DE69832623D1 - Mikrogefertigte kreisel - Google Patents

Mikrogefertigte kreisel

Info

Publication number
DE69832623D1
DE69832623D1 DE69832623T DE69832623T DE69832623D1 DE 69832623 D1 DE69832623 D1 DE 69832623D1 DE 69832623 T DE69832623 T DE 69832623T DE 69832623 T DE69832623 T DE 69832623T DE 69832623 D1 DE69832623 D1 DE 69832623D1
Authority
DE
Germany
Prior art keywords
micro
circles
made circles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69832623T
Other languages
English (en)
Other versions
DE69832623T2 (de
Inventor
A Geen
W Carow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Analog Devices Inc
Original Assignee
Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Application granted granted Critical
Publication of DE69832623D1 publication Critical patent/DE69832623D1/de
Publication of DE69832623T2 publication Critical patent/DE69832623T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
DE69832623T 1997-09-02 1998-09-01 Mikrogefertigte kreisel Expired - Lifetime DE69832623T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US921672 1997-09-02
US08/921,672 US6122961A (en) 1997-09-02 1997-09-02 Micromachined gyros
PCT/US1998/018099 WO1999012002A2 (en) 1997-09-02 1998-09-01 Micromachined gyros

Publications (2)

Publication Number Publication Date
DE69832623D1 true DE69832623D1 (de) 2006-01-05
DE69832623T2 DE69832623T2 (de) 2006-08-17

Family

ID=25445798

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69832623T Expired - Lifetime DE69832623T2 (de) 1997-09-02 1998-09-01 Mikrogefertigte kreisel

Country Status (5)

Country Link
US (8) US6122961A (de)
EP (1) EP1009971B1 (de)
JP (1) JP2001515201A (de)
DE (1) DE69832623T2 (de)
WO (1) WO1999012002A2 (de)

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* Cited by examiner, † Cited by third party
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US20030200806A1 (en) 2003-10-30
DE69832623T2 (de) 2006-08-17
US6505512B2 (en) 2003-01-14
US20030056589A1 (en) 2003-03-27
US6122961A (en) 2000-09-26
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US20050274182A1 (en) 2005-12-15
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US6925877B2 (en) 2005-08-09
US6487908B2 (en) 2002-12-03
US6505511B1 (en) 2003-01-14
US20020046603A1 (en) 2002-04-25
US6481284B2 (en) 2002-11-19
US20020046602A1 (en) 2002-04-25
EP1009971A2 (de) 2000-06-21
WO1999012002A3 (en) 1999-08-05
US7406866B2 (en) 2008-08-05
US6684698B2 (en) 2004-02-03
EP1009971B1 (de) 2005-11-30
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