EP0367541A3 - Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof and ink jet apparatus with ink jet head - Google Patents

Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof and ink jet apparatus with ink jet head Download PDF

Info

Publication number
EP0367541A3
EP0367541A3 EP19890311199 EP89311199A EP0367541A3 EP 0367541 A3 EP0367541 A3 EP 0367541A3 EP 19890311199 EP19890311199 EP 19890311199 EP 89311199 A EP89311199 A EP 89311199A EP 0367541 A3 EP0367541 A3 EP 0367541A3
Authority
EP
European Patent Office
Prior art keywords
ink jet
head
manufacturing
jet head
discharge opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19890311199
Other versions
EP0367541B1 (en
EP0367541A2 (en
Inventor
Takashi Watanabe
Kazuaki Masuda
Akira Goto
Hiroshi Kono
Tadashi Kanzaki
Toshio Kashino
Akio Saito
Koyo Midorikawa
Toru Okumura
Masami Ikeda
Nobuyuki Kuwabara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP27579788A external-priority patent/JPH02121842A/en
Priority claimed from JP63275800A external-priority patent/JP2771557B2/en
Priority claimed from JP27579488A external-priority patent/JPH02121843A/en
Priority claimed from JP740989A external-priority patent/JPH02187345A/en
Priority claimed from JP741089A external-priority patent/JP2633943B2/en
Priority claimed from JP1007470A external-priority patent/JP2831368B2/en
Priority claimed from JP1007403A external-priority patent/JP2763563B2/en
Priority claimed from JP918189A external-priority patent/JPH02188255A/en
Priority claimed from JP918489A external-priority patent/JPH02188257A/en
Priority claimed from JP1018079A external-priority patent/JP2764418B2/en
Priority to EP99200740A priority Critical patent/EP0937579B1/en
Priority to ES99200740T priority patent/ES2207908T3/en
Priority to EP94200483A priority patent/EP0602021A2/en
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP0367541A2 publication Critical patent/EP0367541A2/en
Publication of EP0367541A3 publication Critical patent/EP0367541A3/en
Publication of EP0367541B1 publication Critical patent/EP0367541B1/en
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14024—Assembling head parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
EP19890311199 1988-10-31 1989-10-30 Method of manufacturing an ink jet head Expired - Lifetime EP0367541B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP94200483A EP0602021A2 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head
ES99200740T ES2207908T3 (en) 1988-10-31 1989-10-30 HEAD FOR INK JETS AND METHOD FOR THE MANUFACTURING OF THE SAME, PLATE WITH DOWNLOAD OVERS FOR THE HEAD AND ITS METHOD OF MANUFACTURING AND APPARATUS FOR INK JETS WITH HEAD FOR INK JETS.
EP99200740A EP0937579B1 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head

Applications Claiming Priority (20)

Application Number Priority Date Filing Date Title
JP275794/88 1988-10-31
JP275797/88 1988-10-31
JP27579788A JPH02121842A (en) 1988-10-31 1988-10-31 Ink jet recording head and manufacture thereof
JP27579488A JPH02121843A (en) 1988-10-31 1988-10-31 Liquid injection recording head and manufacture thereof
JP63275800A JP2771557B2 (en) 1988-10-31 1988-10-31 Method of manufacturing ink jet recording head
JP275800/88 1988-10-31
JP1007403A JP2763563B2 (en) 1989-01-13 1989-01-13 Method of manufacturing ink jet recording head
JP7410/89 1989-01-13
JP7409/89 1989-01-13
JP1007470A JP2831368B2 (en) 1989-01-13 1989-01-13 Method of manufacturing ejection port forming member for ink jet recording head
JP7470/89 1989-01-13
JP741089A JP2633943B2 (en) 1989-01-13 1989-01-13 Ink jet recording head and method of manufacturing the head
JP740989A JPH02187345A (en) 1989-01-13 1989-01-13 Ink jet recording head and its manufacture
JP7403/89 1989-01-13
JP9184/89 1989-01-18
JP918189A JPH02188255A (en) 1989-01-18 1989-01-18 Production of discharge port plate
JP9181/89 1989-01-18
JP918489A JPH02188257A (en) 1989-01-18 1989-01-18 Production of ink jet head
JP18079/89 1989-01-28
JP1018079A JP2764418B2 (en) 1989-01-28 1989-01-28 Method of manufacturing ink jet recording head and ink jet recording head manufactured by the method

