DE69414630D1 - Vorrichtung zur optischen Beleuchtung und Untersuchung von Defekten in Halbleiterscheiben und Solarzellen - Google Patents

Vorrichtung zur optischen Beleuchtung und Untersuchung von Defekten in Halbleiterscheiben und Solarzellen

Info

Publication number
DE69414630D1
DE69414630D1 DE69414630T DE69414630T DE69414630D1 DE 69414630 D1 DE69414630 D1 DE 69414630D1 DE 69414630 T DE69414630 T DE 69414630T DE 69414630 T DE69414630 T DE 69414630T DE 69414630 D1 DE69414630 D1 DE 69414630D1
Authority
DE
Germany
Prior art keywords
examination
defects
solar cells
semiconductor wafers
optical lighting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69414630T
Other languages
English (en)
Other versions
DE69414630T2 (de
Inventor
Howard Edwin Pollard
Robert Edward Neff
Cheryl Jennings Ajluni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxar Space LLC
Original Assignee
Space Systems Loral LLC
Loral Space Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Space Systems Loral LLC, Loral Space Systems Inc filed Critical Space Systems Loral LLC
Publication of DE69414630D1 publication Critical patent/DE69414630D1/de
Application granted granted Critical
Publication of DE69414630T2 publication Critical patent/DE69414630T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9505—Wafer internal defects, e.g. microcracks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S136/00—Batteries: thermoelectric and photoelectric
    • Y10S136/29—Testing, calibrating, treating, e.g. aging
DE69414630T 1993-04-05 1994-04-05 Vorrichtung zur optischen Beleuchtung und Untersuchung von Defekten in Halbleiterscheiben und Solarzellen Expired - Fee Related DE69414630T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/042,890 US5334844A (en) 1993-04-05 1993-04-05 Optical illumination and inspection system for wafer and solar cell defects

Publications (2)

Publication Number Publication Date
DE69414630D1 true DE69414630D1 (de) 1998-12-24
DE69414630T2 DE69414630T2 (de) 1999-06-17

Family

ID=21924285

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69414630T Expired - Fee Related DE69414630T2 (de) 1993-04-05 1994-04-05 Vorrichtung zur optischen Beleuchtung und Untersuchung von Defekten in Halbleiterscheiben und Solarzellen

Country Status (5)

Country Link
US (1) US5334844A (de)
EP (1) EP0619484B1 (de)
JP (1) JPH06308042A (de)
CA (1) CA2118743A1 (de)
DE (1) DE69414630T2 (de)

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JP3261362B2 (ja) * 1998-05-28 2002-02-25 株式会社アドバンテスト 表面状態測定方法及び装置
US6111638A (en) * 1998-08-21 2000-08-29 Trw Inc. Method and apparatus for inspection of a solar cell by use of a rotating illumination source
US6236044B1 (en) * 1998-08-21 2001-05-22 Trw Inc. Method and apparatus for inspection of a substrate by use of a ring illuminator
US6275295B1 (en) 1999-04-30 2001-08-14 Midwest Research Institute Optical system for determining physical characteristics of a solar cell
DE19930043A1 (de) * 1999-06-30 2001-01-04 Wolf Systeme Ag Beleuchtungsvorrichtung für die elektronische Bildverarbeitung
US6433867B1 (en) * 2000-01-11 2002-08-13 The Aerospace Corporation Contrast imaging method for inspecting specular surface devices
US6359212B1 (en) * 2000-07-13 2002-03-19 Trw Inc. Method for testing solar cell assemblies and second surface mirrors by ultraviolet reflectometry for susceptibility to ultraviolet degradation
DE20103645U1 (de) * 2001-03-02 2001-05-23 Astrium Gmbh Sonnensimulator mit verschiebbarem Filter
SE526617C2 (sv) * 2003-10-01 2005-10-18 Sick Ivp Ab System och metod för att avbilda ett objekts egenskaper
US7146034B2 (en) * 2003-12-09 2006-12-05 Superpower, Inc. Tape manufacturing system
DE102004017690B4 (de) * 2004-04-10 2006-07-13 Leica Microsystems Jena Gmbh Vorrichtung und Verfahren zur Aufnahme eines Gesamtbildes einer Oberfläche eines Halbleitersubstrats
FR2869994B1 (fr) * 2004-05-04 2009-05-22 Centre Nat Rech Scient Cnrse Dispositif et procede de mesure de la reflectivite d'une cellule solaire
US20050252545A1 (en) * 2004-05-12 2005-11-17 Spire Corporation Infrared detection of solar cell defects under forward bias
US7327113B2 (en) * 2004-11-15 2008-02-05 General Electric Company Electric starter generator system employing bidirectional buck-boost power converters, and methods therefor
JP2006351669A (ja) * 2005-06-14 2006-12-28 Mitsubishi Electric Corp 赤外検査装置および赤外検査方法ならびに半導体ウェハの製造方法
US7705978B2 (en) * 2006-02-06 2010-04-27 Northrop Grumman Corporation Method and apparatus for inspection of multi-junction solar cells
US7326929B2 (en) * 2006-02-06 2008-02-05 Northrop Grumman Corporation Method and apparatus for inspection of semiconductor devices
US7847237B2 (en) * 2006-05-02 2010-12-07 National University Corporation Nara Method and apparatus for testing and evaluating performance of a solar cell
KR20080015363A (ko) * 2006-08-14 2008-02-19 야마하 가부시키가이샤 웨이퍼 및 반도체 소자의 검사 방법 및 장치
JP2008058270A (ja) * 2006-09-04 2008-03-13 Mitsubishi Electric Corp 多結晶シリコン基板の検査方法および太陽電池セルの検査方法、並びに赤外線検査装置
DE102007006525B4 (de) 2007-02-06 2009-05-14 Basler Ag Verfahren und Vorrichtung zur Detektierung von Defekten
DE102007007140B4 (de) * 2007-02-09 2009-01-29 Astrium Gmbh Verfahren und Anordnung zur Detektion mechanischer Defekte eines Halbleiter-Bauelements, insbesondere einer Solarzelle oder Solarzellen-Anordnung
CN102089486A (zh) 2008-07-09 2011-06-08 天空燃料有限公司 空间框架连接件
AU2009268667A1 (en) 2008-07-09 2010-01-14 Skyfuel, Inc. Solar collectors having slidably removable reflective panels for use in solar thermal applications
US8904774B2 (en) 2008-08-22 2014-12-09 Skyfuel, Inc. Hydraulic-based rotational system for solar concentrators that resists high wind loads without a mechanical lock
US8318239B2 (en) * 2008-11-17 2012-11-27 Solopower, Inc. Method and apparatus for detecting and passivating defects in thin film solar cells
US20100142796A1 (en) * 2008-12-05 2010-06-10 Jen-Ming Chang Inspection method and apparatus for substrate
DE102009015746B4 (de) * 2009-03-31 2011-09-29 Globalfoundries Dresden Module One Limited Liability Company & Co. Kg Verfahren und System zur Materialcharakterisierung in Halbleiterstellungsprozessen auf der Grundlage von FTIR mit variablem Einfallswinkel
FR2944143A1 (fr) * 2009-04-02 2010-10-08 Photowatt Internat Detection de salissure
US8251576B1 (en) 2009-05-30 2012-08-28 Mia Sole Cold lift-off test for strength of film stack subjected to thermal loading
TW201043947A (en) * 2009-06-11 2010-12-16 Zhi-Bin Sun Inspection method, inspection device and mobile phone having the inspection device
DE202010000365U1 (de) * 2010-03-12 2011-08-30 Kuka Systems Gmbh Prüfeinrichtung
EP2410319A1 (de) 2010-07-23 2012-01-25 Solarpower GmbH Verfahren und System zur Detektion von defekten Solarmodulen
US8768040B2 (en) * 2011-01-14 2014-07-01 Varian Semiconductor Equipment Associates, Inc. Substrate identification and tracking through surface reflectance
US9234843B2 (en) 2011-08-25 2016-01-12 Alliance For Sustainable Energy, Llc On-line, continuous monitoring in solar cell and fuel cell manufacturing using spectral reflectance imaging
TWI454689B (zh) * 2011-12-29 2014-10-01 Chroma Ate Inc 光學檢測系統
DE202013009329U1 (de) 2013-10-18 2014-03-14 Institut für innovative Technologien, Technologietransfer, Ausbildung und berufsbegleitende Weiterbildung (ITW) e.V. Hochleistungs-Flächenlichtquelle
DE102013017501A1 (de) 2013-10-18 2015-04-23 Institut für innovative Technologien, Technologietransfer, Ausbildung und berufsbegleitende Weiterbildung (ITW) e. V. Verfahren und Vorrichtung zur Prüfung von Siliziumbauteilen
US10480935B2 (en) 2016-12-02 2019-11-19 Alliance For Sustainable Energy, Llc Thickness mapping using multispectral imaging
JP6797481B2 (ja) * 2017-03-01 2020-12-09 株式会社ディスコ 半導体インゴットの検査方法、検査装置及びレーザー加工装置
US10345373B2 (en) * 2017-09-29 2019-07-09 Taiwan Semiconductor Manufacturing Co., Ltd. Method for inspecting semiconductor device structure
DE102018201723B4 (de) * 2018-02-05 2022-11-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Inspektion von vergrabenen Strukturen in Solarzellen und Solarzellen-Vorstufen
US20190257876A1 (en) * 2018-02-21 2019-08-22 Asm Technology Singapore Pte Ltd System and method for detecting defects in an electronic device
CN112595727B (zh) * 2021-03-01 2021-05-14 常州微亿智造科技有限公司 用于检测手机后盖板油墨玻璃缺陷的成像系统及检测方法
US20230119076A1 (en) * 2021-09-01 2023-04-20 Arizona Board Of Regents On Behalf Of Arizona State University Autonomous polarimetric imaging for photovoltaic module inspection and methods thereof

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US4501966A (en) * 1981-03-13 1985-02-26 Massachusetts Institute Of Technology Infrared microscope inspection apparatus
JPH0641910B2 (ja) * 1988-03-04 1994-06-01 三井金属鉱業株式会社 比抵抗の分散の測定方法
JPH0711494B2 (ja) * 1988-06-16 1995-02-08 松下電工株式会社 透光性容器の検査方法
FR2641866B1 (fr) * 1988-12-26 1993-03-05 Aerospatiale Procede et installation de controle de fenetres de protection de cellules solaires
FR2686697B1 (fr) * 1992-01-27 1994-04-29 Aerospatiale Dispositif de detection de defauts dans des pieces bicouches, notamment dans des cellules solaires.

Also Published As

Publication number Publication date
EP0619484A1 (de) 1994-10-12
CA2118743A1 (en) 1994-10-06
EP0619484B1 (de) 1998-11-18
DE69414630T2 (de) 1999-06-17
JPH06308042A (ja) 1994-11-04
US5334844A (en) 1994-08-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee