Substrate 104 has a top surface to which a bottom surface of stiffener 112 is mounted. A bottom surface of substrate 104 attaches the plurality of solder balls 106 . The plurality of solder balls 106 connect to vias and/or points on the bottom surface of substrate 104 to which signals internal to substrate 104 are routed and exposed.
  • Wire bonds 108 connect corresponding bond pads 118 on IC die 102 to contact points 120 on substrate 104 .
  • Wire bonds 108 extend through one or more openings 114 in stiffener 112 to form connections with substrate 104 .
  • Stiffener 112 has a top surface to which IC die 102 is mounted. Furthermore, ring 902 is attached to the top surface of stiffener 112 . Ring 902 may be laminated to stiffener 112 , after wire bonding is completed. Epoxy 116 is filled in and flushed to ring 902 after the attachment of ring 902 .
  • Ring 902 is preferably made of a metal, such as copper or aluminum, or a combination thereof, but may be constructed from other applicable materials. Preferably, ring 902 is made from the same material as stiffener 112 , to minimize the mismatch of the thermal expansion coefficient. Ring 902 is preferably flush with the outer edges of stiffener 112 to form an outer edge of BGA package 900 , but may also reside entirely within an outer profile of stiffener 112 .
  • a primary benefit of attaching ring 902 to stiffener 112 is an increase in stiffness of BGA package 900 .
  • Ring 902 also aids in reducing the amount of warp of BGA package 900 .
  • ring 902 promotes heat dissipation from stiffener 112 , reduces junction-to-case thermal resistance, and facilitates-the attachment of an external heat spreader to BGA package. 900 .
  • Ring 902 enhances the process of encapsulation of the BGA package.
  • Ring 902 with stiffener 112 , creates a cavity that may be filled with a dispensed glob top or encapsulating material, that locks IC die 102 and surrounding elements in place.
  • FIG. 17 shows a flowchart 1700 providing operational steps for assembling one or more embodiments of the present invention.
  • the steps of FIG. 17 do not necessarily have to occur in the order shown, as will be apparent to persons skilled in the relevant art(s) based on the teachings herein.
  • Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1700 begins with step 1702 .
  • a substrate that has a first surface and a second surface is provided.
  • the substrate is flex substrate 104 , or another substrate type suitable for a BGA package.
  • an IC die mounting position and/or contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • a first surface of a stiffener is attached to the first substrate-surface.
  • the stiffener is stiffener 112 , which is attached to substrate 104 .
  • a stiffener is not required, and is not attached to the substrate.
  • an IC die is mounted to the first stiffener surface.
  • the IC die is IC die 102 , which is mounted to stiffener 112 .
  • IC die 102 is mounted directly to the substrate.
  • a plurality of solder balls are attached to the second substrate surface.
  • the plurality of solder balls are plurality of solder balls 106 , which connect to vias and/or solder ball pads on the bottom surface of substrate 104 .
  • the solder balls may be arranged on the bottom surface of substrate 104 as shown in FIGS. 12B and 12C , or in alternative arrangements.
  • the solder balls are used to attach a BGA package to a PCB.
  • a metal ring is attached to the first stiffener surface. Attaching the metal ring enhances heat dissipation from the stiffener.
  • the metal ring is ring 902 .
  • ring 902 is attached directly to the substrate.
  • Flowchart 1700 may include the additional step where the second stiffener surface within the volume encompassed by the ring is encapsulated.
  • a filled upper surface may be called a “glob top”.
  • this volume may be encapsulated by a resin or molding compound, that also encapsulates the IC die and wire bonding.
  • the thermal performance of a BGA package is improved by bridging an IC die pad to which the IC die is mounted to the outer regions of the stiffener.
  • one or more metal studs are used as thermal bridges, to bridge the openings in the stiffener that surround the IC die, in a die-up tape BGA package.
  • the openings on a stiffener surface allow for wire bond connections between an IC die and a substrate. These openings have the additional effect of reducing the amount of heat that can spread to the outer surface regions of the stiffener, hampering the ability of the stiffener to act as a heat spreader. This effect is illustrated in FIG. 2B , which is further described above.
  • the stiffener is patterned such that one or more short studs run across each wire bond opening. More than one stud may be used to bridge each wire bond opening to promote heat spreading.
  • the manufacturing process used for lead frame patterning may be adapted to pattern a stiffener with studs across the wire bond openings. The use of the studs, however, may reduce space for wire bonds, and may reduce BGA package I/O capability, in some situations.
  • FIG. 10A illustrates a stiffener 1000 , that includes one or more studs 1002 , according to an embodiment of the present invention.
  • Stiffener 1000 having one or more studs 1002 , may be incorporated into a BGA package in the same manner as is described elsewhere herein for stiffener 112 .
  • a stud 1002 bridges each opening 114 in stiffener 1000 .
  • more than one stud 1002 per opening 114 may be used.
  • each opening 114 may be bridged by a different number of studs 1002 . Some of openings 114 may be bridged by one or more studs 1002 , while other openings 114 may not be bridged at all.
  • FIG. 10B provides an illustration where IC die 102 is wire bound to substrate 104 through stiffener 1000 , according to an embodiment of the present invention.
  • One or more wire bonds 108 connect corresponding bond pads 118 on IC die 102 to contact points 120 on substrate 104 .
  • Wire bonds 108 avoid studs 1002 when making connections to substrate 104 .
  • FIG. 18 shows a flowchart 1800 providing operational steps for assembling one or more embodiments of the present invention.
  • the steps of FIG. 18 do not necessarily have to occur in the order shown, as will be apparent to c persons skilled in the relevant art(s) based on the teachings herein.
  • Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1800 begins with step 1802 .
  • a substrate that has a first surface and a second surface is provided.
  • the substrate is flex substrate 104 , or another substrate type suitable for a BGA package.
  • an IC die mounting position and/or contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • a wire bond opening is created along each edge of an IC die mount position on a stiffener, wherein each wire bond opening extends through the stiffener.
  • the wire bond openings are wire bond openings 114 in stiffener 1000 .
  • the IC die mount position is IC die mounting position 202 , shown in FIG. 10A .
  • a first surface of the stiffener is attached to the first substrate surface.
  • the stiffener is stiffener 1000 , which is attached to substrate 104 .
  • an IC die is mounted to a second surface of the stiffener.
  • the IC die is IC die 102 , which is mounted to stiffener 1000 , in IC die mounting position 202 .
  • step 1810 at least one of the wire bond openings are bridged with at least one stud.
  • one or more of wire bond openings 114 are bridged with one or more studs 1002 . Studs 1002 allow for increased heat spreading across corresponding wire bond openings 114 to the outer edges of stiffener 1000 .
  • a plurality of solder balls are attached to the second substrate surface.
  • the plurality of solder balls are plurality of solder balls 106 , which connect to vias and/or solder ball pads on the bottom surface of substrate 104 .
  • the solder balls may be arranged on the bottom surface of substrate 104 as shown in FIGS. 12B and 12C , or in alternative arrangements.
  • the solder balls are used to attach a BGA package to a PCB.
  • the flowchart 1800 may include the further step where a contact pad on the IC die is coupled to the substrate with a wire bond, wherein the wire bond passes through one of the wire bond openings in the stiffener.
  • Flowchart 1800 may include the additional step where the second stiffener surface is encapsulated.
  • the second stiffener surface may be encapsulated by a resin or molding compound, that also encapsulates the IC die and wire bonding.
  • the electrical and thermal performance of a plastic BGA (PBGA) package is improved by attaching a thermal/ground connector to the bottom surface of a PBGA package.
  • the thermal/ground connector couples the bottom center of a plastic substrate of a die-up PBGA to the PCB. Heat from an IC die is more easily spread to the PCB through the thermal/ground connector, which is attached to the plastic substrate underneath the IC die.
  • FIG. 8 embodiments were described that used a ground/thermal connector to couple a flex BGA package to a PCB, to reduce package junction-to-board thermal resistance. Aspects of this discussion above is adaptable to other die-up BGA package types. These include BGA packages having an organic substrate, such as PBGA and fine pitch ball grid array (FBGA) packages. Further detailed description is provided in the following discussion that is applicable to BGA packages with organic substrates.
  • BGA packages having an organic substrate such as PBGA and fine pitch ball grid array (FBGA) packages.
  • FIG. 11 illustrates a cross-sectional view of a die-up PBGA package 1100 , according to an embodiment of the present invention.
  • PBGA package 1100 includes plastic substrate 302 , IC die 304 , plurality of solder balls 306 , plurality of wire bonds 308 , die pad 310 , one or more vias 314 , one or more thermal/ground vias 316 , epoxy 320 , a ground/thermal connector 1102 , epoxy 1104 , a plurality of ground bonds 1106 , and a plurality of ground bond pads 1108 .
  • IC die 304 is mounted to die pad 310 .
  • Wire bonds 308 connect signals of
  • IC die 304 to contact pads on substrate 302 .
  • the contact pads on substrate 302 connect to solder balls 306 attached to the bottom surface of substrate 302 , through vias 314 and routing within substrate 302 .
  • Thermal/ground vias 316 connect die pad 310 to an exposed metal plated plane 1110 at the bottom center of substrate 302 .
  • die pad 310 and metal plated plane 1110 may be exposed copper pads of plastic substrate 302 .
  • Ground/thermal connector 1102 is attached to metal plated plane 1110 .
  • ground/thermal connector 1102 may be a metal piece (copper or aluminum, for example) that is laminated to metal plated plane 1110 at the bottom center of substrate 302 using a conductive epoxy 1104 .
  • a bottom surface 1112 of ground/thermal connector 1102 may be plated with solder for surface mount to soldering pads on the PCB.
  • BGA package 1100 provides a thermal path of IC die 304 , to die pad 310 , to thermal/ground vias 316 , to metal plated plane 1110 , to epoxy 1104 , to ground thermal connector 1102 (and bottom surface 1112 ) to the PCB soldering pads. Heat spreading is improved by a direct thermal path from IC die 304 to the PCB.
  • Metal pads on the PCB can be connected to a PCB ground plane to advantageously shorten the length of electrical current return paths, as well shorten the conductive heat dissipation path from device junctions of IC die to the PCB.
  • Ground bonds 1106 may be used to couple ground bond pads 1108 on IC die 304 to die pad 310 , when die pad 310 is coupled to ground. This provides for very short ground connections for signals in IC die 304 .
  • FIG. 19A shows a flowchart 1900 providing operational steps for assembling one or more embodiments of the present invention.
  • FIGS. 19 B-C provide operational steps according to further embodiments. The steps of FIGS. 19 A-C do not necessarily have to occur in the order shown, as will be apparent to persons skilled in the relevant art(s) based on the teachings herein. Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1900 begins with step 1902 .
  • a substrate that has a first surface and a second surface is provided.
  • the substrate is plastic substrate 302 , or another substrate type suitable for a BGA package.
  • an IC die mounting position and contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • an IC die is mounted to the first substrate surface.
  • the IC die is IC die 304 , which is mounted to substrate 302 .
  • IC die 304 may be mounted to a die pad 310 attached to substrate 302 .
  • a plurality of solder balls are attached to the second substrate surface.
  • the plurality of solder balls are plurality of solder balls 306 , which connect to vias and/or solder ball pads on the bottom surface of substrate 302 .
  • the solder balls may be arranged on the bottom surface of substrate 302 as shown in FIG. 12B , or in other arrangements.
  • the solder balls are used to attach a BGA package to a PCB.
  • a first surface of a heat spreader is coupled to the second substrate surface.
  • the heat spreader is ground/thermal connector 1102 , which is coupled to substrate 302 with epoxy 1104 .
  • Ground/thermal connector 1102 may be mounted to metal plated plane 1110 on substrate 302 by epoxy 1104 .
  • a second surface of the heat spreader is configured to be coupled to a printed circuit board (PCB).
  • Second heat spreader surface is bottom surface 1112 .
  • step 1910 may include the step where the second surface of the heat spreader is plated with solder.
  • Flowchart 1900 may comprise the additional step where the first substrate surface is coupled to the heat spreader through at least one via that extends through the substrate.
  • the first substrate surface may be coupled to the heat spreader by one or more ground/thermal vias 316 .
  • FIG. 19B provides exemplary steps for performing step 1904 :
  • a copper plated die-attach pad is exposed in the center of the first substrate surface.
  • the copper plated die-attach pad, die pad 310 may be an exposed portion of a metal layer of plastic substrate 302 .
  • the IC die is mounted to the copper plated die-attach pad.
  • the IC die may be mounted with an epoxy.
  • FIG. 19C provides exemplary steps for performing step 1908 :
  • a copper plated plane is exposed in the center of the second substrate surface.
  • the copper plated plane, metal plated plane 1110 is an exposed portion of a metal layer of plastic substrate 302 .
  • step 1918 the die-attach pad is coupled to the copper plated plane with the at least one via.
  • Flowchart 1900 may include the additional step where the first substrate surface is encapsulated.
  • the first substrate surface may be encapsulated by a resin or molding compound, that also encapsulates the IC die and wire bonding.

Abstract

An electrically and thermally enhanced die-up tape substrate ball grid array (BGA) package and die-up plastic substrate BGA package are described. A substrate that has a first surface and a second surface is provided. The stiffener has a first surface and a second surface. The second stiffener surface is attached to the first substrate surface. An IC die has a first surface and a second surface. The first IC die surface is mounted to the first stiffener surface. A plurality of solder balls is attached to the second substrate surface. In one aspect, a heat spreader is mounted to the second IC die surface. In another aspect, the stiffener is coupled to ground to act as a ground plane. In another aspect, the substrate has a window opening that exposes a portion of the second stiffener surface. The exposed portion of the second stiffener surface is configured to be coupled to a printed circuit board (PCB). In another aspect, a metal ring is attached to the first stiffener surface. In another aspect, wire bond openings in the stiffener are bridged by one or more studs.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention
  • The invention relates generally to the field of integrated circuit (IC) device packaging technology, and more particularly to substrate stiffening and heat spreading techniques in ball grid array (BGA) packages.
  • 2. Related Art
  • Integrated circuit (IC) dies are typically mounted in or on a package that is attached to a printed circuit board (PCB). One such type of IC die package is a ball grid array (BGA) package. BGA packages provide for smaller footprints than many other package solutions available today. A BGA package has an array of solder balls located on a bottom external surface of a package substrate. The solder balls are reflowed to attach the package to the PCB. The IC die is mounted to a top surface of the package substrate. Wire bonds typically couple signals in the IC die to the substrate. The substrate has internal routing which electrically couples the IC die signals to the solder balls on the bottom substrate surface.
  • A number of BGA package substrate types exist, including ceramic, plastic, and tape (also known as “flex”). In some BGA package types, a stiffener may be attached to the substrate to supply planarity and rigidity to the package. In such packages, the IC die may be mounted to the stiffener instead of the substrate. Openings in the stiffener may be used to allow the IC die to be wire-bonded to the substrate.
  • Die-up and die-down BGA package configurations exist. In die-up BGA packages, the IC die is mounted on a top surface of the substrate or stiffener, opposite of the side to which the solder balls are attached. In die-down BGA packages, the IC die is mounted on a bottom surface of the substrate or stiffener, on the same side as which the solder balls are attached.
  • Conventional BGA packages are subject to high thermal stresses that result from the heat given off during operation of the mounted IC die. The thermal stresses are primarily imposed on the IC die and solder balls due to the mismatch of the thermal expansion coefficient (CTE) between the semiconductor die and the metal stiffener. As a result, conventional flex BGA packages have difficulty in meeting reliability requirements for die sizes larger than 9 mm. See, e.g., Thompson, T., et al., Reliability Assessment of a Thin (Flex) BGA Using a Polyimide Tape Substrate, International Electronics Manufacturing Technology Symposium, IEEE, pp. 207-213 (1999).
  • The tape substrate used in flex BGA packages is typically polyimide, which has very low values of thermal conductivity. Consequently, the IC die is separated from the PCB internally by the tape substrate thermal barrier. The lack of direct thermal connection from IC die to PCB leads to relatively high resistance to heat transfer from IC die-to-board (theta-jb).
  • A stiffener attached to a substrate enhances heat spreading. However, the openings on the stiffener for wire bond connections tend to reduce the thermal connections between the IC die and the edges of the stiffener. As a result, heat spreading is limited largely to the region of the IC die attach pad, while areas at the stiffener peripheral do not contribute effectively to heat spreading.
  • Furthermore, because of the high density of the substrate routing circuitry, it is difficult to bond each power and ground pad on the IC die to the substrate by a corresponding bond finger. As a result, the distribution of ground and power signals connecting to the IC die is frequently compromised in conventional BGA packages.
  • Ball grid array packages that use plastic substrates (for example, BT or FR4 plastic) are commonly known as plastic BGAs, or PBGAs. See, e.g., Lau, J. H., Ball Grid Array Technology, McGraw-Hill, New York, (1995). A PBGA package, for example, may add solder balls to the bottom substrate surface under the IC die to aid in conducting heat to the PCB. Solder balls such as these are referred to as thermal balls. The cost of the PBGA package, however, will increase with the number of thermal balls. Furthermore, a large array of thermal balls may be necessary for heat dissipation into the PCB for high levels of IC device power.
  • Hence, what is needed are BGA packages with improved heat spreading capabilities, while also providing for high levels of IC electrical performance.
    • SUMMARY OF THE INVENTION
  • Ball grid array (BGA) packages having enhanced electrical and thermal characteristics are described herein. The BGA package has a substrate that has a first surface and a second surface. A stiffener has a first surface and a second surface. The second stiffener surface is attached to the first substrate surface. An IC die has a first surface and a second surface. The first IC die surface is mounted to the first stiffener surface. A plurality of solder balls are attached to the second substrate surface.
  • In a first aspect of the present invention, a heat spreader has a first surface. The first heat spreader surface is mounted to the second IC die surface.
  • In a further aspect of the present invention, the second IC die surface includes a contact pad. A wire bond corresponding to the contact pad couples the corresponding contact pad to the second stiffener surface. At least one power/ground/thermal solder ball is attached to the second substrate surface. Each of the power/ground/thermal solder balls are coupled to the stiffener through a corresponding via extending through the substrate. The at least one power/ground/thermal solder ball is coupled to a first potential.
  • In a further aspect of the present invention, the substrate has a window opening that exposes a portion of the second stiffener surface. The exposed portion of the second stiffener surface is configured to be coupled to a printed circuit board (PCB).
  • In a further aspect of the present invention, a metal ring is attached to the first stiffener surface.
  • In a further aspect of the present invention, a wire bond opening is positioned along an edge of the IC die mount location. The wire bond opening extends through the stiffener. At least one stud corresponds to the wire bond opening. Each stud bridges the substrate across the corresponding the wire bond opening.
  • In a further aspect of the present invention, BGA packages having enhanced electrical and thermal characteristics are described herein. A substrate has a first surface and a second surface. The second substrate surface includes an array of contact pads. The first substrate surface is configured to mount an integrated circuit (IC) die. A plurality of solder balls is attached to the contact pads of the substrate. A heat spreader has a first surface coupled to the second substrate surface. A second surface of the heat spreader is configured to be coupled to a printed circuit board (PCB).
  • Further aspects of the present invention, and further features and benefits thereof, are described below. The accompanying drawings, which are incorporated herein and form a part of the specification, illustrate the present invention and, together with the description, further serve to explain the principles of the invention and to enable a person skilled in the pertinent art to make and use the invention.
    • BRIEF DESCRIPTION OF THE FIGURES
  • The accompanying drawings, which are incorporated herein and form a part of the specification, illustrate the present invention and, together with the description, further serve to explain the principles of the invention and to enable a person skilled in the pertinent art to make and use the invention.
  • FIGS. 1A and 1B illustrate conventional flex BGA packages.
  • FIG. 2A shows a top view of a stiffener.
  • FIG. 2B shows a temperature distribution for a stiffener during operation of an IC device in a flex BGA package.
  • FIG. 2C shows an top view of an alternative stiffener configuration.
  • FIG. 3 shows across-sectional view of a conventional die-up plastic BGA package.
  • FIG. 4 illustrates a cross-sectional view of a die-up flex BGA package with heat spreader, according to an embodiment of the present invention.
  • FIG. 5 show a cross-sectional view of an alternative BGA package, according to embodiments of the present invention, where the heat spreader is internal to the BGA package.
  • FIG. 6 illustrates a cross-sectional view of a die-up flex BGA package with stiffener ground plane, according to an embodiment of the present invention.
  • FIG. 7 illustrates a cross-sectional view of a die-up flex BGA package with patterned stiffener, according to an embodiment of the present invention.
  • FIG. 8 illustrates a cross-sectional view of a die-up flex BGA package with ground/thermal connector, according to an embodiment of the present invention.
  • FIG. 9A illustrates a cross-sectional view of a die-up tape BGA package with metal ring, according to an embodiment of the present invention.
  • FIG. 9B illustrates a top view of the die-up tape BGA package with metal ring of FIG. 9A, according to an embodiment of the present invention.
  • FIG. 10A illustrates a stiffener that includes one or more thermal studs, according to an embodiment of the present invention.
  • FIG. 10B illustrates an IC die that is wire bound to a substrate through openings in the stiffener of FIG. 10A, according to an embodiment of the present invention.
  • FIG. 11 illustrates a cross-sectional view of a die-up PBGA package with ground/thermal connector, according to an embodiment of the present invention.
  • FIG. 12A illustrates a cross-sectional view of a die-up BGA package.
  • FIGS. 12B and 12C illustrate exemplary solder ball arrangements for the die-up BGA package of FIG. 12A.
  • FIG. 13 shows exemplary routing in a substrate layer.
  • FIG. 14 shows a flowchart related to FIGS. 4 and 5, that provides operational steps of exemplary embodiments of the present invention.
  • FIG. 15 shows a flowchart related to FIG. 6 that provides operational steps of exemplary embodiments of the present invention.
  • FIGS. 16A-D show flowcharts related to FIGS. 7 and 8 that provide operational steps of exemplary embodiments of the present invention.
  • FIG. 17 shows a flowchart related to FIGS. 9A and 9B that provides operational steps of exemplary embodiments of the present invention.
  • FIG. 18 shows a flowchart related to FIGS. 10A and 10B that provides operational steps of exemplary embodiments of the present invention.
  • FIGS. 19A-C show flowcharts related to FIG. 11 that provide operational steps of exemplary embodiments of the present invention.
  • FIG. 20 illustrates a substrate that has a central window opening, according to an embodiment of the present invention.
  • FIG. 21 illustrates a side view of a stiffener that has a downward protruding portion, according to an embodiment of the present invention.
  • The present invention will now be described with reference to the accompanying drawings. In the drawings, like reference numbers indicate identical or functionally similar elements. Additionally, the left-most digit(s) of a reference number identifies the drawing in which the reference number first appears.
    • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • Overview
  • The present invention is directed to a method and system for improving the mechanical, thermal, and electrical performance of BGA packages. The present invention is applicable to all types of BGA substrates, including ceramic, plastic, and tape (flex) BGA packages. Furthermore the present invention is applicable to die-up (cavity-up) and die-down (cavity-down) orientations.
  • Numerous embodiments of the present invention are presented herein. In a first embodiment, BGA package thermal stress at the IC die/stiffener interface is released or altered with the introduction of a heat spreader on the top surface of the IC die, enabling large size dies with high input and output (I/O) counts to be packaged using BGA technology. In a second embodiment, BGA package thermal resistance and the length of the current return path are reduced by introducing thermal/ground balls underneath or within close proximity of the IC die. In a third embodiment, the package thermal resistance and ground inductance are reduced by removing center solder balls, and enabling the attachment of a die pad to the PCB. The die pad is attached to the PCB with novel patternings of the metal stiffener, or by positioning a thermal/ground connector in between the IC die pad and the PCB. In a fourth embodiment, the package thermal resistance is reduced by attaching a metal ring to the top surface of a stiffener. In a fifth embodiment, the package thermal resistance is reduced by bridging the die pad to the outer regions of the stiffener with metal studs.
  • In further embodiments according to the present invention, the electrical performance of the BGA package is improved. In a sixth embodiment, electrical performance is improved by connecting ground bonds from the IC die to the stiffener. In such a configuration, the stiffener operates as a package ground plane. The package ground plane may be connected to PCB ground through either thermal/ground balls or thermal/ground connectors mentioned in embodiments above, and further described herein. In a seventh embodiment, package power distribution is enhanced by using a layer in a tape substrate as a power or ground plane.
  • In still further embodiments according to the present invention, plastic ball grid array (PBGA) package thermal and electrical performances are improved. In an eighth embodiment, replacing the center solder balls with a solid conductor reduces the package junction-to-board thermal resistance and package ground inductance of a PBGA package.
  • Ball grid array package types are described below. Further detail on the above described embodiments, and additional embodiments according to the present invention, are presented below. The embodiments described herein may be combined in any applicable manner, as required by a particular application.
  • Ball Grid Array (BGA) Package
  • A ball grid array (BGA) package is used to package and interface an IC die with a printed circuit board (PCB). BGA packages may be used with any type of IC die, and are particularly useful for high speed ICs. In a BGA package, solder pads do not just surround the package periphery, as in chip carrier type packages, but cover the entire bottom package surface in an array configuration. BGA packages are also referred to as pad array carrier (PAC), pad array, land grid array, and pad-grid array packages. BGA packages types are further described in the following paragraphs. For additional description on BGA packages, refer to Lau, J. H., Ball GridArray Technology, McGraw-Hill, New York, (1995), which is herein incorporated by reference in its entirety.
  • Die-up and die-down BGA package configurations exist. In die-up BGA packages, the IC die is mounted on a top surface of the substrate or stiffener, in a direction away from the PCB. In die-down BGA packages, the IC die is mounted on a bottom surface of the substrate or stiffener, in a direction towards the PCB.
  • A number of BGA package substrate types exist, including ceramic, plastic (PBGA), and tape (also known as “flex”). FIG. 1A illustrates a conventional flex BGA package 100. Flex BGA package 100 includes an IC die 102, a tape substrate 104, a plurality of solder balls 106, and one or more wire bonds 108. Tape or flex BGA packages are particularly appropriate for large IC dies with large numbers of input and outputs, such as application specific integrated circuits (ASIC) and microprocessors.
  • Tape substrate 104 is generally made from one or more conductive layers bonded with a dielectric material. For instance, the dielectric material may be made from various substances, such as polyimide tape. The conductive layers are typically made from a metal, or combination of metals, such as copper and aluminum. Trace or routing patterns are made in the conductive layer material. Substrate 104 may be a single-layer tape, a two-layer tape, or additional layer tape substrate type. In a two-layer tape, the metal layers sandwich the dielectric layer, such as in a copper-Upilex-copper arrangement.
  • IC die 102 is attached directly to substrate 104, for example, by an epoxy. IC die 102 is any type of semiconductor integrated circuit, separated from a semiconductor wafer.
  • One or more wire bonds 108 connect corresponding bond pads 118 on IC die 102 to contact points 120 on substrate 104.
  • An encapsulate, mold compound, or epoxy 116 covers IC die 102 and wire bonds 108 for mechanical and environmental protection.
  • As shown in FIG. 1A, flex BGA package 100 does not include a stiffener. In some BGA package types, particularly in flex BGA packages, a stiffener can be attached to the substrate to add planarity and rigidity to the package. FIG. 11B illustrates a flex BGA package 110, similar to flex BGA package 100, that incorporates a stiffener 112. Stiffener 112 may be laminated to substrate 104. Stiffener 112 is typically made from a metal, or combination of metals, such as copper, tin, and aluminum, or may be made from a polymer, for example. Stiffener 112 also may act as a heat sink, and allow for greater heat spreading in BGA package 110. One or more openings 114 in stiffener 112 may be used to allow for wire bonds 108 to connect IC die 102 to substrate 104. Stiffener 112 may be configured in other ways, and have different opening arrangements than shown in FIG. 1B.
  • The use of a stiffener in a flex BGA package requires additional considerations when attempting to manage heat spreading. FIG. 2A shows a top view of a stiffener 112. Stiffener 112 includes an opening 114 adjacent to all four sides of an IC die mounting position 202 in the center of stiffener 112. FIG. 2B shows a temperature distribution 204 of a stiffener, such as stiffener 1 12, during operation of an IC die in a flex BGA package. Temperature distribution 204 shows that heat transfer from IC die mounting position 202 to the edges of stiffener 112 is substantially limited by openings 114. Openings 114 act as thermal barriers to heat spreading in stiffener 112.
  • FIG. 2C shows a top view of an alternative configuration for stiffener 112, according to an embodiment of the present invention. Stiffener 112 includes an opening 206 adjacent to all four sides of an IC die mounting position 202 in the center of stiffener 112. Openings 206 are similar to openings 114 of FIG. 2A, but of different shape. Further alternatively shaped openings in stiffener 112 are applicable to the present invention.
  • FIG. 3 shows a cross-sectional view of a conventional die-up PBGA package 300. PBGA package 300 includes a plastic substrate 302, an IC die 304, a plurality of solder balls 306, a plurality of wire bonds 308, a die pad 310, one or more vias 314, and one or more thermal/ground vias 316.
  • Plastic substrate 302 includes one or more metal layers formed on an organic substrate (for example, BT resin or FR4 epoxy/glass). IC die 304 is mounted to die pad 310. IC die 304 may be attached to die pad 310 with an epoxy, such as a silver-filled epoxy. Wire bonds 308 connect signals of IC die 304 to substrate 302. For instance, gold bonding wire is bonded from aluminum bond pads on IC die 304 to gold-plated contact pads on substrate 302. The contact pads on substrate 302 connect to solder balls 306 attached to the bottom surface of substrate 302, through vias 314 and routing within substrate 302 using copper conductors 312. Thermal/ground vias 316 connect die pad 310 to one or more thermal/ground balls 322 on the center bottom surface of substrate 302. An encapsulate, mold compound, or epoxy 320 covers IC die 304 and wire bonds 308 for mechanical and environmental protection.
  • As described above, a BGA package includes an array of solder balls located on a bottom external surface of the package substrate. FIG. 12A illustrates a cross-sectional view of a die-up BGA package 1200. FIGS. 12B and 12C illustrate exemplary solder ball arrangements for die-up BGA package 1200. As shown in FIG. 12A, BGA package 1200 includes an IC die 1208 mounted on a substrate 1212. IC die 1208 is electrically connected to substrate 1212 by one or more wire bonds 1210. Wire bonds 1210 are electrically connected to solder balls 1206 underneath substrate 1212 through corresponding vias and routing in substrate 1212. The vias in substrate 1212 can be filled with a conductive material, such as solder, to allow for these connections. Solder balls 1206 are attached to substrate 1212, and are used to attach the BGA package to a PCB.
  • Note that although wire bonds, such as wire bonds 1210, are shown and described herein, IC dies may be mounted and coupled to a substrate with solder balls located on the bottom surface of the IC die, by a process commonly referred to as “C4” or “flip chip” packaging.
  • As shown in FIG. 12B, solder balls 1206 may be arranged in an array. FIG. 12B shows a 14 by 14 array of solder balls on the bottom surface of BGA package 1200. Other sized arrays of solder balls are also applicable to the present invention. Solder balls 1206 are reflowed to attach BGA package 1200 to a PCB. The PCB may include contact pads to which solder balls 1206 are bonded. PCB contact pads are generally made from a metal or combination of metals, such as copper, nickel, tin, and gold.
  • FIG. 12C shows a bottom view of BGA package 1200, with an alternative solder ball array arrangement. BGA package 1200 attaches an array of solder balls 1206 on a bottom surface of substrate 1212. As shown in FIG. 12C, solder balls 1206 are located in a peripheral area of the bottom surface of substrate 1212, away from a substrate center 1224. For example, solder balls 1206 on the bottom surface of substrate 1212 may be located outside an outer profile area of an IC die mounted on the opposite surface of substrate 1212. The solder ball array may be organized in any number of ways, according to the requirements of the particular BGA package application.
  • The solder ball arrangement shown in FIG. 12C is particularly applicable to embodiments of the present invention described below, such as for attaching a heat spreader or ground/thermal connector to a bottom surface of a BGA package. The heat spreader or ground/thermal connector may be connected in substrate center 1224.
  • As described above, the BGA package substrate provides vias and routing on one or more layers to connect contact pads for wire bonds on its upper surface to solder balls attached to the bottom substrate surface. FIG. 13 shows an example routing 1304 in a substrate layer 1302 for accomplishing this.
  • The present invention is applicable to improving thermal and electrical performance in the BGA package types described herein, and further BGA package types.
  • BGA Embodiments According to the Present Invention
  • Further details of structural and operational implementations of ball grid array packages of the present invention are described in the following sections. These structural and operational implementations are described herein for illustrative purposes, and are not limiting. For instance, the present invention as described herein may be implemented in both die-up and die-down BGA package types, as well as other IC package types. Furthermore, each of the embodiments presented below are applicable to tape substrate BGA packages, plastic substrate BGA packages, and ceramic substrate BGA packages. The description below is adaptable to these and other package types, as would be understood to persons skilled in the relevant art(s) from the teachings herein. For instance, in plastic substrate BGA packages, and some tape BGA packages, a stiffener may not be required in the BGA package.
  • Features of each of the embodiments presented below may be incorporated into BGA packages independently, or may be combined in any manner, as would be apparent to persons skilled in the relevant art(s) from the teachings herein.
  • Drop-In Heat Spreader Embodiments
  • According to an embodiment of the present invention, a heat spreader may be used in a BGA package to provide for thermal stress relief and heat dissipation. In a preferred embodiment, a drop-in heat spreader is attached to the top surface of an IC die in a flex BGA package to provide for thermal stress relief and heat dissipation.
  • FIG. 4 illustrates a cross-sectional view of a die-up flex BGA package 400, according to an embodiment of the present invention. BGA package 400 includes IC die 102, substrate 104, plurality of solder balls 106, one or more wire bonds 108, stiffener 112, epoxy 116, a drop-in heat spreader 402, and an epoxy 404. Refer to the discussion above related to FIGS. 1A-1B for additional detail on the structure and operation of some of these elements.
  • Substrate 104 has a top surface to which a bottom surface of stiffener 112 is mounted. A bottom surface of substrate 104 attaches the plurality of solder balls 106. The plurality of solder balls 106 connect to vias and/or points on the bottom surface of substrate 104 to which signals internal to substrate 104 are routed and exposed.
  • Stiffener 112 has a top surface to which IC die 102 is mounted. In alternate embodiments, BGA package 400 does not require a stiffener, and does not include a stiffener 112. In such an alternate embodiment, IC die 102 is mounted to substrate 104.
  • One or more wire bonds 108 connect corresponding bond pads 118 on IC die 102 to contact points 120 on substrate 104. When a stiffener 112 is present, as shown in FIG. 4, wire bonds 108 extend through one or more openings 114 in stiffener 112 to form connections with substrate 104.
  • Heat spreader 402 is attached to the top surface (active surface) of IC die 102 using epoxy 404. The epoxy 404 may be the same substance as epoxy 116, or may be a different substance. Silver filled epoxies may be used for epoxy 404 to enhance heat extraction from IC die 102.
  • As shown in FIG. 4, heat spreader 402 is smaller in area than the upper surface of IC die 102. Alternative sizes for heat spreader 402 are also applicable to the present invention, including sizes equal to the area of IC die 102, or larger areas. Heat spreader 402 is shaped and configured to spread heat from IC die 102, as is required by the application.
  • As shown in FIG. 4, the top surface of heat spreader 402 forms a portion of a top surface of BGA package 400. Heat dissipation to the environment can be improved by exposing the top surface of heat spreader 402. Furthermore, in such a configuration, additional heat sinks may be attached to heat spreader 402. FIG. 5 show a cross-sectional view of an alternative BGA package 500, according to embodiments of the present invention, where a heat spreader 502 is internal to BGA package 500. Heat spreader 502 is completely encapsulated by epoxy 116.
  • By attaching heat spreader 402 to the top surface of IC die 102, the mechanical structure of BGA package 400 becomes more symmetrical in its center region, particularly when ground/thermal solder balls do not exist on the bottom surface of substrate 104 underneath the outer profile of IC die 102. Thermal stress at the interface of IC die 102 and stiffener 112 is substantially released or altered by heat spreader 402. Deformation caused by thermal stress in stiffener 112 and substrate 104 is substantially reduced through the use of heat spreader 402. Drop-in heat spreader 402 allows for even larger sizes for IC die 102 and greater I/O counts by providing for greater heat spreading capacity in BGA package 400.
  • FIG. 14 shows a flowchart 1400 providing operational steps for assembling one or more embodiments of the present invention. The steps of FIG. 14 do not necessarily have to occur in the order shown, as will be apparent to persons skilled in the relevant art(s) based on the teachings herein. Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1400 begins with step 1402. In step 1402, a substrate that has a first surface and a second surface is provided. For example, the substrate is flex substrate 104, or another substrate type suitable for a BGA package. For example, an IC die mounting position and/or contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • In step 1404, a first surface of a stiffener is attached to the first substrate surface. For example, the stiffener is stiffener 112, which is attached to substrate 104. In alternative embodiments, a stiffener is not required.
  • In step 1406, an IC die is mounted to the second stiffener surface. For example, the IC die is IC die 102, which is mounted to stiffener 112. In alternative embodiments, when a stiffener is not used, IC die 102 is mounted directly to the substrate.
  • In step 1408, a heat spreader is mounted to the IC die, wherein the heat spreader dissipates heat from the IC die. For example, the heat spreader is heat spreader 402 or 502, which is mounted with epoxy 404 or other attachment means to the upper surface of IC die 102. Heat spreader 402 or 502 typically is mounted to the center of the upper surface of IC die 102, and covers less than the entire upper surface of IC die 102. For instance, the smaller area of heat spreader 402 or 502 allows for bond pads 118 to be exposed on the upper surface of IC die 102 for wire bond connections. In alternative embodiments, heat spreader 402 or 502 is of the same size, or comprises a larger area than the upper surface of IC die 102.
  • In step 1410, a plurality of solder balls are attached to the second substrate surface. For example, the plurality of solder balls are plurality of solder balls 106, which connect to vias and/or solder ball pads on the bottom surface of substrate 104. The solder balls may be arranged on the bottom surface of substrate 104 as shown in FIGS. 12B and 12C, or in alternative arrangements. The solder balls are used to attach a BGA package to a PCB.
  • A benefit of performing the steps of flowchart 1400 is that the heat spreader relieves thermal stress at an interface of the IC die and the first stiffener surface.
  • Flowchart 1400 may include the additional step where the second stiffener surface is encapsulated. For instance, the second stiffener surface may be encapsulated by a resin or molding compound, that also encapsulates the IC die, heat spreader, and wire bonding.
  • Stiffener Ground Plane Embodiments
  • According to an embodiment of the present invention, electrical performance of an IC die, and thermal performance of a corresponding BGA package may be improved by allowing a stiffener to act as a ground plane. In a preferred embodiment, a stiffener in a die-up tape BGA (Flex BGA) package is coupled to PCB ground through one or more vias to ground solder balls. Ground contact pads of the IC die are connected to the stiffener by ground wire bonds. In a further aspect, one or more metal layers of a flex tape substrate may be coupled to a ground or power potential, to operate as a ground or power plane.
  • FIG. 6 illustrates a cross-sectional view of a die-up flex BGA package 600, according to an embodiment of the present invention. BGA package 600 includes IC die 102, substrate 104, plurality of solder balls 106, one or more wire bonds 108, stiffener 112, epoxy 116, one or more ground bonds to stiffener 602, one or more ground/thermal vias 604, one or more ground/thermal balls 606, one or more ground contact pads 608, one or more power contact pads 610, and one or more power vias 612.
  • Substrate 104 has a top surface to which a bottom surface of stiffener 112 is mounted. A bottom surface of substrate 104 attaches the plurality of solder balls 106. The plurality of solder balls 106 connect to vias and/or points on the bottom surface of substrate 104 to which signals internal to substrate 104 are routed and exposed.
  • Stiffener 112 has a top surface to which IC die 102 is mounted.
  • One or more wire bonds 108 connect corresponding bond pads 118 on IC die 102 to contact points 120 on substrate 104. Wire bonds 108 extend through one or more openings 114 in stiffener 112 to form connections with substrate 104.
  • IC die 102 has a top surface that includes at least one ground pad 608. Ground pad 608 is coupled to a ground potential signal in IC die 102. A ground wire bond 602 connects ground pad 608 to stiffener 112. The bottom surface of stiffener 112 is coupled to a ground potential signal in the PCB to which BGA package 600 is attached, to cause stiffener 112 to operate as a ground plane. Stiffener 112 is coupled to PCB ground through one or more of ground/thermal via 604 that extend through substrate 104. The one or more of ground/thermal vias 604 are located in substrate 104, underneath IC die 102, and can be filled with a conductive material, such as solder. A ground/thermal solder ball 606 is attached to each ground/thermal via 604 on the bottom surface of substrate 104. Ground/thermal solder ball 606 forms the connection to PCB ground, when reflowed to attach to the PCB. Each ground/thermal via 604 connects the respective ground/thermal solder ball 606 to stiffener 112 both electrically and thermally.
  • In a further embodiment, a tape substrate is configured such that a metal layer is used as a package power or ground plane. For instance, with a two-layer tape substrate, the bottom metal layer may be used as a power or ground-lane.
  • In FIG. 6, PCB package 600 includes a bottom metal layer 614 of a two-layer tape substrate 104 that is coupled to a potential to operate as a power plane, according to an embodiment of the present invention. One or more power contact pads 610 on IC die 102 are coupled to a power potential signal in IC die 102. Power contact pad 610 on IC die 102 is connected to a corresponding power via 612 by a power wire bond 616. When a stiffener 112 is present, power wire bond 616 extends through opening 114. Power via 612 extends through substrate 104. Power via 612 can be filled with a conductive material, such as solder. Each power via 612 is coupled to the bottom metal layer 614 of substrate 104. Furthermore, one or more power vias 612 may be connected to corresponding solder balls on the bottom of substrate 104, to connect bottom metal layer 614 to PCB power pads when the solder balls are reflowed.
  • The introduction of a stiffener ground plane, and/or a power/ground plane using a metal layer of a tape substrate allows for very short power and ground connections. Current return path lengths are shortened, voltage drop across planes is reduced, and power/ground inductance is reduced. The shorter power and ground paths are also significant in reducing a power/ground path resistance, which advantageously reduces required IC device power levels.
  • For further description of the use of a thermal vias in a flex tape substrate, and of the use of a thermal ball coupled to a heat spreader in a die-down TBGA package, refer to U.S. Pat. No. 6,020,637, which is incorporated by reference in its entirety herein. For further description of the use of a thermal via and a thermal ball in a plastic substrate BGA package, refer to U.S. Pat. No. 5,894,410, which is incorporated by reference in its entirety.
  • FIG. 15 shows a flowchart 1500 providing operational steps for assembling one or more embodiments of the present invention. The steps of FIG. 15 do not necessarily have to occur in the order shown, as will be apparent to persons skilled in the relevant art(s) based on the teachings herein. Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1500 begins with step 1502. In step 1502, a substrate that has a first surface and a second surface is provided. For example, the substrate is flex substrate 104, or another substrate type suitable for a BGA package. For example, an IC die mounting position and/or contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • In step 1504, at least one opening in a stiffener from a first surface of the stiffener to a second surface of the stiffener is provided. For example, the at least one opening includes openings 114 in stiffener 112. In a preferred embodiment, an opening 114 is located on each of the four edges of IC die 102.
  • In step 1506, the first stiffener surface is attached to the first substrate surface. For example, the stiffener is stiffener 112, which is attached to substrate 104. In alternative embodiments, a stiffener is not required, and is not attached to the substrate.
  • In step 1508, an integrated circuit (IC) die is mounted to the second stiffener surface, wherein a first surface of the IC die includes a contact pad. For example, the IC die is IC die 102, which is mounted to stiffener 112. In alternative embodiments, when a stiffener is not used, IC die 102 is mounted directly to the substrate. For example, the contact pad is ground contact pad 608.
  • In step 1510, the contact pad is coupled to the second stiffener surface. For instance, contact pad is ground contact pad 608, which is connected to stiffener 112 by ground wire bond 602. Ground wire bond 602 may be soldered, or otherwise attached to stiffener 112.
  • In step 1512, a plurality of solder balls is attached to the second substrate surface, inside an outer dimensional profile of the IC die. For example, the plurality of solder balls include one or more ground/thermal balls 606, which are arranged on the bottom surface of substrate 104 in the region of substrate center 1224, shown in FIG. 12C. The outer dimensional profile of the IC die is the area bounded by the edges of IC die 102.
  • In step 1514, the plurality of solder balls are coupled through corresponding vias in the substrate to the first stiffener surface. For example, the vias include ground/thermal via 604. The vias can be filled with a conductive material, such as solder, to allow the electrical connection of the solder balls to stiffener 112.
  • In a further embodiment according to flowchart 1500, the substrate includes a metal layer, wherein the metal layer is coupled to a second potential. The stiffener has at least one opening extending from the first stiffener surface to the second stiffener surface. The second IC die surface includes a second contact pad. The second contact pad is coupled to the metal layer through one of the openings in the stiffener and through a corresponding via that extends through the substrate. The second contact pad may be coupled to a power or ground potential in the IC die. For example, the second contact pad is power contact pad 610, the metal layer is metal layer 614, and the corresponding via is power via 612.
  • In an embodiment, flowchart 1500 may include an additional step, where the contact pad is coupled to a ground potential in the IC die. For example, the contact pad may be connected to a ground plane or ground signal in IC die that is routed to the contact pad.
  • Flowchart 1500 may include the additional step where the second stiffener surface is encapsulated. For instance, the second stiffener surface may be encapsulated by a resin or molding compound, that also encapsulates the IC die and wire bonding.
  • Flowchart 1500 may include the additional step where a second plurality of solder balls is attached to the second substrate surface, outside an outer dimensional profile of the IC die. For example, the second plurality of solder balls are plurality of solder balls 106, which connect to vias and/or solder ball pads on the bottom surface of substrate 104. The solder balls are arranged on the bottom surface of substrate 104 as shown in FIG. 12B, outside of substrate center 1224. The solder balls are used to attach a BGA package to a PCB.
  • Embodiments with Stiffener Coupled to a PCB
  • According to an embodiment of the present invention, electrical performance of the IC device, and thermal performance of a BGA package is improved by enabling an IC die pad to attach to a PCB. In an embodiment, the IC die pad is attached to the PCB by a novel patterning of the metal stiffener in a die-up tape BGA package. In an alternate embodiment, the IC die pad is attached to the PCB by placing a thermal/ground connector between the IC die pad and PCB in a die-up tape BGA package.
  • A BGA package junction-to-board thermal resistance can be substantially reduced by the attachment of a metal die-attach pad directly to a PCB. Metal die-attach pads are coupled to a PCB for package junction-to-board thermal resistance minimization in an exposed pad quad flat pack (QFP), a QFP with exposed heat sink at bottom, and a leadless plastic chip carrier (i.e. LPCC, QFN, SON, QLP) package, for instance. All existing such designs that involve an exposed die pad or an exposed heat sink at package bottom are “lead flame” packages. The present invention provides for an exposed die-attach pad or heat sink at the bottom of flex BGA packages.
  • FIG. 7 illustrates a cross-sectional view of a die-up flex BGA package 700, according to an embodiment of the present invention. BGA package 700 includes IC die 102, substrate 104, plurality of solder balls 106, one or more wire bonds 108, stiffener 112, epoxy 116, ground wire bond to stiffener 602, ground contact pad 608, and a stiffener cavity 702.
  • Substrate 104 has a top surface to which a bottom surface of stiffener 112 is mounted. A bottom surface of substrate 104 attaches the plurality of solder balls 106. The plurality of solder balls 106 connect to vias and/or points on the bottom surface of substrate 104 to which signals internal to substrate 104 are routed and exposed. Substrate 104 in FIG. 7 has a central window-shaped opening 704, under which solder balls are preferably not connected. FIG. 20 illustrates a bottom view of a substrate 104 that has a central window opening 704, according to an embodiment of the present invention.
  • Stiffener 112 has a top surface to which IC die 102 is mounted. Stiffener 112 in FIG. 7 is patterned with a cavity 702, which protrudes downward for attachment of IC die 102. As described above, a central window-shaped opening 704 exists in substrate 104. This opening 704 exists to allow stiffener 112 to protrude through, and make contact with soldering pads on a PCB to which BGA package 700 is to be mounted. The bottom exposed surface of cavity 702 can be plated with solder to facilitate surface mount to solder plated metal pads on a PCB to which BGA package 700 is mounted. Hence, stiffener 112 may act as a conduit for heat to be transferred from IC die 102 to the PCB.
  • Stiffener 112 may optionally be configured to operate as a ground plane. One or more ground pads 608 may be coupled to a ground potential signal in IC die 102. A ground wire bond 602 connects each ground pad 608 to stiffener 112. With one or more ground wire bonds 602 coupled to stiffener 602, the bottom exposed surface of cavity 702 may function both as an exposed ground pad of BGA package 700, and as an exposed heat spreader. As described above, the bottom exposed surface of cavity 702 may be plated with solder to allows stiffener 112 to be surface mounted to one or more soldering pads on the PCB. The pads on the PCB can be connected to a PCB ground plane to shorten the length of electrical current return paths, as well as to form a conductive heat dissipation path from BGA package 700 to the PCB.
  • Direct electrical and thermal connection from BGA package ground to a PCB ground plane is also possible by attaching a heat spreader between the stiffener and PCB. FIG. 8 illustrates a cross-sectional view of a die-up flex BGA package 700, according to an embodiment of the present invention. Substrate 104 in FIG. 8 has a central window-shaped opening, under which no solder balls are connected. A portion of the bottom surface of stiffener 112 is exposed through the central window-shaped opening 704 of substrate 104. A heat spreader (for example, manufactured from copper or aluminum), shown as ground/thermal connector 802, is coupled to the exposed portion of stiffener 112. Ground/thermal connector 802 can be made from the same material as stiffener 112. Material different from stiffener 112 may be used for ground/thermal connector 802 to compensate for the mismatch of thermal expansion coefficient between the die 102 and stiffener 112. Ground/thermal connector 802 may be laminated to the exposed portion of stiffener 112 using conductive epoxy. The bottom surface of ground/thermal connector 802 may be plated with solder to facilitate its surface mount to soldering pads on the PCB. Metal pads on the PCB may be connected to a PCB ground plane to shorten the length of electrical current return paths, as well as enhance the conductive heat dissipation path from IC die 102 to the PCB. An advantage of this design is a high efficiency in the metal connector lamination process.
  • In a further embodiment, stiffener 112 and ground/thermal connector 802 may be manufactured from a single piece of metal, and hence consist of a single metal piece. FIG. 21 illustrates a side view of stiffener 112 that has a downward protruding portion 2102, according to an embodiment of the present invention. When stiffener 112 shown in FIG. 21 is attached to substrate 104, portion 2102 extends partially or entirely through window-shaped opening 704. Portion 2102 may be directly connected to the PCB, or may be connected to a ground/thermal connector 802 that is connected to the PCB. Because of the thermal and electrical improvement enabled by the coupling of stiffener 112 to a PCB, length of wire bonds can be reduced by moving opening 114 closer to the proximity of die 102 without compromising thermal performance significantly.
  • FIG. 16A shows a flowchart 1600 providing operational steps for assembling one or more embodiments of the present invention. FIGS. 16B-D provide operational steps according to further embodiments. The steps of FIGS. 16A-D do not necessarily have to occur in the order shown, as will be apparent to persons skilled in the relevant art(s) based on the teachings herein. Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1600 begins with step 1602. In step 1602, a substrate that has a first surface and a second surface is provided. For example, the substrate is flex substrate 104, or another substrate type suitable for a BGA package. For example, an IC die mounting position and/or contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • In step 1604, a first surface of a stiffener is attached to the first substrate surface. For example, the stiffener is stiffener 112, which is attached to substrate 104.
  • In step 1606, a portion of the first stiffener surface is exposed through a window opening in the substrate. For example, substrate 104 has a window opening 704 in its center. A portion of the bottom surface of stiffener 112 is exposed through window opening 704.
  • In step 1608, an IC die is mounted to a second surface of the stiffener, wherein a surface of the IC die includes at least one contact pad. For example, the IC die is IC die 102, which is mounted to stiffener 112.
  • In step 1610, a plurality of solder balls are attached to the second substrate surface. For example, the plurality of solder balls are plurality of solder balls 106, which connect to vias and/or solder ball pads on the bottom surface of substrate 104. The solder balls are arranged on the bottom surface of substrate 104 as shown in FIG. 12B, exclusive of the area of window opening 704. The solder balls are used to attach a BGA package to a PCB.
  • In step 1612, the exposed portion of the first stiffener surface is configured to be coupled to a printed circuit board (PCB), whereby electrical and thermal performance of the BGA package is improved.
  • FIG. 16B provides exemplary steps for performing step 1612:
  • In step 1614, a heat spreader is coupled to the exposed portion of the first stiffener surface. For example, the heat spreader is ground/thermal connector 802, which is coupled to stiffener 112 through window opening 702.
  • In step 1616, a surface of the heat spreader is configured to be coupled to the PCB. In an embodiment, step 1612 further includes the step where the heat spreader surface is plated with solder to allow the heat spreader surface to be surface mounted to soldering pads on the PCB.
  • In an alternate embodiment, step 1612 comprises the step where the stiffener is shaped to have a centrally-located cavity shaped portion that protrudes through the window opening. In an embodiment, step 1612 further includes the step where a surface of the cavity shaped portion is plated with solder to allow the stiffener to be surface mounted to soldering pads on the PCB. For example, stiffener 112 is patterned with a cavity 702, which protrudes downward in window opening 704. The bottom surface of cavity 702 is plated with solder.
  • FIG. 16C provides additional exemplary steps for flowchart 1600 of FIG. 16A:
  • In step 1618, the stiffener is coupled to a potential. For example, the stiffener may be coupled to ground or power on the PCB. The bottom surface of cavity 702 may be coupled to the ground or power potential on the PCB, or ground/thermal connector 802 may make the connection to the PCB.
  • In step 1620, each of the at least one contact pads are coupled to the second stiffener surface with corresponding wire bonds.
  • FIG. 16D provides exemplary steps for performing step 1618:
  • In step 1622, the stiffener is coupled to a ground potential.
  • In step 1624, the stiffener allowed to serve as a ground plane.
  • Flowchart 1600 may include the additional step where the second stiffener surface is encapsulated. For instance, the second stiffener surface may be encapsulated by an epoxy, that also encapsulates the IC die and wire bonding.
  • Metal Ring Embodiments
  • According to an embodiment of the present invention, the mechanical and thermal performance of a BGA package is enhanced by attaching a metal ring to the top surface of the stiffener. In a preferred embodiment, a metal ring is attached to the top surface of the stiffener in a die-up tape BGA package.
  • FIG. 9A illustrates a cross-sectional view of a die-up tape BGA package 900, according to an embodiment of the present invention. BGA package 900 includes IC die 102, substrate 104, plurality of solder balls 106, one or more wire bonds 108, stiffener 112, epoxy 116, and a ring 902. FIG. 9B illustrates a top view of die-up tape BGA package 900, with ring 902.
  • Substrate 104 has a top surface to which a bottom surface of stiffener 112 is mounted. A bottom surface of substrate 104 attaches the plurality of solder balls 106. The plurality of solder balls 106 connect to vias and/or points on the bottom surface of substrate 104 to which signals internal to substrate 104 are routed and exposed.
  • One or more wire bonds 108 connect corresponding bond pads 118 on IC die 102 to contact points 120 on substrate 104. Wire bonds 108 extend through one or more openings 114 in stiffener 112 to form connections with substrate 104.
  • Stiffener 112 has a top surface to which IC die 102 is mounted. Furthermore, ring 902 is attached to the top surface of stiffener 112. Ring 902 may be laminated to stiffener 112, after wire bonding is completed. Epoxy 116 is filled in and flushed to ring 902 after the attachment of ring 902. Ring 902 is preferably made of a metal, such as copper or aluminum, or a combination thereof, but may be constructed from other applicable materials. Preferably, ring 902 is made from the same material as stiffener 112, to minimize the mismatch of the thermal expansion coefficient. Ring 902 is preferably flush with the outer edges of stiffener 112 to form an outer edge of BGA package 900, but may also reside entirely within an outer profile of stiffener 112.
  • A primary benefit of attaching ring 902 to stiffener 112 is an increase in stiffness of BGA package 900. Ring 902 also aids in reducing the amount of warp of BGA package 900. Furthermore, ring 902 promotes heat dissipation from stiffener 112, reduces junction-to-case thermal resistance, and facilitates-the attachment of an external heat spreader to BGA package. 900.
  • Furthermore, ring 902 enhances the process of encapsulation of the BGA package. Ring 902, with stiffener 112, creates a cavity that may be filled with a dispensed glob top or encapsulating material, that locks IC die 102 and surrounding elements in place.
  • FIG. 17 shows a flowchart 1700 providing operational steps for assembling one or more embodiments of the present invention. The steps of FIG. 17 do not necessarily have to occur in the order shown, as will be apparent to persons skilled in the relevant art(s) based on the teachings herein. Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1700 begins with step 1702. In step 1702, a substrate that has a first surface and a second surface is provided. For example, the substrate is flex substrate 104, or another substrate type suitable for a BGA package. For example, an IC die mounting position and/or contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • In step 1704, a first surface of a stiffener is attached to the first substrate-surface. For example, the stiffener is stiffener 112, which is attached to substrate 104. In alternative embodiments, a stiffener is not required, and is not attached to the substrate.
  • In step 1706, an IC die is mounted to the first stiffener surface. For example, the IC die is IC die 102, which is mounted to stiffener 112. In alternative embodiments, when a stiffener is not used, IC die 102 is mounted directly to the substrate.
  • In step 1708, a plurality of solder balls are attached to the second substrate surface. For example, the plurality of solder balls are plurality of solder balls 106, which connect to vias and/or solder ball pads on the bottom surface of substrate 104. The solder balls may be arranged on the bottom surface of substrate 104 as shown in FIGS. 12B and 12C, or in alternative arrangements. The solder balls are used to attach a BGA package to a PCB.
  • In step 1710, a metal ring is attached to the first stiffener surface. Attaching the metal ring enhances heat dissipation from the stiffener. For example, the metal ring is ring 902. In alternative embodiments, when a stiffener is not used, ring 902 is attached directly to the substrate.
  • Flowchart 1700 may include the additional step where the second stiffener surface within the volume encompassed by the ring is encapsulated. For example, such a filled upper surface may be called a “glob top”. For instance, this volume may be encapsulated by a resin or molding compound, that also encapsulates the IC die and wire bonding.
  • Embodiments Using Metal Studs to Bridge Stiffener Openings
  • According to an embodiment of the present invention, the thermal performance of a BGA package is improved by bridging an IC die pad to which the IC die is mounted to the outer regions of the stiffener. In a preferred embodiment, one or more metal studs are used as thermal bridges, to bridge the openings in the stiffener that surround the IC die, in a die-up tape BGA package.
  • The openings on a stiffener surface allow for wire bond connections between an IC die and a substrate. These openings have the additional effect of reducing the amount of heat that can spread to the outer surface regions of the stiffener, hampering the ability of the stiffener to act as a heat spreader. This effect is illustrated in FIG. 2B, which is further described above. To promote heat spreading according to the present invention, the stiffener is patterned such that one or more short studs run across each wire bond opening. More than one stud may be used to bridge each wire bond opening to promote heat spreading. The manufacturing process used for lead frame patterning may be adapted to pattern a stiffener with studs across the wire bond openings. The use of the studs, however, may reduce space for wire bonds, and may reduce BGA package I/O capability, in some situations.
  • FIG. 10A illustrates a stiffener 1000, that includes one or more studs 1002, according to an embodiment of the present invention. Stiffener 1000, having one or more studs 1002, may be incorporated into a BGA package in the same manner as is described elsewhere herein for stiffener 112. As shown in FIG. 10A, a stud 1002 bridges each opening 114 in stiffener 1000. In alternative embodiments, more than one stud 1002 per opening 114 may be used. Furthermore, each opening 114 may be bridged by a different number of studs 1002. Some of openings 114 may be bridged by one or more studs 1002, while other openings 114 may not be bridged at all.
  • FIG. 10B provides an illustration where IC die 102 is wire bound to substrate 104 through stiffener 1000, according to an embodiment of the present invention. One or more wire bonds 108 connect corresponding bond pads 118 on IC die 102 to contact points 120 on substrate 104. Wire bonds 108 avoid studs 1002 when making connections to substrate 104.
  • FIG. 18 shows a flowchart 1800 providing operational steps for assembling one or more embodiments of the present invention. The steps of FIG. 18 do not necessarily have to occur in the order shown, as will be apparent to c persons skilled in the relevant art(s) based on the teachings herein. Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1800 begins with step 1802. In step 1802, a substrate that has a first surface and a second surface is provided. For example, the substrate is flex substrate 104, or another substrate type suitable for a BGA package. For example, an IC die mounting position and/or contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • In step 1804, a wire bond opening is created along each edge of an IC die mount position on a stiffener, wherein each wire bond opening extends through the stiffener. For example, the wire bond openings are wire bond openings 114 in stiffener 1000. The IC die mount position is IC die mounting position 202, shown in FIG. 10A.
  • In step 1806, a first surface of the stiffener is attached to the first substrate surface. For example, the stiffener is stiffener 1000, which is attached to substrate 104.
  • In step 1808, an IC die is mounted to a second surface of the stiffener. For example, the IC die is IC die 102, which is mounted to stiffener 1000, in IC die mounting position 202.
  • In step 1810, at least one of the wire bond openings are bridged with at least one stud. For example, one or more of wire bond openings 114 are bridged with one or more studs 1002. Studs 1002 allow for increased heat spreading across corresponding wire bond openings 114 to the outer edges of stiffener 1000.
  • In step 1812, a plurality of solder balls are attached to the second substrate surface. For example, the plurality of solder balls are plurality of solder balls 106, which connect to vias and/or solder ball pads on the bottom surface of substrate 104. The solder balls may be arranged on the bottom surface of substrate 104 as shown in FIGS. 12B and 12C, or in alternative arrangements. The solder balls are used to attach a BGA package to a PCB.
  • The flowchart 1800 may include the further step where a contact pad on the IC die is coupled to the substrate with a wire bond, wherein the wire bond passes through one of the wire bond openings in the stiffener.
  • Flowchart 1800 may include the additional step where the second stiffener surface is encapsulated. For instance, the second stiffener surface may be encapsulated by a resin or molding compound, that also encapsulates the IC die and wire bonding.
  • PBGA Thermal/Ground Connector Embodiments
  • According to an embodiment of the present invention, the electrical and thermal performance of a plastic BGA (PBGA) package is improved by attaching a thermal/ground connector to the bottom surface of a PBGA package. The thermal/ground connector couples the bottom center of a plastic substrate of a die-up PBGA to the PCB. Heat from an IC die is more easily spread to the PCB through the thermal/ground connector, which is attached to the plastic substrate underneath the IC die.
  • In the discussion above regarding FIG. 8, embodiments were described that used a ground/thermal connector to couple a flex BGA package to a PCB, to reduce package junction-to-board thermal resistance. Aspects of this discussion above is adaptable to other die-up BGA package types. These include BGA packages having an organic substrate, such as PBGA and fine pitch ball grid array (FBGA) packages. Further detailed description is provided in the following discussion that is applicable to BGA packages with organic substrates.
  • FIG. 11 illustrates a cross-sectional view of a die-up PBGA package 1100, according to an embodiment of the present invention. PBGA package 1100 includes plastic substrate 302, IC die 304, plurality of solder balls 306, plurality of wire bonds 308, die pad 310, one or more vias 314, one or more thermal/ground vias 316, epoxy 320, a ground/thermal connector 1102, epoxy 1104, a plurality of ground bonds 1106, and a plurality of ground bond pads 1108.
  • IC die 304 is mounted to die pad 310. Wire bonds 308 connect signals of
  • IC die 304 to contact pads on substrate 302. The contact pads on substrate 302 connect to solder balls 306 attached to the bottom surface of substrate 302, through vias 314 and routing within substrate 302.
  • Thermal/ground vias 316 connect die pad 310 to an exposed metal plated plane 1110 at the bottom center of substrate 302. For instance, die pad 310 and metal plated plane 1110 may be exposed copper pads of plastic substrate 302.
  • Solder balls are not attached to the bottom region of substrate 302 covered by metal plated plane 1110. Ground/thermal connector 1102 is attached to metal plated plane 1110. For instance, ground/thermal connector 1102 may be a metal piece (copper or aluminum, for example) that is laminated to metal plated plane 1110 at the bottom center of substrate 302 using a conductive epoxy 1104. A bottom surface 1112 of ground/thermal connector 1102 may be plated with solder for surface mount to soldering pads on the PCB.
  • BGA package 1100 provides a thermal path of IC die 304, to die pad 310, to thermal/ground vias 316, to metal plated plane 1110, to epoxy 1104, to ground thermal connector 1102 (and bottom surface 1112) to the PCB soldering pads. Heat spreading is improved by a direct thermal path from IC die 304 to the PCB.
  • Metal pads on the PCB can be connected to a PCB ground plane to advantageously shorten the length of electrical current return paths, as well shorten the conductive heat dissipation path from device junctions of IC die to the PCB.
  • Ground bonds 1106 may be used to couple ground bond pads 1108 on IC die 304 to die pad 310, when die pad 310 is coupled to ground. This provides for very short ground connections for signals in IC die 304.
  • FIG. 19A shows a flowchart 1900 providing operational steps for assembling one or more embodiments of the present invention. FIGS. 19B-C provide operational steps according to further embodiments. The steps of FIGS. 19A-C do not necessarily have to occur in the order shown, as will be apparent to persons skilled in the relevant art(s) based on the teachings herein. Other structural embodiments will be apparent to persons skilled in the relevant art(s) based on the following discussion. These steps are described in detail below.
  • Flowchart 1900 begins with step 1902. In step 1902, a substrate that has a first surface and a second surface is provided. For example, the substrate is plastic substrate 302, or another substrate type suitable for a BGA package. For example, an IC die mounting position and contact points are provided on a first, upper surface, and solder ball pads are provided on a second, bottom surface.
  • In step 1904, an IC die is mounted to the first substrate surface. For example, the IC die is IC die 304, which is mounted to substrate 302. IC die 304 may be mounted to a die pad 310 attached to substrate 302.
  • In step 1906, a plurality of solder balls are attached to the second substrate surface. For example, the plurality of solder balls are plurality of solder balls 306, which connect to vias and/or solder ball pads on the bottom surface of substrate 302. The solder balls may be arranged on the bottom surface of substrate 302 as shown in FIG. 12B, or in other arrangements. The solder balls are used to attach a BGA package to a PCB.
  • In step 1908, a first surface of a heat spreader is coupled to the second substrate surface. For example, the heat spreader is ground/thermal connector 1102, which is coupled to substrate 302 with epoxy 1104. Ground/thermal connector 1102 may be mounted to metal plated plane 1110 on substrate 302 by epoxy 1104.
  • In step 1910, a second surface of the heat spreader is configured to be coupled to a printed circuit board (PCB). Second heat spreader surface is bottom surface 1112. In an embodiment, step 1910 may include the step where the second surface of the heat spreader is plated with solder.
  • Flowchart 1900 may comprise the additional step where the first substrate surface is coupled to the heat spreader through at least one via that extends through the substrate. For example, the first substrate surface may be coupled to the heat spreader by one or more ground/thermal vias 316.
  • FIG. 19B provides exemplary steps for performing step 1904:
  • In step 1912, a copper plated die-attach pad is exposed in the center of the first substrate surface. The copper plated die-attach pad, die pad 310, may be an exposed portion of a metal layer of plastic substrate 302.
  • In step 1914, the IC die is mounted to the copper plated die-attach pad. For example, the IC die may be mounted with an epoxy.
  • FIG. 19C provides exemplary steps for performing step 1908:
  • In step 1916, a copper plated plane is exposed in the center of the second substrate surface. The copper plated plane, metal plated plane 1110, is an exposed portion of a metal layer of plastic substrate 302.
  • In step 1918, the die-attach pad is coupled to the copper plated plane with the at least one via.
  • Flowchart 1900 may include the additional step where the first substrate surface is encapsulated. For instance, the first substrate surface may be encapsulated by a resin or molding compound, that also encapsulates the IC die and wire bonding.
  • Conclusion
  • While various embodiments of the present invention have been described above, it should be understood that they have been presented by way of example only, and not limitation. It will be apparent to persons skilled in the relevant art that various changes in form and detail can be made therein without departing from the spirit and scope of the invention. Thus, the breadth and scope of the present invention should not be limited by any of the above-described exemplary embodiments, but should be defined only in accordance with the following claims and their equivalents.

Claims (36)

1-33. (canceled).
34. A method of assembling a ball grid array (BGA) package, comprising the steps of:
providing a tape substrate that has a first surface and a second surface;
attaching a first surface of a stiffener to the first substrate surface;
mounting an IC die to the second stiffener surface;
mounting a heat spreader to the IC die; and
attaching a plurality of solder balls to the second substrate surface.
35. The method of claim 34, wherein said heat spreader mounting step comprises the step of:
causing thermal stress to be reduced at an interface of the IC die and the first stiffener surface during operation of the IC die.
36. A method of assembling a ball grid array (BGA) package, comprising the steps of:
providing a substrate that has a first surface and a second surface;
providing at least one opening in a stiffener from a first surface of the stiffener to the second surface of the stiffener;
attaching the first stiffener surface to the first substrate surface;
mounting an integrated circuit (IC) die to the second stiffener surface, wherein a first surface of the IC die includes a contact pad,
coupling the contact pad to the second stiffener surface;
attaching a plurality of solder balls to the second substrate surface, inside an outer dimensional profile of the IC die; and
coupling the plurality of solder balls through corresponding vias in the substrate to the first stiffener surface.
37. The method of claim 36, wherein the substrate includes a metal layer, wherein the metal layer is coupled to a second potential;
wherein the stiffener has at least one opening extending from the first stiffener surface to the second stiffener surface;
wherein the second IC die surface includes a second contact pad, wherein the method further comprises the step of:
coupling the second contact pad to the metal layer through one of the at least one openings in the stiffener and through a corresponding via that extends through the substrate.
38. The method of claim 36, further comprising the step of: coupling the contact pad to a ground potential in the IC die.
39. The method of claim 37, further comprising the step of:
coupling the second contact pad to a power potential in the IC die.
40. A method of assembling a ball grid array (BGA) package, comprising the steps of:
providing a substrate that has a first surface and a second surface;
attaching a first surface of a stiffener to the first substrate surface;
exposing a portion of the first stiffener surface through a window opening in the substrate;
mounting an IC die to a second stiffener surface, wherein a surface of the IC die includes at least one contact pad; and
attaching a plurality of solder balls to the second substrate surface;
configuring the exposed portion of the first stiffener surface to be coupled to a printed circuit board (PCB), whereby electrical and thermal performance of the BGA package is improved.
41. The method of claim 40, wherein said configuring step comprises the steps of:
coupling a heat spreader to the exposed portion of the first stiffener surface; and
configuring a surface of the heat spreader to be coupled to the PCB.
42. The method of claim 41, wherein said configuring step further comprises the step of:
plating the heat spreader surface with solder to allow the heat spreader surface to be surface mounted to soldering pads on the PCB.
43. The method of claim 40, wherein said configuring step comprises the step of:
shaping the stiffener to have a centrally-located cavity shaped portion that protrudes through the window opening.
44. The method of claim 43, wherein said configuring step further comprises the step of:
plating a surface of the cavity shaped portion with a conductive material to allow the stiffener to be surface mounted to contact pads on the PCB.
45. The method of claim 43, further comprising the steps of:
coupling the stiffener to a potential;
coupling each of the at least one contact pads to the second stiffener surface with corresponding wire bonds.
46. The method of 45, wherein the stiffener coupling step comprises the steps of:
coupling the stiffener to a ground potential; and
allowing the stiffener to serve as a ground plane.
47. A method of assembling a ball grid array (BGA) package, comprising the steps of:
providing a substrate that has a first surface and a second surface;
attaching a first surface of a stiffener to the first substrate surface;
mounting an IC die to the first stiffener surface;
attaching a plurality of solder balls to the second substrate surface; and
attaching a metal ring to the first stiffener surface.
48. The method of claim 47, wherein said metal ring attaching step comprises the step of dissipating heat from the stiffener with the metal ring.
49. The method of claim 46, further comprising the step of:
mounting an IC die to the first stiffener surface.
50. A method of assembling a ball grid array (BGA) package, comprising the steps of:
providing a substrate that has a first surface and a second surface;
creating a wire bond opening along each edge of an IC die mount position on a stiffener, wherein each wire bond opening extends through the stiffener;
attaching a first surface of the stiffener to the first substrate surface;
mounting an IC die to the IC die mount position on a second surface of the stiffener;
bridging at least one of the wire bond openings with at least one stud; and
attaching a plurality of solder balls to the second substrate surface.
51. The method of claim 50, wherein the IC die includes a contact pad, wherein the method further comprises the step of:
coupling the contact pad to the substrate with a wire bond, wherein the wire bond passes through one of the wire bond openings in the stiffener.
52. A method of assembling a ball grid array (BGA) package, comprising the steps of:
providing a substrate that has a first surface and a second surface;
mounting an IC die to the first substrate surface;
attaching a plurality of solder balls to the second substrate surface;
coupling a first surface of a heat spreader to the second substrate surface; and
configuring a second surface of the heat spreader to be coupled to a printed circuit board (PCB).
53. The method of claim 52, further comprising the step of coupling the first substrate surface to the heat spreader through at least one via that extends through the substrate.
54. The method of claim 53, wherein said mounting step comprises the steps of:
exposing a copper plated die-attach pad to the center of the first substrate surface; and
mounting the IC die to the copper plated die-attach pad.
55. The method of claim 53, wherein said step of coupling the first substrate surface to the heat spreader comprises the steps of:
exposing a copper plated plane to the center of the second substrate surface; and
coupling the die-attach pad to the copper plated plane with the at least one via.
56. The method of claim 52, wherein said configuring step comprises the step of:
plating the second surface of the heat spreader with solder.
57. (canceled)
58. The method of claim 43, further comprising the step of:
patterning at least a portion of the second stiffener surface.
59. The method of claim 58, wherein said patterning step comprises:
patterning the second stiffener surface with a surface treatment, wherein the surface treatment enhances said step of mounting the IC die to the second stiffener surface.
60. The method of claim 58, wherein said patterning step comprises:
patterning the second stiffener surface with a surface texture, wherein the surface texture enhances said step of mounting the IC die to the second stiffener surface.
61. The method of claim 43, wherein said configuring step further comprises the step of:
plating a surface of the cavity shaped portion with at least one of a solder, silver, tin, or gold material to allow the stiffener to be surface mounted to contact pads on the PCB.
62. The method of claim 45, further comprising the step of:
plating at least one area of the second stiffener surface, wherein the at least one plated area enhances said step of coupling each of the at least one contact pads to the second stiffener surface with the corresponding wire bonds.
63. The method of claim 62, wherein said plating step includes plating the at least one area with a solder, copper, nickel, tin, gold, or silver material.
64. The method of claim 43, wherein said attaching step comprises arranging the plurality of solder balls in an array on a peripheral area of the second substrate surface to accommodate the centrally-located cavity shaped portion of the stiffener that protrudes through the window opening in the substrate.
65. The method of claim 43, further comprising the steps of:
forming at least one opening through the stiffener that is open at the first and second stiffener surfaces; and
coupling the at least one contact pad of the IC die to at least one contact point on the first substrate surface with a corresponding wire bond that extends through the at least one opening through the stiffener.
66. The method of claim 43, further comprising the steps of:
forming at least one opening through the stiffener that is open at the first and second stiffener surfaces; and
coupling the at least one contact pad of the IC die to the plurality of solder balls with a corresponding wire bond that extends through the at least one opening through the stiffener to at least one via through the substrate.
67. The method of claim 43, further comprising the step of:
encapsulating the second stiffener surface with an encapsulating material.
68. The method of claim 44, wherein the contact pads on the PCB are formed from at least one of a copper, nickel, tin, or gold material.
US10/942,031 2000-12-22 2004-09-16 Enhanced die-up ball grid array and method for making the same Abandoned US20050029657A1 (en)

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US14/542,351 US20150137343A1 (en) 2000-12-22 2014-11-14 Enhanced die-up ball grid array and method for making the same

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US09/742,366 Abandoned US20020079572A1 (en) 2000-12-22 2000-12-22 Enhanced die-up ball grid array and method for making the same
US10/197,438 Expired - Lifetime US7038312B2 (en) 2000-12-22 2002-07-18 Die-up ball grid array package with attached stiffener ring
US10/200,255 Expired - Fee Related US7859101B2 (en) 2000-12-22 2002-07-23 Die-up ball grid array package with die-attached heat spreader
US10/200,336 Expired - Lifetime US7102225B2 (en) 2000-12-22 2002-07-23 Die-up ball grid array package with printed circuit board attachable heat spreader
US10/201,309 Expired - Lifetime US6989593B2 (en) 2000-12-22 2002-07-24 Die-up ball grid array package with patterned stiffener opening
US10/201,891 Expired - Lifetime US7005737B2 (en) 2000-12-22 2002-07-25 Die-up ball grid array package with enhanced stiffener
US10/201,893 Expired - Lifetime US7227256B2 (en) 2000-12-22 2002-07-25 Die-up ball grid array package with printed circuit board attachable heat spreader
US10/942,031 Abandoned US20050029657A1 (en) 2000-12-22 2004-09-16 Enhanced die-up ball grid array and method for making the same
US11/509,715 Expired - Fee Related US7579217B2 (en) 2000-12-22 2006-08-25 Methods of making a die-up ball grid array package with printed circuit board attachable heat spreader
US12/424,270 Abandoned US20090203172A1 (en) 2000-12-22 2009-04-15 Enhanced Die-Up Ball Grid Array and Method for Making the Same
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US10/200,255 Expired - Fee Related US7859101B2 (en) 2000-12-22 2002-07-23 Die-up ball grid array package with die-attached heat spreader
US10/200,336 Expired - Lifetime US7102225B2 (en) 2000-12-22 2002-07-23 Die-up ball grid array package with printed circuit board attachable heat spreader
US10/201,309 Expired - Lifetime US6989593B2 (en) 2000-12-22 2002-07-24 Die-up ball grid array package with patterned stiffener opening
US10/201,891 Expired - Lifetime US7005737B2 (en) 2000-12-22 2002-07-25 Die-up ball grid array package with enhanced stiffener
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US14/542,351 Abandoned US20150137343A1 (en) 2000-12-22 2014-11-14 Enhanced die-up ball grid array and method for making the same

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Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070040267A1 (en) * 2005-08-22 2007-02-22 Broadcom Corporation Method and system for secure heat sink attachment on semiconductor devices with macroscopic uneven surface features
US20070090502A1 (en) * 2005-10-20 2007-04-26 Broadcom Corporation Methods and apparatus for improved thermal performance and electromagnetic interference (EMI) shielding in leadframe integrated circuit (IC) packages
US20070126094A1 (en) * 2005-12-01 2007-06-07 Intel Corporation Microelectronic package having a stiffening element and method of making same
US20070164424A1 (en) * 2003-04-02 2007-07-19 Nancy Dean Thermal interconnect and interface systems, methods of production and uses thereof
US20070267740A1 (en) * 2006-05-16 2007-11-22 Broadcom Corporation Method and apparatus for cooling semiconductor device hot blocks and large scale integrated circuit (IC) using integrated interposer for IC packages
US20070273049A1 (en) * 2006-05-12 2007-11-29 Broadcom Corporation Interconnect structure and formation for package stacking of molded plastic area array package
US20070273023A1 (en) * 2006-05-26 2007-11-29 Broadcom Corporation Integrated circuit package having exposed thermally conducting body
US20070278632A1 (en) * 2006-06-01 2007-12-06 Broadcom Corporation Leadframe IC packages having top and bottom integrated heat spreaders
US20070290322A1 (en) * 2006-06-20 2007-12-20 Broadcom Corporation Thermal improvement for hotspots on dies in integrated circuit packages
US20080006934A1 (en) * 2004-11-03 2008-01-10 Broadcom Corporation Flip Chip Package Including a Non-Planar Heat Spreader and Method of Making the Same
US20080032454A1 (en) * 2006-08-07 2008-02-07 Matthew Romig Thermally Enhanced BGA Package Substrate Structure and Methods
US20080096312A1 (en) * 2006-10-20 2008-04-24 Broadcom Corporation Low profile ball grid array (BGA) package with exposed die and method of making same
US20080211089A1 (en) * 2007-02-16 2008-09-04 Broadcom Corporation Interposer for die stacking in semiconductor packages and the method of making the same
US7432591B1 (en) * 2008-02-28 2008-10-07 International Business Machines Corporation Thermal enhanced plastic ball grid array with heat sink attachment option
US20080303124A1 (en) * 2007-06-08 2008-12-11 Broadcom Corporation Lead frame-BGA package with enhanced thermal performance and I/O counts
US20090057871A1 (en) * 2000-12-22 2009-03-05 Broadcom Corporation Ball Grid Array Package Enhanced With a Thermal and Electrical Connector
US20090203172A1 (en) * 2000-12-22 2009-08-13 Broadcom Corporation Enhanced Die-Up Ball Grid Array and Method for Making the Same
US20090267222A1 (en) * 2002-03-22 2009-10-29 Broadcom Corporation Low Voltage Drop and High Thermal Performance Ball Grid Array Package
US20090294115A1 (en) * 2003-06-06 2009-12-03 Honeywell International Inc. Thermal Interconnect System and Production Thereof
US20100283143A1 (en) * 2009-05-06 2010-11-11 Chenglin Liu Die Exposed Chip Package
US20110012240A1 (en) * 2009-07-15 2011-01-20 Chenglin Liu Multi-Connect Lead
US20110182042A1 (en) * 2007-07-05 2011-07-28 Occam Portfolio Llc Electronic Assemblies without Solder and Methods for their Manufacture
US8183680B2 (en) 2006-05-16 2012-05-22 Broadcom Corporation No-lead IC packages having integrated heat spreader for electromagnetic interference (EMI) shielding and thermal enhancement
CN102738022A (en) * 2011-04-15 2012-10-17 飞思卡尔半导体公司 Method for assembling semiconductor device containing insulating substrate and heat sink
CN102832183A (en) * 2012-09-14 2012-12-19 杰群电子科技（东莞）有限公司 Outer-pin-free flat semiconductor package structure adopting elastic device
US8581381B2 (en) 2006-06-20 2013-11-12 Broadcom Corporation Integrated circuit (IC) package stacking and IC packages formed by same
CN103594380A (en) * 2013-10-24 2014-02-19 天水华天科技股份有限公司 Manufacturing method for flat-four-side and non-pin package part with soldered ball surface array

Families Citing this family (160)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2002217987A1 (en) 2000-12-01 2002-06-11 Broadcom Corporation Thermally and electrically enhanced ball grid array packaging
US6906414B2 (en) * 2000-12-22 2005-06-14 Broadcom Corporation Ball grid array package with patterned stiffener layer
US6853070B2 (en) * 2001-02-15 2005-02-08 Broadcom Corporation Die-down ball grid array package with die-attached heat spreader and method for making the same
US7259448B2 (en) * 2001-05-07 2007-08-21 Broadcom Corporation Die-up ball grid array package with a heat spreader and method for making the same
US6930256B1 (en) * 2002-05-01 2005-08-16 Amkor Technology, Inc. Integrated circuit substrate having laser-embedded conductive patterns and method therefor
JP2003031610A (en) * 2001-07-16 2003-01-31 Nec Corp Semiconductor device and its wire bonding method
US7154166B2 (en) * 2001-08-15 2006-12-26 Texas Instruments Incorporated Low profile ball-grid array package for high power
US20030059976A1 (en) * 2001-09-24 2003-03-27 Nathan Richard J. Integrated package and methods for making same
SG114508A1 (en) * 2001-11-02 2005-09-28 Inst Of Microelectronics Enhanced chip scale package for wire bonds dies
US6664615B1 (en) * 2001-11-20 2003-12-16 National Semiconductor Corporation Method and apparatus for lead-frame based grid array IC packaging
TW558814B (en) * 2001-12-18 2003-10-21 Via Tech Inc Multi-chip package structure having heat sink member
US6879039B2 (en) * 2001-12-18 2005-04-12 Broadcom Corporation Ball grid array package substrates and method of making the same
US20030112710A1 (en) * 2001-12-18 2003-06-19 Eidson John C. Reducing thermal drift in electronic components
US6861750B2 (en) * 2002-02-01 2005-03-01 Broadcom Corporation Ball grid array package with multiple interposers
US7180175B2 (en) * 2002-02-01 2007-02-20 Stmicroelectronics, Inc. Thermally-enhanced ball grid array package structure and method
US7245500B2 (en) * 2002-02-01 2007-07-17 Broadcom Corporation Ball grid array package with stepped stiffener layer
US7550845B2 (en) * 2002-02-01 2009-06-23 Broadcom Corporation Ball grid array package with separated stiffener layer
US6825108B2 (en) * 2002-02-01 2004-11-30 Broadcom Corporation Ball grid array package fabrication with IC die support structures
US20030152773A1 (en) * 2002-02-14 2003-08-14 Chrysler Gregory M. Diamond integrated heat spreader and method of manufacturing same
US20030153119A1 (en) * 2002-02-14 2003-08-14 Nathan Richard J. Integrated circuit package and method for fabrication
US6876553B2 (en) * 2002-03-21 2005-04-05 Broadcom Corporation Enhanced die-up ball grid array package with two substrates
TW535244B (en) * 2002-04-19 2003-06-01 Advanced Semiconductor Eng Wafer level package method and package structure
US7548430B1 (en) 2002-05-01 2009-06-16 Amkor Technology, Inc. Buildup dielectric and metallization process and semiconductor package
US7670962B2 (en) 2002-05-01 2010-03-02 Amkor Technology, Inc. Substrate having stiffener fabrication method
US9691635B1 (en) 2002-05-01 2017-06-27 Amkor Technology, Inc. Buildup dielectric layer having metallization pattern semiconductor package fabrication method
US7399661B2 (en) * 2002-05-01 2008-07-15 Amkor Technology, Inc. Method for making an integrated circuit substrate having embedded back-side access conductors and vias
US20080043447A1 (en) * 2002-05-01 2008-02-21 Amkor Technology, Inc. Semiconductor package having laser-embedded terminals
US6800948B1 (en) 2002-07-19 2004-10-05 Asat Ltd. Ball grid array package
US6979594B1 (en) 2002-07-19 2005-12-27 Asat Ltd. Process for manufacturing ball grid array package
US6987032B1 (en) * 2002-07-19 2006-01-17 Asat Ltd. Ball grid array package and process for manufacturing same
EP1435659A1 (en) * 2002-12-17 2004-07-07 Dialog Semiconductor GmbH Partially populated ball grid design to accomodate landing pads close to the die
KR100701380B1 (en) * 2002-12-30 2007-03-28 동부일렉트로닉스 주식회사 Heat spreading type package structure
US7164192B2 (en) * 2003-02-10 2007-01-16 Skyworks Solutions, Inc. Semiconductor die package with reduced inductance and reduced die attach flow out
DE10323296A1 (en) * 2003-05-21 2005-01-05 Infineon Technologies Ag Arrangement for stress reduction for substrate-based chip packages has uniform trench-shaped structures on chip side of substrate to interrupt or displace thermally induced mechanical stress
US6924170B2 (en) * 2003-06-30 2005-08-02 Intel Corporation Diamond-silicon hybrid integrated heat spreader
US7372151B1 (en) 2003-09-12 2008-05-13 Asat Ltd. Ball grid array package and process for manufacturing same
TWI348748B (en) * 2003-10-07 2011-09-11 Rohm Co Ltd Semiconductor device and method of fabricating the same
FR2861216B1 (en) * 2003-10-21 2006-02-10 St Microelectronics Sa SEMICONDUCTOR PACKAGE WITH CHIP ON SUPPORT PLATE
US10811277B2 (en) 2004-03-23 2020-10-20 Amkor Technology, Inc. Encapsulated semiconductor package
US11081370B2 (en) 2004-03-23 2021-08-03 Amkor Technology Singapore Holding Pte. Ltd. Methods of manufacturing an encapsulated semiconductor device
CN1906974A (en) * 2004-03-30 2007-01-31 霍尼韦尔国际公司 Heat spreader constructions, integrated circuitry, methods of forming heat speader contruictions, and methods of forming integrated circuitry
US20050257821A1 (en) * 2004-05-19 2005-11-24 Shriram Ramanathan Thermoelectric nano-wire devices
US20050266592A1 (en) * 2004-05-28 2005-12-01 Intersil Americas, Inc. Method of fabricating an encapsulated chip and chip produced thereby
US20050266602A1 (en) * 2004-05-28 2005-12-01 Intersil Americas, Inc. Encapsulated chip and method of fabrication thereof
US7091581B1 (en) 2004-06-14 2006-08-15 Asat Limited Integrated circuit package and process for fabricating the same
US7411289B1 (en) 2004-06-14 2008-08-12 Asat Ltd. Integrated circuit package with partially exposed contact pads and process for fabricating the same
US7482686B2 (en) 2004-06-21 2009-01-27 Braodcom Corporation Multipiece apparatus for thermal and electromagnetic interference (EMI) shielding enhancement in die-up array packages and method of making the same
US7432586B2 (en) * 2004-06-21 2008-10-07 Broadcom Corporation Apparatus and method for thermal and electromagnetic interference (EMI) shielding enhancement in die-up array packages
US7411281B2 (en) * 2004-06-21 2008-08-12 Broadcom Corporation Integrated circuit device package having both wire bond and flip-chip interconnections and method of making the same
US7235889B2 (en) * 2004-09-10 2007-06-26 Lsi Corporation Integrated heatspreader for use in wire bonded ball grid array semiconductor packages
FR2875672B1 (en) * 2004-09-21 2007-05-11 3D Plus Sa Sa ELECTRONIC DEVICE WITH INTEGRATED HEAT DISTRIBUTOR
US7786591B2 (en) 2004-09-29 2010-08-31 Broadcom Corporation Die down ball grid array package
US8610262B1 (en) 2005-02-18 2013-12-17 Utac Hong Kong Limited Ball grid array package with improved thermal characteristics
US7332808B2 (en) * 2005-03-30 2008-02-19 Sanyo Electric Co., Ltd. Semiconductor module and method of manufacturing the same
US8826531B1 (en) 2005-04-05 2014-09-09 Amkor Technology, Inc. Method for making an integrated circuit substrate having laminated laser-embedded circuit layers
US7298052B2 (en) * 2005-04-22 2007-11-20 Stats Chippac Ltd. Micro chip-scale-package system
US8314481B2 (en) * 2005-05-18 2012-11-20 Kingpak Technology Inc. Substrate structure for an image sensor package and method for manufacturing the same
KR20080014004A (en) * 2005-06-06 2008-02-13 로무 가부시키가이샤 Interposer and semiconductor device
US20070013042A1 (en) * 2005-06-20 2007-01-18 Nokia Corporation Electronic module assembly with heat spreader
TWI287275B (en) * 2005-07-19 2007-09-21 Siliconware Precision Industries Co Ltd Semiconductor package without chip carrier and fabrication method thereof
TWI279175B (en) * 2005-07-21 2007-04-11 Phoenix Prec Technology Corp Circuit board structure and method for fabricating the same
JP5357543B2 (en) * 2005-08-26 2013-12-04 コーニンクレッカ フィリップス エヌ ヴェ Electrically shielded through-wafer interconnect
US7585702B1 (en) * 2005-11-08 2009-09-08 Altera Corporation Structure and assembly procedure for low stress thin die flip chip packages designed for low-K Si and thin core substrate
US7679201B2 (en) * 2005-12-20 2010-03-16 Intel Corporation Device package
US7737564B2 (en) * 2006-01-19 2010-06-15 Lsi Corporation Power configuration method for structured ASICs
US7675157B2 (en) * 2006-01-30 2010-03-09 Marvell World Trade Ltd. Thermal enhanced package
KR100744930B1 (en) * 2006-02-01 2007-08-01 삼성전기주식회사 Method for manufacturing ltcc module
US20070200210A1 (en) * 2006-02-28 2007-08-30 Broadcom Corporation Methods and apparatus for improved thermal performance and electromagnetic interference (EMI) shielding in integrated circuit (IC) packages
US7545032B2 (en) * 2006-07-10 2009-06-09 Stats Chippac Ltd. Integrated circuit package system with stiffener
US7514684B2 (en) * 2006-08-28 2009-04-07 L-3 Communications Corporation Surface mounted infrared image detector systems and associated methods
US7906844B2 (en) * 2006-09-26 2011-03-15 Compass Technology Co. Ltd. Multiple integrated circuit die package with thermal performance
US7589398B1 (en) 2006-10-04 2009-09-15 Amkor Technology, Inc. Embedded metal features structure
JP5090362B2 (en) * 2006-10-11 2012-12-05 株式会社図研 Electric information processing apparatus in CAD system, electric information processing method and program in CAD system
US20080087456A1 (en) * 2006-10-13 2008-04-17 Onscreen Technologies, Inc. Circuit board assemblies with combined fluid-containing heatspreader-ground plane and methods therefor
US7788960B2 (en) * 2006-10-27 2010-09-07 Cummins Filtration Ip, Inc. Multi-walled tube and method of manufacture
US7573131B2 (en) * 2006-10-27 2009-08-11 Compass Technology Co., Ltd. Die-up integrated circuit package with grounded stiffener
US7701046B2 (en) * 2006-12-29 2010-04-20 Advanced Semiconductor Engineering Inc. Stacked type chip package structure
US7752752B1 (en) 2007-01-09 2010-07-13 Amkor Technology, Inc. Method of fabricating an embedded circuit pattern
US20080218979A1 (en) * 2007-03-08 2008-09-11 Jong-Ho Park Printed circuit (PC) board module with improved heat radiation efficiency
US7648858B2 (en) * 2007-06-19 2010-01-19 Freescale Semiconductor, Inc. Methods and apparatus for EMI shielding in multi-chip modules
US20080315383A1 (en) * 2007-06-25 2008-12-25 Tong Hsing Electric Industries Ltd. Chip frame for optical digital processor
US20090190277A1 (en) * 2007-09-28 2009-07-30 Super Talent Electronics, Inc. ESD Protection For USB Memory Devices
US7618849B2 (en) * 2007-10-22 2009-11-17 Broadcom Corporation Integrated circuit package with etched leadframe for package-on-package interconnects
US20090146294A1 (en) * 2007-12-11 2009-06-11 Apple Inc. Gasket system for liquid-metal thermal interface
US7714419B2 (en) * 2007-12-27 2010-05-11 Stats Chippac Ltd. Integrated circuit package system with shielding
KR100959604B1 (en) * 2008-03-10 2010-05-27 주식회사 하이닉스반도체 Wafer level semiconductor package and method of manufacturing the same
US20090236134A1 (en) * 2008-03-20 2009-09-24 Knecht Thomas A Low frequency ball grid array resonator
US8314438B2 (en) * 2008-03-25 2012-11-20 Bridge Semiconductor Corporation Semiconductor chip assembly with bump/base heat spreader and cavity in bump
US8324723B2 (en) * 2008-03-25 2012-12-04 Bridge Semiconductor Corporation Semiconductor chip assembly with bump/base heat spreader and dual-angle cavity in bump
US7768135B1 (en) * 2008-04-17 2010-08-03 Amkor Technology, Inc. Semiconductor package with fast power-up cycle and method of making same
TW200945530A (en) * 2008-04-24 2009-11-01 Chipmos Technologies Inc Chip package structure
US7804179B2 (en) * 2008-04-24 2010-09-28 Lockheed Martin Corporation Plastic ball grid array ruggedization
KR100956688B1 (en) * 2008-05-13 2010-05-10 삼성전기주식회사 Printed Circuit Board and Manufacturing Method Thereof
TW200950014A (en) * 2008-05-23 2009-12-01 Advanced Semiconductor Eng Semiconductor package and method for manufacturing the same
US8076786B2 (en) * 2008-07-11 2011-12-13 Advanced Semiconductor Engineering, Inc. Semiconductor package and method for packaging a semiconductor package
JP5236377B2 (en) * 2008-07-16 2013-07-17 シャープ株式会社 Semiconductor device and display device
JPWO2010038345A1 (en) * 2008-10-03 2012-02-23 パナソニック株式会社 Wiring substrate, semiconductor device, and manufacturing method thereof
US9123614B2 (en) 2008-10-07 2015-09-01 Mc10, Inc. Methods and applications of non-planar imaging arrays
US8097926B2 (en) 2008-10-07 2012-01-17 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
US8389862B2 (en) 2008-10-07 2013-03-05 Mc10, Inc. Extremely stretchable electronics
US8212346B2 (en) * 2008-10-28 2012-07-03 Global Foundries, Inc. Method and apparatus for reducing semiconductor package tensile stress
US8872329B1 (en) 2009-01-09 2014-10-28 Amkor Technology, Inc. Extended landing pad substrate package structure and method
US7851269B2 (en) * 2009-02-19 2010-12-14 Intel Corporation Method of stiffening coreless package substrate
JP2010225919A (en) * 2009-03-24 2010-10-07 Sony Corp Semiconductor device
US20110059579A1 (en) * 2009-09-08 2011-03-10 Freescale Semiconductor, Inc. Method of forming tape ball grid array package
US8586414B2 (en) * 2010-12-14 2013-11-19 Alpha & Omega Semiconductor, Inc. Top exposed package and assembly method
KR20110050231A (en) * 2009-11-06 2011-05-13 삼성전자주식회사 Semiconductor package and method of forming the same
TW201119532A (en) * 2009-11-20 2011-06-01 Inventec Corp Accurate impedance designing method for circuit layout
US8093714B2 (en) * 2009-12-10 2012-01-10 Semtech Corporation Chip assembly with chip-scale packaging
US8009429B1 (en) 2010-03-22 2011-08-30 Honeywell International Inc. Electrical component thermal management
US8264849B2 (en) * 2010-06-23 2012-09-11 Intel Corporation Mold compounds in improved embedded-die coreless substrates, and processes of forming same
TWI426587B (en) * 2010-08-12 2014-02-11 矽品精密工業股份有限公司 Chip scale package and fabrication method thereof
US8411444B2 (en) * 2010-09-15 2013-04-02 International Business Machines Corporation Thermal interface material application for integrated circuit cooling
US20120241954A1 (en) * 2011-03-24 2012-09-27 Conexant Systems, Inc. Unpackaged and packaged IC stacked in a system-in-package module
US20130027894A1 (en) * 2011-07-27 2013-01-31 Harris Corporation Stiffness enhancement of electronic substrates using circuit components
CN102290356B (en) * 2011-09-02 2012-11-21 四川卫士通信息安全平台技术有限公司 Method suitable for packaging protection of BGA (ball grid array) chip after attachment and welding
US10388584B2 (en) * 2011-09-06 2019-08-20 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming Fo-WLCSP with recessed interconnect area in peripheral region of semiconductor die
TW201320263A (en) * 2011-11-11 2013-05-16 Chipmos Technologies Inc Thermally enhanced packaging structure
US9082780B2 (en) * 2012-03-23 2015-07-14 Stats Chippac, Ltd. Semiconductor device and method of forming a robust fan-out package including vertical interconnects and mechanical support layer
US20130308274A1 (en) * 2012-05-21 2013-11-21 Triquint Semiconductor, Inc. Thermal spreader having graduated thermal expansion parameters
US8674509B2 (en) 2012-05-31 2014-03-18 Freescale Semiconductor, Inc. Integrated circuit die assembly with heat spreader
US9087847B2 (en) 2012-08-14 2015-07-21 Bridge Semiconductor Corporation Thermally enhanced interconnect substrate with embedded semiconductor device and built-in stopper and method of making the same
KR20150072415A (en) 2012-10-09 2015-06-29 엠씨10, 인크 Conformal electronics integrated with apparel
US9171794B2 (en) * 2012-10-09 2015-10-27 Mc10, Inc. Embedding thin chips in polymer
US8766453B2 (en) 2012-10-25 2014-07-01 Freescale Semiconductor, Inc. Packaged integrated circuit having large solder pads and method for forming
US10096534B2 (en) 2012-11-09 2018-10-09 Nvidia Corporation Thermal performance of logic chip in a package-on-package structure
US8754521B1 (en) 2013-03-13 2014-06-17 Freescale Semiconductor, Inc. Semiconductor device assembly having a heat spreader
US9673131B2 (en) * 2013-04-09 2017-06-06 Intel Corporation Integrated circuit package assemblies including a glass solder mask layer
US9706647B2 (en) 2013-05-14 2017-07-11 Mc10, Inc. Conformal electronics including nested serpentine interconnects
WO2015000596A1 (en) * 2013-07-03 2015-01-08 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Die package with low electromagnetic interference interconnection
JP2015065553A (en) * 2013-09-25 2015-04-09 株式会社東芝 Connection member, semiconductor device, and laminate structure
WO2015077559A1 (en) 2013-11-22 2015-05-28 Mc10, Inc. Conformal sensor systems for sensing and analysis of cardiac activity
CN103730442B (en) * 2013-12-31 2016-06-08 天水华天科技股份有限公司 Band weldering spherical array four limit is without pin package body stack package and preparation method
JP6312527B2 (en) * 2014-05-23 2018-04-18 新日本無線株式会社 Electronic component mounting structure with heat sink
US20160035593A1 (en) * 2014-07-31 2016-02-04 Skyworks Solutions, Inc. Devices and methods related to support for packaging substrate panel having cavities
US9832860B2 (en) 2014-09-26 2017-11-28 Intel Corporation Panel level fabrication of package substrates with integrated stiffeners
USD781270S1 (en) 2014-10-15 2017-03-14 Mc10, Inc. Electronic device having antenna
US9502368B2 (en) 2014-12-16 2016-11-22 Intel Corporation Picture frame stiffeners for microelectronic packages
US9515017B2 (en) * 2014-12-18 2016-12-06 Intel Corporation Ground via clustering for crosstalk mitigation
US10477354B2 (en) 2015-02-20 2019-11-12 Mc10, Inc. Automated detection and configuration of wearable devices based on on-body status, location, and/or orientation
WO2016140793A1 (en) * 2015-03-03 2016-09-09 Intel Corporation Electronic package that includes multi-layer stiffener
CN106158778B (en) * 2015-03-12 2020-07-17 恩智浦美国有限公司 Integrated circuit package with side contact pads and bottom contact pads
JP6620989B2 (en) * 2015-05-25 2019-12-18 パナソニックＩｐマネジメント株式会社 Electronic component package
US9978663B2 (en) * 2015-12-09 2018-05-22 Samsung Display Co., Ltd. Integrated circuit assembly with heat spreader and method of making the same
EP3420732B8 (en) 2016-02-22 2020-12-30 Medidata Solutions, Inc. System, devices, and method for on-body data and power transmission
CN108781313B (en) 2016-02-22 2022-04-08 美谛达解决方案公司 System, apparatus and method for a coupled hub and sensor node to obtain sensor information on-body
EP3445230B1 (en) 2016-04-19 2024-03-13 Medidata Solutions, Inc. Method and system for measuring perspiration
CN107424974A (en) * 2016-05-24 2017-12-01 胡迪群 Package substrate with flush type noise shielding wall
WO2018031457A1 (en) * 2016-08-08 2018-02-15 Invensas Corporation Warpage balancing in thin packages
US10447347B2 (en) 2016-08-12 2019-10-15 Mc10, Inc. Wireless charger and high speed data off-loader
CN106374208B (en) * 2016-10-09 2019-06-18 华进半导体封装先导技术研发中心有限公司 High bandwidth organic substrate antenna structure and production method
US10438882B2 (en) * 2017-03-29 2019-10-08 Intel Corporation Integrated circuit package with microstrip routing and an external ground plane
CN109148397B (en) * 2017-06-16 2023-02-28 日月光半导体制造股份有限公司 Semiconductor device package
US10410940B2 (en) * 2017-06-30 2019-09-10 Intel Corporation Semiconductor package with cavity
US10269678B1 (en) 2017-12-05 2019-04-23 Nxp Usa, Inc. Microelectronic components having integrated heat dissipation posts, systems including the same, and methods for the fabrication thereof
US10440813B1 (en) 2018-06-28 2019-10-08 Nxp Usa, Inc. Microelectronic modules including thermal extension levels and methods for the fabrication thereof
KR102577265B1 (en) * 2018-12-06 2023-09-11 삼성전자주식회사 Semiconductor package
CN110446368A (en) * 2019-07-23 2019-11-12 中国科学技术大学 Bonding structure, bonding method and the Package boxes comprising the bonding structure
CN110446369A (en) * 2019-07-23 2019-11-12 中国科学技术大学 Bonding structure, bonding method and the Package boxes comprising the bonding structure
US11769752B2 (en) * 2020-07-24 2023-09-26 Micron Technology, Inc. Stacked semiconductor die assemblies with substrate heat sinks and associated systems and methods

Citations (97)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US113284A (en) * 1871-04-04 Improvement in water and wind wheels
US3790866A (en) * 1973-05-14 1974-02-05 Gen Motors Corp Semiconductor device enclosure and method of making same
US4611238A (en) * 1982-05-05 1986-09-09 Burroughs Corporation Integrated circuit package incorporating low-stress omnidirectional heat sink
US5045921A (en) * 1989-12-26 1991-09-03 Motorola, Inc. Pad array carrier IC device using flexible tape
US5208504A (en) * 1990-12-28 1993-05-04 Raytheon Company Saw device and method of manufacture
US5216278A (en) * 1990-12-04 1993-06-01 Motorola, Inc. Semiconductor device having a pad array carrier package
US5285352A (en) * 1992-07-15 1994-02-08 Motorola, Inc. Pad array semiconductor device with thermal conductor and process for making the same
US5291062A (en) * 1993-03-01 1994-03-01 Motorola, Inc. Area array semiconductor device having a lid with functional contacts
US5294826A (en) * 1993-04-16 1994-03-15 Northern Telecom Limited Integrated circuit package and assembly thereof for thermal and EMI management
US5394009A (en) * 1993-07-30 1995-02-28 Sun Microsystems, Inc. Tab semiconductor package with cushioned land grid array outer lead bumps
US5397921A (en) * 1993-09-03 1995-03-14 Advanced Semiconductor Assembly Technology Tab grid array
US5397917A (en) * 1993-04-26 1995-03-14 Motorola, Inc. Semiconductor package capable of spreading heat
US5433631A (en) * 1993-01-26 1995-07-18 International Business Machines Corporation Flex circuit card elastomeric cable connector assembly
US5438216A (en) * 1992-08-31 1995-08-01 Motorola, Inc. Light erasable multichip module
US5490324A (en) * 1993-09-15 1996-02-13 Lsi Logic Corporation Method of making integrated circuit package having multiple bonding tiers
US5534467A (en) * 1993-03-18 1996-07-09 Lsi Logic Corporation Semiconductor packages for high I/O semiconductor dies
US5541450A (en) * 1994-11-02 1996-07-30 Motorola, Inc. Low-profile ball-grid array semiconductor package
US5552635A (en) * 1994-01-11 1996-09-03 Samsung Electronics Co., Ltd. High thermal emissive semiconductor device package
US5642261A (en) * 1993-12-20 1997-06-24 Sgs-Thomson Microelectronics, Inc. Ball-grid-array integrated circuit package with solder-connected thermal conductor
US5648679A (en) * 1994-09-16 1997-07-15 National Semiconductor Corporation Tape ball lead integrated circuit package
US5650659A (en) * 1995-08-04 1997-07-22 National Semiconductor Corporation Semiconductor component package assembly including an integral RF/EMI shield
US5650662A (en) * 1993-08-17 1997-07-22 Edwards; Steven F. Direct bonded heat spreader
US5717252A (en) * 1994-07-25 1998-02-10 Mitsui High-Tec, Inc. Solder-ball connected semiconductor device with a recessed chip mounting area
US5736785A (en) * 1996-12-20 1998-04-07 Industrial Technology Research Institute Semiconductor package for improving the capability of spreading heat
US5744863A (en) * 1994-07-11 1998-04-28 International Business Machines Corporation Chip carrier modules with heat sinks attached by flexible-epoxy
US5796170A (en) * 1996-02-15 1998-08-18 Northern Telecom Limited Ball grid array (BGA) integrated circuit packages
US5798909A (en) * 1995-02-15 1998-08-25 International Business Machines Corporation Single-tiered organic chip carriers for wire bond-type chips
US5801432A (en) * 1992-06-04 1998-09-01 Lsi Logic Corporation Electronic system using multi-layer tab tape semiconductor device having distinct signal, power and ground planes
US5856911A (en) * 1996-11-12 1999-01-05 National Semiconductor Corporation Attachment assembly for integrated circuits
US5866949A (en) * 1996-12-02 1999-02-02 Minnesota Mining And Manufacturing Company Chip scale ball grid array for integrated circuit packaging
US5883430A (en) * 1996-06-19 1999-03-16 International Business Machines Corporation Thermally enhanced flip chip package
US5889324A (en) * 1998-03-30 1999-03-30 Nec Corporation Package for a semiconductor device
US5889321A (en) * 1997-06-17 1999-03-30 International Business Machines Corporation Stiffeners with improved adhesion to flexible substrates
US5894410A (en) * 1996-03-28 1999-04-13 Intel Corporation Perimeter matrix ball grid array circuit package with a populated center
US5895967A (en) * 1997-07-07 1999-04-20 Texas Instruments Incorporated Ball grid array package having a deformable metal layer and method
US5901041A (en) * 1997-12-02 1999-05-04 Northern Telecom Limited Flexible integrated circuit package
US5903052A (en) * 1998-05-12 1999-05-11 Industrial Technology Research Institute Structure for semiconductor package for improving the efficiency of spreading heat
US5905633A (en) * 1996-02-29 1999-05-18 Anam Semiconductor Inc. Ball grid array semiconductor package using a metal carrier ring as a heat spreader
US5907189A (en) * 1997-05-29 1999-05-25 Lsi Logic Corporation Conformal diamond coating for thermal improvement of electronic packages
US5907903A (en) * 1996-05-24 1999-06-01 International Business Machines Corporation Multi-layer-multi-chip pyramid and circuit board structure and method of forming same
US5920117A (en) * 1994-08-02 1999-07-06 Fujitsu Limited Semiconductor device and method of forming the device
US5949137A (en) * 1997-09-26 1999-09-07 Lsi Logic Corporation Stiffener ring and heat spreader for use with flip chip packaging assemblies
US5953589A (en) * 1996-12-30 1999-09-14 Anam Semiconductor Inc. Ball grid array semiconductor package with solder balls fused on printed circuit board and method for fabricating the same
US6011304A (en) * 1997-05-05 2000-01-04 Lsi Logic Corporation Stiffener ring attachment with holes and removable snap-in heat sink or heat spreader/lid
US6011694A (en) * 1996-08-01 2000-01-04 Fuji Machinery Mfg. & Electronics Co., Ltd. Ball grid array semiconductor package with solder ball openings in an insulative base
US6020637A (en) * 1997-05-07 2000-02-01 Signetics Kp Co., Ltd. Ball grid array semiconductor package
US6028358A (en) * 1996-05-30 2000-02-22 Nec Corporation Package for a semiconductor device and a semiconductor device
US6034427A (en) * 1998-01-28 2000-03-07 Prolinx Labs Corporation Ball grid array structure and method for packaging an integrated circuit chip
US6040984A (en) * 1996-02-27 2000-03-21 Fuji Machinery Mfg. & Electronics Co., Ltd. Printed circuit board with opposed bonding shelves for semiconductor chip wire bonding at different levels
US6057601A (en) * 1998-11-27 2000-05-02 Express Packaging Systems, Inc. Heat spreader with a placement recess and bottom saw-teeth for connection to ground planes on a thin two-sided single-core BGA substrate
US6060777A (en) * 1998-07-21 2000-05-09 Intel Corporation Underside heat slug for ball grid array packages
US6064111A (en) * 1996-07-31 2000-05-16 Hitachi Company, Ltd. Substrate for holding a chip of semi-conductor package, semi-conductor package, and fabrication process of semi-conductor package
US6069407A (en) * 1998-11-18 2000-05-30 Vlsi Technology, Inc. BGA package using PCB and tape in a die-up configuration
US6077724A (en) * 1998-09-05 2000-06-20 First International Computer Inc. Multi-chips semiconductor package and fabrication method
US6084777A (en) * 1997-04-23 2000-07-04 Texas Instruments Incorporated Ball grid array package
US6084297A (en) * 1998-09-03 2000-07-04 Micron Technology, Inc. Cavity ball grid array apparatus
