DE69407603D1 - Oberflächenemittierende laservorrichtung mit einem vertikalen resonator - Google Patents

Oberflächenemittierende laservorrichtung mit einem vertikalen resonator

Info

Publication number
DE69407603D1
DE69407603D1 DE69407603T DE69407603T DE69407603D1 DE 69407603 D1 DE69407603 D1 DE 69407603D1 DE 69407603 T DE69407603 T DE 69407603T DE 69407603 T DE69407603 T DE 69407603T DE 69407603 D1 DE69407603 D1 DE 69407603D1
Authority
DE
Germany
Prior art keywords
laser device
emitting laser
vertical resonator
resonator
vertical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69407603T
Other languages
English (en)
Other versions
DE69407603T2 (de
Inventor
Olle Nilsson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telefonaktiebolaget LM Ericsson AB
Original Assignee
Telefonaktiebolaget LM Ericsson AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telefonaktiebolaget LM Ericsson AB filed Critical Telefonaktiebolaget LM Ericsson AB
Application granted granted Critical
Publication of DE69407603D1 publication Critical patent/DE69407603D1/de
Publication of DE69407603T2 publication Critical patent/DE69407603T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18383—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] with periodic active regions at nodes or maxima of light intensity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • H01L33/46—Reflective coating, e.g. dielectric Bragg reflector
    • H01L33/465—Reflective coating, e.g. dielectric Bragg reflector with a resonant cavity structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00—Functional characteristics
    • H01S2301/16—Semiconductor lasers with special structural design to influence the modes, e.g. specific multimode
    • H01S2301/163—Single longitudinal mode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18341—Intra-cavity contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
    • H01S5/18369—Structure of the reflectors, e.g. hybrid mirrors based on dielectric materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • H01S5/3095—Tunnel junction
DE69407603T 1993-09-10 1994-09-01 Oberflächenemittierende laservorrichtung mit einem vertikalen resonator Expired - Lifetime DE69407603T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9302950A SE501722C2 (sv) 1993-09-10 1993-09-10 Ytemitterande laseranordning med vertikal kavitet
PCT/SE1994/000803 WO1995007566A1 (en) 1993-09-10 1994-09-01 Surface emitting laser device with a vertical cavity

Publications (2)

Publication Number Publication Date
DE69407603D1 true DE69407603D1 (de) 1998-02-05
DE69407603T2 DE69407603T2 (de) 1998-04-09

Family

ID=20391056

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69407603T Expired - Lifetime DE69407603T2 (de) 1993-09-10 1994-09-01 Oberflächenemittierende laservorrichtung mit einem vertikalen resonator

Country Status (7)

Country Link
US (1) US5781575A (de)
EP (1) EP0717883B1 (de)
JP (1) JPH09502571A (de)
CA (1) CA2169442A1 (de)
DE (1) DE69407603T2 (de)
SE (1) SE501722C2 (de)
WO (1) WO1995007566A1 (de)

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Publication number Priority date Publication date Assignee Title
US6243407B1 (en) 1997-03-21 2001-06-05 Novalux, Inc. High power laser devices
FR2761537B1 (fr) * 1997-04-01 1999-06-11 Thomson Csf Laser comprenant un empilement de diodes laser epitaxiees compris entre deux miroirs de bragg
EP1051783B1 (de) * 1998-01-30 2002-01-09 Osram Opto Semiconductors GmbH & Co. OHG Halbleiterlaser-chip
DE19954093A1 (de) * 1999-11-10 2001-05-23 Infineon Technologies Ag Anordnung für Hochleistungslaser
US6816525B2 (en) 2000-09-22 2004-11-09 Andreas Stintz Quantum dot lasers
US6905900B1 (en) * 2000-11-28 2005-06-14 Finisar Corporation Versatile method and system for single mode VCSELs
US7065124B2 (en) * 2000-11-28 2006-06-20 Finlsar Corporation Electron affinity engineered VCSELs
WO2002071562A2 (en) * 2001-03-02 2002-09-12 Science & Technology Corporation @ Unm Quantum dot vertical cavity surface emitting laser
DE10147353C2 (de) * 2001-09-26 2003-12-18 Infineon Technologies Ag Halbleiterlaser mit mindestens zwei optisch aktiven Bereichen
US6965626B2 (en) * 2002-09-03 2005-11-15 Finisar Corporation Single mode VCSEL
DE10251824A1 (de) * 2002-11-01 2004-05-19 Technische Universität Dresden Optoelektronisches Bauelement zur Erzeugung kohärenter Strahlung im Terahertz-Frequenzbereich
US6813293B2 (en) * 2002-11-21 2004-11-02 Finisar Corporation Long wavelength VCSEL with tunnel junction, and implant
US20040222363A1 (en) * 2003-05-07 2004-11-11 Honeywell International Inc. Connectorized optical component misalignment detection system
US20040247250A1 (en) * 2003-06-03 2004-12-09 Honeywell International Inc. Integrated sleeve pluggable package
US7298942B2 (en) 2003-06-06 2007-11-20 Finisar Corporation Pluggable optical optic system having a lens fiber stop
US7433381B2 (en) 2003-06-25 2008-10-07 Finisar Corporation InP based long wavelength VCSEL
US7054345B2 (en) 2003-06-27 2006-05-30 Finisar Corporation Enhanced lateral oxidation
US7277461B2 (en) * 2003-06-27 2007-10-02 Finisar Corporation Dielectric VCSEL gain guide
US7075962B2 (en) * 2003-06-27 2006-07-11 Finisar Corporation VCSEL having thermal management
US20060056762A1 (en) * 2003-07-02 2006-03-16 Honeywell International Inc. Lens optical coupler
US7210857B2 (en) * 2003-07-16 2007-05-01 Finisar Corporation Optical coupling system
US20050013542A1 (en) * 2003-07-16 2005-01-20 Honeywell International Inc. Coupler having reduction of reflections to light source
US20050013539A1 (en) * 2003-07-17 2005-01-20 Honeywell International Inc. Optical coupling system
US6887801B2 (en) * 2003-07-18 2005-05-03 Finisar Corporation Edge bead control method and apparatus
US7282732B2 (en) * 2003-10-24 2007-10-16 Stc. Unm Quantum dot structures
US7031363B2 (en) * 2003-10-29 2006-04-18 Finisar Corporation Long wavelength VCSEL device processing
US20070130153A1 (en) * 2005-12-02 2007-06-07 Palm, Inc. Techniques to communicate and process location information from communications networks on a mobile computing device
DE102006010728A1 (de) * 2005-12-05 2007-06-06 Osram Opto Semiconductors Gmbh Halbleiterbauelement und Laservorrichtung
US20170256915A1 (en) * 2016-03-04 2017-09-07 Princeton Optronics, Inc. High-Speed VCSEL Device
US20210194216A1 (en) * 2019-12-24 2021-06-24 Array Photonics, Inc. Stacked semiconductor lasers with controlled spectral emission

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Publication number Priority date Publication date Assignee Title
US4316156A (en) * 1979-07-12 1982-02-16 Xerox Corporation Optical repeater integrated lasers
JPS59104189A (ja) * 1982-12-07 1984-06-15 Kokusai Denshin Denwa Co Ltd <Kdd> 半導体レ−ザ
US4602370A (en) * 1983-05-12 1986-07-22 At&T Bell Laboratories Large optical cavity laser having a plurality of active layers
US4719630A (en) * 1986-03-24 1988-01-12 Xerox Corporation Phased array semiconductor lasers with uniform and stable supermode
US4817103A (en) * 1986-10-06 1989-03-28 University Of Illinois Semiconductor light emitting device with stacked active regions
JPS6395682A (ja) * 1986-10-09 1988-04-26 Mitsubishi Electric Corp 端面発光素子
DE8806828U1 (de) * 1988-05-25 1988-09-01 Siemens Ag, 1000 Berlin Und 8000 Muenchen, De
JPH02144983A (ja) * 1988-11-25 1990-06-04 Agency Of Ind Science & Technol 複数の活性層を有する半導体レーザ装置
US4916712A (en) * 1989-07-27 1990-04-10 Mcdonnell Douglas Corporation Optically pumped slab laser
JPH03124067A (ja) * 1989-10-07 1991-05-27 Showa Shell Sekiyu Kk 光起電力装置およびその製造方法
US5115442A (en) * 1990-04-13 1992-05-19 At&T Bell Laboratories Top-emitting surface emitting laser structures
US5052016A (en) * 1990-05-18 1991-09-24 University Of New Mexico Resonant-periodic-gain distributed-feedback surface-emitting semiconductor laser
US5181219A (en) * 1990-09-12 1993-01-19 Seiko Epson Corporation Surface emission type semiconductor laser
US5212706A (en) * 1991-12-03 1993-05-18 University Of Connecticut Laser diode assembly with tunnel junctions and providing multiple beams

Also Published As

Publication number Publication date
US5781575A (en) 1998-07-14
SE9302950D0 (sv) 1993-09-10
DE69407603T2 (de) 1998-04-09
EP0717883A1 (de) 1996-06-26
WO1995007566A1 (en) 1995-03-16
EP0717883B1 (de) 1997-12-29
SE9302950L (sv) 1995-03-11
JPH09502571A (ja) 1997-03-11
SE501722C2 (sv) 1995-05-02
CA2169442A1 (en) 1995-03-16

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