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP94200483.9 Division-Into 1989-10-30

Publications (3)

Publication Number Publication Date
EP0367541A2 EP0367541A2 (en) 1990-05-09
EP0367541A3 true EP0367541A3 (en) 1990-11-14
EP0367541B1 EP0367541B1 (en) 1994-10-05

Family

ID=27579561

Family Applications (3)

Application Number Title Priority Date Filing Date
EP94200483A Withdrawn EP0602021A2 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head
EP19890311199 Expired - Lifetime EP0367541B1 (en) 1988-10-31 1989-10-30 Method of manufacturing an ink jet head
EP99200740A Expired - Lifetime EP0937579B1 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP94200483A Withdrawn EP0602021A2 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP99200740A Expired - Lifetime EP0937579B1 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head

Country Status (3)

Country Link
EP (3) EP0602021A2 (en)
DE (2) DE68918663T2 (en)
ES (2) ES2207908T3 (en)

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GB9010289D0 (en) * 1990-05-08 1990-06-27 Xaar Ltd Drop-on-demand printing apparatus and method of manufacture
CN1067632C (en) * 1990-07-20 2001-06-27 佳能株式会社 Recording apparatus with ink jet recording head
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US5442384A (en) * 1990-08-16 1995-08-15 Hewlett-Packard Company Integrated nozzle member and tab circuit for inkjet printhead
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US5469199A (en) * 1990-08-16 1995-11-21 Hewlett-Packard Company Wide inkjet printhead
US5305015A (en) * 1990-08-16 1994-04-19 Hewlett-Packard Company Laser ablated nozzle member for inkjet printhead
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US5420627A (en) * 1992-04-02 1995-05-30 Hewlett-Packard Company Inkjet printhead
US5450113A (en) * 1992-04-02 1995-09-12 Hewlett-Packard Company Inkjet printhead with improved seal arrangement
US5278584A (en) * 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
US5297331A (en) * 1992-04-03 1994-03-29 Hewlett-Packard Company Method for aligning a substrate with respect to orifices in an inkjet printhead
US5300959A (en) * 1992-04-02 1994-04-05 Hewlett-Packard Company Efficient conductor routing for inkjet printhead
US5703631A (en) * 1992-05-05 1997-12-30 Compaq Computer Corporation Method of forming an orifice array for a high density ink jet printhead
US5378137A (en) * 1993-05-10 1995-01-03 Hewlett-Packard Company Mask design for forming tapered inkjet nozzles
US5350616A (en) * 1993-06-16 1994-09-27 Hewlett-Packard Company Composite orifice plate for ink jet printer and method for the manufacture thereof
GB9418412D0 (en) * 1994-09-13 1994-11-02 Xaar Ltd Removal of material from inkjet printheads
SG85076A1 (en) * 1994-09-13 2001-12-19 Xaar Ltd Removal of material from inkjet printheads
US5736998A (en) * 1995-03-06 1998-04-07 Hewlett-Packard Company Inkjet cartridge design for facilitating the adhesive sealing of a printhead to an ink reservoir
US5852460A (en) * 1995-03-06 1998-12-22 Hewlett-Packard Company Inkjet print cartridge design to decrease deformation of the printhead when adhesively sealing the printhead to the print cartridge
JPH0952365A (en) * 1995-06-08 1997-02-25 Canon Inc Ink jet recording head and manufacture thereof, and ink jet recording apparatus
US6561623B1 (en) * 1995-08-31 2003-05-13 Canon Kabushiki Kaisha Method for producing ink jet recording head and ink jet recording head produced by same
AU2476197A (en) * 1996-06-07 1997-12-11 Canon Kabushiki Kaisha Liquid ejection head and apparatus, and manufacturing method for liquid ejection head
JP3461249B2 (en) * 1996-08-30 2003-10-27 キヤノン株式会社 Inkjet recording head
US6193347B1 (en) 1997-02-06 2001-02-27 Hewlett-Packard Company Hybrid multi-drop/multi-pass printing system
US6259463B1 (en) 1997-10-30 2001-07-10 Hewlett-Packard Company Multi-drop merge on media printing system
US6193345B1 (en) 1997-10-30 2001-02-27 Hewlett-Packard Company Apparatus for generating high frequency ink ejection and ink chamber refill
US6234613B1 (en) * 1997-10-30 2001-05-22 Hewlett-Packard Company Apparatus for generating small volume, high velocity ink droplets in an inkjet printer
US6361145B1 (en) * 1998-01-27 2002-03-26 Canon Kabushiki Kaisha Ink jet recording head, method of producing same, and ink jet recording apparatus
US6416155B1 (en) 1998-10-27 2002-07-09 Canon Kabushiki Kaisha Ink jet recording head, ink jet recording cartridge, and recording apparatus
US6261742B1 (en) 1999-02-01 2001-07-17 Hewlett-Packard Company Method for manufacturing a printhead with re-entrant nozzles
EP1065058A3 (en) * 1999-06-30 2003-04-09 Canon Kabushiki Kaisha Method for manufacturing ink jet recording head, ink jet recording head manufactured by such method, and laser working method
US6747244B1 (en) 1999-11-30 2004-06-08 Canon Kabushiki Kaisha Laser working apparatus, laser working method, method for producing ink jet recording head utilizing such laser working apparatus or method, and ink jet recording head formed by such producing method
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US7311386B2 (en) 2004-06-30 2007-12-25 Lexmark Interntional, Inc. Die attach methods and apparatus for micro-fluid ejection device
US7043838B2 (en) 2004-06-30 2006-05-16 Lexmark International, Inc. Process for manufacturing a micro-fluid ejection device
KR100580654B1 (en) 2004-10-29 2006-05-16 삼성전자주식회사 Nozzle plate, inkjet printhead having the same and manufacturing method of nozzle plate
JP5404331B2 (en) 2008-12-17 2014-01-29 キヤノン株式会社 Ink jet recording head, recording element substrate, method for manufacturing ink jet recording head, and method for manufacturing recording element substrate

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EP0309146B1 (en) * 1987-09-19 1993-01-13 Xaar Limited Manufacture of nozzles for ink jet printers

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Title
LASER FOCUS. vol. 23, no. 5, May 1987, TULSA US pages 54 - 70; ZNOTINS, THOMAS A. ET AL: "EXCIMER LASERS: AN EMERGING TECHNOLOGY IN MATERIALS PROCESSING" *
PATENT ABSTRACTS OF JAPAN vol. 10, no. 189 (M-494)(2245) 03 July 1986, & JP-A-61 032761 (ISAO KAGATANI) 15 February 1986, *
PATENT ABSTRACTS OF JAPAN vol. 6, no. 201 (M-163)(1079) 13 October 1982, & JP-A-57 107848 (TAKUROU SEKIYA) 05 July 1982, *
PATENT ABSTRACTS OF JAPAN vol. 8, no. 69 (M-286)(1506) 31 March 1984, & JP-A-58 217368 (TAKUROU SEKIYA) 17 December 1983, *

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EP0937579A3 (en) 1999-11-03
EP0367541B1 (en) 1994-10-05
DE68918663D1 (en) 1994-11-10
DE68918663T2 (en) 1995-03-16
DE68929489T2 (en) 2004-08-19
ES2207908T3 (en) 2004-06-01
EP0602021A3 (en) 1994-08-31
EP0937579A2 (en) 1999-08-25
EP0602021A2 (en) 1994-06-15
EP0367541A2 (en) 1990-05-09
EP0937579B1 (en) 2003-10-08
DE68929489D1 (en) 2003-11-13
ES2060789T3 (en) 1994-12-01

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