DE69131266D1 - Universal Mehrfach-Kontakt-Verbindung zwischen einer EWS-Probekarte und eine Testkarte oder einer Siliciumscheiben-Teststation - Google Patents
Universal Mehrfach-Kontakt-Verbindung zwischen einer EWS-Probekarte und eine Testkarte oder einer Siliciumscheiben-TeststationInfo
- Publication number
- DE69131266D1 DE69131266D1 DE69131266T DE69131266T DE69131266D1 DE 69131266 D1 DE69131266 D1 DE 69131266D1 DE 69131266 T DE69131266 T DE 69131266T DE 69131266 T DE69131266 T DE 69131266T DE 69131266 D1 DE69131266 D1 DE 69131266D1
- Authority
- DE
- Germany
- Prior art keywords
- card
- ews
- silicon wafer
- test
- contact connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R31/00—Coupling parts supported only by co-operation with counterpart
- H01R31/06—Intermediate parts for linking two coupling parts, e.g. adapter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R12/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
- H01R12/50—Fixed connections
- H01R12/51—Fixed connections for rigid printed circuits or like structures
- H01R12/52—Fixed connections for rigid printed circuits or like structures connecting to other rigid printed circuits or like structures
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Coupling Device And Connection With Printed Circuit (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT08362390A IT1243302B (it) | 1990-06-19 | 1990-06-19 | Connessione universale multicontatto tra scheda portasonde ews e scheda di prova per una stazione di collaudo su fetta di dispositivi a semiconduttore. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69131266D1 true DE69131266D1 (de) | 1999-07-01 |
DE69131266T2 DE69131266T2 (de) | 1999-09-23 |
Family
ID=11323294
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69131266T Expired - Fee Related DE69131266T2 (de) | 1990-06-19 | 1991-06-12 | Universal Mehrfach-Kontakt-Verbindung zwischen einer EWS-Probekarte und eine Testkarte oder einer Siliciumscheiben-Teststation |
Country Status (6)
Country | Link |
---|---|
US (1) | US5187431A (de) |
EP (1) | EP0462944B1 (de) |
JP (1) | JP3160314B2 (de) |
KR (1) | KR920001665A (de) |
DE (1) | DE69131266T2 (de) |
IT (1) | IT1243302B (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5457344A (en) * | 1994-03-25 | 1995-10-10 | Bartelink; Dirk J. | Test fixtures for C4 solder-bump technology |
US5656942A (en) * | 1995-07-21 | 1997-08-12 | Electroglas, Inc. | Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane |
US6281692B1 (en) * | 1998-10-05 | 2001-08-28 | International Business Machines Corporation | Interposer for maintaining temporary contact between a substrate and a test bed |
JP3486841B2 (ja) * | 2000-08-09 | 2004-01-13 | 日本電子材料株式会社 | 垂直型プローブカード |
US6667631B2 (en) | 2001-12-27 | 2003-12-23 | Stmicroelectronics, Inc. | High temperature probe card |
US7554347B2 (en) * | 2002-03-19 | 2009-06-30 | Georgia Tech Research Corporation | High input/output density optoelectronic probe card for wafer-level test of electrical and optical interconnect components, methods of fabrication, and methods of use |
ATE493559T1 (de) * | 2002-10-30 | 2011-01-15 | Element Six Pty Ltd | Werkzeugeinsatz |
US6812720B1 (en) * | 2003-04-17 | 2004-11-02 | Chipmos Technologies (Bermuda) Ltd. | Modularized probe card with coaxial transmitters |
JP5258590B2 (ja) * | 2009-01-16 | 2013-08-07 | 株式会社日本マイクロニクス | 集積回路の試験装置 |
JP5235163B2 (ja) * | 2009-05-18 | 2013-07-10 | 株式会社日本マイクロニクス | 検査装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3028573A (en) * | 1959-05-01 | 1962-04-03 | Automatic Elect Lab | Cross-connecting board |
US3866119A (en) * | 1973-09-10 | 1975-02-11 | Probe Rite Inc | Probe head-probing machine coupling adaptor |
US4357062A (en) * | 1979-12-10 | 1982-11-02 | John Fluke Mfg. Co., Inc. | Universal circuit board test fixture |
JPS5929151B2 (ja) * | 1981-08-03 | 1984-07-18 | 日本電子材料株式会社 | 半導体ウエハ−試験装置 |
