DE69307833D1 - Probenträgervorrichtung für ein Rastermikroskop - Google Patents
Probenträgervorrichtung für ein RastermikroskopInfo
- Publication number
- DE69307833D1 DE69307833D1 DE69307833T DE69307833T DE69307833D1 DE 69307833 D1 DE69307833 D1 DE 69307833D1 DE 69307833 T DE69307833 T DE 69307833T DE 69307833 T DE69307833 T DE 69307833T DE 69307833 D1 DE69307833 D1 DE 69307833D1
- Authority
- DE
- Germany
- Prior art keywords
- sample
- carrier device
- sample carrier
- scanning microscope
- carriage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000523 sample Substances 0.000 abstract 7
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/02—Probe holders
- G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/872—Positioner
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/973,796 US5260577A (en) | 1992-11-09 | 1992-11-09 | Sample carriage for scanning probe microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69307833D1 true DE69307833D1 (de) | 1997-03-13 |
DE69307833T2 DE69307833T2 (de) | 1997-07-24 |
Family
ID=25521236
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69307833T Expired - Fee Related DE69307833T2 (de) | 1992-11-09 | 1993-11-03 | Probenträgervorrichtung für ein Rastermikroskop |
Country Status (6)
Country | Link |
---|---|
US (1) | US5260577A (de) |
EP (1) | EP0597622B1 (de) |
JP (1) | JP2625636B2 (de) |
AT (1) | ATE148558T1 (de) |
CA (1) | CA2107048C (de) |
DE (1) | DE69307833T2 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5410910A (en) * | 1993-12-22 | 1995-05-02 | University Of Virginia Patent Foundation | Cryogenic atomic force microscope |
US5483064A (en) * | 1994-01-21 | 1996-01-09 | Wyko Corporation | Positioning mechanism and method for providing coaxial alignment of a probe and a scanning means in scanning tunneling and scanning force microscopy |
US5831181A (en) * | 1995-09-29 | 1998-11-03 | The Regents Of The University Of California | Automated tool for precision machining and imaging |
US5821545A (en) * | 1995-11-07 | 1998-10-13 | Molecular Imaging Corporation | Heated stage for a scanning probe microscope |
US5654546A (en) * | 1995-11-07 | 1997-08-05 | Molecular Imaging Corporation | Variable temperature scanning probe microscope based on a peltier device |
WO2002048776A2 (en) * | 2000-12-15 | 2002-06-20 | The Technology Partnership Plc | Optical scanning system apparatus |
CN100489491C (zh) * | 2005-11-17 | 2009-05-20 | 钢铁研究总院 | 金属原位分析仪悬浮式扫描方法及样品夹具 |
GB0602083D0 (en) | 2006-02-02 | 2006-03-15 | Smartdrive Technology Ltd | Microscopes |
AT519344B1 (de) * | 2016-10-18 | 2019-11-15 | Anton Paar Gmbh | Definiert schaltbare magnetische Haltevorrichtung |
US10867782B2 (en) * | 2019-01-10 | 2020-12-15 | Shimadzij Corporation | Time-of-flight mass spectrometer |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB842495A (en) * | 1958-01-18 | 1960-07-27 | Darwins Ltd | Improvements in or relating to magnetic blocks and workholders |
GB1052542A (de) * | 1964-01-21 | |||
US3412991A (en) * | 1966-07-28 | 1968-11-26 | Burndy Corp | Reproducible position platform |
JPS5918182Y2 (ja) * | 1979-02-02 | 1984-05-26 | 「国」華工業株式会社 | 磁石の反発力を利用した磁気スプリング |
JPS57169212A (en) * | 1981-04-13 | 1982-10-18 | Kokka Kogyo Kk | Vibration suppressing device |
US4560880A (en) * | 1983-09-19 | 1985-12-24 | Varian Associates, Inc. | Apparatus for positioning a workpiece in a localized vacuum processing system |
DE3570012D1 (en) * | 1985-01-29 | 1989-06-08 | Ibm | Field-emission scanning auger electron microscope |
JP2896794B2 (ja) * | 1988-09-30 | 1999-05-31 | キヤノン株式会社 | 走査型トンネル電流検出装置,走査型トンネル顕微鏡,及び記録再生装置 |
US4908519A (en) * | 1988-10-11 | 1990-03-13 | The Board Of Thustees Of The Leland Stanford Jr. University | Loading mechanism and support structure having improved vibration damping useful in scanning tunneling microscopy |
US4947042A (en) * | 1988-12-13 | 1990-08-07 | Mitsubishi Denki Kabushiki Kaisha | Tunnel unit and scanning head for scanning tunneling microscope |
JP2501897B2 (ja) * | 1988-12-13 | 1996-05-29 | 三菱電機株式会社 | 走査型トンネル顕微鏡のトンネル・ユニット及びスキャン・ヘッド |
US5041783A (en) * | 1989-02-13 | 1991-08-20 | Olympus Optical Co., Ltd. | Probe unit for an atomic probe microscope |
US4935634A (en) * | 1989-03-13 | 1990-06-19 | The Regents Of The University Of California | Atomic force microscope with optional replaceable fluid cell |
JP2815196B2 (ja) * | 1989-10-02 | 1998-10-27 | オリンパス光学工業株式会社 | 微細表面形状計測装置 |
US5103095A (en) * | 1990-05-23 | 1992-04-07 | Digital Instruments, Inc. | Scanning probe microscope employing adjustable tilt and unitary head |
JP3060527B2 (ja) * | 1990-11-13 | 2000-07-10 | 松下電器産業株式会社 | 位置決め装置 |
-
1992
- 1992-11-09 US US07/973,796 patent/US5260577A/en not_active Expired - Lifetime
-
1993
- 1993-09-27 CA CA002107048A patent/CA2107048C/en not_active Expired - Fee Related
- 1993-10-25 JP JP5265966A patent/JP2625636B2/ja not_active Expired - Fee Related
- 1993-11-03 EP EP93308790A patent/EP0597622B1/de not_active Expired - Lifetime
- 1993-11-03 DE DE69307833T patent/DE69307833T2/de not_active Expired - Fee Related
- 1993-11-03 AT AT93308790T patent/ATE148558T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE69307833T2 (de) | 1997-07-24 |
US5260577A (en) | 1993-11-09 |
JP2625636B2 (ja) | 1997-07-02 |
JPH06207807A (ja) | 1994-07-26 |
ATE148558T1 (de) | 1997-02-15 |
EP0597622A1 (de) | 1994-05-18 |
CA2107048A1 (en) | 1994-05-10 |
EP0597622B1 (de) | 1997-01-29 |
CA2107048C (en) | 1998-08-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: DUSCHER, R., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 7 |
|
8339 | Ceased/non-payment of the annual fee |