DE69735759D1 - Mikrogefertigter vibrations-drehgeschwindigkeitskreisel - Google Patents

Mikrogefertigter vibrations-drehgeschwindigkeitskreisel

Info

Publication number
DE69735759D1
DE69735759D1 DE69735759T DE69735759T DE69735759D1 DE 69735759 D1 DE69735759 D1 DE 69735759D1 DE 69735759 T DE69735759 T DE 69735759T DE 69735759 T DE69735759 T DE 69735759T DE 69735759 D1 DE69735759 D1 DE 69735759D1
Authority
DE
Germany
Prior art keywords
micro
spin speed
speed circle
manufactured vibration
vibration spin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69735759T
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English (en)
Other versions
DE69735759T2 (de
Inventor
A Clark
Thor Juneau
T Howe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California filed Critical University of California
Publication of DE69735759D1 publication Critical patent/DE69735759D1/de
Application granted granted Critical
Publication of DE69735759T2 publication Critical patent/DE69735759T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69735759T 1996-05-31 1997-05-30 Mikrogefertigter vibrationsdrehgeschwindigkeitskreisel Expired - Lifetime DE69735759T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US658924 1996-05-31
US08/658,924 US5992233A (en) 1996-05-31 1996-05-31 Micromachined Z-axis vibratory rate gyroscope
PCT/US1997/009150 WO1997045699A2 (en) 1996-05-31 1997-05-30 Micromachined vibratory rate gyroscope

Publications (2)

Publication Number Publication Date
DE69735759D1 true DE69735759D1 (de) 2006-06-01
DE69735759T2 DE69735759T2 (de) 2006-11-02

Family

ID=24643274

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69735759T Expired - Lifetime DE69735759T2 (de) 1996-05-31 1997-05-30 Mikrogefertigter vibrationsdrehgeschwindigkeitskreisel

Country Status (6)

Country Link
US (3) US5992233A (de)
EP (1) EP0902876B1 (de)
JP (1) JP2002515976A (de)
AU (1) AU3474497A (de)
DE (1) DE69735759T2 (de)
WO (1) WO1997045699A2 (de)

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US5992233A (en) 1999-11-30
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US6067858A (en) 2000-05-30
JP2002515976A (ja) 2002-05-28
WO1997045699A3 (en) 2002-01-10
DE69735759T2 (de) 2006-11-02
WO1997045699A2 (en) 1997-12-04
EP0902876A1 (de) 1999-03-24
US6296779B1 (en) 2001-10-02
AU3474497A (en) 1998-01-05

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