DE8500168U1 (de) * | 1985-01-05 | 1985-05-23 | Riba-Prüftechnik GmbH, 7801 Schallstadt | Tastnadel für eine Leiterplatten-Prüfeinrichtung |
JPS61278768A (ja) * | 1985-06-04 | 1986-12-09 | Meiko Denshi Kogyo Kk | プリント配線板検査機のインタ−フエ−ス |
US4667154A (en) * | 1985-06-26 | 1987-05-19 | Lehighton Electronics, Inc. | Electrical contact assembly |
JPS62105379A (ja) * | 1985-11-01 | 1987-05-15 | 株式会社日立製作所 | コネクタ装置 |
JPS62113069A (ja) * | 1985-11-12 | 1987-05-23 | Hitachi Electronics Eng Co Ltd | 取付用部品 |
US4884024A (en) * | 1985-11-19 | 1989-11-28 | Teradyne, Inc. | Test pin assembly for circuit board tester |
DE3630548A1 (de) * | 1986-09-08 | 1988-03-10 | Mania Gmbh | Vorrichtung zum elektronischen pruefen von leiterplatten mit kontaktpunkten im 1/20 zoll-raster |
DE3721312A1 (de) * | 1987-06-27 | 1989-01-05 | List Ingo | Verstellbarer universalfederkontaktstift zum kontaktieren von testpunkten mit beliebigen koordinaten von einem vorgegebenen rasterfeld aus |
US4859806A (en) * | 1988-05-17 | 1989-08-22 | Microelectronics And Computer Technology Corporation | Discretionary interconnect |
-
1990
- 1990-06-19 IT IT08362390A patent/IT1243302B/it active IP Right Grant
-
1991
- 1991-06-11 KR KR1019910009578A patent/KR920001665A/ko not_active Application Discontinuation
- 1991-06-12 EP EP91830260A patent/EP0462944B1/de not_active Expired - Lifetime
- 1991-06-12 DE DE69131266T patent/DE69131266T2/de not_active Expired - Fee Related
- 1991-06-18 US US07/716,704 patent/US5187431A/en not_active Expired - Lifetime
- 1991-06-19 JP JP17435491A patent/JP3160314B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3160314B2 (ja) | 2001-04-25 |
DE69131266T2 (de) | 1999-09-23 |
EP0462944B1 (de) | 1999-05-26 |
KR920001665A (ko) | 1992-01-30 |
IT9083623A0 (it) | 1990-06-19 |
US5187431A (en) | 1993-02-16 |
JPH0621167A (ja) | 1994-01-28 |
EP0462944A1 (de) | 1991-12-27 |
IT1243302B (it) | 1994-05-26 |
IT9083623A1 (it) | 1991-12-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR880005624A (ko) | 반도체메모리와 그 시험방법 | |
EP0202905A3 (en) | Semiconductor integrated circuit (ic) including circuit elements for evaluating the ic and means for testing the circuit elements | |
KR870011686A (ko) | 반도체장치 및 그 제조방법 | |
KR880701454A (ko) | 반도체 웨이퍼 세정 방법 및 장치 | |
DE69119367D1 (de) | Befestigungsmethode und -einrichtung für Wafer | |
EP0408299A3 (en) | Semiconductor integrated circuit device and test method therefor | |
KR860001495A (ko) | 반도체장치 및 그 제조방법 | |
KR910008793A (ko) | 반도체장치 및 그 제조방법 | |
EP0174185A3 (en) | Semiconductor device and manufacturing method thereof | |
KR870009477A (ko) | 반도체장치와 그 제조방법 | |
KR860004457A (ko) | 반도체 집적회로장치 및 그의 제조방법과 제조장치 | |
KR900019132A (ko) | 웨이퍼 얼라인먼트 마크 및 그 제조방법 | |
DE69029630D1 (de) | Mehrfach umhüllte Halbleiteranordnung und Herstellungsverfahren dafür | |
EP0229362A3 (en) | Semiconductor device and method of fabrication | |
DE69131266T2 (de) | Universal Mehrfach-Kontakt-Verbindung zwischen einer EWS-Probekarte und eine Testkarte oder einer Siliciumscheiben-Teststation | |
JPS57178343A (en) | Semiconductor wafer positioning method and device | |
KR910016815A (ko) | 폴리실 페닐렌 실옥산 및 그 제조방법과 레지스트 재료 및 반도체 장치 | |
KR890004398A (ko) | 반도체장치 및 그의 제조방법 | |
EP0257870A3 (en) | A semiconductor device, making and testing thereof | |
KR870008394A (ko) | 반도체장치 및 그 제조방법 | |
EP0410737A3 (en) | Silicon crystal evaluation method and semiconductor device fabrication method using the same | |
DE69034109D1 (de) | Halbleiter-IC-Vorrichtung und deren Herstellungsverfahren | |
EP0468213A3 (en) | Semiconductor substrate, method of manufacturing semiconductor substrate and semiconductor device, and method of inspecting and evaluating semiconductor substrate | |
DK598287D0 (da) | Mappe eller lignende samt fremgangsmaade og apparat til fremstilling heraf | |
KR880701968A (ko) | 반도체장치 및 그 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |