DE69116464T2 - Längenmessgerät mittels Laserinterferometrie - Google Patents

Längenmessgerät mittels Laserinterferometrie

Info

Publication number
DE69116464T2
DE69116464T2 DE69116464T DE69116464T DE69116464T2 DE 69116464 T2 DE69116464 T2 DE 69116464T2 DE 69116464 T DE69116464 T DE 69116464T DE 69116464 T DE69116464 T DE 69116464T DE 69116464 T2 DE69116464 T2 DE 69116464T2
Authority
DE
Germany
Prior art keywords
measuring device
length measuring
laser interferometry
interferometry
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69116464T
Other languages
English (en)
Other versions
DE69116464D1 (de
Inventor
Shigeru Hosoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP17443290A external-priority patent/JPH0463305A/ja
Priority claimed from JP2225165A external-priority patent/JPH04109129A/ja
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Publication of DE69116464D1 publication Critical patent/DE69116464D1/de
Application granted granted Critical
Publication of DE69116464T2 publication Critical patent/DE69116464T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
DE69116464T 1990-07-03 1991-06-28 Längenmessgerät mittels Laserinterferometrie Expired - Fee Related DE69116464T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP17443290A JPH0463305A (ja) 1990-07-03 1990-07-03 偏光ビームスプリッタ及びレーザ干渉測長計
JP2225165A JPH04109129A (ja) 1990-08-29 1990-08-29 偏光検出光学系

Publications (2)

Publication Number Publication Date
DE69116464D1 DE69116464D1 (de) 1996-02-29
DE69116464T2 true DE69116464T2 (de) 1996-08-22

Family

ID=26496044

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69116464T Expired - Fee Related DE69116464T2 (de) 1990-07-03 1991-06-28 Längenmessgerät mittels Laserinterferometrie

Country Status (3)

Country Link
US (1) US5172186A (de)
EP (1) EP0469718B1 (de)
DE (1) DE69116464T2 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2821817B2 (ja) * 1991-03-11 1998-11-05 コニカ株式会社 差動型干渉プリズム
US5325175A (en) * 1992-05-08 1994-06-28 Honeywell Inc. Solid-block homodyne interferometer
AT399222B (de) * 1992-10-19 1995-04-25 Tabarelli Werner Interferometrische einrichtung zur messung der lage eines reflektierenden objektes
JPH06229922A (ja) * 1993-02-02 1994-08-19 Agency Of Ind Science & Technol 高精度空気屈折率計
US5404222A (en) * 1994-01-14 1995-04-04 Sparta, Inc. Interferametric measuring system with air turbulence compensation
US5778016A (en) 1994-04-01 1998-07-07 Imra America, Inc. Scanning temporal ultrafast delay methods and apparatuses therefor
US5585913A (en) * 1994-04-01 1996-12-17 Imra America Inc. Ultrashort pulsewidth laser ranging system employing a time gate producing an autocorrelation and method therefore
GB9409064D0 (en) * 1994-05-06 1994-06-22 Perkin Elmer Ltd Improvements in or relating to optical interferometers
US6020963A (en) * 1996-06-04 2000-02-01 Northeastern University Optical quadrature Interferometer
US5991033A (en) * 1996-09-20 1999-11-23 Sparta, Inc. Interferometer with air turbulence compensation
US6498680B1 (en) * 1996-10-29 2002-12-24 Chorum Technologies Lp Compact tunable optical wavelength interleaver
EP1031868B1 (de) * 1999-02-26 2003-05-14 Dr. Johannes Heidenhain GmbH Kompensierter Parallel-Strahlteiler mit zwei Platten sowie Interferometer
JP4365927B2 (ja) * 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
FR2795877B1 (fr) * 1999-06-30 2001-10-05 Photonetics Composant optique partiellement reflechissant et source laser incorporant un tel composant
US6738143B2 (en) * 2001-11-13 2004-05-18 Agilent Technologies, Inc System and method for interferometer non-linearity compensation
US7224466B2 (en) 2003-02-05 2007-05-29 Agilent Technologies, Inc. Compact multi-axis interferometer
US7230754B2 (en) * 2003-08-15 2007-06-12 Meade Instruments Corp. Neutral white-light filter device
JP4939765B2 (ja) * 2005-03-28 2012-05-30 株式会社日立製作所 変位計測方法とその装置
US7359057B2 (en) * 2005-08-26 2008-04-15 Ball Aerospace & Technologies Corp. Method and apparatus for measuring small shifts in optical wavelengths
JP4264667B2 (ja) * 2007-02-16 2009-05-20 ソニー株式会社 振動検出装置
JP5523664B2 (ja) * 2007-11-06 2014-06-18 株式会社ミツトヨ 干渉計
US8307822B2 (en) * 2008-10-06 2012-11-13 Hewlett-Packard Development Company, L.P. High efficiency solar energy devices and methods
EP2182387A1 (de) 2008-10-30 2010-05-05 EADS Construcciones Aeronauticas, S.A. Anzeigesystem und Verfahren für Auftankvorgänge
CN102128588B (zh) * 2010-01-19 2013-03-06 上海微电子装备有限公司 一种一体式双频激光干涉仪
US8174699B2 (en) 2010-07-22 2012-05-08 Siemens Energy, Inc. Fluid detection in turbine engine components
US8760786B2 (en) * 2012-06-25 2014-06-24 Oracle International Corporation Lateral tape motion detector
CN109799601A (zh) * 2017-11-17 2019-05-24 财团法人金属工业研究发展中心 光辅助加工构造
CN113899305B (zh) * 2021-09-30 2023-08-22 广东技术师范大学 一种改进的相移相位测量方法及系统

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1168161A (en) * 1967-01-30 1969-10-22 Mullard Ltd Improvements in or relating to Light Beam Deflector Systems
US3510198A (en) * 1967-05-17 1970-05-05 North American Rockwell Polarizing beam-splitter having improved contrast ratio
FR2375577A1 (fr) * 1976-12-23 1978-07-21 Soro Electro Optics Interferometre destine a la mesure de deplacements
US4685773A (en) * 1984-09-13 1987-08-11 Gte Laboratories Incorporated Birefringent optical multiplexer with flattened bandpass
US4702603A (en) * 1985-07-23 1987-10-27 Cmx Systems, Inc. Optical phase decoder for interferometers
US4671613A (en) * 1985-11-12 1987-06-09 Gte Laboratories Inc. Optical beam splitter prism
US4717250A (en) * 1986-03-28 1988-01-05 Zygo Corporation Angle measuring interferometer
CA2059553A1 (en) * 1989-05-30 1990-12-01 Raymond Hesline Birefringent polarizing device

Also Published As

Publication number Publication date
EP0469718A3 (en) 1993-10-13
EP0469718A2 (de) 1992-02-05
DE69116464D1 (de) 1996-02-29
US5172186A (en) 1992-12-15
EP0469718B1 (de) 1996-01-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee