DE69825458D1 - Speicheranordnung für wafer - Google Patents

Speicheranordnung für wafer

Info

Publication number
DE69825458D1
DE69825458D1 DE69825458T DE69825458T DE69825458D1 DE 69825458 D1 DE69825458 D1 DE 69825458D1 DE 69825458 T DE69825458 T DE 69825458T DE 69825458 T DE69825458 T DE 69825458T DE 69825458 D1 DE69825458 D1 DE 69825458D1
Authority
DE
Germany
Prior art keywords
wafer
storage arrangement
arrangement
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69825458T
Other languages
English (en)
Other versions
DE69825458T2 (de
Inventor
Jan Zinger
Gert-Jan Snijders
Cornelis Marinus Kooijman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM International NV
Original Assignee
ASM International NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASM International NV filed Critical ASM International NV
Publication of DE69825458D1 publication Critical patent/DE69825458D1/de
Application granted granted Critical
Publication of DE69825458T2 publication Critical patent/DE69825458T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting
DE69825458T 1997-07-03 1998-07-03 Speicheranordnung für wafer Expired - Fee Related DE69825458T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL1006461 1997-07-03
NL1006461A NL1006461C2 (nl) 1997-07-03 1997-07-03 Opslagsamenstel voor wafers.
PCT/NL1998/000383 WO1999001894A1 (en) 1997-07-03 1998-07-03 Storage assembly for wafers

Publications (2)

Publication Number Publication Date
DE69825458D1 true DE69825458D1 (de) 2004-09-09
DE69825458T2 DE69825458T2 (de) 2005-08-18

Family

ID=19765266

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69825458T Expired - Fee Related DE69825458T2 (de) 1997-07-03 1998-07-03 Speicheranordnung für wafer

Country Status (8)

Country Link
US (1) US6357984B1 (de)
EP (1) EP1016128B1 (de)
JP (1) JP2002507182A (de)
KR (1) KR100536768B1 (de)
AU (1) AU9610698A (de)
DE (1) DE69825458T2 (de)
NL (1) NL1006461C2 (de)
WO (1) WO1999001894A1 (de)

Families Citing this family (223)

* Cited by examiner, † Cited by third party
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EP1016128A1 (de) 2000-07-05
KR20010020588A (ko) 2001-03-15
JP2002507182A (ja) 2002-03-05
KR100536768B1 (ko) 2005-12-16
WO1999001894A1 (en) 1999-01-14
US6357984B1 (en) 2002-03-19
AU9610698A (en) 1999-01-25
NL1006461C2 (nl) 1999-01-05
DE69825458T2 (de) 2005-08-18
EP1016128B1 (de) 2004-08-04

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