US6114761A (en) * 1998-01-20 2000-09-05 Lsi Logic Corporation Thermally-enhanced flip chip IC package with extruded heatspreader
US6117797A (en) * 1998-09-03 2000-09-12 Micron Technology, Inc. Attachment method for heat sinks and devices involving removal of misplaced encapsulant
US6184580B1 (en) * 1999-09-10 2001-02-06 Siliconware Precision Industries Co., Ltd. Ball grid array package with conductive leads
US6201300B1 (en) * 1998-04-22 2001-03-13 World Wiser Electronics Inc. Printed circuit board with thermal conductive structure
US6207467B1 (en) * 1999-08-17 2001-03-27 Micron Technology, Inc. Multi-chip module with stacked dice
US6212070B1 (en) * 1996-07-22 2001-04-03 International Business Machines Corporation Zero force heat sink
US20010001505A1 (en) * 1998-10-14 2001-05-24 3M Innovative Properties Company Tape ball grid array with interconnected ground plane
US6242279B1 (en) * 1999-06-14 2001-06-05 Thin Film Module, Inc. High density wire bond BGA
US6246111B1 (en) * 2000-01-25 2001-06-12 Siliconware Precision Industries Co., Ltd. Universal lead frame type of quad flat non-lead package of semiconductor
US6278613B1 (en) * 2000-09-27 2001-08-21 St Assembly Test Services Pte Ltd Copper pads for heat spreader attach
US6347037B2 (en) * 1994-04-28 2002-02-12 Fujitsu Limited Semiconductor device and method of forming the same
US6362525B1 (en) * 1999-11-09 2002-03-26 Cypress Semiconductor Corp. Circuit structure including a passive element formed within a grid array substrate and method for making the same
US6365980B1 (en) * 1999-02-26 2002-04-02 Texas Instruments Incorporated Thermally enhanced semiconductor ball grid array device and method of fabrication
US6369455B1 (en) * 2000-01-04 2002-04-09 Siliconware Precision Industries Co., Ltd. Externally-embedded heat-dissipating device for ball grid array integrated circuit package
US6380623B1 (en) * 1999-10-15 2002-04-30 Hughes Electronics Corporation Microcircuit assembly having dual-path grounding and negative self-bias
US20020053731A1 (en) * 2000-11-08 2002-05-09 Shin-Hua Chao Structure and package of a heat spreader substrate
US20020072214A1 (en) * 1998-10-28 2002-06-13 Seiko Epson Corporation Semiconductor device and method of fabrication thereof, circuit board, and electronic equipment
US20020079572A1 (en) * 2000-12-22 2002-06-27 Khan Reza-Ur Rahman Enhanced die-up ball grid array and method for making the same
US20020079562A1 (en) * 2000-12-22 2002-06-27 Broadcom Corporation Enhanced die-up ball grid array packages and method for making the same
US20020098617A1 (en) * 2001-01-20 2002-07-25 Ming-Xun Lee CD BGA package and a fabrication method thereof
US20020096767A1 (en) * 2001-01-25 2002-07-25 Cote Kevin J. Cavity down ball grid array package with EMI shielding and reduced thermal resistance
US20020109226A1 (en) * 2001-02-15 2002-08-15 Broadcom Corporation Enhanced die-down ball grid array and method for making the same
US6525942B2 (en) * 2000-09-19 2003-02-25 Siliconware Precision Industries Co., Ltd. Heat dissipation ball grid array package
US6528892B2 (en) * 2001-06-05 2003-03-04 International Business Machines Corporation Land grid array stiffener use with flexible chip carriers
US6528869B1 (en) * 2001-04-06 2003-03-04 Amkor Technology, Inc. Semiconductor package with molded substrate and recessed input/output terminals
US20030057550A1 (en) * 2000-12-22 2003-03-27 Broadcom Corporation Ball grid array package enhanced with a thermal and electrical connector
US6541832B2 (en) * 2000-01-31 2003-04-01 Texas Instruments Incorporated Plastic package for micromechanical devices
US6552266B2 (en) * 1998-03-11 2003-04-22 International Business Machines Corporation High performance chip packaging and method
US6552428B1 (en) * 1998-10-12 2003-04-22 Siliconware Precision Industries Co., Ltd. Semiconductor package having an exposed heat spreader
US6552430B1 (en) * 2002-01-30 2003-04-22 Texas Instruments Incorporated Ball grid array substrate with improved traces formed from copper based metal
US6563712B2 (en) * 1999-07-30 2003-05-13 Micron Technology, Inc. Heak sink chip package
US20030111726A1 (en) * 2001-12-18 2003-06-19 Khan Reza-Ur Rahman Ball grid array package substrates and method of making the same
US6583516B2 (en) * 1998-03-23 2003-06-24 Seiko Epson Corporation Semiconductor device and method of manufacturing the same, circuit board, and electronic instrument
US20030138613A1 (en) * 2002-01-24 2003-07-24 Steve Thoman Lightweight thermal heat transfer apparatus
US6602732B2 (en) * 2000-01-14 2003-08-05 Computech International Ventures Limited Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate
US20030146509A1 (en) * 2002-02-01 2003-08-07 Broadcom Corporation Ball grid array package with separated stiffener layer
US20030146506A1 (en) * 2002-02-01 2003-08-07 Broadcom Corporation Ball grid array package fabrication with IC die support structures
US20030146511A1 (en) * 2002-02-01 2003-08-07 Broadcom Corporation Ball grid array package with multiple interposers
US20030146503A1 (en) * 2002-02-01 2003-08-07 Broadcom Corporation Ball grid array package with stepped stiffener layer
US6724080B1 (en) * 2002-12-20 2004-04-20 Altera Corporation Heat sink with elevated heat spreader lid
US6724171B2 (en) * 2001-10-23 2004-04-20 Primax Electronics Ltd. Movable plug-head charger

Family Cites Families (82)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US138613A (en) * 1873-05-06 Improvement in the methods of engraving bank-not plates
US706102A (en) * 1901-07-09 1902-08-05 Pendleton Tapscott Company Centrifugal grinding-mill.
JPH0724287B2 (en) 1987-02-12 1995-03-15 三菱電機株式会社 Semiconductor device having light transmitting window and method of manufacturing the same
US5065281A (en) 1990-02-12 1991-11-12 Rogers Corporation Molded integrated circuit package incorporating heat sink
US5173766A (en) * 1990-06-25 1992-12-22 Lsi Logic Corporation Semiconductor device package and method of making such a package
WO1992005583A1 (en) 1990-09-19 1992-04-02 Fujitsu Limited Semiconductor device having many lead pins
JPH04259520A (en) 1991-02-13 1992-09-16 Nippon Steel Corp Resin mold and flexible tape
JPH05203522A (en) 1992-01-23 1993-08-10 Mitsubishi Electric Corp Pressure sensor for molded package semiconductor and manufacture thereof
JP3322429B2 (en) 1992-06-04 2002-09-09 新光電気工業株式会社 Semiconductor device
US5583377A (en) 1992-07-15 1996-12-10 Motorola, Inc. Pad array semiconductor device having a heat sink with die receiving cavity
US5394865A (en) * 1992-12-28 1995-03-07 Salerno; Albert Fiber-view lighted stylet
KR960009089B1 (en) 1993-03-04 1996-07-10 문정환 Mold for package molding and plastic charge-coupled device and the manufacturing method using the mold
US6326678B1 (en) * 1993-09-03 2001-12-04 Asat, Limited Molded plastic package with heat sink and enhanced electrical performance
US5366589A (en) 1993-11-16 1994-11-22 Motorola, Inc. Bonding pad with circular exposed area and method thereof
US5772451A (en) * 1993-11-16 1998-06-30 Form Factor, Inc. Sockets for electronic components and methods of connecting to electronic components
KR970005706B1 (en) 1994-01-24 1997-04-19 금성일렉트론 주식회사 Ccd and the manufacturing method
EP1213756A3 (en) 1994-03-18 2005-05-25 Hitachi Chemical Co., Ltd. Fabrication process of semiconductor package and semiconductor package
US5578869A (en) 1994-03-29 1996-11-26 Olin Corporation Components for housing an integrated circuit device
EP0683517B1 (en) 1994-05-09 2002-07-24 Nec Corporation Semiconductor device having semiconductor chip bonded to circuit board through bumps and process of mounting thereof
US5583378A (en) 1994-05-16 1996-12-10 Amkor Electronics, Inc. Ball grid array integrated circuit package with thermal conductor
US5741729A (en) * 1994-07-11 1998-04-21 Sun Microsystems, Inc. Ball grid array package for an integrated circuit
US5610442A (en) * 1995-03-27 1997-03-11 Lsi Logic Corporation Semiconductor device package fabrication method and apparatus
US5572405A (en) 1995-06-07 1996-11-05 International Business Machines Corporation (Ibm) Thermally enhanced ball grid array package
US5844168A (en) 1995-08-01 1998-12-01 Minnesota Mining And Manufacturing Company Multi-layer interconnect sutructure for ball grid arrays
US5691567A (en) 1995-09-19 1997-11-25 National Semiconductor Corporation Structure for attaching a lead frame to a heat spreader/heat slug structure
US5843808A (en) 1996-01-11 1998-12-01 Asat, Limited Structure and method for automated assembly of a tab grid array package
US5986340A (en) * 1996-05-02 1999-11-16 National Semiconductor Corporation Ball grid array package with enhanced thermal and electrical characteristics and electronic device incorporating same
NL1003315C2 (en) 1996-06-11 1997-12-17 Europ Semiconductor Assembly E Method for encapsulating an integrated semiconductor circuit.
JP2828053B2 (en) 1996-08-15 1998-11-25 日本電気株式会社 Semiconductor device
US6002147A (en) 1996-09-26 1999-12-14 Samsung Electronics Company Hybrid microwave-frequency integrated circuit
JPH10163386A (en) * 1996-12-03 1998-06-19 Toshiba Corp Semiconductor device, semiconductor package and mounting circuit device
US5948991A (en) 1996-12-09 1999-09-07 Denso Corporation Semiconductor physical quantity sensor device having semiconductor sensor chip integrated with semiconductor circuit chip
US6020221A (en) * 1996-12-12 2000-02-01 Lsi Logic Corporation Process for manufacturing a semiconductor device having a stiffener member
US6097098A (en) 1997-02-14 2000-08-01 Micron Technology, Inc. Die interconnections using intermediate connection elements secured to the die face
US5986885A (en) 1997-04-08 1999-11-16 Integrated Device Technology, Inc. Semiconductor package with internal heatsink and assembly method
US6617193B1 (en) * 1997-04-30 2003-09-09 Hitachi Chemical Company, Ltd. Semiconductor device, semiconductor device substrate, and methods of fabricating the same
US6160705A (en) 1997-05-09 2000-12-12 Texas Instruments Incorporated Ball grid array package and method using enhanced power and ground distribution circuitry
KR100330652B1 (en) 1997-06-23 2002-03-29 사토 게니치로 Ic module and ic card
JPH1131751A (en) 1997-07-10 1999-02-02 Sony Corp Hollow package and manufacture thereof
US5972734A (en) 1997-09-17 1999-10-26 Lsi Logic Corporation Interposer for ball grid array (BGA) package
US5835355A (en) 1997-09-22 1998-11-10 Lsi Logic Corporation Tape ball grid array package with perforated metal stiffener
US6166434A (en) 1997-09-23 2000-12-26 Lsi Logic Corporation Die clip assembly for semiconductor package
JP3460533B2 (en) * 1997-09-26 2003-10-27 日立電線株式会社 BGA type semiconductor device
US6145365A (en) 1997-09-29 2000-11-14 Nakamura Seisakusho Kabushikigaisha Method for forming a recess portion on a metal plate
JP3462979B2 (en) * 1997-12-01 2003-11-05 株式会社東芝 Semiconductor device
JP3087709B2 (en) 1997-12-08 2000-09-11 日本電気株式会社 Semiconductor device and manufacturing method thereof
US6111313A (en) * 1998-01-12 2000-08-29 Lsi Logic Corporation Integrated circuit package having a stiffener dimensioned to receive heat transferred laterally from the integrated circuit
JP3097653B2 (en) * 1998-04-17 2000-10-10 日本電気株式会社 Semiconductor device package and method of manufacturing the same
US6140707A (en) 1998-05-07 2000-10-31 3M Innovative Properties Co. Laminated integrated circuit package
US6002169A (en) 1998-06-15 1999-12-14 Lsi Logic Corporation Thermally enhanced tape ball grid array package
US5977626A (en) 1998-08-12 1999-11-02 Industrial Technology Research Institute Thermally and electrically enhanced PBGA package
TW383908U (en) 1998-09-22 2000-03-01 Caesar Technology Inc Structure used for increasing heat-dissipation of micro-electronic apparatus
JP2000138262A (en) 1998-10-31 2000-05-16 Anam Semiconductor Inc Chip-scale semiconductor package and manufacture thereof
US6313521B1 (en) 1998-11-04 2001-11-06 Nec Corporation Semiconductor device and method of manufacturing the same
JP2000150730A (en) 1998-11-17 2000-05-30 Fujitsu Ltd Semiconductor device and its manufacture
US5999415A (en) 1998-11-18 1999-12-07 Vlsi Technology, Inc. BGA package using PCB and tape in a die-down configuration
US5982621A (en) 1998-11-23 1999-11-09 Caesar Technology Inc. Electronic device cooling arrangement
US6162659A (en) 1999-03-05 2000-12-19 International Business Machines Corporation Method for manufacturing a package structure having a heat spreader for integrated circuit chips
JP2000286294A (en) 1999-03-30 2000-10-13 Hitachi Ltd Semiconductor device and its manufacture
US6133064A (en) 1999-05-27 2000-10-17 Lsi Logic Corporation Flip chip ball grid array package with laminated substrate
TW417219B (en) 1999-07-22 2001-01-01 Siliconware Precision Industries Co Ltd Ball grid array package having leads
US6294839B1 (en) * 1999-08-30 2001-09-25 Micron Technology, Inc. Apparatus and methods of packaging and testing die
US6331451B1 (en) * 1999-11-05 2001-12-18 Amkor Technology, Inc. Methods of making thin integrated circuit device packages with improved thermal performance and substrates for making the packages
US6163458A (en) 1999-12-03 2000-12-19 Caesar Technology, Inc. Heat spreader for ball grid array package
DE29922576U1 (en) 1999-12-22 2000-03-16 Orient Semiconductor Elect Ltd Heat sink of a plastic ball grid matrix on an IC chip surface
US6559525B2 (en) 2000-01-13 2003-05-06 Siliconware Precision Industries Co., Ltd. Semiconductor package having heat sink at the outer surface
TW592349U (en) * 2001-09-04 2004-06-11 Cheng-Chun Chang Removable box with IDE interface and USB interface for computer
AU2002217987A1 (en) * 2000-12-01 2002-06-11 Broadcom Corporation Thermally and electrically enhanced ball grid array packaging
US6664617B2 (en) * 2000-12-19 2003-12-16 Convergence Technologies, Ltd. Semiconductor package
US6906414B2 (en) * 2000-12-22 2005-06-14 Broadcom Corporation Ball grid array package with patterned stiffener layer
US7259448B2 (en) * 2001-05-07 2007-08-21 Broadcom Corporation Die-up ball grid array package with a heat spreader and method for making the same
US6537848B2 (en) 2001-05-30 2003-03-25 St. Assembly Test Services Ltd. Super thin/super thermal ball grid array package
US6472741B1 (en) 2001-07-14 2002-10-29 Siliconware Precision Industries Co., Ltd. Thermally-enhanced stacked-die ball grid array semiconductor package and method of fabricating the same
US20020188717A1 (en) * 2001-06-08 2002-12-12 International Business Machines Corporation Method and apparatus for modeling the performance of Web page retrieval
US7061102B2 (en) * 2001-06-11 2006-06-13 Xilinx, Inc. High performance flipchip package that incorporates heat removal with minimal thermal mismatch
US6657870B1 (en) * 2001-10-01 2003-12-02 Lsi Logic Corporation Die power distribution system
US6876553B2 (en) * 2002-03-21 2005-04-05 Broadcom Corporation Enhanced die-up ball grid array package with two substrates
US7196415B2 (en) * 2002-03-22 2007-03-27 Broadcom Corporation Low voltage drop and high thermal performance ball grid array package
US6614660B1 (en) * 2002-04-30 2003-09-02 Ultratera Corporation Thermally enhanced IC chip package
US6586834B1 (en) * 2002-06-17 2003-07-01 Asat Ltd. Die-up tape ball grid array package
US7786591B2 (en) * 2004-09-29 2010-08-31 Broadcom Corporation Die down ball grid array package
JP2008066603A (en) * 2006-09-08 2008-03-21 Toshiba Corp Semiconductor memory device and its manufacturing method

Patent Citations (99)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US113284A (en) * 1871-04-04 Improvement in water and wind wheels
US3790866A (en) * 1973-05-14 1974-02-05 Gen Motors Corp Semiconductor device enclosure and method of making same
US4611238A (en) * 1982-05-05 1986-09-09 Burroughs Corporation Integrated circuit package incorporating low-stress omnidirectional heat sink
US5045921A (en) * 1989-12-26 1991-09-03 Motorola, Inc. Pad array carrier IC device using flexible tape
US5216278A (en) * 1990-12-04 1993-06-01 Motorola, Inc. Semiconductor device having a pad array carrier package
US5208504A (en) * 1990-12-28 1993-05-04 Raytheon Company Saw device and method of manufacture
US5801432A (en) * 1992-06-04 1998-09-01 Lsi Logic Corporation Electronic system using multi-layer tab tape semiconductor device having distinct signal, power and ground planes
US5285352A (en) * 1992-07-15 1994-02-08 Motorola, Inc. Pad array semiconductor device with thermal conductor and process for making the same
US5438216A (en) * 1992-08-31 1995-08-01 Motorola, Inc. Light erasable multichip module
US5433631A (en) * 1993-01-26 1995-07-18 International Business Machines Corporation Flex circuit card elastomeric cable connector assembly
US5291062A (en) * 1993-03-01 1994-03-01 Motorola, Inc. Area array semiconductor device having a lid with functional contacts
US5534467A (en) * 1993-03-18 1996-07-09 Lsi Logic Corporation Semiconductor packages for high I/O semiconductor dies
US5294826A (en) * 1993-04-16 1994-03-15 Northern Telecom Limited Integrated circuit package and assembly thereof for thermal and EMI management
US5397917A (en) * 1993-04-26 1995-03-14 Motorola, Inc. Semiconductor package capable of spreading heat
US5394009A (en) * 1993-07-30 1995-02-28 Sun Microsystems, Inc. Tab semiconductor package with cushioned land grid array outer lead bumps
US5650662A (en) * 1993-08-17 1997-07-22 Edwards; Steven F. Direct bonded heat spreader
US5397921A (en) * 1993-09-03 1995-03-14 Advanced Semiconductor Assembly Technology Tab grid array
US5409865A (en) * 1993-09-03 1995-04-25 Advanced Semiconductor Assembly Technology Process for assembling a TAB grid array package for an integrated circuit
US5490324A (en) * 1993-09-15 1996-02-13 Lsi Logic Corporation Method of making integrated circuit package having multiple bonding tiers
US5642261A (en) * 1993-12-20 1997-06-24 Sgs-Thomson Microelectronics, Inc. Ball-grid-array integrated circuit package with solder-connected thermal conductor
US5552635A (en) * 1994-01-11 1996-09-03 Samsung Electronics Co., Ltd. High thermal emissive semiconductor device package
US6347037B2 (en) * 1994-04-28 2002-02-12 Fujitsu Limited Semiconductor device and method of forming the same
US5744863A (en) * 1994-07-11 1998-04-28 International Business Machines Corporation Chip carrier modules with heat sinks attached by flexible-epoxy
US5717252A (en) * 1994-07-25 1998-02-10 Mitsui High-Tec, Inc. Solder-ball connected semiconductor device with a recessed chip mounting area
US5920117A (en) * 1994-08-02 1999-07-06 Fujitsu Limited Semiconductor device and method of forming the device
US5648679A (en) * 1994-09-16 1997-07-15 National Semiconductor Corporation Tape ball lead integrated circuit package
US5541450A (en) * 1994-11-02 1996-07-30 Motorola, Inc. Low-profile ball-grid array semiconductor package
US5798909A (en) * 1995-02-15 1998-08-25 International Business Machines Corporation Single-tiered organic chip carriers for wire bond-type chips
US5650659A (en) * 1995-08-04 1997-07-22 National Semiconductor Corporation Semiconductor component package assembly including an integral RF/EMI shield
US5796170A (en) * 1996-02-15 1998-08-18 Northern Telecom Limited Ball grid array (BGA) integrated circuit packages
US6040984A (en) * 1996-02-27 2000-03-21 Fuji Machinery Mfg. & Electronics Co., Ltd. Printed circuit board with opposed bonding shelves for semiconductor chip wire bonding at different levels
US5905633A (en) * 1996-02-29 1999-05-18 Anam Semiconductor Inc. Ball grid array semiconductor package using a metal carrier ring as a heat spreader
US5894410A (en) * 1996-03-28 1999-04-13 Intel Corporation Perimeter matrix ball grid array circuit package with a populated center
US5907903A (en) * 1996-05-24 1999-06-01 International Business Machines Corporation Multi-layer-multi-chip pyramid and circuit board structure and method of forming same
US6028358A (en) * 1996-05-30 2000-02-22 Nec Corporation Package for a semiconductor device and a semiconductor device
US5883430A (en) * 1996-06-19 1999-03-16 International Business Machines Corporation Thermally enhanced flip chip package
US6212070B1 (en) * 1996-07-22 2001-04-03 International Business Machines Corporation Zero force heat sink
US6064111A (en) * 1996-07-31 2000-05-16 Hitachi Company, Ltd. Substrate for holding a chip of semi-conductor package, semi-conductor package, and fabrication process of semi-conductor package
US6011694A (en) * 1996-08-01 2000-01-04 Fuji Machinery Mfg. & Electronics Co., Ltd. Ball grid array semiconductor package with solder ball openings in an insulative base
US5856911A (en) * 1996-11-12 1999-01-05 National Semiconductor Corporation Attachment assembly for integrated circuits
US5866949A (en) * 1996-12-02 1999-02-02 Minnesota Mining And Manufacturing Company Chip scale ball grid array for integrated circuit packaging
US5736785A (en) * 1996-12-20 1998-04-07 Industrial Technology Research Institute Semiconductor package for improving the capability of spreading heat
US5953589A (en) * 1996-12-30 1999-09-14 Anam Semiconductor Inc. Ball grid array semiconductor package with solder balls fused on printed circuit board and method for fabricating the same
US6084777A (en) * 1997-04-23 2000-07-04 Texas Instruments Incorporated Ball grid array package
US6011304A (en) * 1997-05-05 2000-01-04 Lsi Logic Corporation Stiffener ring attachment with holes and removable snap-in heat sink or heat spreader/lid
US6020637A (en) * 1997-05-07 2000-02-01 Signetics Kp Co., Ltd. Ball grid array semiconductor package
US5907189A (en) * 1997-05-29 1999-05-25 Lsi Logic Corporation Conformal diamond coating for thermal improvement of electronic packages
US5889321A (en) * 1997-06-17 1999-03-30 International Business Machines Corporation Stiffeners with improved adhesion to flexible substrates
US5895967A (en) * 1997-07-07 1999-04-20 Texas Instruments Incorporated Ball grid array package having a deformable metal layer and method
US5949137A (en) * 1997-09-26 1999-09-07 Lsi Logic Corporation Stiffener ring and heat spreader for use with flip chip packaging assemblies
US5901041A (en) * 1997-12-02 1999-05-04 Northern Telecom Limited Flexible integrated circuit package
US6114761A (en) * 1998-01-20 2000-09-05 Lsi Logic Corporation Thermally-enhanced flip chip IC package with extruded heatspreader
US6034427A (en) * 1998-01-28 2000-03-07 Prolinx Labs Corporation Ball grid array structure and method for packaging an integrated circuit chip
US6552266B2 (en) * 1998-03-11 2003-04-22 International Business Machines Corporation High performance chip packaging and method
US6583516B2 (en) * 1998-03-23 2003-06-24 Seiko Epson Corporation Semiconductor device and method of manufacturing the same, circuit board, and electronic instrument
US5889324A (en) * 1998-03-30 1999-03-30 Nec Corporation Package for a semiconductor device
US6201300B1 (en) * 1998-04-22 2001-03-13 World Wiser Electronics Inc. Printed circuit board with thermal conductive structure
US5903052A (en) * 1998-05-12 1999-05-11 Industrial Technology Research Institute Structure for semiconductor package for improving the efficiency of spreading heat
US6060777A (en) * 1998-07-21 2000-05-09 Intel Corporation Underside heat slug for ball grid array packages
US6545351B1 (en) * 1998-07-21 2003-04-08 Intel Corporation Underside heat slug for ball grid array packages
US6117797A (en) * 1998-09-03 2000-09-12 Micron Technology, Inc. Attachment method for heat sinks and devices involving removal of misplaced encapsulant
US6084297A (en) * 1998-09-03 2000-07-04 Micron Technology, Inc. Cavity ball grid array apparatus
US6077724A (en) * 1998-09-05 2000-06-20 First International Computer Inc. Multi-chips semiconductor package and fabrication method
US6552428B1 (en) * 1998-10-12 2003-04-22 Siliconware Precision Industries Co., Ltd. Semiconductor package having an exposed heat spreader
US20010001505A1 (en) * 1998-10-14 2001-05-24 3M Innovative Properties Company Tape ball grid array with interconnected ground plane
US20020072214A1 (en) * 1998-10-28 2002-06-13 Seiko Epson Corporation Semiconductor device and method of fabrication thereof, circuit board, and electronic equipment
US6069407A (en) * 1998-11-18 2000-05-30 Vlsi Technology, Inc. BGA package using PCB and tape in a die-up configuration
US6057601A (en) * 1998-11-27 2000-05-02 Express Packaging Systems, Inc. Heat spreader with a placement recess and bottom saw-teeth for connection to ground planes on a thin two-sided single-core BGA substrate
US6365980B1 (en) * 1999-02-26 2002-04-02 Texas Instruments Incorporated Thermally enhanced semiconductor ball grid array device and method of fabrication
US6242279B1 (en) * 1999-06-14 2001-06-05 Thin Film Module, Inc. High density wire bond BGA
US6563712B2 (en) * 1999-07-30 2003-05-13 Micron Technology, Inc. Heak sink chip package
US6207467B1 (en) * 1999-08-17 2001-03-27 Micron Technology, Inc. Multi-chip module with stacked dice
US6184580B1 (en) * 1999-09-10 2001-02-06 Siliconware Precision Industries Co., Ltd. Ball grid array package with conductive leads
US6380623B1 (en) * 1999-10-15 2002-04-30 Hughes Electronics Corporation Microcircuit assembly having dual-path grounding and negative self-bias
US6362525B1 (en) * 1999-11-09 2002-03-26 Cypress Semiconductor Corp. Circuit structure including a passive element formed within a grid array substrate and method for making the same
US6369455B1 (en) * 2000-01-04 2002-04-09 Siliconware Precision Industries Co., Ltd. Externally-embedded heat-dissipating device for ball grid array integrated circuit package
US6602732B2 (en) * 2000-01-14 2003-08-05 Computech International Ventures Limited Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate
US6246111B1 (en) * 2000-01-25 2001-06-12 Siliconware Precision Industries Co., Ltd. Universal lead frame type of quad flat non-lead package of semiconductor
US6541832B2 (en) * 2000-01-31 2003-04-01 Texas Instruments Incorporated Plastic package for micromechanical devices
US6525942B2 (en) * 2000-09-19 2003-02-25 Siliconware Precision Industries Co., Ltd. Heat dissipation ball grid array package
US6278613B1 (en) * 2000-09-27 2001-08-21 St Assembly Test Services Pte Ltd Copper pads for heat spreader attach
US20020053731A1 (en) * 2000-11-08 2002-05-09 Shin-Hua Chao Structure and package of a heat spreader substrate
US20030057550A1 (en) * 2000-12-22 2003-03-27 Broadcom Corporation Ball grid array package enhanced with a thermal and electrical connector
US20020079572A1 (en) * 2000-12-22 2002-06-27 Khan Reza-Ur Rahman Enhanced die-up ball grid array and method for making the same
US20020079562A1 (en) * 2000-12-22 2002-06-27 Broadcom Corporation Enhanced die-up ball grid array packages and method for making the same
US20020098617A1 (en) * 2001-01-20 2002-07-25 Ming-Xun Lee CD BGA package and a fabrication method thereof
US20020096767A1 (en) * 2001-01-25 2002-07-25 Cote Kevin J. Cavity down ball grid array package with EMI shielding and reduced thermal resistance
US20020109226A1 (en) * 2001-02-15 2002-08-15 Broadcom Corporation Enhanced die-down ball grid array and method for making the same
US6528869B1 (en) * 2001-04-06 2003-03-04 Amkor Technology, Inc. Semiconductor package with molded substrate and recessed input/output terminals
US6528892B2 (en) * 2001-06-05 2003-03-04 International Business Machines Corporation Land grid array stiffener use with flexible chip carriers
US6724171B2 (en) * 2001-10-23 2004-04-20 Primax Electronics Ltd. Movable plug-head charger
US20030111726A1 (en) * 2001-12-18 2003-06-19 Khan Reza-Ur Rahman Ball grid array package substrates and method of making the same
US20030138613A1 (en) * 2002-01-24 2003-07-24 Steve Thoman Lightweight thermal heat transfer apparatus
US6552430B1 (en) * 2002-01-30 2003-04-22 Texas Instruments Incorporated Ball grid array substrate with improved traces formed from copper based metal
US20030146506A1 (en) * 2002-02-01 2003-08-07 Broadcom Corporation Ball grid array package fabrication with IC die support structures
US20030146511A1 (en) * 2002-02-01 2003-08-07 Broadcom Corporation Ball grid array package with multiple interposers
US20030146503A1 (en) * 2002-02-01 2003-08-07 Broadcom Corporation Ball grid array package with stepped stiffener layer
US20030146509A1 (en) * 2002-02-01 2003-08-07 Broadcom Corporation Ball grid array package with separated stiffener layer
US6724080B1 (en) * 2002-12-20 2004-04-20 Altera Corporation Heat sink with elevated heat spreader lid

Cited By (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090203172A1 (en) * 2000-12-22 2009-08-13 Broadcom Corporation Enhanced Die-Up Ball Grid Array and Method for Making the Same
US20090057871A1 (en) * 2000-12-22 2009-03-05 Broadcom Corporation Ball Grid Array Package Enhanced With a Thermal and Electrical Connector
US7893546B2 (en) 2000-12-22 2011-02-22 Broadcom Corporation Ball grid array package enhanced with a thermal and electrical connector
US20110140272A1 (en) * 2000-12-22 2011-06-16 Broadcom Corporation Ball Grid Array Package Enhanced With a Thermal and Electrical Connector
US8310067B2 (en) 2000-12-22 2012-11-13 Broadcom Corporation Ball grid array package enhanced with a thermal and electrical connector
US7781882B2 (en) 2002-03-22 2010-08-24 Broadcom Corporation Low voltage drop and high thermal performance ball grid array package
US20090267222A1 (en) * 2002-03-22 2009-10-29 Broadcom Corporation Low Voltage Drop and High Thermal Performance Ball Grid Array Package
US20070164424A1 (en) * 2003-04-02 2007-07-19 Nancy Dean Thermal interconnect and interface systems, methods of production and uses thereof
US20090294115A1 (en) * 2003-06-06 2009-12-03 Honeywell International Inc. Thermal Interconnect System and Production Thereof
US7719110B2 (en) 2004-11-03 2010-05-18 Broadcom Corporation Flip chip package including a non-planar heat spreader and method of making the same
US20080006934A1 (en) * 2004-11-03 2008-01-10 Broadcom Corporation Flip Chip Package Including a Non-Planar Heat Spreader and Method of Making the Same
US7566591B2 (en) 2005-08-22 2009-07-28 Broadcom Corporation Method and system for secure heat sink attachment on semiconductor devices with macroscopic uneven surface features
US20070040267A1 (en) * 2005-08-22 2007-02-22 Broadcom Corporation Method and system for secure heat sink attachment on semiconductor devices with macroscopic uneven surface features
US7781266B2 (en) 2005-10-20 2010-08-24 Broadcom Corporation Methods and apparatus for improved thermal performance and electromagnetic interference (EMI) shielding in leadframe integrated circuit (IC) packages
US7582951B2 (en) 2005-10-20 2009-09-01 Broadcom Corporation Methods and apparatus for improved thermal performance and electromagnetic interference (EMI) shielding in leadframe integrated circuit (IC) packages
US20070090502A1 (en) * 2005-10-20 2007-04-26 Broadcom Corporation Methods and apparatus for improved thermal performance and electromagnetic interference (EMI) shielding in leadframe integrated circuit (IC) packages
US7372133B2 (en) * 2005-12-01 2008-05-13 Intel Corporation Microelectronic package having a stiffening element and method of making same
US20070126094A1 (en) * 2005-12-01 2007-06-07 Intel Corporation Microelectronic package having a stiffening element and method of making same
US20070273049A1 (en) * 2006-05-12 2007-11-29 Broadcom Corporation Interconnect structure and formation for package stacking of molded plastic area array package
US7714453B2 (en) 2006-05-12 2010-05-11 Broadcom Corporation Interconnect structure and formation for package stacking of molded plastic area array package
US9299634B2 (en) 2006-05-16 2016-03-29 Broadcom Corporation Method and apparatus for cooling semiconductor device hot blocks and large scale integrated circuit (IC) using integrated interposer for IC packages
US8183680B2 (en) 2006-05-16 2012-05-22 Broadcom Corporation No-lead IC packages having integrated heat spreader for electromagnetic interference (EMI) shielding and thermal enhancement
US20070267740A1 (en) * 2006-05-16 2007-11-22 Broadcom Corporation Method and apparatus for cooling semiconductor device hot blocks and large scale integrated circuit (IC) using integrated interposer for IC packages
US20070273023A1 (en) * 2006-05-26 2007-11-29 Broadcom Corporation Integrated circuit package having exposed thermally conducting body
US20070278632A1 (en) * 2006-06-01 2007-12-06 Broadcom Corporation Leadframe IC packages having top and bottom integrated heat spreaders
US7808087B2 (en) 2006-06-01 2010-10-05 Broadcom Corporation Leadframe IC packages having top and bottom integrated heat spreaders
US8581381B2 (en) 2006-06-20 2013-11-12 Broadcom Corporation Integrated circuit (IC) package stacking and IC packages formed by same
US9013035B2 (en) 2006-06-20 2015-04-21 Broadcom Corporation Thermal improvement for hotspots on dies in integrated circuit packages
US20070290322A1 (en) * 2006-06-20 2007-12-20 Broadcom Corporation Thermal improvement for hotspots on dies in integrated circuit packages
WO2008021797A1 (en) * 2006-08-07 2008-02-21 Texas Instruments Incorporated Thermally enhanced bga package apparatus and method
US20080032454A1 (en) * 2006-08-07 2008-02-07 Matthew Romig Thermally Enhanced BGA Package Substrate Structure and Methods
US20080096312A1 (en) * 2006-10-20 2008-04-24 Broadcom Corporation Low profile ball grid array (BGA) package with exposed die and method of making same
US8169067B2 (en) 2006-10-20 2012-05-01 Broadcom Corporation Low profile ball grid array (BGA) package with exposed die and method of making same
US20080211089A1 (en) * 2007-02-16 2008-09-04 Broadcom Corporation Interposer for die stacking in semiconductor packages and the method of making the same
US8183687B2 (en) 2007-02-16 2012-05-22 Broadcom Corporation Interposer for die stacking in semiconductor packages and the method of making the same
US7872335B2 (en) 2007-06-08 2011-01-18 Broadcom Corporation Lead frame-BGA package with enhanced thermal performance and I/O counts
US20080303124A1 (en) * 2007-06-08 2008-12-11 Broadcom Corporation Lead frame-BGA package with enhanced thermal performance and I/O counts
US20110182042A1 (en) * 2007-07-05 2011-07-28 Occam Portfolio Llc Electronic Assemblies without Solder and Methods for their Manufacture
US7432591B1 (en) * 2008-02-28 2008-10-07 International Business Machines Corporation Thermal enhanced plastic ball grid array with heat sink attachment option
US20100283143A1 (en) * 2009-05-06 2010-11-11 Chenglin Liu Die Exposed Chip Package
US20110012240A1 (en) * 2009-07-15 2011-01-20 Chenglin Liu Multi-Connect Lead
CN102738022A (en) * 2011-04-15 2012-10-17 飞思卡尔半导体公司 Method for assembling semiconductor device containing insulating substrate and heat sink
CN102832183A (en) * 2012-09-14 2012-12-19 杰群电子科技（东莞）有限公司 Outer-pin-free flat semiconductor package structure adopting elastic device
CN103594380A (en) * 2013-10-24 2014-02-19 天水华天科技股份有限公司 Manufacturing method for flat-four-side and non-pin package part with soldered ball surface array

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US20020190361A1 (en) 2002-12-19
US20150137343A1 (en) 2015-05-21
US20020190362A1 (en) 2002-12-19
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US20020185720A1 (en) 2002-12-12
US20070045824A1 (en) 2007-03-01
US7579217B2 (en) 2009-08-25
US7227256B2 (en) 2007-06-05
US7005737B2 (en) 2006-02-28
US7859101B2 (en) 2010-12-28
US7102225B2 (en) 2006-09-05
US20020185750A1 (en) 2002-12-12
US20020185734A1 (en) 2002-12-12
US20020185722A1 (en) 2002-12-12
US6989593B2 (en) 2006-01-24
US7038312B2 (en) 2006-05-02
US20020079572A1 (en) 2002-06-27

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